Coating machine

Abstract

The utility model provides a film plating machine which comprises an evaporation source, and the evaporation source is used for providing metal steam so that the metal steam can form a metal film on the surface of a base material; the base material frame is used for arranging a base material; and the filtering assembly comprises a filtering net, and the filtering net is arranged between the evaporation source and the base material frame to filter impurities and large particles in the metal steam, so that the qualification rate of a coating film on the base material is improved, and the completeness and stability of the coating film are ensured.

Description

Technical Field

[0001] The utility model belongs to the technical field of film coating, and specifically relates to a film coating machine. Background Art

[0002] In the field of thin film preparation technology, evaporation coating technology is widely used in the preparation of metal thin films on various substrates due to its advantages of high efficiency, uniformity and easy control. In the evaporation coating process, the heating source melts the metal raw material and heats it to an evaporation state. The generated metal vapor contacts the substrate and forms a metal film on the surface of the substrate.

[0003] However, during the evaporation of the molten metal, impurities come into contact with the metal vapor, causing the molten metal to splash. The large droplets produced by the splashing may burn the substrate or even create defects such as holes on the substrate, affecting the integrity and stability of the coating. Utility Model Content

[0004] One purpose of the utility model is to provide a new technical solution for a coating machine.

[0005] According to a first aspect of the utility model, a coating machine is provided, comprising:

[0006] An evaporation source, the evaporation source is used to provide metal vapor so that the metal vapor forms a metal film on the surface of the substrate;

[0007] A substrate frame, wherein the substrate frame is used to place the substrate;

[0008] A filter assembly comprises a filter screen, and the filter screen is arranged between the evaporation source and the substrate frame.

[0009] Optionally, the filter assembly includes a driving member, which is connected to the filter screen and is used to drive the filter screen to move.

[0010] Optionally, the filter assembly includes a first filter screen and a second filter screen, the first filter screen and the second filter screen are connected to the driving member, and the first filter screen and the second filter screen move in opposite directions.

[0011] Optionally, the driving member includes a first rotating shaft and a second rotating shaft, one side of the filter screen is wound around the first rotating shaft, and the other side of the filter screen is wound around the second rotating shaft;

[0012] When the second rotating shaft rotates, it can drive the filter screen to unwind on the first rotating shaft.

[0013] Optionally, the first rotating shaft is an unwinding shaft, and the second rotating shaft is a rewinding shaft;

[0014] When the reel-up shaft rotates, the unreeling shaft can rotate synchronously with the reel-up shaft.

[0015] Optionally, the filter assembly includes a first driving member and a second driving member, the first driving member is connected to the first rotating shaft and is used to drive the first rotating shaft to rotate, and the second driving member is connected to the second rotating shaft and is used to drive the second rotating shaft to rotate.

[0016] Optionally, the substrate holder comprises a rotating roller, and the outer peripheral side of the rotating roller is used to place the substrate;

[0017] The rotating roller can drive the substrate to rotate when rotating.

[0018] Optionally, the pore size of the mesh in the filter screen ranges from 0.1 μm to 100 μm.

[0019] Optionally, the filter assembly includes a layer of filter mesh, and the pore size of the mesh in the filter mesh ranges from 0.1 μm to 20 μm.

[0020] Optionally, the filter assembly includes multiple layers of filter screens, the multiple layers of filter screens are arranged at intervals between the evaporation source and the substrate holder, and the pore sizes of the meshes in the filter screens range from 10 μm to 100 μm.

[0021] Optionally, in the direction from the evaporation source to the substrate holder, mesh holes in multiple layers of the filter screen are arranged in a staggered manner.

[0022] A technical effect of the utility model is:

[0023] An embodiment of the present application provides a coating machine, which includes an evaporation source, which is used to provide metal vapor so that the metal vapor forms a metal film on the surface of a substrate; a substrate frame, which is used to set the substrate; and a filter component, which includes a filter net, which is set between the evaporation source and the substrate frame to filter impurities and large particles in the metal vapor, thereby improving the qualified rate of the coating on the substrate and ensuring the integrity and stability of the coating.

[0024] Other features and advantages of the present invention will become apparent from the following detailed description of exemplary embodiments of the present invention with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate embodiments of the present invention and, together with the description, serve to explain the principles of the present invention.

[0026] Figure 1 A schematic diagram of various parts of a coating machine provided by an embodiment of the utility model;

[0027] Figure 2 A three-dimensional diagram of a coating machine provided in one embodiment of the utility model;

[0028] Figure 3 A three-dimensional diagram of a coating machine provided by one embodiment of the utility model (excluding the driving parts);

[0029] Figure 4 A top view of a coating machine provided in one embodiment of the utility model;

[0030] Figure 5 A side view of a coating machine provided in accordance with an embodiment of the utility model.

[0031] Wherein: 1, evaporation source; 2, substrate frame; 21, roller; 3, filter assembly; 31, filter screen; 32, first rotating shaft; 33, second rotating shaft; 34, first driving member; 35, second driving member. DETAILED DESCRIPTION

[0032] Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that unless otherwise specifically stated, the relative arrangements of components and steps, numerical expressions and numerical values ​​set forth in these embodiments do not limit the scope of the present invention.

[0033] The embodiments of the present application will be described in detail below, and examples of the embodiments are shown in the accompanying drawings. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and should not be understood as limiting the present application. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without making creative work are within the scope of protection of the present application.

[0034] The term "first" or "second" in the specification and claims of this application may include one or more of the features explicitly or implicitly. In the description of this application, unless otherwise specified, "plurality" means two or more. In addition, "and / or" in the specification and claims means at least one of the connected objects, and the character " / " generally means that the objects connected before and after are in an "or" relationship.

[0035] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0036] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0037] It should be noted that like reference numerals and letters refer to similar items in the following figures, and therefore, once an item is defined in one figure, it need not be further discussed in subsequent figures.

[0038] In the coating machine provided in the embodiment of the present application, the coating machine melts the metal raw material and heats it to an evaporation state, and the generated metal vapor can form a metal film on the surface of the substrate after contacting the substrate. In addition, during the evaporation of the molten metal, the impurities in contact with the metal vapor can be filtered through the filter component to prevent large particle droplets carrying impurities from scalding the substrate, thereby ensuring the integrity and stability of the coating on the substrate.

[0039] Reference Figure 1 and Figure 5 , an embodiment of the present application provides a coating machine, the coating machine comprising:

[0040] An evaporation source 1, the evaporation source 1 is used to provide metal vapor so that the metal vapor forms a metal film on the surface of the substrate;

[0041] A substrate frame 2, the substrate frame 2 is used to place the substrate;

[0042] The filter assembly 3 includes a filter screen 31 , and the filter screen 31 is disposed between the evaporation source 1 and the substrate holder 2 .

[0043] In this embodiment, the evaporation source 1 includes a panel, a heating source and a metal disposed in the panel. The metal is melted and heated to an evaporation state. The generated metal vapor can form a metal film on the surface of the substrate after contacting the substrate.

[0044] The filter 31 is disposed between the evaporation source 1 and the substrate holder 2 , that is, the filter 31 is disposed on the evaporation path of the metal vapor, which is the movement path of the metal vapor from the evaporation source 1 to the substrate surface.

[0045] During the evaporation of metal vapor, the particle diameter of the cloud formed by the metal vapor is relatively small. Specifically, the vapor cloud mainly exists in the form of single atoms and a small number of atomic clusters. The cloud formed by the metal vapor can freely pass through the filter 31 and move toward the substrate, and then be deposited on the substrate to form a metal film. When the evaporation source 1 produces a continuous cloud of metal vapor and evaporates upward, it will be accompanied by the contact between the cloud and impurities. After the impurities contact the high-temperature metal vapor cloud, they will collapse to produce liquid particles with larger diameters. The liquid particles with large diameters will be intercepted by the filter 31 due to their large size. For example, the liquid particles with large diameters can adhere to the filter 31. After the particles with large diameters are filtered, the probability of the substrate being burned and producing cavities is greatly reduced or even avoided, so that the substrate is effectively protected, thereby improving the qualified rate of the coating on the substrate and ensuring the integrity and stability of the coating.

[0046] In one embodiment, the substrate holder 2 is disposed directly above the evaporation source 1, and the filter screen 31 is horizontally disposed between the evaporation source 1 and the substrate holder 2, and the filter screen 31 is disposed close to the evaporation source 1 to improve the efficiency of the filter screen 31 in filtering large diameter particles.

[0047] The coating machine provided in the embodiment of the present application includes: an evaporation source 1, which is used to provide metal vapor so that the metal vapor forms a metal film on the surface of the substrate; a substrate frame 2, which is used to set the substrate; a filter component 3, which includes a filter mesh 31, and the filter mesh 31 is arranged between the evaporation source 1 and the substrate frame 2 to filter impurities and large particles in the metal vapor, so that the substrate is effectively protected, thereby improving the qualified rate of the coating on the substrate and ensuring the integrity and stability of the coating.

[0048] In one embodiment, see Figure 1 The filter assembly 3 includes a driving member, which is connected to the filter screen 31 and is used to drive the filter screen 31 to move.

[0049] In this embodiment, the filter screen 31 includes a first area and a second area. The first area can be firstly located between the evaporation source 1 and the substrate frame 2 to filter impurities and large particles in the metal vapor. After filtering in the first area for a period of time, at least part of the filter screen holes on the first area may be blocked by impurities, thereby affecting the normal passage of the filtered metal vapor. At this time, the first area can be moved away from the space between the evaporation source 1 and the substrate frame 2 by the driving member, and the second area can be moved to between the evaporation source 1 and the substrate frame 2, so as to utilize the unused second area of ​​the filter screen 31 for filtering, thereby ensuring the effectiveness of the filter screen 31 in filtering impurities and large particles in the metal vapor.

[0050] In one embodiment, the first area of ​​the filter 31 can be rolled up after use to facilitate the collection of the filter 31; and as the filter 31 is rolled up, large particle droplets attached to the filter 31 are rolled out of the area between the evaporation source 1 and the substrate frame 2, and the area of ​​the filter 31 stained with attached particles is rolled up to become waste, while the unused area of ​​the filter 31 enters between the evaporation source 1 and the substrate frame 2 to continue filtering.

[0051] In one embodiment, the filter assembly 3 includes a first filter screen and a second filter screen, the first filter screen and the second filter screen are connected to the driving member, and the first filter screen and the second filter screen move in opposite directions.

[0052] In this embodiment, the first filter screen and the second filter screen are stacked in the area between the evaporation source 1 and the substrate frame 2, and the first filter screen and the second filter screen are spaced apart from each other, so that double-layer filtration of the filter screen can be achieved, thereby improving the filtration efficiency of the filter screen 31.

[0053] Both the first filter and the second filter are movable so as to replace the used filter area with the unused filter area; in one embodiment, the first filter and the second filter are stacked up and down, the first filter moves to the left and rolls up the used part, and the second filter moves to the right and rolls up the used part, so as to more effectively capture and trap particles while collecting the filter 31 on both sides, thereby improving the filtration efficiency.

[0054] In one embodiment, see Figures 1 to 3 The driving member includes a first rotating shaft 32 and a second rotating shaft 33, one side of the filter 31 is wound around the first rotating shaft 32, and the other side of the filter 31 is wound around the second rotating shaft 33;

[0055] The second rotating shaft 33 can drive the filter screen 31 to unwind on the first rotating shaft 32 when rotating.

[0056] In this embodiment, the second rotating shaft 33 can be a driving rotating shaft, and the first rotating shaft 32 can be a driven rotating shaft. The second rotating shaft 33 can drive the filter 31 to move when driven by a motor or rotated manually, so as to facilitate the filter 31 that has been filtered for a period of time to be moved out of the space between the evaporation source 1 and the substrate frame 2, and the unused part of the filter 31 is moved between the evaporation source 1 and the substrate frame 2, so as to facilitate the replacement of the old part of the filter 31 with the new part.

[0057] The first rotating shaft 32 is not restricted in the rotation direction, that is, the filter screen 31 can drive the first rotating shaft 32 to rotate during the movement, so that the part of the filter screen 31 originally wound around the first rotating shaft 32 can be unwound.

[0058] In one embodiment, the rotation of the first rotating shaft 32 needs to have a certain damping. For example, the first rotating shaft 32 is installed on a base, and the rotation of the first rotating shaft 32 relative to the base needs to overcome the set damping. When the filter 31 overcomes the set damping during the movement and drives the first rotating shaft 32 to rotate, the flatness of the unfolded part of the filter 31 can be ensured.

[0059] In one embodiment, the first rotating shaft 32 is a reeling shaft, and the second rotating shaft 33 is a reeling shaft;

[0060] When the reel is rotating, the unwinding shaft can rotate synchronously with the reel.

[0061] In this embodiment, both the first rotating shaft 32 and the second rotating shaft 33 can actively rotate, one of which unwinds the filter screen 31, and the other reels in the filter screen 31; for example, when the second rotating shaft 33 rotates and reels in a used portion of the filter screen 31, the first rotating shaft 32 can rotate and unwind an unused portion of the filter screen 31, and the first rotating shaft 32 and the second rotating shaft 33 have the same rotation speed, so that the linear speed of the unwinding of the first rotating shaft 32 is the same as the linear speed of the rewinding of the second rotating shaft 33, so as to ensure that the rewinding and unwinding of the filter screen 31 is balanced, and flexibly adjust the tension of the unfolded portion of the filter screen 31 to avoid the filter screen 31 being too loose or too tight.

[0062] In one embodiment, see Figure 1 The filter assembly 3 includes a first driving member 34 and a second driving member 35. The first driving member 34 is connected to the first rotating shaft 32 and is used to drive the first rotating shaft 32 to rotate. The second driving member 35 is connected to the second rotating shaft 33 and is used to drive the second rotating shaft 33 to rotate.

[0063] In this embodiment, the first driving member 34 can be an electric motor or a pneumatic motor, and the second driving member 35 can be an electric motor or a pneumatic motor. The first driving member 34 can actively drive the first rotating shaft 32 to rotate so as to unwind the unused part of the filter 31 on the first rotating shaft 32; and the second driving member 35 can actively drive the second rotating shaft 33 to rotate so as to rewind the used part of the filter 31 on the second rotating shaft 33, thereby improving the controllability of the unwinding and rewinding of the filter 31.

[0064] In one embodiment, see Figure 5 The substrate frame 2 includes a roller 21, and the outer peripheral side of the roller 21 is used to place the substrate;

[0065] The rotating roller 21 can drive the substrate to rotate when rotating.

[0066] In this embodiment, the roller 21 is opposite to the evaporation source 1 in vertical relation, that is, the roller 21 can be arranged directly above the evaporation source 1, and a substrate is arranged on the periphery of the roller 21. The metal is melted and heated to an evaporated state, and the metal vapor generated by the evaporated metal contacts the substrate to form a metal film on the surface of the substrate.

[0067] The rotating roller 21 can drive the substrate to rotate when rotating, so that after a metal film is formed on the surface of the substrate opposite to the evaporation source 1, the portion of the substrate without the metal film formed thereon is rotated to be opposite to the evaporation source 1, so as to form a continuous metal film on the substrate.

[0068] In another embodiment, the substrate holder 2 includes a translation structure, and the substrate is connected to the translation structure. The movement of the translation structure can drive the translation of the substrate, and a continuous metal film can also be formed on the substrate, ensuring the efficiency and integrity of the film formation.

[0069] In one embodiment, the pore size of the mesh in the filter 31 ranges from 0.1 μm to 100 μm.

[0070] In this embodiment, uniform mesh holes may be formed in the filter screen 31, and the shape of the mesh holes may be square, circular, elliptical or triangular.

[0071] If the mesh size of the filter 31 is too small, it is easy to block the passage of metal vapor, affecting the efficiency of coating; if the mesh size of the filter 31 is too large, it will miss the filtration of impurities in the metal vapor, affecting the integrity of the coating; controlling the mesh size of the filter 31 in the range of 0.1μm-100μm can ensure the integrity of the coating while improving the efficiency of coating.

[0072] In one embodiment, the filter assembly 3 includes a layer of filter mesh 31, and the pore size of the mesh in the filter mesh 31 ranges from 0.1 μm to 20 μm.

[0073] In this embodiment, the filter screen 31 in the filter assembly 3 adopts a single-layer filtering structure. The single-layer filter screen requires a smaller mesh size, that is, the mesh size is arranged more densely to improve the filter screen 31's efficiency in capturing impurities in the metal vapor; but in order to avoid ineffective filtering of the metal vapor by the filter screen 31, the mesh size in the filter screen 31 can be set to be greater than or equal to 0.1 μm.

[0074] In one embodiment, the filter assembly 3 includes a plurality of filter screens 31 , which are arranged at intervals between the evaporation source 1 and the substrate holder 2 , and the pore size of the mesh in the filter screen 31 ranges from 10 μm to 100 μm.

[0075] In this embodiment, the filter screen 31 in the filter assembly 3 adopts a double-layer or multi-layer filtering structure. The double-layer or multi-layer filtering filter screens are stacked together to ensure the filtering phase rate; compared with the single-layer filtering structure, the aperture of the mesh in the multi-layer filtering structure can be larger. For example, the aperture range of the mesh in the filter screen 31 is set to 10μm-100μm, which improves the transmittance of the metal vapor cloud and thus improves the coating efficiency on the substrate.

[0076] In one embodiment, in the direction from the evaporation source 1 to the substrate holder 2 , the meshes in the multi-layer filter screen 31 are arranged in a staggered manner.

[0077] In this embodiment, the meshes of the multi-layer filter screens 31 are staggered up and down, and the combination of the multi-layer filter screens 31 can enhance the filtering effect and improve the filtering efficiency of the filter screens 31 on impurities in the metal vapor.

[0078] Although some specific embodiments of the present invention have been described in detail by way of examples, it should be understood by those skilled in the art that the above examples are for illustration only and are not intended to limit the scope of the present invention. It should be understood by those skilled in the art that the above embodiments may be modified without departing from the scope and spirit of the present invention. The scope of the present invention is defined by the appended claims.

Claims

1. A coating machine, characterized in that: include: An evaporation source (1), the evaporation source (1) being used to provide metal vapor so that the metal vapor forms a metal film on the surface of a substrate; A substrate frame (2), wherein the substrate frame (2) is used to place a substrate; A filter assembly (3), wherein the filter assembly (3) comprises a filter screen (31), and the filter screen (31) is arranged between the evaporation source (1) and the substrate frame (2).

2. The coating machine according to claim 1, characterized in that: The filter assembly (3) comprises a driving member, which is connected to the filter screen (31) and is used to drive the filter screen (31) to move.

3. The coating machine according to claim 2, characterized in that: The filter assembly (3) comprises a first filter screen and a second filter screen, wherein the first filter screen and the second filter screen are connected to the driving member, and the first filter screen and the second filter screen move in opposite directions.

4. The coating machine according to claim 2, characterized in that: The driving member comprises a first rotating shaft (32) and a second rotating shaft (33), one side of the filter screen (31) is wound around the first rotating shaft (32), and the other side of the filter screen (31) is wound around the second rotating shaft (33); When the second rotating shaft (33) rotates, it can drive the filter screen (31) to unwind on the first rotating shaft (32).

5. The coating machine according to claim 4, characterized in that: The first rotating shaft (32) is a reeling shaft, and the second rotating shaft (33) is a reeling shaft; When the reel-up shaft rotates, the unreeling shaft can rotate synchronously with the reel-up shaft.

6. The coating machine according to claim 5, characterized in that: The filter assembly (3) comprises a first driving member (34) and a second driving member (35), wherein the first driving member (34) is connected to the first rotating shaft (32) and is used to drive the first rotating shaft (32) to rotate, and the second driving member (35) is connected to the second rotating shaft (33) and is used to drive the second rotating shaft (33) to rotate.

7. The coating machine according to claim 1, characterized in that: The substrate frame (2) comprises a rotating roller (21), and the outer peripheral side of the rotating roller (21) is used to place the substrate; The rotating roller (21) can drive the substrate to rotate when rotating.

8. The coating machine according to claim 1, characterized in that: The pore size of the mesh in the filter (31) ranges from 0.1 μm to 100 μm.

9. The coating machine according to claim 8, characterized in that: The filter assembly (3) comprises a layer of filter screen (31), and the pore size of the mesh in the filter screen (31) ranges from 0.1 μm to 20 μm.

10. The coating machine according to claim 8, characterized in that: The filter assembly (3) comprises a plurality of filter screens (31), wherein the plurality of filter screens (31) are arranged at intervals between the evaporation source (1) and the substrate frame (2), and the pore size of the mesh in the filter screen (31) ranges from 10 μm to 100 μm.

11. The coating machine according to claim 10, characterized in that: In the direction from the evaporation source (1) to the substrate frame (2), mesh holes in multiple layers of the filter screen (31) are arranged in a staggered manner.

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