Compressed air system for wafer proton irradiation device

Abstract

The utility model discloses a compressed air system for a wafer proton irradiation device, which comprises an air source module, an air compressor, an air storage tank and a dryer, wherein the air compressor, the air storage tank and the dryer are sequentially arranged on an air source pipeline; the filtering module comprises a multi-stage filter connected with an air source pipeline; and the control distribution module comprises a PLC (Programmable Logic Controller) master controller and a plurality of branch pipe pneumatic cabinets which are communicated with the PLC master controller and are connected with the air source pipeline. The multi-stage filter is designed on the air source module to filter compressed air, and the drying machine is designed to dry the compressed air, so that the compressed air provided by the system is pure, dry, oil-free, impurity-free, stable in output and pulse-free.

Description

Technical Field

[0001] The utility model relates to the field of irradiation, in particular to a compressed air system for a wafer proton irradiation device. Background Art

[0002] The beam transmission and distribution system needs to distribute the beam to each irradiation room according to the control instructions of the master control system. For example, when the devices to be irradiated in the first vacuum irradiation room are ready, the operator of the first irradiation room sends an application for beam distribution to the master control system. The master control room integrates the working status of the accelerator and the working status of the other irradiation rooms, and distributes the beam to the first irradiation room based on the authorization of the dose monitoring and interlocking system.

[0003] After the first irradiation room receives the beam, it checks the beam parameters, starts the background irradiation operation control program, and performs irradiation production operations. During the irradiation production operation, the overall control system locks the beam supply room, and other rooms cannot receive the beam, thereby releasing the interlocking system of other rooms, and other irradiation rooms can carry out work such as replacement of irradiated items.

[0004] During the operation of the irradiation device, the pneumatic gate valve of the vacuum system of the irradiation device and the Faraday cup of the beam measurement system require compressed air as a working requirement;

[0005] Therefore, it is necessary to propose a compressed air system to provide pure, dry, oil-free and impurity-free compressed air with stable and pulse-free output for the pneumatic gate valve and the Faraday cup of the beam measurement system, thereby meeting their working requirements. Utility Model Content

[0006] Purpose of the utility model: to provide a compressed air system for a wafer proton irradiation device to solve the above-mentioned problems existing in the prior art.

[0007] Technical solution: A compressed air system for a wafer proton irradiation device, comprising:

[0008] An air source module, comprising an air source pipeline, and an air compressor, an air storage tank and a dryer which are sequentially arranged on the air source pipeline;

[0009] A filter module, including a multi-stage filter connected to a gas source pipeline;

[0010] The control distribution module includes a PLC master controller and a plurality of branch pneumatic cabinets which are communicated with the PLC master controller and connected with the air source pipeline.

[0011] The utility model designs a multi-stage filter on the air source module to filter the compressed air, and designs a dryer to dry the compressed air, so that the compressed air provided by the system is pure, dry, oil-free and impurity-free, and the output is stable and pulse-free.

[0012] In a further embodiment, the multi-stage filter comprises:

[0013] The primary filter is arranged between the output end of the gas storage tank and the input end of the dryer;

[0014] The secondary filter, the tertiary filter and the quaternary filter are arranged adjacent to each other. The secondary filter is arranged at the output end of the dryer, the tertiary filter is arranged at the output end of the secondary filter, and the quaternary filter is arranged at the output end of the tertiary filter.

[0015] In a further embodiment, the output ends of the plurality of branch pneumatic cabinets are respectively connected to the gas ports of the accelerator vacuum plug valve, the beam transport line vacuum plug valve, the beam test Faraday cage and the irradiation terminal vacuum plug valve.

[0016] In a further embodiment, the input ends of the plurality of branch pneumatic cabinets are connected to the output end of the four-stage filter.

[0017] Beneficial effects: The utility model discloses a compressed air system for a wafer proton irradiation device. The utility model designs a multi-stage filter on the air source module to filter the compressed air, and designs a dryer to dry the compressed air, so that the compressed air provided by the system is pure, dry, oil-free and impurity-free, and the output is stable and pulse-free. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a structural schematic diagram of the utility model.

[0019] The accompanying drawings are marked as follows:

[0020] 1. Air compressor; 2. Air storage tank; 3. Primary filter; 4. Dryer; 5. Secondary filter; 6. Third-stage filter; 7. PLC master controller; 9. Fourth-stage filter; 10. Pneumatic cabinet. DETAILED DESCRIPTION

[0021] The present application relates to a compressed air system for a wafer proton irradiation device, which is explained in detail below through a specific implementation method.

[0022] A compressed air system for a wafer proton irradiation device, comprising:

[0023] The air source module comprises an air source pipeline, and an air compressor 1, an air storage tank 2 and a dryer 4 which are sequentially arranged on the air source pipeline;

[0024] A filter module, including a multi-stage filter connected to a gas source pipeline;

[0025] The control distribution module includes a PLC master controller 7 and a plurality of branch pneumatic cabinets which are communicated with the PLC master controller 7 and connected with the air source pipeline.

[0026] By designing a multi-stage filter on the air source module to filter the compressed air, and designing a dryer 4 to dry the compressed air, the compressed air provided by the system is pure, dry, oil-free and impurity-free, and the output is stable and pulse-free.

[0027] The maximum working pressure of the air compressor must be ≥0.80MPa, and the control pressure can be adjusted between 0.65MPa and 0.80MPa. Taking into account factors such as the compressor operating load efficiency, component air consumption, and reserved expansion margin, a vortex oil-free silent type is used, and the noise value is ≤50±3dB(A) measured at 1.5 meters from the front of air compressor 1; the condensate discharge of air compressor 1 should be equipped with an automatic drain device and a condensate discharge pipe.

[0028] Dryer 4 can be a refrigerated dryer 4 to reduce the temperature of compressed air and remove moisture from compressed air to prevent high-temperature water-containing compressed air from damaging pneumatic components. The basic processing air flow rate should be determined based on the exhaust volume of air compressor 1, and taking into account indicators such as pressure dew point coefficient, inlet air temperature coefficient, ambient temperature coefficient and inlet air pressure coefficient; the inlet air pressure is 0.3-1.0MPa; the gas pressure dew point range is 3℃-10℃; a high-temperature air intake type is used, and the inlet air temperature range should be 5-50℃; the refrigerant uses environmentally friendly refrigerant; a one-way valve is designed for the compressed air input and output ports of the cold dryer, and a cold dryer safety bypass is designed to ensure the safety and convenience of cold dryer commissioning and maintenance; an automatic drainage device and a discharge pipe are installed at the condensate discharge port of the cold dryer.

[0029] The design and installation of gas tank 2 is mainly to precipitate part of the moisture in the compressed air, which can reduce the number of times the air compressor is started and can be load adjusted. The material is 304# stainless steel, the tank volume is agreed to be 0.5-1m3, the tank is vertical, and the working temperature of the tank should meet the requirements of the air compressor 1 to output high-temperature gas; the design pressure is 1.05MPa, and the working pressure is 1.0MPa; a safety valve matching the design pressure of the tank is installed to achieve overpressure protection function, and the opening pressure of the safety valve is 0.85MPa; an automatic drain device is installed, and if there is emission noise, noise reduction measures should be considered. According to the specifications of the automatic drain device, the gas bottle bracket is designed, manufactured and installed to facilitate the installation of the drain device and related pipelines; a one-way valve should be installed at the inlet of the gas tank 2 to prevent the gas in the gas tank 2 from flowing back to the gas cylinder of the air compressor 1 after the air compressor 1 is shut down. A one-way valve that meets the specifications and functions must be installed at the outlet and drain of the gas tank 2, and the valve and accessories must be made of 316L# stainless steel;

[0030] Filter module

[0031] Compressed air is mainly used for pneumatic equipment such as accelerator vacuum system and beam measurement system. The pneumatic system is designed with four-stage filtration to obtain oil-free, rust-free, impurity-free, dry pure compressed air to ensure the high quality of compressed air.

[0032] The first-level filter is a pre-filter, which is installed between the gas storage tank 2 and the dryer 4, and mainly filters impurities ≥ 5μm;

[0033] The secondary and tertiary filters 6 are installed after the dryer 4, and the filtration accuracy is not less than 3μm and 1μm;

[0034] The fourth-stage filter 9 is installed at the inlet of the pneumatic cabinet, mainly filtering tar, and can be integrated with the pressure reducing and regulating valve and the residual pressure release valve. The residual oil content and secondary side oil concentration are better than 1mg / m3;

[0035] When selecting filters, the air handling capacity and filtration pressure loss factors should be comprehensively considered to ensure the maximum air handling capacity and the smallest pressure loss under the condition of high-quality air source;

[0036] The outlet of the filter module can be designed and installed with a shutoff valve to facilitate the isolation of the load and the gas source equipment;

[0037] The multi-stage filter comprises:

[0038] The primary filter 3 is arranged between the output end of the gas storage tank 2 and the input end of the dryer 4, and is used to filter impurities ≥ 5 μm;

[0039] The secondary filter 5 , the tertiary filter 6 , and the quaternary filter 9 are arranged adjacent to each other. The secondary filter 5 is arranged at the output end of the dryer 4 , the tertiary filter 6 is arranged at the output end of the secondary filter 5 , and the quaternary filter 9 is arranged at the output end of the tertiary filter 6 .

[0040] The filtering accuracy of the secondary filter 5 and the tertiary filter 6 is not less than 3μm and 1μm;

[0041] The four-stage filter 9 mainly filters tar and can be integrated with the pressure reducing and regulating valve and the residual pressure release valve. The residual oil content and secondary side oil concentration are better than 1mg / m3;

[0042] The output ends of the plurality of pneumatic cabinets 10 are respectively connected to the gas ports of the accelerator vacuum plug valve, the beam transport line vacuum plug valve, the beam test Faraday cage and the irradiation terminal vacuum plug valve.

[0043] The input ends of the multiple pneumatic cabinets 10 are connected to the output end of the four-stage filter 9 .

[0044] Working principle description: Compressed air is generated by air compressor 1 and stored in air tank 2. Then it passes through four-stage filtration of the system to obtain oil-free, rust-free, impurity-free, dry pure compressed air. Then, the PLC master controller 7 controls each pneumatic cabinet 10 to output air to each pneumatic equipment, thereby achieving the conditions for the operation of the vacuum system or beam measurement system.

[0045] The preferred embodiments of the present invention are described in detail above in conjunction with the accompanying drawings; however, the present invention is not limited to the specific details in the above embodiments. Within the technical concept of the present invention, various equivalent transformations can be made to the technical scheme of the present invention, and these equivalent transformations all belong to the protection scope of the present invention.

Claims

1. A compressed air system for a wafer proton irradiation device, characterized in that: include: An air source module comprises an air source pipeline, and an air compressor (1), an air storage tank (2) and a dryer (4) which are sequentially arranged on the air source pipeline; A filter module, including a multi-stage filter connected to a gas source pipeline; The control distribution module comprises a PLC master controller (7) and a plurality of branch pneumatic cabinets (10) which are in communication with the PLC master controller (7) and connected to an air source pipeline.

2. The compressed air system for wafer proton irradiation device according to claim 1, characterized in that: The multi-stage filter comprises: A primary filter (3) is arranged between the output end of the gas storage tank (2) and the input end of the dryer (4); The secondary filter (5), the tertiary filter (6) and the quaternary filter (9) are arranged adjacent to each other. The secondary filter (5) is arranged at the output end of the dryer (4), the tertiary filter (6) is arranged at the output end of the secondary filter (5), and the quaternary filter (9) is arranged at the output end of the tertiary filter (6).

3. The compressed air system for wafer proton irradiation device according to claim 1, characterized in that: The output ends of the plurality of branch pneumatic cabinets (10) are respectively connected to the gas ports of the accelerator vacuum plug valve, the beam transport line vacuum plug valve, the beam test Faraday cup and the irradiation terminal vacuum plug valve.

4. The compressed air system for wafer proton irradiation device according to claim 2, characterized in that: The input ends of the plurality of pneumatic cabinets (10) are connected to the output end of the four-stage filter (9).

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