Measuring system with separated superconducting magnet and sample table

Abstract

The utility model relates to a measuring system with a separated superconducting magnet and a sample table. The measurement system may include a magnetic field generating device and a sample measuring device. The magnetic field generating device includes a pair of coil magnets, a first heat shield surrounding the coil magnets, and a first housing surrounding the first heat shield, the first heat shield and the first housing each having a U-shape. The sample measurement device includes a sample stage, a first movement device for moving the sample stage between a sample transfer position and a measurement position, a second heat shield surrounding the sample stage and the first movement device, and a second housing surrounding the second heat shield. The sample measuring device and the magnetic field generating device are separated from each other, and the sample measuring device can be inserted into the area of the U-shaped opening of the magnetic field generating device, so that a sample on the sample table is located in the magnetic field generated by the pair of coil magnets.

Description

Technical Field

[0001] The utility model generally relates to the field of physical property measurement, and more particularly to a physical property measurement system comprising a separated superconducting magnet and a sample stage. Background Art

[0002] Physical property measurement systems generally require the measurement of physical properties of samples under extreme conditions such as strong magnetic fields and extremely low temperatures. In order to save energy, strong magnetic fields can be generated by superconducting magnets. Superconducting magnets can be divided into split and non-split types. Split magnets include two coil magnets arranged opposite to each other, which facilitate the placement and removal of samples in a direction perpendicular to the axial direction (that is, from the gap between the two coil magnets). Non-split magnets include a single coil magnet, which can only place and remove samples in the axial direction. Generally speaking, the magnetic field uniformity of split magnets is better than that of non-split magnets.

[0003] At present, both the split and non-split designs can only be used to test small samples. For example, Iceoxford's split superconducting magnet can only measure samples less than 2 inches, and cannot put samples larger than 2 inches into the magnetic field for measurement. Quantum Design's (often referred to as QD) physical property measurement system (PPMS) uses a non-split superconducting magnet design, which can only place the sample in the center of the magnet solenoid, also limiting the size of the sample.

[0004] Therefore, there is still a need to improve the current physical property measurement system to adapt to the measurement of large-size samples. Utility Model Content

[0005] An embodiment of the utility model provides a measurement system, including a magnetic field generating device and a sample measuring device. The magnetic field generating device includes: a pair of coil magnets arranged opposite to each other, the pair of coil magnets are supported by a magnet support; a first heat shield surrounding the pair of coil magnets and the magnet support; a first refrigeration device arranged in the first heat shield, used for refrigeration to make the pair of coil magnets in a superconducting state; and a first shell surrounding the first heat shield, wherein the first heat shield and the first shell both have a U-shape, so that the space between the pair of coil magnets is located in the U-shaped opening. The sample measuring device includes: a sample stage for carrying a sample; a first moving device for moving the sample stage between a sample transfer position and a measurement position; a plurality of probes; a second moving device for moving the plurality of probes, the second moving device pressing the plurality of probes against the sample to measure the sample; a second heat shield surrounding the sample stage, the first moving device, the plurality of probes, and the second moving device; a second refrigeration device arranged in the second heat shield, used for refrigeration to make the sample at a predetermined temperature; and a second shell surrounding the second heat shield. The sample measuring device and the magnetic field generating device are separated from each other, and the sample measuring device can be inserted into the region of the U-shaped opening of the magnetic field generating device so that the sample is located in the magnetic field generated by the pair of coil magnets.

[0006] In one embodiment, there is a gap between the first heat shield of the magnetic field generating device and the first shell, and the magnetic field generating device further comprises a first vacuuming device for vacuuming the gap between the first heat shield and the first shell. There is a gap between the second heat shield of the sample measuring device and the second shell, and the sample measuring device further comprises a second vacuuming device for vacuuming the gap between the second heat shield and the second shell.

[0007] In one embodiment, the magnet support includes a pair of annular supports arranged opposite to each other and a connection portion connecting the pair of annular supports, and the pair of coil magnets are respectively wound around the pair of annular supports. The first heat shield and the first shell each have a through hole portion passing through the hollow portion of the annular supports, the second heat shield and the second shell each have a light-transmitting portion corresponding to the measurement position, and when the sample measurement device is inserted into the region of the U-shaped opening of the magnetic field generating device, the through hole portion is aligned with the light-transmitting portion, so that light irradiates the sample on the sample stage in the sample measurement device through the through hole portion and the light-transmitting portion.

[0008] In one embodiment, the second heat shield and the second shell further include one or more sample transfer windows corresponding to the sample transfer position.

[0009] In one embodiment, the second cooling device comprises a flexible connection portion connected to the sample stage, and when the sample stage is mounted from the sample transfer window to the first motion device, the flexible connection portion is connected to the sample stage.

[0010] In one embodiment, the second motion device comprises a plurality of independent motion units for independently moving the plurality of probes, each of the independent motion units comprising a piezoelectric motion unit.

[0011] In one embodiment, the piezoelectric motion unit includes a plurality of stator layers and a plurality of piezoelectric layers alternately stacked with each other, and the plurality of piezoelectric layers include at least one in-plane moving piezoelectric layer and at least one vertical moving piezoelectric layer.

[0012] In one embodiment, the first motion device comprises a stepping piezoelectric motor.

[0013] In one embodiment, the first refrigeration device and the second refrigeration device include a GM cold head or a pipe for transmitting refrigerant, the GM cold head includes a primary cold head for achieving a first temperature and a secondary cold head for achieving a temperature lower than the first temperature, at least the secondary cold head is arranged in the space within the first heat insulation screen or the second heat insulation screen.

[0014] In one embodiment, the sample measuring device has a basically flat shape, so that when inserted into the U-shaped opening area of ​​the magnetic field generating device, the upper and lower surfaces of the sample measuring device respectively face the pair of coil magnets, and the one or more sample transfer windows are formed on the side of the sample measuring device.

[0015] The measuring system of the utility model has at least the following advantages:

[0016] 1) The magnetic field generating device has a U-shaped structure, and the sample measuring device is suitable for loading a large-sized sample and inserting it into the opening of the U-shaped structure, so that the measurement of the large-sized sample can be achieved;

[0017] 2) The sample measuring device and the magnetic field generating device are separated from each other. After a large-size sample is loaded into the sample measuring device, it can be inserted into the U-shaped opening of the magnetic field generating device, so the sample loading and sampling operations are very convenient;

[0018] 3) Since the sample measuring device and the magnetic field generating device are separated from each other, they can have independent refrigeration systems. The heat brought into the sample measuring device during the sample loading and sampling operations will not affect the superconducting magnet in the magnetic field generating device, thereby improving the measurement efficiency;

[0019] 4) The measurement system may include a magnetic field generating device and multiple (e.g., two) sample measuring devices, so that when one sample measuring device is used to perform sample measurement, another sample measuring device may be used to load the sample and perform cooling operations, thereby further improving the measurement efficiency;

[0020] 5) Light can be introduced to the sample from the through hole in the magnetic field generating device and the light-transmitting window on the sample measuring device, which facilitates observation of the sample, or the sample can be measured under light irradiation (such as laser irradiation), thereby broadening the measurement conditions.

[0021] The above and other features and advantages of the present invention will become apparent from the following description of exemplary embodiments with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 A schematic diagram of a measurement system according to an embodiment of the present invention is shown.

[0023] Figure 2A A side cross-sectional view showing a magnetic field generating device in a measurement system according to an embodiment of the present invention.

[0024] Figure 2B A top cross-sectional view of a magnetic field generating device in a measurement system according to an embodiment of the present utility model is shown.

[0025] Figure 3 A schematic diagram showing a magnet support of a magnetic field generating device in a measurement system according to an embodiment of the present utility model.

[0026] Figure 4A A side cross-sectional view of a sample measuring device in a measuring system according to an embodiment of the present invention is shown.

[0027] Figure 4B A top cross-sectional view of a sample measuring device in a measuring system according to an embodiment of the present invention is shown.

[0028] Figure 5 A schematic diagram showing a moving device for moving a probe of a sample measuring device in a measuring system according to an embodiment of the present utility model is shown.

[0029] Fig. 6A , 6B , 6C and 6D are schematic diagrams showing the sample loading and measuring process of the measuring system according to an embodiment of the present invention. DETAILED DESCRIPTION

[0030] In order to enable those skilled in the art to better understand the present invention, the present invention is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0031] Figure 1FIG. 1 is a schematic diagram of a measurement system 100 according to an embodiment of the present invention. Figure 1 As shown, the measurement system 100 may include a magnetic field generating device 110 and a sample measuring device 130. The magnetic field generating device 110 may include a superconducting magnet (which will be described in detail below) and has a substantially U-shaped shape. Figure 1 The U-shaped shape is shown as lying down, but the present invention is not limited thereto. The sample measurement device 130 may have a generally flat shape so that it can be inserted into the U-shaped opening of the magnetic field generating device 110. In one embodiment, a through hole ( Figure 1 The light can be irradiated onto the sample measuring device 130 inserted into the U-shaped opening via the through hole, and then onto the sample to be measured in the measuring device 130 via the light-transmitting window on the measuring device 130, which will be described in detail below. It can be understood that the shape of the measuring device 130 is not limited to the shape shown in the drawings, as long as at least a part of its shape is suitable for being inserted into the U-shaped opening of the magnetic field generating device 110.

[0032] Figure 2A and Figure 2B 1 and 2 respectively show a side cross-sectional view and a top cross-sectional view of a magnetic field generating device 110 in a measurement system 100 according to an embodiment of the present invention. Figure 2A and Figure 2B The magnetic field generating device 110 may include a superconducting magnet 111 , which includes a pair of coil magnets 112 a and 112 b (which may be collectively referred to as coil magnets 112 ) disposed opposite to each other, and a magnet support 114 for supporting the coil magnets 112 . Figure 3 A schematic diagram of a magnet support 114 is shown, which includes a pair of annular supports 114a and 114b arranged opposite to each other, and a connecting portion 114c connecting the annular supports 114a and 114b. Coil magnets 112a and 112b can be wound around the annular supports 114a and 114b, respectively, so that the coil magnets 112a and 112b have a hollow portion in the axial direction in addition to a gap between the two that is perpendicular to the axial direction. The magnet support 114 can be formed of a soft ferromagnetic material, and the coil magnet 112 can be formed of a superconducting material such as but not limited to Nb3Sn. In one embodiment, a channel for a refrigerant to flow through can also be formed in the magnet support 114 to cool the coil magnet 112 so that it can achieve a superconducting state.

[0033] The superconducting magnet 111 may be enclosed in a first heat shield 118, which is made of a material with excellent heat insulation properties to ensure that the superconducting magnet 111 can be in an extremely low temperature environment to achieve a superconducting working state. The first refrigeration device 116 can be used to refrigerate the environment in the first heat shield 118 to achieve the low temperature required for the superconducting working state of the superconducting magnet 111. In one embodiment, the first refrigeration device 116 may include a wet refrigeration device, such as a pipeline for transmitting a refrigerant, and the refrigerant may be liquid helium or liquid nitrogen, depending on the temperature required for the superconducting material to enter the superconducting state. In one embodiment, the refrigerant, such as liquid helium or liquid nitrogen, can soak the entire or part of the superconducting magnet 111. In another embodiment, a channel for the refrigerant to flow through may be formed in the magnet support 114 of the superconducting magnet 111, and the pipeline for providing the refrigerant of the first refrigeration device 116 can be connected to the refrigerant channel of the magnet support 114. In another embodiment, the first refrigeration device 116 may include a GM (Giffod-McMahon) cold head, and the GM cold head may include a primary cold head for achieving a first temperature, such as 40K, and a secondary cold head for achieving a second temperature, such as 4K, lower than the first temperature. In one embodiment, the secondary cold head may be disposed in a space surrounded by the first heat shield 118, and the primary cold head may be disposed outside the first heat shield 118 and in the first housing 120.

[0034] The first shell 120 surrounds the entire first heat shield 118, and a gap may be formed between the first shell 120 and the first heat shield 118. Although not shown, a heat insulation support member such as a rib may be provided in the gap. In one embodiment, the magnetic field generating device 110 may further include a first vacuuming device (not shown) to evacuate the gap between the first shell 120 and the first heat shield 118 to reduce the heat dissipation of the first heat shield 118 to the outside and ensure the low temperature level of the internal space of the first heat shield 118. It can be understood that the superconducting magnet 111, the first refrigeration device 116, and other devices such as temperature sensors disposed in the first shell 120 and the first heat shield 118 can be sealed through the first heat shield 118 and the first shell 120 and lead out to the outside to facilitate the operation of the magnetic field generating device 110.

[0035] like Figure 2A and 2BAs shown, the superconducting magnet 111 can be roughly U-shaped, and the first heat shield 118 and the first shell 120 surrounding it also have a roughly U-shaped shape, or can also be called a roughly C-shaped shape. A pair of coil magnets 112a and 112b are divided into opposite sides of the opening of the U-shaped shape, and the space between the coil magnets 112a and 112b corresponds to the space in the U-shaped opening. As mentioned above, the axes of the coil magnets 112a and 112b are hollow, and the first heat shield 118 and the first shell 120 have through holes 122 passing through the hollow parts. Although Figure 2A Two through holes 122 are shown, but in some embodiments, only one through hole 122 , for example, the upper side through hole 122 may be formed.

[0036] Figure 4A and Figure 4B 1 and 2 respectively show a side cross-sectional view and a top cross-sectional view of a sample measuring device 130 in a measuring system 100 according to an embodiment of the present invention. Figure 4A and 4B , the sample measuring device 130 includes a sample stage 132 for carrying a sample (not shown), and a first motion device 134 for moving the sample stage 132. Although not shown, the first motion device 134 can be mounted on a bracket. The motion device 134 can be a stepping piezoelectric motor, such as the stepping piezoelectric motor described in the prior utility model patent CN202022400257.X of the applicant, and the entire disclosure of the prior utility model patent is incorporated herein by reference. The first motion device 134 can move the sample stage 132 between a sample transfer position and a measurement position, at which the sample stage 132 can be placed in the sample measuring device 130 or taken out of the sample measuring device 130, and the sample on the sample stage 132 can be measured at the measurement position. The sample stage 132 can be made of a metal with good thermal conductivity, such as copper or an insulator. In one embodiment, a channel for cooling liquid to flow through may be formed in the sample stage 132 , or a resistance wire for heating may be formed therein, so as to facilitate measurement of samples at different temperatures.

[0037] The sample measuring device 130 may further include a plurality of probes 136 and a second moving device 138 for moving the probes 136. The probes 136 may be, for example, commercially available direct current (DC) and radio frequency (RF) cryogenic probes, which have a certain elasticity and good electrical conductivity and can be pressed against the sample surface to perform a measurement operation. Generally, at least four probes are provided. Figure 4B Six are shown in the figure, which are arranged near the above-mentioned measurement position. The second motion device 138 may include a plurality of independent motion units capable of independently moving each probe 136, Figure 5 An example of an independent motion unit is shown. Figure 5, an independent motion unit may include a plurality of stator layers 138a and a plurality of piezoelectric layers 138b and 138c alternately stacked with each other, the piezoelectric layers including at least one in-plane moving piezoelectric layer 138b and at least one vertical moving piezoelectric layer 138c. The stator layer 138a is a layer that does not deform, and the bottom stator layer 138a can be fixed, for example, glued to the inner wall of the second heat insulation shield 142 (described later) or fixed to a separate probe holder (not shown). The in-plane moving piezoelectric layer 138b is a layer that generates deformation in the in-plane direction when a voltage is applied, and the vertical moving piezoelectric layer 138c is a layer that generates deformation in the vertical direction when a voltage is applied. The probe 136 can be moved to a desired position by deformation in the in-plane direction and deformation in the vertical direction; and by alternately stacking the stator layer and the moving layer, the moving layers can be prevented from being separated from each other due to deformation. It is understandable that other motion devices may also be used to move each probe 136, such as the above-mentioned stepping piezoelectric motor or other existing servo motors.

[0038] Continue to refer to Figure 4A and 4B The sample stage 132, the first motion device 134, the probe 136 and the second motion device 138 can be enclosed in a second heat shield 142. The second heat shield 142 is also made of a material with excellent heat insulation properties to ensure that the sample stage 132 can be in a desired low-temperature environment to facilitate measurement. The second refrigeration device 140 can be used to cool the internal space of the second heat shield 142 to achieve the desired low-temperature state. Similar to the first refrigeration device 116, the second refrigeration device 140 may include a wet refrigeration device, such as a pipeline for transmitting a refrigerant, and the refrigerant may be liquid helium or liquid nitrogen. Figure 4B As shown, the refrigerant transmission pipeline of the second refrigeration device 140 can be connected to the refrigerant channel inlet and outlet of the sample stage 132 through, for example, a flexible connection portion 141 (i.e., a flexible pipeline), so that the sample to be tested on the sample stage 132 can be better cooled. In another embodiment, the second refrigeration device 140 may include a GM (Giffod-McMahon) cold head, and the GM cold head may include a primary cold head for achieving a first temperature, such as 40K, and a secondary cold head for achieving a second temperature lower than the first temperature, such as 4K. In one embodiment, the secondary cold head may be arranged in the space surrounded by the second heat insulation shield 142, and the primary cold head may be arranged outside the second heat insulation shield 142 and in the second shell 144.

[0039] The second shell 144 may surround the entire second heat shield 142, and a gap may be formed between the second shell 144 and the second heat shield 142. Although not shown, a heat insulating support member such as a rib may be provided in the gap. In one embodiment, the sample measuring device 130 may further include a second vacuuming device (not shown) to vacuum the gap between the second shell 144 and the second heat shield 142 to reduce the heat dissipation of the second heat shield 142 to the outside and ensure the low temperature level of the internal space of the second heat shield 142. In one embodiment, the first vacuuming device of the magnetic field generating device 110 and the second vacuuming device of the sample measuring device 130 may share the same device such as a mechanical pump, an electromagnetic pump or a molecular pump, which is connected to the vacuum ports on the shells of the magnetic field generating device 110 and the sample measuring device 130 through a manifold. It can be understood that, for example, temperature sensors, pressure sensors, etc. can also be set in the sample measuring device 130. These sensors and related lines and pipes of the first motion device 134, the probe 136, the second motion device 138, and the second refrigeration device 140 can be sealed through the second heat insulation shield 142 and the second shell 144 and led to the outside to facilitate the operation of the sample measuring device 130.

[0040] One or more light-transmitting portions 146 may be formed on the second heat shield 142 and the second shell 144. When the sample measuring device 130 is inserted into the U-shaped opening of the magnetic field generating device 110, the light-transmitting portion 146 may be aligned with the through hole 122 of the magnetic field generating device 110, so that light can be irradiated onto the sample to be measured in the sample measuring device 130 through the through hole 122 and the light-transmitting portion 146. That is, the light-transmitting portion 146 corresponds to the sample measurement position in the sample measuring device 130. Here, the sample may be irradiated with visible light to facilitate observation of the measurement process; or the sample may be irradiated with light of a specific frequency, such as ultraviolet light, infrared light, laser, etc., to measure various physical properties of the sample under specific lighting conditions. It can also be understood that the light-transmitting portion 146, the first heat shield 118, the first shell 120, the second heat shield 142, and the second shell 144 are preferably formed of a material that is easily permeable by a magnetic field, so that the magnetic field generated by the superconducting magnet 111 is applied to the sample to be measured.

[0041] like Figure 4B As shown, one or more sample transfer windows 148 corresponding to the sample transfer position may be formed on the second heat shield 142 and the second housing 144, such as sample transfer windows 148a and 148b formed on opposite sides. In one embodiment, the sample stage 132 with the sample to be measured thereon may be installed in the sample measurement device 130 through one sample transfer window, and the flexible connection portion (e.g., a flexible refrigerant liquid transmission pipe) of the second refrigeration device 140 may be connected to the sample stage 132 through another sample transfer window.

[0042] Fig. 6A ,6B 6C and 6D are schematic diagrams showing the sample loading and measuring process of the sample measuring device 130 according to an embodiment of the present invention. Fig. 6A , open the first sample transfer window 148a on one side of the sample measuring device 130, and install the sample stage 132 with the sample to be measured on the first moving device 134 in the sample measuring device 130. The first moving device 134 can move the sample stage 132 between the sample transfer position and the measurement position. Then refer to Figure 6B , the first sample transfer window 148a can be closed, and Figure 6C As shown, the second sample transfer window 148b on the other side is opened, and the flexible connection part (for example, the flexible refrigerant liquid transmission tube) of the second refrigeration device 140 is connected to the sample stage 132. Then, refer to Fig.6D The first moving device 134 can move the sample stage 132 from the sample transfer position to the measurement position (ie, the area where the probe 136 is located) along the direction of the arrow to perform measurement.

[0043] Return to reference Figure 1 The sample measuring device 130 with the sample installed can be inserted into the U-shaped opening of the magnetic field generating device 110, so that the light-transmitting portion 146 is aligned with the through hole 122, and the sample is located below the light-transmitting portion 146, so that light can be irradiated onto the sample, and the magnetic field generated by the superconducting magnet 111 can be applied to the sample to perform sample measurement.

[0044] Although it is described above that the measurement system 100 includes one magnetic field generating device 110 and one sample measuring device 130, it should be understood that the measurement system 100 may also include two sample measuring devices 130. While the measurement is performed using the first sample measuring device 130, the loading / unloading operation and the vacuuming and cooling operation may be performed on the second sample measuring device 130. In this way, when the measurement of the first sample measuring device 130 is completed, the first sample measuring device 130 may be quickly removed, and the second sample measuring device 130 may be inserted into the U-shaped opening of the magnetic field generating device 110, and then the measurement operation may be started immediately, thereby improving the measurement efficiency.

[0045] The measurement system 100 of the present invention has at least the following advantages:

[0046] 1) The magnetic field generating device 110 has a U-shaped structure, and the sample measuring device 130 is suitable for loading a large-sized sample and inserting it into the opening of the U-shaped structure, so that the measurement of the large-sized sample can be achieved;

[0047] 2) The sample measuring device 130 and the magnetic field generating device 110 are separated from each other. After a large-size sample is loaded into the sample measuring device 130, it can be inserted into the U-shaped opening of the magnetic field generating device 110, so the sample loading and sampling operations are very convenient;

[0048] 3) Since the sample measuring device 130 and the magnetic field generating device 110 are separated from each other, the two can have independent refrigeration systems. The heat brought into the sample measuring device during the sample loading and sampling operations will not affect the superconducting magnet 111 in the magnetic field generating device 110, thereby avoiding additional refrigeration operation time and improving measurement efficiency;

[0049] 4) The measurement system 100 may include a magnetic field generating device 110 and a plurality of (e.g., two) sample measuring devices 130. Therefore, when one sample measuring device 130 is used to perform sample measurement, another sample measuring device 130 may be used to perform loading / unloading, vacuuming, and cooling operations, thereby further improving the measurement efficiency.

[0050] 5) Light can be introduced to the sample from the through hole 122 in the magnetic field generating device 110 and the light-transmitting window 148 on the sample measuring device 130, which facilitates observation of the sample, or the sample can be measured under light (eg, laser irradiation) conditions, thereby broadening the measurement conditions.

[0051] Unless the context clearly requires otherwise, throughout the specification and claims, contrary to the exclusive or exhaustive meaning, the words "including", "comprising", etc. should be understood in an inclusive sense, that is, in the sense of "including but not limited to". In the embodiments described above, some commonly used known devices, operations, etc. in the relevant field may be omitted. The wording "connected" generally used here means that two or more elements can be directly connected or connected by means of one or more intermediate elements. In addition, when used in this application, the words "here", "above", "below" and words of similar meanings should refer to the application as a whole, rather than any specific part of the application. When the context permits, the words used in the above description in the singular or plural may also include the plural or singular, respectively. The wording "or" when referring to a list of two or more items covers all of the following interpretations thereof: any item in the list, all items in the list, and any combination of items in the list.

[0052] The above detailed description of the embodiment of the utility model is not intended to be exhaustive or to limit the utility model to the precise form disclosed above. Although the specific embodiment of the utility model and the example for the utility model are described above for the purpose of illustration, as will be appreciated by those skilled in the art, various equivalent modifications within the scope of the utility model are feasible. For example, although a process or block is presented in a given order, an alternative embodiment can perform a process with steps in different orders, or adopt a system with blocks in different orders, and some processes or blocks can be deleted, moved, added, subtracted, combined and / or modified. Each of these processes or blocks can be implemented in a variety of different ways. Similarly, although a process or block is sometimes shown as being executed serially, on the contrary, these processes or blocks can also be executed in parallel, or can be executed at different times.

[0053] Although some embodiments of the utility model have been described, these embodiments have been presented only by way of example, and the embodiments are not intended to limit the scope of the present disclosure. In fact, the novel methods and systems described herein can be implemented in a variety of other forms; in addition, various omissions, substitutions, and changes in the form of the methods and systems described herein can be made without departing from the spirit of the present disclosure. The drawings and their equivalents are intended to cover such forms or modifications that will fall within the scope and spirit of the present disclosure.

Claims

1. A measurement system, characterized in that include: A magnetic field generating device, comprising: a pair of coil magnets disposed opposite to each other, the pair of coil magnets being supported by a magnet support; a first heat shield surrounding the pair of coil magnets and the magnet holder; a first refrigeration device disposed in the first heat shield, for refrigerating so that the pair of coil magnets are in a superconducting state; and a first housing surrounding the first heat shield, wherein the first heat shield and the first housing both have a U-shape such that a space between the pair of coil magnets is located within an opening of the U-shape; and Sample measuring device, comprising: A sample stage, used for carrying samples; A first motion device for moving the sample stage between a sample transfer position and a measurement position; Multiple probes; a second moving device for moving the plurality of probes, the second moving device pressing the plurality of probes against the sample to measure the sample; a second heat shield surrounding the sample stage, the first motion device, the plurality of probes, and the second motion device; a second refrigeration device disposed in the second heat shield, for refrigerating the sample so that the sample is at a predetermined temperature; and a second housing surrounding the second heat shield, The sample measuring device and the magnetic field generating device are separated from each other, and the sample measuring device can be inserted into the U-shaped opening of the magnetic field generating device so that the sample is located in the magnetic field generated by the pair of coil magnets.

2. The measuring system according to claim 1, characterized in that There is a gap between the first heat insulation shield and the first shell of the magnetic field generating device, and the magnetic field generating device further comprises a first vacuuming device for evacuating the gap between the first heat insulation shield and the first shell into a vacuum, and A gap is provided between the second heat insulation shield and the second shell of the sample measuring device, and the sample measuring device further comprises a second vacuuming device for vacuuming the gap between the second heat insulation shield and the second shell.

3. The measuring system according to claim 1, characterized in that The magnet support comprises a pair of annular supports arranged opposite to each other and a connecting portion connecting the pair of annular supports, the pair of coil magnets are respectively wound around the pair of annular supports, and The first heat shield and the first shell each have a through hole portion passing through the hollow portion of the annular bracket, the second heat shield and the second shell each have a light-transmitting portion corresponding to the measurement position, and when the sample measuring device is inserted into the area of ​​the U-shaped opening of the magnetic field generating device, the through hole portion is aligned with the light-transmitting portion, so that light irradiates the sample on the sample stage in the sample measuring device through the through hole portion and the light-transmitting portion.

4. The measuring system according to claim 1, characterized in that The second heat insulation shield and the second shell further include one or more sample transfer windows corresponding to the sample transfer positions.

5. The measuring system according to claim 4, characterized in that The second cooling device includes a flexible connection portion connected to the sample stage, and when the sample stage is mounted from the sample transfer window to the first motion device, the flexible connection portion is connected to the sample stage.

6. The measuring system according to claim 1, characterized in that The second motion device includes a plurality of independent motion units for independently moving the plurality of probes, each of the independent motion units including a piezoelectric motion unit.

7. The measuring system according to claim 6, characterized in that The piezoelectric motion unit includes a plurality of stator layers and a plurality of piezoelectric sublayers alternately stacked with each other, and the plurality of piezoelectric sublayers include at least one in-plane moving piezoelectric layer and at least one vertical moving piezoelectric layer.

8. The measuring system according to claim 1, characterized in that The first motion device includes a stepping piezoelectric motor.

9. The measuring system according to claim 1, characterized in that The first refrigeration device and the second refrigeration device include a GM cold head or a pipeline for transmitting refrigerant, the GM cold head includes a primary cold head for achieving a first temperature and a secondary cold head for achieving a temperature lower than the first temperature, at least the secondary cold head is arranged in the space within the first heat insulation screen or the second heat insulation screen.

10. The measuring system according to claim 4, characterized in that The sample measuring device has a substantially flat shape so that when inserted into the U-shaped opening of the magnetic field generating device, the upper and lower surfaces of the sample measuring device respectively face the pair of coil magnets, and the one or more sample transfer windows are formed on the side of the sample measuring device.

Images