Manipulator and manipulator system

Abstract

The utility model provides a manipulator and a manipulator system. The mechanical arm comprises an arm unit and a finger unit, and the arm unit is detachably connected with the finger unit based on the connection relation between a first connecting piece in the arm unit and a second connecting piece in the finger unit. And under the action of a driving part in the first connecting piece, automatic disassembly and connection between the arm unit and the finger unit can be achieved. Besides, one or more kinds of finger units are stored in a storage box in the manipulator system, so that the arm unit can automatically replace different kinds of finger units to meet the conveying requirements of different target objects. Compared with a manual replacement mode, the manipulator capable of automatically replacing the finger unit is high in replacement efficiency and precision, low in pollution and damage degree to the manipulator and a target object, beneficial to prolonging the service life of a device and capable of improving the process preparation efficiency.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor manufacturing, in particular to a manipulator and a manipulator system. Background Art

[0002] A manipulator is an operating device that can imitate some of the movements of human fingers and arms, and can grab, move objects or operate tools according to a fixed procedure. It is widely used in industries such as industry, medicine, and the military. At present, manipulators are also commonly used to transfer wafers in the semiconductor preparation process. However, with the increasing number of types of semiconductor products, there are more and more types of wafers, and different types of wafers have different sizes and thicknesses. Therefore, in order to ensure the stability of transmission, the manipulator needs to switch to different types of finger components to match various types of wafers. In the prior art, replacing finger components requires manual determination of the replacement type, and then manual disassembly and installation. It is not only time-consuming and labor-intensive, but also easy to damage or contaminate the manipulator, affecting the service life of the manipulator. In addition, due to the low efficiency of manual replacement of finger components, the same type of wafers need to be arranged for collective delivery in the process preparation or testing link, and it is difficult to control the emergency or additional wafers in time, which is easy to affect the preparation or testing process, and even increase the wafer depreciation rate.

[0003] Therefore, a new manipulator is urgently needed to solve the above-mentioned technical problems. Utility Model Content

[0004] The utility model aims to provide a manipulator and a manipulator system to solve the problem of how to improve the replacement efficiency of finger units.

[0005] In order to solve the above technical problems, the utility model provides a manipulator, comprising: an arm unit and a finger unit;

[0006] The arm unit includes an arm body and a first connecting member; the first connecting member is arranged at one end of the arm body, and the first connecting member has a driving part so that the first connecting member can rotate relative to the arm body;

[0007] The finger unit includes a finger body and a second connecting member; the second connecting member is arranged at one end of the finger body, and the second connecting member is adapted to the first connecting member in shape so that the first connecting member and the second connecting member are connected or separated at least under the rotation of the first connecting member.

[0008] Optionally, in the manipulator, the first connecting member further has an interface portion; the interface portion, the driving portion and one end of the arm body are connected in sequence, and under the drive of the driving portion, the interface portion can rotate relative to the arm body;

[0009] Furthermore, the interface portion is adapted to the morphology of the second connecting member, so that at least when the interface portion is rotated, the interface portion is connected to or separated from the second connecting member.

[0010] Optionally, in the manipulator, the interface portion is a column, and the second connecting member is a slot; or, the interface portion is a slot, and the second connecting member is a column;

[0011] In which, the outer surface of the column has a plurality of clips, and the inner surface of the slot body has a plurality of first guide rails and a plurality of second guide rails; the first guide rail extends along the axial direction of the slot body, and the clip can slide along the corresponding first guide rail so that the column extends into or out of the slot body; the second guide rail is connected to at least one of the first guide rails, and the second guide rail extends along the circumference of the slot body, so that when the column rotates relative to the slot body under the drive of the driving part, the clip can slide along the corresponding second guide rail; and when the clip slides relative to the second guide rail in a direction away from the first guide rail, the column is clipped with the slot body; when the clip slides relative to the second guide rail in a direction close to the first guide rail, the column is separated from the slot body.

[0012] Optionally, in the manipulator, the interface portion is a column, and the second connecting member is a slot; or, the interface portion is a slot, and the second connecting member is a column;

[0013] In which, the outer surface of the column has a plurality of clips, and the inner surface of the slot body has a plurality of third guide rails; the clips are elastic and can be extended and retracted along the radial direction of the column; and when the column extends into or out of the slot body, the clips are in a compressed state; the third guide rails extend along the circumference of the slot body, and under the drive of the driving part, when the column rotates relative to the slot body, the clips slide along the third guide rails; and the third guide rails are variable-section guide rails, so that when the column is engaged and rotated relative to the slot body, the clips are in an elongated state, and the elongation deformation amount increases; when the column is separated and rotated relative to the slot body, the clips are in a compressed state, and the compression deformation amount increases.

[0014] Optionally, in the manipulator, the interface portion is a column, and the second connecting member is a slot; or, the interface portion is a slot, and the second connecting member is a column;

[0015] Among them, the outer surface of the column has a first rotating thread, the inner surface of the groove has a matching second rotating thread, and the column can extend into or out of the groove, and under the drive of the driving part, the column and the groove rotate relative to each other so that the column and the groove are threadedly connected or separated.

[0016] Optionally, in the manipulator, the manipulator further includes a positioning unit; the positioning unit is arranged on the arm unit and / or the finger unit, and is used to detect the relative position of the first connecting member and the second connecting member.

[0017] Optionally, in the manipulator, the arm body includes a connected driving assembly and a supporting arm; the driving assembly is used to drive the supporting arm to move along at least one degree of freedom, and the supporting arm is connected to the first connecting member and is at least used to support the finger unit;

[0018] The finger body has a bearing portion and a connecting portion connected to each other; the bearing portion is used to bear and / or clamp a target object, and the connecting portion is connected to the second connecting member and is used to connect to the arm unit;

[0019] Furthermore, the driving assembly and the driving portion both include a motor.

[0020] Based on the same concept, the utility model also provides a manipulator system, comprising: the manipulator and a storage box; the storage box has an inner cavity, and a carrier is accommodated in the inner cavity, and the carrier is used to store at least one finger unit; and,

[0021] At least under the drive of the driving unit, the arm unit can be connected to or separated from the finger unit in the storage box to switch the use of the finger unit.

[0022] Optionally, in the robot system, multiple types of the finger units are stored in the storage box, and different types of the finger units are used to transport different types and / or different quantities of targets.

[0023] Optionally, in the manipulator system, the inner cavity of the storage box is divided into a plurality of areas; each area is used to store one type of the finger unit, and different areas are used to store different types of the finger units.

[0024] In summary, the utility model provides a manipulator and a manipulator system. Compared with the prior art, the manipulator includes an arm unit and a finger unit, and based on the connection relationship between the first connecting member in the arm unit and the second connecting member in the finger unit, the arm unit and the finger unit are detachably connected. And, under the action of the driving part in the first connecting member, the automatic disassembly and connection between the arm unit and the finger unit can be realized. In addition, if one or more of the finger units are stored in the storage box in the manipulator system, the arm unit can automatically replace different types of the finger units to meet the transmission requirements of different targets. Compared with the manual replacement method, the manipulator with automatically replaceable finger units provided by the utility model not only has high replacement efficiency and high precision, but also has low pollution and damage to the manipulator and the target, which is conducive to extending the service life of the device and improving the process preparation efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Those skilled in the art will appreciate that the drawings are provided for a better understanding of the present invention, but do not constitute any limitation on the scope of the present invention.

[0026] Figure 1 It is a structural schematic diagram of the manipulator in the embodiment of the utility model.

[0027] Figure 2 It is a structural schematic diagram of the arm body in the embodiment of the utility model.

[0028] Figure 3 This is a schematic diagram of a first connection between a first connecting member and a second connecting member in an embodiment of the utility model.

[0029] Figure 4 This is a schematic diagram of a second connection between the first connecting member and the second connecting member in an embodiment of the utility model.

[0030] Figure 5 It is a cross-sectional schematic diagram of the clamping member located at different positions in the third guide rail in the embodiment of the utility model.

[0031] Figure 6 This is a third connection diagram of the first connecting member and the second connecting member in the embodiment of the utility model.

[0032] Figure 7 This is a fourth connection diagram of the first connecting member and the second connecting member in the embodiment of the utility model.

[0033] Figure 8 It is a structural schematic diagram of a storage box in an embodiment of the utility model.

[0034] And, in the attached drawings:

[0035] 10-Manipulator;

[0036] 101-arm unit; 1011-arm body; 1011a-driving assembly; 1011b-support arm; 1012-first connecting member; 1012a-driving part; 1012b-interface part;

[0037] 102-finger unit; 1021-finger body; 1021a-bearing part; 1021b-connecting part; 1022-second connecting member;

[0038] 20-storage box; 201-box; 202-carrying frame;

[0039] B-clamping part; G1-first guide rail; G2-second guide rail; G3-third guide rail; S1-first rotating thread; S2-second rotating thread; R1-first area; R2-second area; R3-third area; R4-fourth area. DETAILED DESCRIPTION

[0040] In order to make the purpose, advantages and features of the utility model clearer, the utility model is further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be noted that the drawings are all in a very simplified form and are not drawn to scale, and are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the utility model. In addition, the structure shown in the drawings is often a part of the actual structure. In particular, the emphasis of each drawing to be shown is different, and sometimes different proportions are used. It should also be understood that, unless otherwise specified or indicated, the terms "first", "second", "third" and the like in the specification are only used to distinguish the various components, elements, steps, etc. in the specification, rather than to represent the logical relationship or sequential relationship between the various components, elements, steps, etc. And, the X-axis direction, Y-axis direction and Z-axis direction referred to in the specification and the drawings of this application are three directions perpendicular to each other in three-dimensional space.

[0041] See also Figure 1 to Figure 3 , this embodiment provides a manipulator 10, including: an arm unit 101 and a finger unit 102; the arm unit 101 includes an arm body 1011 and a first connecting member 1012; the first connecting member 1012 is arranged at one end of the arm body 1011, and the first connecting member 1012 has a driving part 1012a, so that the first connecting member 1012 can rotate relative to the arm body 1011; the finger unit 102 includes a finger body 1021 and a second connecting member 1022; the second connecting member 1022 is arranged at one end of the finger body 1021, and the second connecting member 1022 is adapted to the morphology of the first connecting member 1012, so that at least under the rotation of the first connecting member 1012, the first connecting member 1012 and the second connecting member 1022 are connected or separated.

[0042] It can be seen that the manipulator 10 provided in this embodiment utilizes the connection relationship between the first connecting member 1012 and the second connecting member 1022 to realize the detachable connection between the arm unit 101 and the finger unit 102. And, under the action of the driving part 1012a, the automatic disassembly and connection between the arm unit 101 and the finger unit 102 are realized. Compared with the manual disassembly and replacement method, the manipulator 10 provided in this embodiment that can automatically replace the finger unit 102 not only has high replacement efficiency and high precision, but also has low pollution and damage to the manipulator 10 and the target object, which is conducive to extending the service life of the device and improving the process preparation efficiency.

[0043] The following is combined with Figures 1 to 8 The robot arm 10 provided in this embodiment is described in detail.

[0044] Please continue reading Figure 1 , the manipulator 10 provided in this embodiment is used to transport the target object. Specifically, the manipulator 10 includes an arm unit 101 and a finger unit 102. Among them, the arm unit 101 and the finger unit 102 are detachably connected, and the arm unit 101 is used to support and drive the finger unit 102 to move along one or more degrees of freedom; the finger unit 102 is used to carry and / or clamp the target object, and the target object can be transported under the cooperation of the arm unit 101 and the finger unit 102. It should be noted that this embodiment does not limit the specific type of the target object, which can be a wafer or other object.

[0045] Furthermore, the arm unit 101 includes an arm body 1011 and a first connecting member 1012, and the first connecting member 1012 is disposed at one end of the arm body 1011. The arm body 1011 is used to provide support and realize movement of one or more degrees of freedom, and the first connecting member 1012 is used to be detachably connected to the finger unit 102. Figure 2 As shown, the arm body 1011 includes a connected driving component 1011a and a support arm 1011b. The driving component 1011a may be composed of a plurality of motors, and is used to drive the support arm 1011b to move along one or more degrees of freedom. The end of the support arm 1011b away from the driving component 1011a is connected to the first connecting member 1012, and is used to provide a supporting force to the finger unit 102 through the first connecting member 1012 and drive the finger unit 102 to move. And, as Figure 3As shown, the finger unit 102 includes a finger body 1021 and a second connecting member 1022, and the second connecting member 1022 is arranged at one end of the finger body 1021. The finger body 1021 is used to carry and / or clamp the target object, and the second connecting member 1022 is used to be detachably connected to the first connecting member 1012. Among them, the finger body 1021 has a connected carrying portion 1021a and a connecting portion 1021b. The carrying portion 1021a is a human finger-like structure, which is used to carry and / or clamp the target object. The end of the connecting portion 1021b away from the carrying portion 1021a is connected to the second connecting member 1022 for realizing connection with the arm unit 101. Optionally, the carrying portion 1021a can be Figure 3 The single-finger structure shown is used to carry a single target object; it can also be a multi-finger structure to carry multiple targets at the same time. In addition, this embodiment does not limit the specific shape, size, material, etc. of the arm body 1011 and the finger body 1021.

[0046] Please continue reading Figure 3 , the first connecting member 1012 has a driving portion 1012a and an interface portion 1012b, and the interface portion 1012b, the driving portion 1012a and one end of the support arm 1011b are connected in sequence. Preferably, the driving portion 1012a is a motor, and under the drive of the driving portion 1012a, the interface portion 1012b can rotate relative to the support arm 1011b. Further, the interface portion 1012b is adapted to the morphology of the second connecting member 1022, and under the rotation of the interface portion 1012b, the interface portion 1012b can be connected or separated from the second connecting member 1022, thereby realizing the connection or separation of the arm unit 101 and the finger unit 102.

[0047] It should be noted that the present embodiment does not limit the specific shape and size of the interface portion 1012b and the second connecting member 1022. For example, the interface portion 1012b is a column, and the second connecting member 1022 is a slot; or the interface portion 1012b is a slot, and the second connecting member 1022 is a column; and the shape of the column is adapted to the slot, and can be extended into or out of the slot. Based on this, the interface portion 1012b and the second connecting member 1022 can be connected by a sleeve connection, and the specific connection method includes but is not limited to a snap connection or a threaded connection.

[0048] Exemplarily, the interface portion 1012b is engaged with the second connector 1022. Figure 3 As shown in FIG. 1 , the interface portion 1012b is a column, and the second connecting member 1022 is a slot. Figure 4 As shown, the interface portion 1012b is a slot body, and the second connecting member 1022 is a column. The column can extend into or out of the slot body, and can rotate relative to the slot body in the slot body, so that the column and the slot body are engaged or separated. The outer surface of the column has a plurality of clamping members B, and the inner surface of the slot body has a plurality of guide rails corresponding to each of the clamping members B. Preferably, the clamping member B is a protruding structure on the surface of the column, and the protruding structure can be a rigid structure or an elastic structure.

[0049] In one example, if Figure 3 and Figure 4 As shown, the clamping member B is a rigid raised structure. The inner surface of the groove body has a plurality of first guide rails G1 and a plurality of second guide rails G2. Specifically, the first guide rail G1 and the second guide rail G2 are both concave guide rails, and are adapted to the raised appearance of the clamping member B. The first guide rail G1 extends along the axial direction of the groove body, and the clamping member B can slide along the corresponding first guide rail G1 so that the column extends into or out of the groove body. The second guide rail G2 is connected to at least one of the first guide rails G1, and the second guide rail G2 extends along the circumference of the groove body, and under the drive of the driving part 1012a, when the column rotates relative to the groove body, the clamping member B can slide along the corresponding second guide rail G2. And, when the clamping member B slides relative to the second guide rail G2 in a direction away from the first guide rail G1, the column and the slot body are gradually clamped; when the clamping member B slides relative to the second guide rail G2 in a direction close to the first guide rail G1, the column and the slot body are gradually separated. Assume that the clamping rotation direction is clockwise and the separation rotation direction is counterclockwise. The process of clamping the column and the slot body is: the clamping member B on the column is aligned with the first guide rail G1 on the slot body, and the column and the clamping member B are slid along the first guide rail G1 into the slot body until the clamping member B slides to the connection position between the first guide rail G1 and the second guide rail G2. Then, the column and the clamping member B are rotated in a clockwise direction along the second guide rail G2 to move away from the first guide rail G1 and be located in a locked position to achieve the clamping connection between the two. On the contrary, the process of separating the column from the slot is: first, the column and the clamping member B are rotated counterclockwise along the second guide rail G2, and the clamping member B is rotated into the first guide rail G1. Then, the column and the clamping member B are slid along the first guide rail G1 toward the outside of the slot to separate the two. In the process of clamping and separating, the clamping member B is placed in the first guide rail G1 and the second guide rail G2, which can not only enhance the guiding performance of the movement, but also ensure the stability of the connection between the column and the slot during clamping.

[0050] It should be noted that the number and position distribution of the first guide rail G1 and the second guide rail G2 depends on the number and position distribution of the clamping parts B. For example, when the number of the clamping parts B is 1, only one first guide rail G1 and one second guide rail G2 are required, and the two guide rails are connected. Figure 3 and Figure 4 As shown, they are arranged linearly along the axial direction of the column, then only one first guide rail G1 and the same number of second guide rails G2 as the clamping parts B need to be set in the slot body. And the spacing distribution of each second guide rail G2 in the axial direction of the slot body is consistent with the spacing distribution of each clamping part B in the axial direction of the column; and all the second guide rails G2 are connected to the first guide rail G1. If each clamping part B is arranged linearly along the circumference of the column, then the slot body needs to be provided with the same number of first guide rails G1 as the clamping parts B, and the spacing distribution of each first guide rail G1 in the circumference of the slot body is consistent with the spacing distribution of each clamping part B in the circumference of the column; and one second guide rail G2 is provided, and all the first guide rails G1 are connected to the second guide rail G2. If each clamping part B is arranged in an array or other discrete arrangement on the surface of the column, the first guide rail G1 and the second guide rail G2 can be set accordingly with reference to the above two linear arrangements.

[0051] In another example, Figure 5As shown, the clamping member B is an elastic protruding structure and can be extended and retracted along the radial direction of the column. And, the inner surface of the groove body has a plurality of third guide rails G3 extending along the circumference of the groove body. The third guide rail G3 is a concave guide rail and is adapted to the morphology of the clamping member B. Wherein, when the column extends into or out of the groove body, the clamping member B is in a compressed state; under the drive of the driving part 1012a, when the column rotates relative to the groove body, the clamping member B slides along the third guide rail G3. Further, in order to ensure the stability of the connection between the column and the groove body and the convenience of separation, the third guide rail G3 is a variable cross-section guide rail. That is, along the extension direction of the third guide rail G3, the radial cross-sectional size of the third guide rail G3 is variable. Preferably, along the clamping rotation direction, the degree of depression of the third guide rail G3 increases; that is, along the separation rotation direction, the degree of depression of the third guide rail G3 decreases. Based on this, when the column rotates relative to the slot body along the engaging rotation direction, the extrusion effect on the clamping part B decreases, and the clamping part B is in an elongated state, and the elongation deformation increases, which is conducive to improving the connection stability between the column and the slot body. When the column rotates relative to the slot body along the separating rotation direction, the extrusion effect on the clamping part B increases, and the clamping part B is in a compressed state, and the compression deformation increases, which is conducive to reducing the resistance of the column in the process of separating from the slot body.

[0052] Assume that the engaging rotation direction is clockwise, and the separating rotation direction is counterclockwise. The process of engaging the column with the slot body is as follows: first, the column is brought close to the slot body and extends into the slot body, and under the pressure of the inner wall of the slot body, the clip B on the column is in a compressed state, and the compression deformation is the largest. When the clip B extends into the third guide rail G3 in the slot body along with the column, the column and the clip B are rotated along the third guide rail G3 in a clockwise direction, and the extrusion force on the clip B decreases, and its elongation deformation increases until it reaches the maximum elongation deformation, thereby achieving the engaging of the two. The process of separating the column from the slot body is as follows: first, the column and the clip B are rotated along the third guide rail G3 in a counterclockwise direction, and the extrusion force on the clip B increases, and its compression deformation increases until it reaches the maximum compression deformation. Then the column is moved axially to separate from the slot body, thereby separating the two. Further, the number and arrangement distribution of the third guide rails G3 also depend on the number and arrangement distribution of the clamping members B, and reference may be made to the above description of the second guide rail G2.

[0053] In another exemplary embodiment, the interface portion 1012b is threadedly connected to the second connecting member 1022. Figure 6 As shown in FIG. 1 , the interface portion 1012b is a column, and the second connecting member 1022 is a slot. Figure 7 As shown, the interface portion 1012b is a slot body, and the second connecting member 1022 is a column. The outer surface of the column has a first rotating thread S1, and the inner surface of the slot has a second rotating thread S2 that matches the first rotating thread S1. Driven by the driving portion 1012a, the column and the slot body rotate relative to each other, and the first rotating thread S1 and the second rotating thread S2 engage or separate with each other, so that the column and the slot body are threadedly connected or separated, and the column can extend into or out of the slot body, thereby realizing the connection or separation of the arm unit 101 and the finger unit 102. Assume that the engaging rotation direction is clockwise and the separating rotation direction is counterclockwise. The driving part 1012a drives the column to rotate clockwise relative to the slot body, so that the two are connected via threads, and the arm unit 101 and the finger unit 102 are connected; the driving part 1012a drives the column to rotate counterclockwise relative to the slot body, so that the column and the slot body are separated, and the arm unit 101 and the finger unit 102 are separated.

[0054] Furthermore, the manipulator 10 also includes a positioning unit. The positioning unit is arranged on the arm unit 101 and / or the finger unit 102, and is used to detect the relative position of the first connecting member 1012 and the second connecting member 1022. Preferably, the positioning unit includes a position sensor, and the present embodiment does not limit the type, quantity and distribution of the position sensor. Exemplarily, the position sensor is a photoelectric position sensor, and the photoelectric position sensor is arranged on the surface of the support arm 1011b connected to the first connecting member 1012, so as to play a positioning role when the first connecting member 1012 and the second connecting member 1022 are connected or separated, thereby ensuring that the connection position of the first connecting member 1012 and the second connecting member 1022 is accurate.

[0055] In summary, the manipulator 10 provided in this embodiment utilizes the connection relationship between the interface portion 1012b in the first connector 1012 and the second connector 1022 to realize the detachable connection between the arm unit 101 and the finger unit 102, and utilizes the driving portion 1012a in the first connector 1012 to realize the automatic disassembly and connection between the arm unit 101 and the finger unit 102. Compared with the manual disassembly method, the automatic positioning disassembly not only has high operating efficiency and high precision, but also has low pollution and damage to the manipulator 10 and the target object, which is conducive to extending the service life of the device.

[0056] Based on the same concept, this embodiment also provides a robot system. Figure 1 and Figure 8, the manipulator system includes the manipulator 10 and a storage box 20. The storage box 20 is used to store at least one of the finger units 102. Among them, the storage box 20 includes a box body 201 and a carrier 202. The box body 201 has an inner cavity, and the carrier 202 is arranged in the inner cavity for storing the finger unit 102. Preferably, the inner cavity is divided into a plurality of areas, each of which is used to store a type of the finger unit 102, and different areas are used to store different types of the finger units 102. Based on this, the manipulator 10 can choose to connect different types of the finger units 102 in the storage box 20 to meet the transmission requirements of different types and / or quantities of the target objects. Preferably, during the process, the storage box 20 can be installed in the equipment front end module (Equipment Front End Module, EFEM).

[0057] It should be noted that the different types of finger units 102 described in this embodiment refer to different types and / or quantities of target objects that can be transmitted by the finger units 102. For example, the target object is a wafer, and the inner cavity is divided into four areas, namely the first area R1, the second area R2, the third area R3 and the fourth area R4. One type of finger unit 102 is stored in each area. Among them, the finger unit 102 stored in the first area R1 is used to transmit 8-inch wafers with a thickness of 725mm to 775mm; the finger unit 102 stored in the second area R2 is used to transmit 12-inch wafers with a thickness of 775mm to 875mm; the finger unit 102 stored in the third area R3 is used to transmit wafers with a thickness of about 500mm; and the finger unit 102 stored in the fourth area R4 is used to transmit thin wafers with iron rings on the periphery. Among them, this embodiment does not limit the number and size of the areas divided in the box 201, nor does it limit the specific types of the finger units 102 stored in each area. Furthermore, there may be one or more finger units 102 stored in each of the areas, so that one or more arm units 101 can replace the finger units 102 .

[0058] Preferably, each of the areas and the finger units 102 in each of the areas are provided with corresponding labels, so that the arm unit 101 can accurately locate the position of the finger unit 102 to be replaced. Exemplarily, the storage box 20 includes areas A to G, and the finger units 102 in each area are stored from top to bottom in the order of numbers 1 to 10. Now the arm unit 101 needs to replace the connected finger unit 102 with serial number 1 in area F with the finger unit 102 with serial number 3 in area C. After the controller corresponding to the manipulator 10 receives the instruction, the drive component 1011a drives the arm body 1011b to drive the finger unit 102 to move to position 1 in area F in the storage box 20. After the positioning unit locates the storage position of the finger unit 102, the driving unit 1012a drives the interface unit 1012b to rotate to the unlocking position, and the second connecting member 1022 is separated from the interface unit 1012b, that is, the finger unit 102 is separated from the arm unit 101, and the finger unit 102 is stored in the F area No. 1 position in the storage box 20. Then, the driving component 1011a drives the arm body 1011b to move to the C area No. 3 position in the storage box 20, and after the positioning unit locates the positions of the finger unit 102 and the arm unit 101, the driving component 1011a moves toward the finger unit 102 by a set distance, so that the interface unit 1012b and the second connecting member 1022 of the finger unit 102 are nested. Finally, the driving part 1012a rotates to the locking position, and the interface part 1012b is connected to the second connecting member 1022, that is, the finger unit 102 is connected to the arm unit 101, and the automatic replacement of the finger unit 102 is completed. It can be seen that in the process of replacing the finger unit 102, only the target object information to be transmitted or the position information of the finger unit 102 to be replaced needs to be manually input to realize automatic replacement, which not only has high replacement efficiency and low error rate, but also facilitates the maintenance of the finger unit 102, so as to reduce the depreciation rate of the finger unit 102 and extend the service life of the device.

[0059] In summary, the manipulator 10 and manipulator system provided in this embodiment utilize the connection relationship between the interface part 1012b in the first connector 1012 and the second connector 1022 to realize the detachable connection between the arm unit 101 and the finger unit 102, and utilize the driving part 1012a in the first connector 1012 to realize the automatic disassembly and connection between the arm unit 101 and the finger unit 102. In addition, based on one or more finger units 102 stored in the storage box 20, the arm unit 101 can be automatically replaced with different types of finger units 102. Compared with the manual replacement method, the automatic replacement not only has high operating efficiency and high precision, but also has low pollution and damage to the manipulator 10 and the target object, which is conducive to extending the service life of the device, and there is no need to strictly require the collective transfer of targets of the same category. It can also flexibly deal with the targets temporarily added in the transmission sequence, which helps to improve the process preparation efficiency.

[0060] In addition, it should be recognized that although the present invention has been disclosed as a preferred embodiment, the above embodiment is not intended to limit the present invention. For any technician familiar with the art, without departing from the scope of the technical solution of the present invention, the above disclosed technical content can be used to make many possible changes and modifications to the technical solution of the present invention, or modified into equivalent embodiments of equivalent changes. Therefore, any simple modification, equivalent change and modification made to the above embodiment based on the technical essence of the present invention without departing from the content of the technical solution of the present invention still falls within the scope of protection of the technical solution of the present invention.

Claims

1. A robot, characterized in that: include: Arm unit and finger unit; The arm unit includes an arm body and a first connecting member; the first connecting member is arranged at one end of the arm body, and the first connecting member has a driving part so that the first connecting member can rotate relative to the arm body; The finger unit includes a finger body and a second connecting member; the second connecting member is arranged at one end of the finger body, and the second connecting member is adapted to the first connecting member in shape so that the first connecting member and the second connecting member are connected or separated at least under the rotation of the first connecting member.

2. The robot according to claim 1, characterized in that: The first connecting member also has an interface portion; the interface portion, the driving portion and one end of the arm body are connected in sequence, and under the drive of the driving portion, the interface portion can rotate relative to the arm body; Furthermore, the interface portion is adapted to the morphology of the second connecting member, so that at least when the interface portion is rotated, the interface portion is connected to or separated from the second connecting member.

3. The robot according to claim 2, characterized in that: The interface part is a column, and the second connecting member is a slot; or the interface part is a slot, and the second connecting member is a column; In which, the outer surface of the column has a plurality of clips, and the inner surface of the slot body has a plurality of first guide rails and a plurality of second guide rails; the first guide rail extends along the axial direction of the slot body, and the clip can slide along the corresponding first guide rail so that the column extends into or out of the slot body; the second guide rail is connected to at least one of the first guide rails, and the second guide rail extends along the circumference of the slot body, so that when the column rotates relative to the slot body under the drive of the driving part, the clip can slide along the corresponding second guide rail; and when the clip slides relative to the second guide rail in a direction away from the first guide rail, the column is clipped with the slot body; when the clip slides relative to the second guide rail in a direction close to the first guide rail, the column is separated from the slot body.

4. The robot according to claim 2, characterized in that: The interface part is a column, and the second connecting member is a slot; or the interface part is a slot, and the second connecting member is a column; In which, the outer surface of the column has a plurality of clips, and the inner surface of the slot body has a plurality of third guide rails; the clips are elastic and can be extended and retracted along the radial direction of the column; and when the column extends into or out of the slot body, the clips are in a compressed state; the third guide rails extend along the circumference of the slot body, and under the drive of the driving part, when the column rotates relative to the slot body, the clips slide along the third guide rails; and the third guide rails are variable-section guide rails, so that when the column is engaged and rotated relative to the slot body, the clips are in an elongated state, and the elongation deformation amount increases; when the column is separated and rotated relative to the slot body, the clips are in a compressed state, and the compression deformation amount increases.

5. The robot according to claim 2, characterized in that: The interface part is a column, and the second connecting member is a slot; or the interface part is a slot, and the second connecting member is a column; Among them, the outer surface of the column has a first rotating thread, the inner surface of the groove has a matching second rotating thread, and the column can extend into or out of the groove, and under the drive of the driving part, the column and the groove rotate relative to each other so that the column and the groove are threadedly connected or separated.

6. The robot according to claim 1, characterized in that: The manipulator further includes a positioning unit; the positioning unit is disposed on the arm unit and / or the finger unit, and is used to detect the relative position of the first connecting member and the second connecting member.

7. The robot according to claim 1, characterized in that: The arm body comprises a connected driving assembly and a supporting arm; the driving assembly is used to drive the supporting arm to move along at least one degree of freedom, and the supporting arm is connected to the first connecting member and is at least used to support the finger unit; The finger body has a bearing portion and a connecting portion connected to each other; the bearing portion is used to bear and / or clamp a target object, and the connecting portion is connected to the second connecting member and is used to connect to the arm unit; Furthermore, the driving assembly and the driving portion both include a motor.

8. A robot system, characterized in that: include: The manipulator and storage box according to any one of claims 1 to 7; the storage box has an inner cavity, and a carrier is accommodated in the inner cavity, and the carrier is used to store at least one finger unit; as well as, At least under the drive of the driving unit, the arm unit can be connected to or separated from the finger unit in the storage box to switch the use of the finger unit.

9. The robot system according to claim 8, characterized in that: The storage box stores a plurality of the finger units, and the finger units of different types are used to transfer targets of different types and / or different quantities.

10. The robot system according to claim 8 or 9, characterized in that: The inner cavity of the storage box is divided into a plurality of areas; each area is used to store one type of the finger unit, and different areas are used to store different types of the finger units.

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