Deviation-rectifying telescopic runway

Abstract

The utility model discloses a deviation-rectifying telescopic runway, which relates to the technical field of silicon wafer processing and comprises a base, a first driving component, a second driving component and two conveying components are arranged on the top surface of the base, each conveying component comprises a fixed seat, a sliding seat and a conveying belt, the conveying belt is sleeved on the fixed seat and the sliding seat, and the first driving component and the second driving component are arranged on the base. The first driving assembly is used for driving the two sliding bases to be away from or close to the fixed base so that the conveying distance of the conveying belt can be lengthened or shortened, and the second driving assembly is used for driving the conveying belt to move. When the conveying device is used and the conveying stroke needs to be adjusted, if the stroke is lengthened, the first driving assembly drives the two sliding seats to be far away from the corresponding fixed seats, so that the conveying stroke of the conveying belt is lengthened; if the stroke is shortened, the first driving assembly drives the two sliding seats to be close to the corresponding fixing seats, so that the conveying stroke of the conveying belt is shortened accordingly, different silicon wafer conveying requirements are met, the adaptability is good, and the occupied space is small.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer processing, in particular to a deviation-correcting telescopic runway. Background Art

[0002] Silicon is refined from quartz sand. Silicon wafers are purified silicon elements. Then the pure silicon is made into silicon crystal rods, which become the material of quartz semiconductors for manufacturing integrated circuits. With the development of large-scale integrated circuits, silicon wafers are widely used as the main substrate material for semiconductors and other electronic products.

[0003] Conveying devices are often used to transport or transfer silicon wafers. However, for some places where the conveying distance needs to be extended, traditional conveying devices adjust the conveying distance by increasing the conveying length of a single conveying device or adding parallel conveying lines or using a robot. However, increasing the conveying length of a single conveying device and increasing the length of the parallel conveying lines have the problems of fixed installation and poor adaptability, and the use of a robot will make the structure complicated and occupy a large space.

[0004] In view of this, a deviation-correcting telescopic runway is urgently needed. Summary of the invention

[0005] In view of the problems existing in the prior art, the utility model solves the problems with the following technical structure.

[0006] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0007] A deviation-correcting telescopic runway comprises: a base, a top surface of which is provided with a first drive assembly, a second drive assembly and two conveying assemblies, the conveying assembly comprising a fixed seat, a sliding seat and a conveyor belt, the conveyor belt being sleeved on the fixed seat and the sliding seat, the first drive assembly being used for driving the two sliding seats away from or close to the fixed seat to extend or shorten the conveying distance of the conveyor belt, and the second drive assembly being used for driving the conveyor belt to move.

[0008] A further feature is that

[0009] The conveying assembly comprises two conveying belts, and the conveying belts are arranged on both sides of the fixed seat and the sliding seat.

[0010] The conveying assembly also includes a pulley assembly arranged on both sides of the fixed seat, the pulley assembly includes a power wheel and two first guide wheels arranged on the side of the power wheel away from the sliding seat, the two first guide wheels are arranged in a vertical direction, and the conveyor belt is wound around the side of the power wheel away from the first guide wheels and the side of the two first guide wheels away from the power wheel.

[0011] The sliding seat is provided with second guide wheels on both sides of one end away from the fixed seat, and the sliding seat is provided with tension wheels on both sides of one end close to the fixed seat. The conveying assembly also includes a support seat provided on one side of the top surface of the base away from the fixed seat, and third guide wheels are provided on both sides of the support seat;

[0012] The conveyor belt is wound around a side of the tensioning wheel away from the second guide wheel, a side of the second guide wheel away from the tensioning wheel, and a side of the third guide wheel away from the tensioning wheel.

[0013] The second driving assembly includes a first motor and a synchronous shaft coaxially arranged at the output end of the first motor, and the synchronous shaft is coaxially connected to the power wheels of the two conveying assemblies.

[0014] The first driving assembly comprises a cylinder arranged on a base and a synchronization plate arranged at an output end of the cylinder, and the synchronization plate is connected to two sliding seats.

[0015] It also includes a correcting assembly, which includes two correcting plate assemblies and a third driving assembly. Each of the correcting plate assemblies includes two correcting plates respectively arranged on both sides of the corresponding conveying assembly. The third driving assembly is used to drive the two correcting plates of the same correcting plate assembly to move away or approach synchronously.

[0016] The third driving assembly includes a mounting plate, a second motor, a belt, a driving wheel and a driven wheel, wherein the mounting plate is placed below the two conveying assemblies, the second motor and the driven wheel are placed on both sides of the mounting plate, the driving wheel is arranged at the output end of the second motor, and the belt is sleeved on the driving wheel and the driven wheel;

[0017] The belt forms an upper belt and a lower belt which are parallel to each other. The correcting plates on the same side of the two correcting plate assemblies are connected to the upper belt, and the correcting plates on the other side of the two correcting plate assemblies are connected to the lower belt.

[0018] A correction plate is horizontally arranged on the top of the deviation-correcting plate, and a plurality of correction rods are arranged on the top surface of the correction plate.

[0019] A slot-type optical coupler is arranged on the installation plate, and a photoelectric baffle adapted to the slot-type optical coupler is arranged on one of the deviation-correcting plates.

[0020] The above structure of the utility model can achieve the following beneficial effects:

[0021] When in use, the second drive component drives the conveyor belt to move to transport materials. When the conveying stroke needs to be adjusted, if the stroke is to be extended, the first drive component drives the two sliding seats away from the corresponding fixed seats, so that the conveying stroke of the conveyor belt is lengthened; if the stroke is to be shortened, the first drive component drives the two sliding seats close to the corresponding fixed seats, so that the conveying stroke of the conveyor belt is shortened. This meets different silicon wafer transportation needs, has good adaptability, and occupies less space. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a structural schematic diagram of this embodiment;

[0023] Figure 2 Schematic diagram of the structure of two conveying components in this embodiment;

[0024] Figure 3 Schematic diagram of the structure of the correction component in this embodiment;

[0025] Figure 4 Schematic diagram of the structure of the correction component in this embodiment from another perspective.

[0026] In the figure: 1. base; 2. fixed seat; 3. sliding seat; 31. second guide wheel; 32. tensioning wheel; 4. conveyor belt; 5. pulley assembly; 51. power wheel; 52. first guide wheel; 6. support seat; 61. third guide wheel; 7. first motor; 71. synchronous shaft; 8. cylinder; 81. synchronous plate; 9. correction assembly; 91. correction plate; 92. mounting plate; 93. second motor; 94. belt; 95. driving wheel; 96. driven wheel; 97. correction rod; 98. slotted optical coupler; 99. photoelectric baffle. DETAILED DESCRIPTION

[0027] In order to enable those skilled in the art to better understand the solution of the utility model, the technical solution in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is only a part of the embodiment of the utility model, not all of the embodiments. Based on the embodiment of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the utility model.

[0028] It should be noted that the terms "including" and "having" and any variations of them in the specification and claims of the present invention and the above-mentioned drawings are intended to cover non-exclusive inclusions. For example, a process, method, apparatus, product or equipment that includes a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or equipment.

[0029] The following is combined with Figure 1-4 This application is described in further detail.

[0030] refer to Figure 1-2 The shown one kind of deviation-correcting telescopic runway comprises: a base 1, a first driving assembly, a second driving assembly and two conveying assemblies are arranged on the top surface of the base 1, the conveying assembly comprises a fixed seat 2, a sliding seat 3 and a conveyor belt 4, the conveyor belt 4 is sleeved on the fixed seat 2 and the sliding seat 3, the first driving assembly is used to drive the two sliding seats 3 away from or close to the fixed seat 2, so that the conveying distance of the conveyor belt 4 is extended or shortened, and the second driving assembly is used to drive the conveyor belt 4 to move, so that when in use, the second driving assembly drives the conveyor belt 4 to move to transport materials. When the conveying stroke needs to be adjusted, if it is to lengthen the stroke, the first driving assembly drives the two sliding seats 3 away from the corresponding fixed seat 2, so that the conveying stroke of the conveyor belt 4 is lengthened accordingly; if it is to shorten the stroke, the first driving assembly drives the two sliding seats 3 close to the corresponding fixed seat 2, so that the conveying stroke of the conveyor belt 4 is shortened accordingly, which meets different silicon wafer conveying requirements, has good adaptability, and occupies less space.

[0031] refer to Figure 1-2 As shown, in order to improve the stability of transportation, the transportation assembly includes two conveyor belts 4, and the conveyor belts 4 are arranged on both sides of the fixed seat 2 and the sliding seat 3, and the silicon wafers are placed above the conveyor belts 4 for transportation.

[0032] refer to Figure 1-2 As shown, the specific installation structure of the conveyor belt 4 on the fixed seat 2 is: the conveying component also includes a pulley assembly 5 arranged on both sides of the fixed seat 2, the pulley assembly 5 includes a power wheel 51 and two first guide wheels 52 arranged on the side of the power wheel 51 away from the sliding seat 3, the two first guide wheels 52 are arranged in the vertical direction, and the conveyor belt 4 is wound around the side of the power wheel 51 away from the first guide wheels 52 and the side of the two first guide wheels 52 away from the power wheel 51, so that the two conveyor belts 3 of a conveying component are respectively installed on the two pulley assemblies 5, and the two first guide wheels 52 of the same pulley assembly 5 guide the movement of the conveyor belt 4, wherein the second driving assembly includes a first motor 7 and a synchronous shaft 71 coaxially arranged at the output end of the first motor 7, the synchronous shaft 71 is coaxially connected to the power wheels 51 of the two conveying assemblies, so that the first motor 7 drives the four power wheels 51 to rotate synchronously, so that the four conveyor belts 3 move synchronously.

[0033] refer to Figure 1-2As shown, second guide wheels 31 are provided on both sides of the end of the sliding seat 3 away from the fixed seat 2, and tensioning wheels 32 are provided on both sides of the end of the sliding seat 3 close to the fixed seat 2. The conveying assembly also includes a support seat 6 arranged on the side of the top surface of the base 1 away from the fixed seat 2, and third guide wheels 61 are provided on both sides of the support seat 6; the conveyor belt 4 is wound around the side of the tensioning wheel 32 away from the second guide wheel 31, the side of the second guide wheel 31 away from the tensioning wheel 32, and the side of the third guide wheel 61 away from the tensioning wheel 32. In this way, when the sliding seat 3 moves away from the fixed seat 2, the tensioning wheel 32 approaches the third guide wheel 61, and the second guide wheel 31 moves away from the first guide wheel 52, so that the conveying stroke of the conveyor belt 4 is lengthened; when the sliding seat 3 moves close to the fixed seat 2, the tensioning wheel 32 moves away from the third guide wheel 61, and the second guide wheel 31 approaches the first guide wheel 52, so that the conveying stroke of the conveyor belt 4 is shortened.

[0034] refer to Figure 1-2 As shown, in order to maintain the synchronization of the two conveying components, the first driving component includes a cylinder 8 arranged on the base 1 and a synchronization plate 81 arranged at the output end of the cylinder 8, and the synchronization plate 81 is connected to the two sliding seats 3. In this way, the cylinder 8 drives the synchronization plate 81 to move to the side away from or close to the fixed seat 2, so that the two sliding seats 3 are synchronously away from or close to the fixed seat 2, and two silicon wafers can be operated at the same time, thereby improving the processing efficiency. The two sliding seats 3 can be installed on the base 1 through slide rails.

[0035] refer to Figure 1-4As shown, in order to adjust the position of the silicon wafer on the conveying assembly, the device also includes a correcting assembly 9, which includes two correcting plate assemblies and a third driving assembly. Each correcting plate assembly includes two correcting plates 91 respectively arranged on both sides of the corresponding conveying assembly. The third driving assembly is used to drive the two correcting plates 91 of the same correcting plate assembly to move away or approach synchronously. In this way, the two correcting plate assemblies are driven to work at the same time by the third driving assembly (the two correcting plates 91 of the same correcting plate assembly move away or approach synchronously). When the two correcting plates 91 of the same correcting plate assembly approach synchronously, the silicon wafer is always placed in the same position on the conveyor belt 4, so that the positions of the silicon wafers on the two conveying assemblies are corrected, thereby improving the accuracy of silicon wafer processing. The specific structure of the driving component may include a mounting plate 92, a second motor 93, a belt 94, a driving wheel 95 and a driven wheel 96. The mounting plate 92 is placed under the two conveying components, the second motor 93 and the driven wheel 96 are placed on both sides of the mounting plate 92, the driving wheel 95 is arranged at the output end of the second motor 93, and the belt 94 is sleeved on the driving wheel 95 and the driven wheel 96; the belt 94 forms an upper belt and a lower belt parallel to each other, the deflection correcting plate 91 on the same side of the two deflection correcting plate assemblies is connected to the upper belt, and the deflection correcting plate 91 on the other side of the two deflection correcting plate assemblies is connected to the lower belt, so that the second motor 93 drives the driving wheel 95 to rotate, so that the belt moves, and the two deflection correcting plates 91 of the same deflection correcting plate assembly move in opposite directions and synchronously, so as to achieve the effect of straightening the silicon wafer.

[0036] refer to Figure 3-4 As shown, in order to ensure the accuracy of alignment, a correction plate is horizontally arranged on the top of the correction plate 91, and a plurality of correction rods 97 are arranged on the top surface of the correction plate. In this way, the plurality of correction rods 97 on each correction plate 91 are distributed in a straight line (the arrangement direction is the conveying direction). When the silicon wafer is aligned, the plurality of correction rods 97 contact the edge of the silicon wafer, so that the silicon wafer moves to the aligned posture.

[0037] refer to Figure 3-4 As shown, in order to accurately detect the position of the correction plate 91, a slot-type optical coupler 98 is provided on the mounting plate 92, and a photoelectric baffle 99 adapted to the slot-type optical coupler 98 is provided on one of the correction plates 91. When the slot-type optical coupler 98 detects the photoelectric baffle 99 (the photoelectric baffle 99 is placed in the slot-type optical coupler 98), the correction plate 91 reaches the specified position.

[0038] In summary, when in use, the second drive component drives the conveyor belt 4 to move to transport materials. When the conveying stroke needs to be adjusted, if the stroke is to be lengthened, the first drive component drives the two sliding seats 3 away from the corresponding fixed seats 2, so that the conveying stroke of the conveyor belt 4 is lengthened accordingly; if the stroke is to be shortened, the first drive component drives the two sliding seats 3 close to the corresponding fixed seats 2, so that the conveying stroke of the conveyor belt 4 is shortened accordingly, thereby meeting different silicon wafer transportation requirements, having good adaptability, and occupying less space.

[0039] And the present application can be applied to taking and placing silicon wafers in a flower basket. When in use, the silicon wafer is inserted into the silicon wafer flower basket tooling, and then the silicon wafer is transferred and taken out. The silicon wafer is inserted into the silicon wafer flower basket tooling, and the silicon wafer is transferred and stored. After the transfer, the silicon wafer is retracted. When taking out and storing, deviation correction and positioning can also be performed.

[0040] The above are only preferred embodiments of the present application, and the present invention is not limited to the above embodiments. It is understood that other improvements and changes directly derived or associated by those skilled in the art without departing from the spirit and concept of the present invention should be considered to be included in the protection scope of the present invention.

Claims

1. A deviation-correcting telescopic runway, characterized in that: include: A base (1), wherein a first driving assembly, a second driving assembly and two conveying assemblies are arranged on the top surface of the base (1), wherein the conveying assembly comprises a fixed seat (2), a sliding seat (3) and a conveyor belt (4), wherein the conveyor belt (4) is sleeved on the fixed seat (2) and the sliding seat (3), wherein the first driving assembly is used for driving the two sliding seats (3) to move away from or close to the fixed seat (2) so as to extend or shorten the conveying distance of the conveyor belt (4), and wherein the second driving assembly is used for driving the conveyor belt (4) to move.

2. The deviation-correcting telescopic runway according to claim 1, characterized in that: The conveying assembly comprises two conveying belts (4), and the conveying belts (4) are arranged on both sides of the fixed seat (2) and the sliding seat (3).

3. The deviation-correcting telescopic runway according to claim 2, characterized in that: The conveying assembly further comprises a pulley assembly (5) arranged on both sides of the fixed seat (2), the pulley assembly (5) comprising a power wheel (51) and two first guide wheels (52) arranged on a side of the power wheel (51) away from the sliding seat (3), the two first guide wheels (52) being arranged in a vertical direction, and the conveying belt (4) is wound around a side of the power wheel (51) away from the first guide wheels (52) and a side of the two first guide wheels (52) away from the power wheel (51).

4. The deviation-correcting telescopic runway according to claim 3, characterized in that: Second guide wheels (31) are arranged on both sides of one end of the sliding seat (3) away from the fixed seat (2), and tension wheels (32) are arranged on both sides of one end of the sliding seat (3) close to the fixed seat (2), and the conveying assembly also includes a support seat (6) arranged on the top surface of the base (1) away from the fixed seat (2), and third guide wheels (61) are arranged on both sides of the support seat (6); The conveyor belt (4) is wound around a side of the tensioning wheel (32) away from the second guide wheel (31), a side of the second guide wheel (31) away from the tensioning wheel (32), and a side of the third guide wheel (61) away from the tensioning wheel (32).

5. The deviation-correcting telescopic runway according to claim 3, characterized in that: The second driving assembly comprises a first motor (7) and a synchronizing shaft (71) coaxially arranged at the output end of the first motor (7), and the synchronizing shaft (71) is coaxially connected to the power wheels (51) of the two conveying assemblies.

6. The deviation-correcting telescopic runway according to claim 1, characterized in that: The first driving assembly comprises a cylinder (8) arranged on a base (1) and a synchronization plate (81) arranged at an output end of the cylinder (8), wherein the synchronization plate (81) is connected to two sliding seats (3).

7. The deviation-correcting telescopic runway according to claim 1, characterized in that: It also includes a deflection correction component (9), which includes two deflection correction plate components and a third driving component. Each of the deflection correction plate components includes two deflection correction plates (91) respectively arranged on both sides of the corresponding conveying component. The third driving component is used to drive the two deflection correction plates (91) of the same deflection correction plate component to move away from or approach each other synchronously.

8. The deviation-correcting telescopic runway according to claim 7, characterized in that: The third driving assembly comprises a mounting plate (92), a second motor (93), a belt (94), a driving wheel (95) and a driven wheel (96); the mounting plate (92) is placed below the two conveying assemblies; the second motor (93) and the driven wheel (96) are placed on both sides of the mounting plate (92); the driving wheel (95) is arranged at the output end of the second motor (93); and the belt (94) is sleeved on the driving wheel (95) and the driven wheel (96); The belt (94) forms an upper belt and a lower belt which are parallel to each other. The correcting plate (91) on the same side of the two correcting plate assemblies is connected to the upper belt, and the correcting plate (91) on the other side of the two correcting plate assemblies is connected to the lower belt.

9. The deviation-correcting telescopic runway according to claim 7, characterized in that: A correction plate is horizontally arranged on the top of the deviation-correcting plate (91), and a plurality of correction rods (97) are arranged on the top surface of the correction plate.

10. The deviation-correcting telescopic runway according to claim 8, characterized in that: A slot-type optical coupler (98) is arranged on the mounting plate (92), and a photoelectric baffle (99) adapted to the slot-type optical coupler (98) is arranged on one of the deviation correcting plates (91).

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