Coating device

Abstract

The utility model provides a coating device, which belongs to the technical field of vacuum coating and comprises a device body, a winding and unwinding mechanism, a magnetron sputtering mechanism and an electron beam evaporation mechanism. A vacuum chamber is arranged in the equipment main body, and the vacuum chamber is divided into a first process cavity and a second process cavity through a process roller and a partition plate; the winding and unwinding mechanism is arranged in an area above the process roller and comprises two winding and unwinding rollers capable of rotating in two directions; the magnetron sputtering mechanism is arranged in the first process cavity and is used for carrying out sputtering coating on the base material; the electron beam evaporation mechanism is arranged at the bottom of the second process cavity, an evaporation coating material is attached to a base material on the process rollers, the winding and unwinding rollers rotate in the two directions to achieve winding and unwinding of the base material in the two directions, repeated coating can be conducted, the whole coating process is achieved in a small space, and a sample test can be conveniently conducted. According to the coating device provided by the utility model, the problems of material waste and extremely high verification cost caused by processing by adopting mass production equipment in the prior art are solved.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating, in particular to a coating device. Background Art

[0002] At present, vacuum coating equipment is increasingly used in industry, among which magnetron sputtering evaporation is widely used due to its relatively low cost and wide application range. As the new energy battery industry's requirements for lithium battery efficiency continue to increase, the demand for ultra-thin copper foil increases. The PET composite copper foil commonly used in the existing technology can be mass-produced in an extremely thin manner. The biggest challenge for the application of PET composite copper foil in new energy batteries is the requirement that the film material does not deform, has good uniformity, and has no perforations. Before the mass production of PET composite copper foil, due to the increasing requirements of film material users for materials, verification is often required and parameters are adjusted multiple times, so more tests are required to verify the amount of copper, evaporation power, winding speed, tension, etc.

[0003] In the prior art, mass production equipment is usually used for testing. Mass production equipment is not only large in size and consumes a lot of raw materials, but also has many chambers that need to be vacuumed and require a lot of power for evaporation, which results in a huge waste of energy and extremely high costs for the company.

[0004] The existing technology lacks small-scale experimental equipment for small-batch copper foil coating, and directly using mass production equipment for processing results in serious material waste and extremely high verification costs. Utility Model Content

[0005] Therefore, the technical problem to be solved by the present invention is to overcome the problems of material waste and extremely high verification costs caused by mass production equipment processing in the prior art, thereby providing a coating device.

[0006] In order to solve the above technical problems, the utility model provides a coating device, comprising:

[0007] An equipment body, wherein a vacuum chamber is arranged inside the equipment body, a process roller is arranged inside the vacuum chamber, a partition is arranged along the axial direction of the process roller, and the partition and the process roller divide the vacuum chamber into a first process chamber and a second process chamber;

[0008] A reeling and unreeling mechanism is arranged in the upper area of ​​the process roller, the reeling and unreeling mechanism is used to convey the substrate, and the reeling and unreeling mechanism includes two reeling and unreeling rollers that can rotate in both directions;

[0009] A magnetron sputtering mechanism is arranged in the first process chamber, a target material of the magnetron sputtering mechanism is arranged at a distance from the process roller, and a gap between the target material and the process roller is suitable for the substrate to pass through;

[0010] The electron beam evaporation mechanism is arranged at the bottom of the second process chamber.

[0011] Optionally, at least one guide roller is provided on the conveying path of the unwinding and winding roller and the process roller, and the guide roller is arranged in the area above the connecting line of the unwinding and winding roller and the process roller.

[0012] Optionally, three guide rollers are arranged on the transmission path of the rewinding roller and the process roller, the first and second guide rollers are arranged on the same horizontal plane, the heights of the first and second guide rollers are higher than the rewinding roller, the height of the third guide roller is lower than the rewinding roller, and the three guide rollers are successively away from the rewinding roller in the horizontal direction.

[0013] Optionally, the electron beam evaporation mechanism comprises:

[0014] A crucible, arranged at the bottom of the second process chamber, the crucible facing the circumferential surface of the bottom of the process roller;

[0015] A wire feeding mechanism is arranged on one side of the crucible, and is used to feed the coating material into the crucible;

[0016] The electron gun is arranged on the side wall of the device body, and the front end of the electron gun is aligned with the crucible.

[0017] Optionally, a groove is provided on the outer side wall of the device body, the electron gun is arranged in the groove, and an incident hole is provided on the side wall of the groove, and the incident hole is suitable for the electric charges emitted by the electron gun to pass through.

[0018] Optionally, a chamber for accommodating a cooling medium is provided inside the process roller.

[0019] Optionally, a film thickness meter is provided on the partition, and a detection end of the film thickness meter faces the process roller.

[0020] Optionally, the device body includes:

[0021] A chamber body, wherein a cylindrical structure is arranged in the chamber body, an opening communicating with an external environment is arranged on the chamber body, and the magnetron sputtering mechanism and the electron beam evaporation mechanism are arranged in the chamber body;

[0022] A sealing door is movably arranged on the opening of the chamber body, the reeling and unreeling mechanism and the process roller are arranged on the sealing door, and the sealing door is assembled on the chamber body to form an internal vacuum chamber.

[0023] Optionally, a ventilation window is provided on an outer wall of the chamber body on a side away from the sealing door, and the ventilation window is communicated with the vacuum chamber.

[0024] Optionally, an ion source is also disposed in the chamber body.

[0025] The technical solution of the utility model has the following advantages:

[0026] 1. The coating device provided by the utility model has a partition and a process roller that divide the vacuum chamber in the main body of the device into a first process chamber and a second process chamber. The substrate to be coated is transferred to the process roller through a winding and unwinding mechanism. The electron beam evaporation mechanism in the second process chamber evaporates the coating material and adheres to the substrate on the process roller. The magnetron sputtering mechanism in the first process chamber sputters and coats the substrate passing between the target material and the process roller. The winding and unwinding rollers rotate in both directions, that is, the two winding and unwinding rollers can be used as winding rollers or unwinding rollers to achieve bidirectional winding and unwinding. The substrate can be reciprocated for multiple times and the entire coating process can be achieved in a relatively small space, which is convenient for small sample tests and reduces test costs and energy consumption. The coating device provided by the utility model solves the problem of material waste and extremely high verification costs caused by mass production equipment processing in the prior art.

[0027] 2. In the coating device provided by the utility model, the guide roller is arranged on the transmission path of the substrate between the reel-up and unreeling rollers and the process rollers, which can guide and tension the substrate, shorten the travel of the film, reduce the working time required by the equipment, and meet the test requirements.

[0028] 3. The coating device provided by the utility model has the functions of guiding, tensioning and relaxing the substrate by arranging three guide rollers on the transmission path of the substrate between the reel-up and unreeling rollers and the process rollers.

[0029] 4. In the coating device provided by the utility model, the wire feeding mechanism conveys the coating material into the crucible, the front end of the electron gun emits electric charge toward the crucible, and the coating material in the crucible evaporates and adheres to the substrate on the circumferential surface of the bottom of the process roller under the bombardment of the electric charge.

[0030] 5. The coating device provided by the utility model emits electric charge toward the crucible through the incident hole in the groove to achieve evaporation of the coating material. The electron gun is embedded in the groove installed on the outer wall of the equipment body, which can facilitate the inspection and maintenance of the electron gun.

[0031] 6. The coating device provided by the utility model cools the substrate by means of the cooling medium inside the process roller, which is beneficial to the formation of a coating on the surface of the substrate.

[0032] 7. The coating device provided by the utility model monitors the coating thickness on the substrate through the film thickness meter on the partition, thereby facilitating the control of the coating times.

[0033] 8. The coating device provided by the utility model has an equipment body arranged as a split structure of a chamber body and a sealing door, which can be easily repaired and maintained. When the sealing door is opened, it is convenient to replace the substrate on the rewinding mechanism and the process roller. When the sealing door is closed, it is locked and sealed to form a vacuum chamber inside the chamber body for the coating process.

[0034] 9. The coating device provided by the utility model can release the vacuum state in the vacuum chamber through the ventilation window to prevent the vacuum state from affecting the opening of the sealed door.

[0035] 10. The coating device provided by the utility model, the ion source arranged in the chamber body can improve the bonding strength between the coating and the substrate, as well as improve the hardness, wear resistance and corrosion resistance of the coating itself. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0037] Figure 1 A schematic diagram of an implementation of a coating device provided in an embodiment of the utility model.

[0038] Description of reference numerals:

[0039] 1. Equipment body; 2. Vacuum chamber; 3. First process chamber; 4. Second process chamber; 5. Process roller; 6. Partition; 7. Winding and unwinding mechanism; 8. Winding and unwinding roller; 9. Guide roller; 10. Target material; 11. Crucible; 12. Wire feeding mechanism; 13. Electron gun; 14. Film thickness meter; 15. Ion source; 16. Substrate. DETAILED DESCRIPTION

[0040] The technical solution of the utility model will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0041] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0042] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0043] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0044] This embodiment provides a structure of a coating device capable of performing a small sample test, which is used for coating the surface of a substrate 16 .

[0045] like Figure 1 As shown, a specific implementation of a coating device provided in this embodiment includes: an equipment body 1, a winding and unwinding mechanism 7, a magnetron sputtering mechanism and an electron beam evaporation mechanism; a vacuum chamber 2 is arranged inside the equipment body 1, a process roller 5 is arranged in the vacuum chamber 2, and a partition 6 is arranged along the axial direction of the process roller 5, and the partition 6 and the process roller 5 divide the vacuum chamber 2 into a first process chamber 3 and a second process chamber 4; the winding and unwinding mechanism 7 is arranged in the upper area of ​​the process roller 5, and the winding and unwinding mechanism 7 is used to convey the substrate 16, and the winding and unwinding mechanism 7 includes two bidirectionally rotatable winding and unwinding rollers 8; the magnetron sputtering mechanism is arranged in the first process chamber 3, and the target material 10 of the magnetron sputtering mechanism is arranged at an interval from the process roller 5, and the gap between the target material 10 and the process roller 5 is suitable for the substrate 16 to pass through; the electron beam evaporation mechanism is arranged at the bottom of the second process chamber 4.

[0046] When in use, the partition 6 and the process roller 5 divide the vacuum chamber 2 in the main body 1 of the device into a first process chamber 3 and a second process chamber 4. The substrate 16 to be coated is transferred to the process roller 5 through the reeling mechanism 7. The electron beam evaporation mechanism in the second process chamber 4 evaporates the coating material and adheres to the substrate 16 on the process roller 5. The magnetron sputtering mechanism in the first process chamber 3 sputters the substrate 16 passing between the target material 10 and the process roller 5. The reeling roller 8 rotates in both directions, that is, the two reeling rollers 8 can be used as both reeling rollers and unreeling rollers to achieve bidirectional winding and unwinding, and the substrate 16 can be reciprocated for multiple times. The whole coating process can be achieved in a small space, which is convenient for small sample testing and reduces test costs and energy consumption. The coating device provided in this embodiment solves the problem of material waste and extremely high verification costs caused by mass production equipment processing in the prior art.

[0047] like Figure 1 As shown, in the coating device provided in this embodiment, at least one guide roller 9 is provided on the transmission path between the reel 8 and the process roller 5, and the guide roller 9 is provided in the area above the connecting line between the reel 8 and the process roller 5. The guide roller 9 is provided on the transmission path of the substrate 16 from the reel 8 and the process roller 5, and can guide and tension the substrate 16. In addition, as an alternative embodiment, the guide roller 9 can also be omitted, and the substrate 16 is directly connected from the reel 8 to the process roller 5.

[0048] like Figure 1 As shown, in the coating device provided in this embodiment, three guide rollers 9 are arranged on the transmission path between the reel 8 and the process roller 5, the first and second guide rollers 9 are arranged on the same horizontal plane, the heights of the first and second guide rollers 9 are higher than the reel 8, the height of the third guide roller 9 is lower than the reel 8, and the three guide rollers 9 are successively away from the reel 8 in the horizontal direction, guiding, tensioning and relaxing the substrate 16, shortening the travel of the film, reducing the working time required by the equipment, and meeting the test requirements. In addition, as an alternative embodiment, the number and installation position of the guide rollers 9 can be adjusted according to actual design requirements.

[0049] like Figure 1As shown, in the coating device provided in this embodiment, the electron beam evaporation mechanism includes: a crucible 11, a wire feeding mechanism 12 and an electron gun 13; the crucible 11 is arranged at the bottom of the second process chamber 4, and the crucible 11 is directly opposite to the circumferential surface of the bottom of the process roller 5; the wire feeding mechanism 12 is arranged on one side of the crucible 11, and the wire feeding mechanism 12 is used to transport the coating material into the crucible 11; the electron gun 13 is arranged on the side wall of the device body 1, and the front end of the electron gun 13 is aligned with the crucible 11. The wire feeding mechanism 12 transports the coating material into the crucible 11, and the front end of the electron gun 13 emits electric charges toward the crucible 11. Under the bombardment of the electric charges, the coating material in the crucible 11 evaporates and adheres to the substrate 16 on the circumferential surface of the bottom of the process roller 5. Specifically, the wire feeding mechanism 12 includes a roller shaft and a wire feeding roller, and the coating material is wound on the roller shaft. The coating material is extracted and transported to the crucible 11 by the rotation of the wire feeding roller. The coating material is copper wire or aluminum wire, and other materials can also be used according to the coating requirements.

[0050] like Figure 1 As shown, in the coating device provided in this embodiment, a groove is provided on the outer wall of the device body 1, the electron gun 13 is arranged in the groove, and an incident hole is provided on the side wall of the groove, and the incident hole is suitable for the charge emitted by the electron gun 13 to pass through. The electron gun 13 can emit charges toward the crucible 11 through the incident hole in the groove to achieve evaporation of the coating material. The electron gun 13 is embedded in the groove installed on the outer wall of the device body 1, which can facilitate the inspection and maintenance of the electron gun 13. In addition, as an alternative embodiment, the electron gun 13 can also be installed on the inner wall of the device body 1.

[0051] like Figure 1 As shown, in the coating device provided in this embodiment, a chamber for accommodating a cooling medium is provided inside the process roller 5. The cooling medium inside the process roller 5 cools the substrate 16, which is beneficial to forming a coating on the surface of the substrate 16.

[0052] like Figure 1 As shown, in the coating device provided in this embodiment, a film thickness meter 14 is provided on the partition 6, and the detection end of the film thickness meter 14 is facing the process roller 5. The film thickness meter 14 on the partition 6 monitors the coating thickness on the substrate 16, so as to facilitate the control of the coating times. In addition, as an alternative embodiment, the film thickness meter 14 can be omitted, and the coating thickness can also be manually detected after the coating is completed.

[0053] like Figure 1As shown, in the coating device provided in this embodiment, the equipment body 1 includes: a chamber body and a sealing door; a cylindrical structure is arranged in the chamber body, an opening for connecting to the external environment is arranged on the chamber body, and the magnetron sputtering mechanism and the electron beam evaporation mechanism are arranged in the chamber body; the sealing door is movably arranged on the opening of the chamber body, the reeling and unreeling mechanism 7 and the process roller 5 are arranged on the sealing door, and the sealing door is assembled on the chamber body to form an internal vacuum chamber 2. The equipment body 1 is set as a split structure of the chamber body and the sealing door, which can be convenient for repair and maintenance. When the sealing door is opened, it is convenient to replace the substrate 16 on the reeling and unreeling mechanism 7 and the process roller 5. When the sealing door is closed, it is locked and sealed, and the vacuum chamber 2 is formed inside the chamber body for coating process. Specifically, a movable slide rail is arranged on the sealing door, and the movement and opening and closing of the sealing door are realized by driving the servo motor. In addition, as an alternative embodiment, the sealing door can also be set to be manually opened and closed.

[0054] It should be supplemented that a plurality of pre-installation holes are provided on the sealing door, and by presetting the installation position, the test roller position can be installed at any time when it is needed to be added later.

[0055] like Figure 1 As shown, in the coating device provided in this embodiment, a ventilation window is provided on the outer wall of the chamber body away from the sealing door, and the ventilation window is connected to the vacuum chamber 2. The vacuum state in the vacuum chamber 2 can be released through the ventilation window to prevent the vacuum state from affecting the opening of the sealing door. In addition, as an alternative embodiment, the ventilation window can be omitted, and a vacuum valve can be provided on the chamber body.

[0056] like Figure 1 As shown, in the coating device provided in this embodiment, the chamber body is further provided with an ion source 15. The ion source 15 provided in the chamber body can improve the bonding strength between the coating and the substrate 16, as well as improve the hardness, wear resistance and corrosion resistance of the coating itself.

[0057] Directions:

[0058] like Figure 1As shown, the coating device provided in this embodiment, when in use, the sealing door is opened, the substrate 16 to be coated is installed on the reeling and winding mechanism 7 and the process roller 5, the sealing door is moved to be assembled on the chamber body and locked and sealed to form a vacuum chamber 2, the wire feeding mechanism 12 conveys the coating material into the crucible 11, and the coating material is bombarded by the electric charge emitted by the front end of the electronic cavity aimed at the crucible 11, so that the coating material evaporates and adheres to the substrate 16 on the process roller 5, the target material 10 of the magnetron sputtering mechanism sputters and coats the substrate 16, and the reeling and winding roller 8 rotates in both directions to realize multiple reciprocating coating, the film thickness meter 14 monitors the coating thickness of the substrate 16 on the process roller 5, and after the coating process is completed, the ventilation window is opened to release the vacuum, and then the sealing door is moved open to take out the substrate 16 that has completed the coating.

[0059] Obviously, the above embodiments are merely examples for the purpose of clear explanation, and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived from these are still within the scope of protection of the present utility model.

Claims

1. A coating device, characterized in that: include: An equipment body (1), wherein a vacuum chamber (2) is arranged inside the equipment body (1), a process roller (5) is arranged inside the vacuum chamber (2), a partition (6) is arranged along the axial direction of the process roller (5), and the partition (6) and the process roller (5) divide the vacuum chamber (2) into a first process chamber (3) and a second process chamber (4); A reeling and unreeling mechanism (7) is arranged in the upper region of the process roller (5), the reeling and unreeling mechanism (7) is used to convey the substrate (16), and the reeling and unreeling mechanism (7) comprises two reeling and unreeling rollers (8) that can rotate in both directions; a magnetron sputtering mechanism, arranged in the first process chamber (3), wherein a target material (10) of the magnetron sputtering mechanism is spaced apart from the process roller (5), and the gap between the target material (10) and the process roller (5) is suitable for allowing the substrate (16) to pass through; The electron beam evaporation mechanism is arranged at the bottom of the second process chamber (4).

2. The coating device according to claim 1, characterized in that: At least one guide roller (9) is arranged on the transmission path of the unwinding and rewinding roller (8) and the process roller (5), and the guide roller (9) is arranged in the area above the connecting line of the unwinding and rewinding roller (8) and the process roller (5).

3. The coating device according to claim 2, characterized in that: Three guide rollers (9) are arranged on the transmission path of the unwinding and winding roller (8) and the process roller (5), the first and second guide rollers (9) are arranged on the same horizontal plane, the heights of the first and second guide rollers (9) are higher than the unwinding and winding roller (8), the height of the third guide roller (9) is lower than the unwinding and winding roller (8), and the three guide rollers (9) are successively away from the unwinding and winding roller (8) in the horizontal direction.

4. The coating device according to claim 3, characterized in that: The electron beam evaporation mechanism comprises: A crucible (11) is arranged at the bottom of the second process chamber (4), and the crucible (11) faces the circumferential surface of the bottom of the process roller (5); A wire feeding mechanism (12) is arranged on one side of the crucible (11), and the wire feeding mechanism (12) is used to feed the coating material into the crucible (11); An electron gun (13) is arranged on a side wall of the device body (1), and a front end of the electron gun (13) is aligned with the crucible (11).

5. The coating device according to claim 4, characterized in that: A groove is arranged on the outer wall of the device body (1), the electron gun (13) is arranged in the groove, and an incident hole is arranged on the side wall of the groove, the incident hole is suitable for the electric charges emitted by the electron gun (13) to pass through.

6. The coating device according to claim 1, characterized in that: The process roller (5) is provided with a chamber for accommodating a cooling medium.

7. The coating device according to claim 1, characterized in that: A film thickness meter (14) is provided on the partition (6), and a detection end of the film thickness meter (14) faces the process roller (5).

8. The coating device according to any one of claims 1 to 7, characterized in that: The device body (1) comprises: A chamber body, wherein a cylindrical structure is arranged in the chamber body, an opening communicating with an external environment is arranged on the chamber body, and the magnetron sputtering mechanism and the electron beam evaporation mechanism are arranged in the chamber body; A sealing door is movably arranged on the opening of the chamber body, the reeling and unreeling mechanism (7) and the process roller (5) are arranged on the sealing door, and the sealing door is assembled on the chamber body to form an internal vacuum chamber (2).

9. The coating device according to claim 8, characterized in that: A ventilation window is provided on an outer wall of the chamber body on a side away from the sealing door, and the ventilation window is in communication with the vacuum chamber (2).

10. The coating device according to claim 9, characterized in that: An ion source (15) is also arranged in the chamber body.

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