Vacuum pump degassing device for proton heavy ion accelerator and vacuum pump system

Abstract

The utility model provides a vacuum pump degassing device for a proton heavy ion accelerator and a vacuum pump system. The vacuum pump degassing device comprises a heating unit and a degassing unit, wherein the heating unit is used for heating a vacuum pump; the first temperature detection unit is used for detecting the temperature of the outer surface of the vacuum pump; and the controller is electrically connected to the temperature detection unit and the heating unit, and the controller controls the power of the heating unit according to the temperature detected by the first temperature detection unit. According to the scheme, accurate online baking of the ion pump is achieved, the use requirement is met, and the replacement frequency of the vacuum pump is greatly reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of proton and heavy ion accelerators, in particular to a vacuum pump degassing device and a vacuum pump system for proton and heavy ion accelerators. Background Art

[0002] Proton and heavy ion cancer accelerators need to accelerate protons or heavy ions to 70% of the speed of light for treatment. To achieve this requirement, the particles must be operated in a high vacuum environment. The acquisition and maintenance of high vacuum requires the use of an ion pump, which has stable operation, low power consumption and low noise. Its working principle is to ionize the residual gas molecules in the pipeline through internal high voltage (about 7kV). These ionized molecules will hit the inner wall of the ion pump under the action of the electric field. The special material of the inner wall can absorb charged ions, thereby achieving the effect of reducing the particles in the vacuum pipeline. When the vacuum is poor or the atmosphere is broken and the ion pump is re-pumped to open the vacuum, there are many residual gas molecules in the pipeline, and the ion pump current will be thousands to tens of thousands of times the current during normal operation. Finally, the ion pump controller activates the protection mechanism to shut down the high voltage. In this abnormal working state of high current, the ion pump is extremely susceptible to contamination, and professional cleaning is required to work normally. However, in actual use, it is inevitable that the vacuum extraction force needs to be increased as the equipment ages. Although it will not cause downtime, it will increase the workload of the high vacuum ion pump here. The working current of the ion pump will gradually increase over time until the controller is shut down due to overheating protection. However, high vacuum pipelines are designed to have a lifespan of more than 30 years, and spare parts are generally not stockpiled in advance, so the preparation time for spare parts will also be very long.

[0003] The current solution is to frequently replace the high vacuum ion pump. Replacing the ion pump is a process in which the high vacuum is completely exposed to the atmosphere, so it takes longer to re-establish a stable high vacuum. Utility Model Content

[0004] The technical problem to be solved by the utility model is to overcome the above-mentioned defects in the prior art and to provide a vacuum pump degassing device and a vacuum pump system for a proton and heavy ion accelerator.

[0005] The utility model achieves the above technical effects through the following technical solutions:

[0006] A vacuum pump degassing device for a proton and heavy ion accelerator, the vacuum pump degassing device comprising:

[0007] A heating unit, wherein the heating unit is used to heat the vacuum pump;

[0008] A first temperature detection unit, the temperature detection unit is used to detect the temperature of the outer surface of the vacuum pump;

[0009] A controller is electrically connected to the temperature detection unit and the heating unit, and controls the power of the heating unit according to the temperature measured by the first temperature detection unit.

[0010] In this solution, by setting up a heating unit, the vacuum pump is heated online, providing a temporary solution for micro-leakage points in high vacuum pipelines, which not only saves manpower and material resources, greatly reduces the cost of spare parts replacement, but also greatly reduces downtime and increases patient treatment time. By setting up the first temperature detection unit, the heating temperature of the vacuum pump can be accurately controlled, because the heating temperature of the vacuum pump is ineffective if it is too low, and too high a temperature may affect the surrounding equipment. Therefore, this solution realizes accurate online baking of the ion pump, which not only meets the use requirements, but also greatly reduces the replacement frequency of the vacuum pump.

[0011] Preferably, the vacuum pump degassing device further comprises a second temperature detection unit, a connecting pipe is provided between the vacuum pump and the vacuum system, and the second temperature detection unit is used to detect the temperature at the connecting pipe.

[0012] In this solution, it should be noted that since the vacuum pump is connected to the vacuum chamber, the vacuum chamber may be connected to electronic equipment, which is not resistant to high temperatures. When the vacuum pump is heated and baked, the second temperature detection unit can be used to monitor the temperature of the connecting pipe to avoid the risk of thermal expansion and leakage due to abnormal heating of components other than the vacuum pump itself due to the influence of heat conduction.

[0013] Preferably, the second temperature detection unit is electrically connected to the controller, and the controller controls the power of the heating unit according to the temperature measured by the second temperature detection unit.

[0014] Preferably, the first temperature detection unit is an infrared measuring instrument.

[0015] Preferably, the vacuum pump degassing device further comprises an alarm unit, the controller is electrically connected to the alarm unit, and the controller is configured to control the alarm unit to issue a prompt message when the temperature measured by the first temperature detection unit is higher than a preset threshold.

[0016] In this solution, by setting up an alarm unit, it is possible to remind on-site staff that the baking temperature has exceeded the threshold, so that the staff can turn off the heating unit in time to avoid excessive heating affecting peripheral equipment.

[0017] Preferably, the vacuum pump degassing device further comprises a current detection unit, the current detection unit is electrically connected to the controller, the current detection unit is used to detect the current of the vacuum pump and send the current value to the controller;

[0018] The controller is configured to control the heating unit to turn on when the current value exceeds a preset threshold.

[0019] In this solution, when there is a micro-leak, the stable working current of the vacuum pump will increase. For example, the working current of the ion pump will increase to more than 1mA and then continue to reach 8mA. By detecting the current value, the existence of the vacuum micro-leak can be discovered in time, so as to ensure that the heating unit can be turned on in time.

[0020] Preferably, the controller is configured to control the turning on and off of the heating unit according to a preset time.

[0021] In this solution, the timing opening and closing of the heating unit is achieved through the above-mentioned structural arrangement.

[0022] Preferably, the vacuum pump degassing device also includes a communication module and a terminal device, the communication module is electrically connected to the controller, the communication module is connected to the terminal device via wireless communication, the communication module sends the temperature information detected by the first temperature detection unit to the terminal device, and the terminal device sends instructions to the communication module to control the power of the heating unit.

[0023] In this solution, the staff can remotely control the vacuum pump degassing device without having to go to the site in person.

[0024] A vacuum pump system comprises the above-mentioned vacuum pump degassing device.

[0025] In this solution, a temporary solution is also provided for the micro-leakage of high vacuum pipelines, which not only saves manpower and material resources, greatly reduces the cost of spare parts replacement, but also greatly reduces downtime and increases patient treatment time. The ability to accurately bake the vacuum pump online not only meets the use requirements, but also greatly reduces the replacement frequency of the vacuum pump.

[0026] Preferably, the vacuum pump system further comprises the vacuum pump and a connecting pipe, and the vacuum pump is connected to the vacuum system via the connecting pipe.

[0027] In this solution, when the vacuum pump is heated and baked, the second temperature detection unit can be used to monitor the temperature of the connecting pipe to avoid the hidden danger of thermal expansion and leakage caused by abnormal heating of components other than the vacuum pump itself due to heat conduction.

[0028] On the basis of conforming to the common sense in the art, the above-mentioned preferred conditions can be arbitrarily combined to obtain the preferred embodiments of the present utility model.

[0029] The positive and progressive effect of the utility model is that for the vacuum pump degassing device, by setting a heating unit, the vacuum pump is heated online, which provides a temporary solution for the situation of micro-leakage points in the high vacuum pipeline, which not only saves manpower and material resources, greatly reduces the cost of spare parts replacement, but also greatly reduces downtime and increases patient treatment time. By setting a first temperature detection unit, the heating temperature of the vacuum pump can be accurately controlled, because the heating temperature of the vacuum pump is ineffective if it is too low, and too high a temperature may affect the surrounding equipment. Therefore, this solution can achieve accurate online baking of the ion pump, which not only meets the use requirements, but also greatly reduces the replacement frequency of the vacuum pump. Correspondingly, for a vacuum pump system including the vacuum pump degassing device, accurate online baking of the vacuum pump can be achieved, which not only meets the use requirements, but also greatly reduces the replacement frequency of the vacuum pump. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] The embodiments of the present invention will be described in detail below with reference to the accompanying drawings so that those skilled in the art will be more aware of the above and other features and advantages of the present invention.

[0031] Figure 1 It is a schematic diagram of a vacuum pump degassing device according to a preferred embodiment of the utility model.

[0032] The reference numerals are as follows:

[0033] Vacuum pump degassing device 100

[0034] Heating unit 101

[0035] First temperature detection unit 102

[0036] Controller 103

[0037] Second temperature detection unit 104 DETAILED DESCRIPTION

[0038] In order to have a clearer understanding of the technical features, purposes and effects of the utility model, the specific implementation methods of the utility model are now described with reference to the accompanying drawings, in which the same reference numerals represent the same parts.

[0039] In this document, “exemplary” means “serving as an example, instance or illustration”, and any diagram or implementation described in this document as “exemplary” should not be interpreted as a more preferred or more advantageous technical solution.

[0040] In order to simplify the drawings, only the parts related to the utility model are schematically shown in each figure, and they do not represent the actual structure of the product. In addition, in order to simplify the drawings and facilitate understanding, in some figures, only one of the parts with the same structure or function is schematically drawn or marked.

[0041] In this article, "one" not only means "only one", but also means "more than one". In this article, "first", "second", etc. are only used to distinguish each other, rather than to indicate their importance and order, or the premise of each other's existence.

[0042] The utility model discloses a vacuum pump degassing device 100 for a proton and heavy ion accelerator. Figure 1 As shown, the vacuum pump degassing device 100 includes a heating unit 101, a first temperature detection unit 102 and a controller 103. The heating unit 101 is used to heat the vacuum pump; the temperature detection unit is used to detect the temperature of the outer surface of the vacuum pump; the controller 103 is electrically connected to the temperature detection unit and the heating unit 101, and the controller 103 controls the power of the heating unit 101 according to the temperature measured by the first temperature detection unit 102.

[0043] In this embodiment, by setting up a heating unit 101, the vacuum pump is heated online, providing a temporary solution for the situation of micro-leakage in the high vacuum pipeline, which not only saves manpower and material resources, greatly reduces the cost of spare parts replacement, but also greatly reduces downtime and increases patient treatment time. By setting up a first temperature detection unit 102, the heating temperature of the vacuum pump can be accurately controlled, because the heating temperature of the vacuum pump is ineffective if it is too low, and the temperature is too high and may affect the surrounding equipment. Therefore, this solution realizes accurate online baking of the ion pump, which not only meets the use requirements, but also greatly reduces the replacement frequency of the vacuum pump.

[0044] Specifically, the heating unit 101 may be a heating element such as a heating rod or a heating wire, and the first temperature detection unit 102 may be an infrared measuring instrument. The vacuum pump in this embodiment may specifically refer to an ion pump, or may refer to other vacuum pumps such as a molecular pump.

[0045] The vacuum pump degassing device 100 also includes a second temperature detection unit 104. A connecting pipe is provided between the vacuum pump and the vacuum system. The second temperature detection unit 104 is used to detect the temperature at the connecting pipe. It should be noted that since the vacuum pump is connected to the vacuum chamber, the vacuum chamber may be connected to electronic equipment, which is not resistant to high temperatures. When the vacuum pump is heated and baked, the second temperature detection unit 104 can be used to monitor the temperature of the connecting pipe to avoid the hidden danger of thermal expansion and leakage caused by abnormal heating of the components other than the vacuum pump itself due to heat conduction. The second temperature detection unit 104 is an infrared thermal imaging measuring instrument. The second temperature detection unit 104 is electrically connected to the controller 103. The controller 103 controls the power of the heating unit 101 according to the temperature measured by the second temperature detection unit 104.

[0046] The vacuum pump degassing device 100 also includes an alarm unit, and the controller 103 is electrically connected to the alarm unit. The controller 103 is configured to control the alarm unit to send a prompt message when the temperature measured by the first temperature detection unit 102 is higher than a preset threshold. By setting the alarm unit, it is possible to prompt the on-site staff that the baking temperature has exceeded the threshold, so that the staff can turn off the heating unit 101 in time to avoid excessive heating affecting the surrounding equipment. The prompt message may include a prompt sound, a flashing light, and the like.

[0047] The vacuum pump degassing device 100 also includes a current detection unit, which is electrically connected to the controller 103. The current detection unit is used to detect the current of the vacuum pump and send the current value to the controller 103; the controller 103 is configured to control the heating unit 101 to turn on when the current value exceeds a preset threshold. When there is a micro-leak, the stable working current of the vacuum pump will increase. For example, when there is a micro-leak in the ion pump, the working current will increase to more than 1mA and then continue to reach 8mA. By detecting the current value, the existence of vacuum micro-leak can be discovered in time, thereby ensuring that the heating unit 101 can be turned on in time.

[0048] The controller 103 is configured to control the opening and closing of the heating unit 101 according to a preset time. Through the above-mentioned structural setting, the timing opening and closing of the heating unit 101 is realized.

[0049] The vacuum pump degassing device 100 further includes a communication module and a terminal device, wherein the communication module is electrically connected to the controller 103, and the communication module is connected to the terminal device via wireless communication, and the communication module sends the temperature information detected by the first temperature detection unit 102 to the terminal device, and the terminal device sends a command to the communication module to control the power of the heating unit 101. The staff does not need to be present at the site, and the present invention realizes remote control of the vacuum pump degassing device 100.

[0050] For the ion pump, its normal working state is 0.0079mA (at 1.910^(-9)mbar). When there is a micro-leak (10^(-6) to 10^(-7)mbar*L / S), the stable working current of the ion pump will increase to more than 1mA. When it reaches 8mA continuously, measures need to be taken, otherwise it will rise rapidly after 8mA, causing the ion pump to be shut down and unable to be turned on. The heating and baking method can make the ion pump drop to about 3mA after it is greater than 8mA. When it is detected that the working current of the ion pump reaches 8mA, the ion pump high voltage is turned off, the molecular pump is used to stabilize the vacuum, the heating unit is turned on, and the heating time is controlled to be about 2 hours. While heating, the first temperature detection unit is used to detect the temperature of the outer surface of the ion pump cavity. When the outer surface temperature reaches 220℃, the heating is stopped; wait for 3-4 hours, turn on the ion pump again, and the current will drop below 3mA after it stabilizes. Under normal circumstances, it takes about 3 months from 3mA to 8mA, so it is baked every 3 months.

[0051] This embodiment also discloses a vacuum pump system, including the above-mentioned vacuum pump degassing device 100. Similarly, a temporary solution is provided for the situation where micro-leakage occurs in the high vacuum pipeline, which not only saves manpower and material resources, greatly reduces the cost of spare parts replacement, but also greatly reduces downtime and increases patient treatment time. It can realize accurate online baking of the vacuum pump, which not only meets the use requirements, but also greatly reduces the replacement frequency of the vacuum pump.

[0052] The vacuum pump system also includes a vacuum pump and a connecting pipe, and the vacuum pump is connected to the vacuum system through the connecting pipe. When the vacuum pump is heated and baked, the temperature of the connecting pipe can be monitored by the second temperature detection unit 104 to avoid the hidden danger of thermal expansion and leakage caused by abnormal heating of the components other than the vacuum pump itself due to heat conduction.

[0053] Although the specific implementations of the utility model are described above, those skilled in the art should understand that this is only an example, and the protection scope of the utility model is defined by the attached claims. Those skilled in the art can make various changes or modifications to these implementations without departing from the principle and essence of the utility model, but these changes and modifications fall within the protection scope of the utility model.

Claims

1. A vacuum pump degassing device for a proton and heavy ion accelerator, characterized in that: The vacuum pump degassing device comprises: A heating unit, wherein the heating unit is used to heat the vacuum pump; A first temperature detection unit, the temperature detection unit is used to detect the temperature of the outer surface of the vacuum pump; A controller is electrically connected to the temperature detection unit and the heating unit, and controls the power of the heating unit according to the temperature measured by the first temperature detection unit.

2. The vacuum pump degassing device for a proton and heavy ion accelerator according to claim 1, characterized in that: The vacuum pump degassing device further comprises a second temperature detection unit. A connecting pipe is provided between the vacuum pump and the vacuum system. The second temperature detection unit is used to detect the temperature at the connecting pipe.

3. The vacuum pump degassing device for a proton and heavy ion accelerator according to claim 2, characterized in that: The second temperature detection unit is electrically connected to the controller, and the controller controls the power of the heating unit according to the temperature measured by the second temperature detection unit.

4. The vacuum pump degassing device for a proton and heavy ion accelerator according to claim 1, characterized in that: The first temperature detection unit is an infrared measuring instrument.

5. The vacuum pump degassing device for a proton and heavy ion accelerator according to claim 1, characterized in that: The vacuum pump degassing device also includes an alarm unit, the controller is electrically connected to the alarm unit, and the controller is configured to control the alarm unit to issue a prompt message when the temperature measured by the first temperature detection unit is higher than a preset threshold.

6. The vacuum pump degassing device for a proton and heavy ion accelerator according to claim 1, characterized in that: The vacuum pump degassing device further comprises a current detection unit, the current detection unit is electrically connected to the controller, the current detection unit is used to detect the current of the vacuum pump and send the current value to the controller; The controller is configured to control the heating unit to turn on when the current value exceeds a preset threshold.

7. The vacuum pump degassing device for a proton and heavy ion accelerator according to claim 1, characterized in that: The controller is configured to control the heating unit to be turned on and off according to a preset time.

8. The vacuum pump degassing device for a proton and heavy ion accelerator according to claim 1, characterized in that: The vacuum pump degassing device also includes a communication module and a terminal device, wherein the communication module is electrically connected to the controller, and the communication module is connected to the terminal device via wireless communication. The communication module sends the temperature information detected by the first temperature detection unit to the terminal device, and the terminal device sends instructions to the communication module to control the power of the heating unit.

9. A vacuum pump system, comprising the vacuum pump degassing device according to any one of claims 1 to 8.

10. The vacuum pump system according to claim 9, characterized in that The vacuum pump system further comprises the vacuum pump and a connecting pipe, and the vacuum pump is connected to the vacuum system via the connecting pipe.

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