High-rigidity linear rotary actuator

Abstract

The utility model discloses a high-rigidity linear rotation actuator which comprises a shell, an output shaft and a driving mechanism, a cavity is formed in the shell, and the driving mechanism drives the output shaft to rotate and move linearly. The driving mechanism comprises a linear driving mechanism, a rotary driving mechanism, a connecting piece and a guide rail, the linear driving mechanism, the rotary driving mechanism, the connecting piece and the guide rail are mounted in the cavity, the rotary driving mechanism and the output shaft are mounted on the connecting piece, the connecting piece is slidably mounted on the guide rail, the guide rail is a guide rail, and the connecting piece is slidably connected with the guide rail through a guide rail sliding block; a cavity is formed in the connecting piece, a magnetic spring is further arranged in the cavity and comprises a magnetic spring stator and a magnetic spring rotor, the magnetic spring stator is installed in the cavity, the magnetic spring rotor is connected with the top of the connecting piece, and the magnetic spring stator gives upward pulling force to the connecting piece through the magnetic spring rotor. According to the utility model, the maintenance rate is reduced, and the service life is prolonged.

Description

Technical Field

[0001] The utility model relates to an actuator, in particular to a high-rigidity linear rotary actuator. Background Art

[0002] Linear rotary actuators, also known as linear rotary actuators or ZR actuators, are used to achieve linear and rotary motion. They are mainly used in technical fields such as semiconductors, electronic equipment processing, biopharmaceuticals, etc., especially as core components of semiconductor chip mounting equipment.

[0003] In the prior art, the linear rotary actuator includes a linear motor and a rotary motor. A slider is fixed to the output end of the linear motor, the slider is connected to the rotary motor, and the output of the rotary motor is connected to the motor output shaft. The voice coil motor drives the slider to move linearly, and the slider drives the rotary motor and the motor output shaft to move linearly. At the same time, the rotary motor drives the motor output shaft to rotate, so that the output shaft can move linearly and rotate at the same time.

[0004] At present, the guide rails used for internal guidance of linear rotary actuators on the market are mostly miniature linear guide rails, but the support stiffness of this type of guide rail is relatively low, and it is not very suitable for some high-precision occasions. For example, due to the low stiffness of the guide rail, it leads to long positioning time and poor steady-state in position. Of course, some mechanisms also use a double slider structure, but the double slider structure has extremely high requirements on the flatness of the mounting seat connecting the slider. At the same time, due to the height difference of different sliders, the slider does not run smoothly after the slider screws are tightened, which leads to unstable force control accuracy. Finally, the counterweight springs set in the linear rotary actuator are mostly ordinary tension springs, and the life of the tension springs is short and cannot meet the life of 100 million times, such as application number 202122966315.X, patent name: A linear rotary voice coil motor, which has the above-mentioned technical problems. Summary of the invention

[0005] The utility model aims to provide a high-rigidity linear rotary actuator. By using the structure, the service life can be extended, the maintenance rate can be reduced, and the support rigidity and force control accuracy can be improved.

[0006] To achieve the above object, the technical solution adopted by the utility model is: a high-rigidity linear rotary actuator, comprising a housing, an output shaft and a driving mechanism, wherein the housing has a cavity, the output shaft is connected to the driving mechanism, the driving mechanism drives the output shaft to rotate and move linearly, and the moving direction of the output shaft away from the housing is a downward direction;

[0007] The driving mechanism comprises a linear driving mechanism, a rotary driving mechanism, a connecting member and a guide rail installed in the cavity, the rotary driving mechanism and the output shaft are installed on the connecting member, the rotary driving mechanism is configured to drive the output shaft to rotate, the connecting member is slidably installed on the guide rail, and the linear driving mechanism is configured to drive the connecting member to move linearly along the guide rail.

[0008] A magnetic spring is also provided in the cavity, the magnetic spring is provided above the guide rail, the magnetic spring comprises a magnetic spring stator and a magnetic spring mover which are interlaced, the magnetic spring stator is fixed on the housing, one end of the magnetic spring mover is connected to the connecting member, and the magnetic spring stator gives the connecting member an upward pulling force through the magnetic spring mover;

[0009] The central axis of the magnetic spring mover is parallel to the central axis of the guide rail, and the central axis of the magnetic spring mover does not exceed the boundary formed by the outer surface around the guide rail.

[0010] In the above technical solution, the magnetic spring mover is sleeved on the magnetic spring stator;

[0011] Or the magnetic spring stator is sleeved on the magnetic spring mover.

[0012] In the above technical solution, the connecting member is slidably connected to the guide rail via a guide rail slider.

[0013] In the above technical solution, a slider mounting plate is provided on the connecting member, and the guide rail slider is connected to the connecting member via the slider mounting plate.

[0014] In the above technical solution, the guide rail and the guide rail slider have guide rail grooves and slider grooves on opposite sides respectively, the openings of the guide rail groove and the slider groove are opposite, and a movably connected rolling body is provided between the guide rail groove and the slider groove.

[0015] In the above technical solution, a first mounting groove and a second mounting groove are provided in the shell, the first mounting groove is used to install the guide rail, the second mounting groove is used to install the magnetic spring, and the depth of the second mounting groove is smaller than the depth of the first mounting groove.

[0016] In the above technical solution, the central axis of the magnetic spring mover, the central axis of the guide rail groove and the central axis of the slider groove are located in the same plane.

[0017] In the above technical solution, a protrusion is provided on the side of the connecting member facing the guide rail, and the bottom of the magnetic spring mover is connected to the protrusion.

[0018] In the above technical solution, the output shaft and the rotation drive mechanism are installed on a connecting piece on one side of the guide rail, the rotation drive mechanism is arranged above the output shaft, and the rotation drive mechanism is configured to drive the output shaft to rotate.

[0019] In the above technical solution, the linear drive mechanism includes a stator and a mover, the stator is installed in a cavity beside the guide rail, the guide rail is arranged between the output shaft and the stator, one end of the mover is movably arranged in the stator, and the other end of the mover is fixedly connected to the connecting member.

[0020] Due to the application of the above technical solution, the utility model has the following advantages compared with the prior art:

[0021] 1. The utility model adopts a guide rail to linearly guide and support the connecting parts, which can solve the problem of insufficient rigidity of the transmission micro-guide rail leading to the in-place setting time and in-place steady state;

[0022] 2. The utility model adopts a magnetic spring to give the connecting piece an upward pulling force. Compared with the conventional tension spring, the utility model can prevent the deformation, fatigue and damage of the tension spring, prolong the service life and reduce the maintenance rate;

[0023] 3. The utility model adopts guide rails and magnetic springs, and the force control accuracy can be accurately achieved through the arrangement position of the magnetic springs, which can also improve the support stiffness and extend the service life;

[0024] 4. The central axis of the magnetic spring mover in the utility model is within the projection range formed by the outer surfaces around the guide rail, which can effectively ensure the force control accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a schematic diagram of the structure of the first embodiment of the present utility model;

[0026] Figure 2 It is a schematic diagram of the structure of the first embodiment of the utility model (the housing is not shown);

[0027] Figure 3 It is a structural schematic diagram of the connecting member in the first embodiment of the utility model;

[0028] Figure 4 It is a structural schematic diagram of the shell in the first embodiment of the present utility model.

[0029] Among them: 1. shell; 2. output shaft; 3. cavity; 4. rotary drive mechanism; 5. connecting piece; 6. guide rail; 7. guide rail slider; 8. magnetic spring; 9. magnetic spring stator; 10. magnetic spring mover; 11. second mounting groove; 12. fixing piece; 13. protrusion; 14. stator; 15. mover; 16. slider mounting plate; 18. through groove; 19. coupling; 20. first mounting groove. DETAILED DESCRIPTION

[0030] The utility model is further described below in conjunction with the accompanying drawings and embodiments:

[0031] Example 1: See Figures 1 to 4 As shown, a high-rigidity linear rotary actuator comprises a housing 1, an output shaft 2 and a driving mechanism, wherein the housing 1 has a cavity 3, the output shaft 2 is connected to the driving mechanism, the driving mechanism drives the output shaft 2 to rotate and move linearly, and the moving direction of the output shaft 2 away from the housing 1 is a downward direction;

[0032] The driving mechanism comprises a linear driving mechanism, a rotary driving mechanism 4, a connecting member 5 and a guide rail installed in the cavity 3. The rotary driving mechanism 4 and the output shaft 2 are installed on the connecting member 5. The rotary driving mechanism 4 is configured to drive the output shaft 2 to rotate. The connecting member 5 is slidably installed on the guide rail. The linear driving mechanism is configured to drive the connecting member 5 to move linearly along the guide rail.

[0033] The guide rail 6 is a cross roller guide rail, and the connecting member 5 is slidably connected to the guide rail 6 via a guide rail slider 7;

[0034] A magnetic spring 8 is also provided in the cavity 3. The magnetic spring 8 is provided above the guide rail 6. The magnetic spring 8 includes a magnetic spring stator 9 and a magnetic spring mover 10 which are interlaced. The magnetic spring stator 9 is fixed to the housing above the guide rail. The bottom of the magnetic spring mover 10 is connected to the connecting member 5. The magnetic spring stator 9 applies an upward pulling force to the connecting member 5 through the magnetic spring mover 10.

[0035] The central axis of the magnetic spring mover 10 is parallel to the central axis of the guide rail 6 , and the central axis of the magnetic spring mover 10 does not exceed the boundary formed by the outer surface around the guide rail 6 .

[0036] In this embodiment, the central axis of the magnetic spring mover will be within the range of the positive projection formed by the outer surface of the guide rail, that is, the central axis of the magnetic spring mover will not exceed the front, rear, left and right boundaries of the guide rail. Among them, the magnetic spring will be arranged above the guide rail, because when the connecting member moves along the guide rail, the load capacity in the extension direction of the guide rail is the largest. The arrangement of the magnetic spring above the guide rail can reduce the lateral force generated by the different axes of the magnetic spring mover and the magnetic spring stator on the smoothness of the cross ball guide rail, which can ensure the best force control effect of the entire actuator.

[0037] In this embodiment, the output shaft is a hollow cylindrical structure, and the connecting member has an air cavity inside, and the air cavity is connected to the external air circuit system. The air circuit system gives the output shaft air blowing, negative pressure, etc. through the air cavity, which is used to grab and discharge the product (the air cavity can be connected to the air circuit system through the air circuit tube). In actual use, the shell is installed on the corresponding equipment. When in use, the linear drive mechanism drives the connecting member and the output shaft to move downward. After moving downward to the predetermined position, the bottom of the output shaft contacts the product, and then negative pressure is given to the output shaft to suck the product, and then the connecting member and the output shaft are driven to move upward, driving the product to move upward, and then when it moves to the corresponding position where unloading is required, the rotary drive mechanism drives the output shaft to rotate, that is, drives the product to rotate to a predetermined angle, and then the linear drive mechanism drives the connecting member, the output shaft and the product to move downward to the predetermined position, and the air circuit system stops the negative pressure, so that the product can fall, and the air circuit system can also give positive pressure blowing to blow the product down to achieve unloading. Of course, there are other ways, the rotary drive mechanism drives the output shaft to rotate, and the linear drive mechanism drives the output shaft to move linearly.

[0038] See also Figure 4 As shown, the housing 1 is provided with a first mounting groove 20 and a second mounting groove 21, wherein the first mounting groove 20 is used to mount the guide rail 6, and the second mounting groove 21 is used to mount the magnetic spring 8, and the depth of the second mounting groove 21 is less than the depth of the first mounting groove 20. The second mounting groove is used to mount the magnetic spring stator. And the depth of the second mounting groove is less than the depth of the first mounting groove, so that the central axis of the magnetic spring stator can be within the boundary formed by the outer surface of the guide rail 6.

[0039] In this embodiment, the guide rail adopts a cross roller guide rail, which is connected to the housing through screws, and a first mounting groove is set in the cavity. The guide rail is installed in the first mounting groove, so that the output shaft is connected to the guide rail through the connecting member and the sliding connection, which can ensure the parallelism of the output shaft relative to the mounting surface of the housing. At the same time, the cross roller guide rail is adopted, which has high rigidity and can solve the problem of in-place setting time and in-place steady state caused by insufficient rigidity of the transmission micro guide rail, thereby shortening the in-place setting time and improving the in-place steady state ability. Among them, the magnetic spring gives the connecting member an upward pulling force, so that in the case of power failure, the output shaft will not fall and cause the product to be crushed. At the same time, the magnetic spring is adopted instead of the structure of the tension spring, so that there will be no problems such as tension spring fatigue, damage and deformation, which can extend the service life and reduce the maintenance rate. At the same time, the magnetic spring stator gives the magnetic spring mover an upward pulling force, and uses the upward power of the magnetic spring mover to give the connecting member an upward pulling force to prevent the output shaft from falling in the case of power failure.

[0040] In the present utility model, the magnetic spring mover 10 is sleeved on the magnetic spring stator 9;

[0041] Or the magnetic spring stator 9 is sleeved on the magnetic spring mover 10 .

[0042] Preferably, in this embodiment, the middle part of the magnetic spring stator has a hole, and the middle part of the magnetic spring mover is movably inserted into the hole. There is a gap between the outer surface of the magnetic spring mover and the magnetic spring stator (hole), and the two do not contact and there is no friction between the two, which can effectively solve the problem of damage of tension springs in previous structures due to long-term extension.

[0043] Furthermore, the guide rail and the guide rail slider are provided with a guide rail groove and a slider groove on the opposite sides, the openings of the guide rail groove and the slider groove are opposite, and a movably connected rolling body is provided between the guide rail groove and the slider groove. Among them, there are multiple rolling bodies, and the multiple rolling bodies are positioned by a ball mounting frame to prevent the relative movement of the multiple rolling bodies, and the multiple rolling bodies can also be limited. In this way, the guide rail constitutes a cross-roller guide rail, and the guide rail slider is a cross-roller slider. The central axis of the magnetic spring mover, the central axis of the guide rail groove, and the central axis of the slider groove are located in the same plane. In this way, it can be ensured that when the magnetic spring gives the connecting part an upward pulling force, its straightness is good, preventing uneven sliding force between the guide rail slider and the guide rail. It can improve the stability and smoothness of the connecting part sliding along the guide rail.

[0044] See also Figure 2As shown, the guide rail slider 7 is composed of two pieces, and the two guide rail sliders 7 are respectively connected to the two sides of the guide rail in a sliding manner. The connector 5 is provided with a slider mounting plate 16, and the guide rail slider 7 is connected to the connector 5 via the slider mounting plate 16. The cross roller guide can prevent creep, which can improve the stability and smoothness of the connector sliding along the guide rail. At the same time, the guide rail slider is connected to the slider mounting plate through multiple screws, and the tightening torque of the multiple screws is consistent and the spiral direction is consistent.

[0045] See also Figure 1 , 2 As shown, a fixing member 12 is provided in the cavity 3 , and the magnetic spring stator 9 is installed in the second installation groove 11 via the fixing member 12 .

[0046] The connector 5 is provided with a protrusion 13 on one side facing the guide rail, and the bottom of the magnetic spring mover 10 is connected to the protrusion 13. The protrusion is provided to connect the magnetic spring mover and the connector, and the protrusion is located directly above the guide rail, so that the magnetic spring mover is also located above the guide rail.

[0047] See also Figure 1 , 2 As shown, the output shaft 2 and the rotation drive mechanism 4 are installed on the connecting member 5 on one side of the guide rail, and the rotation drive mechanism 4 is arranged above the output shaft 2, and the rotation drive mechanism 4 is configured to drive the output shaft 2 to rotate.

[0048] In this embodiment, the rotary drive mechanism adopts a rotary motor, and the rotary drive mechanism is installed at the top of one side of the connecting member. The top of the output shaft and the bottom of the connecting member on this side are rotatably connected. A through groove 18 is provided on the connecting member, and a coupling 19 is provided in the through groove. The coupling connects the top of the output shaft and the rotary drive mechanism, thereby ensuring that the output shaft and the rotary motor rotate synchronously.

[0049] See also Figure 1 , 2 As shown, the linear drive mechanism is a voice coil motor, including a stator 14 and a mover 15, the stator 14 is installed in the cavity 3 beside the guide rail, the guide rail 6 is arranged between the output shaft 2 and the stator 14, one end of the mover 15 is movably arranged in the stator 14, and the other end of the mover 15 is fixedly connected to the connecting member 5.

[0050] The stator is fixed in the cavity of the shell, and the mover is connected to the connecting piece, so that when the stator drives the mover to move linearly, the stator drives the connecting piece to move linearly along the guide rail seat, thereby realizing the linear movement of the output shaft.

[0051] In the description of the present invention, it should be understood that the terms "upper", "lower", "top", "bottom", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In the description of the present invention, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined.

[0052] In the present utility model, unless otherwise clearly specified and limited, the terms "install", "connect", "connect", "fix" and the like should be understood in a broad sense, for example, it can be a fixed connection, or a detachable connection, or an integral one; it can be a mechanical connection, or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, for example, the two can form a mechanical abutment or abutment connection through abutment, contact, etc., the two can also be directly hung or hung through an intermediate medium, etc., or it can be the internal connection of the two elements or the interaction relationship between the two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

Claims

1. A high-rigidity linear rotary actuator, comprising a housing (1), an output shaft (2) and a driving mechanism, wherein the housing (1) has a cavity (3), the output shaft (2) is connected to the driving mechanism, the driving mechanism drives the output shaft (2) to rotate and move linearly, and the direction in which the output shaft (2) moves away from the housing (1) is a downward direction; The driving mechanism comprises a linear driving mechanism, a rotary driving mechanism (4), a connecting member (5) and a guide rail (6) installed in the cavity (3); the rotary driving mechanism (4) and the output shaft (2) are installed on the connecting member (5); the rotary driving mechanism (4) is configured to drive the output shaft (2) to rotate; the connecting member (5) is slidably installed on the guide rail (6); the linear driving mechanism is configured to drive the connecting member (5) to move linearly along the guide rail (6); and the invention is characterized in that: A magnetic spring (8) is also provided in the cavity (3). The magnetic spring (8) is provided above the guide rail (6). The magnetic spring (8) comprises a magnetic spring stator (9) and a magnetic spring mover (10) which are interlaced. The magnetic spring stator (9) is fixed on the housing. One end of the magnetic spring mover (10) is connected to the connecting member (5). The magnetic spring stator (9) applies an upward pulling force to the connecting member (5) via the magnetic spring mover (10). The central axis of the magnetic spring mover (10) is parallel to the central axis of the guide rail (6), and the central axis of the magnetic spring mover (10) does not exceed the boundary formed by the outer surface around the guide rail (6).

2. The high-rigidity linear-rotary actuator according to claim 1, characterized in that: The magnetic spring mover (10) is sleeved on the magnetic spring stator (9); Or the magnetic spring stator (9) is sleeved on the magnetic spring mover (10).

3. The high-rigidity linear-rotary actuator according to claim 1, characterized in that: The connecting member (5) is slidably connected to the guide rail (6) via a guide rail slider (7).

4. The high-rigidity linear-rotary actuator according to claim 3, characterized in that: The connecting member (5) is provided with a slider mounting plate (16), and the guide rail slider (7) is connected to the connecting member (5) via the slider mounting plate (16).

5. The high-rigidity linear-rotary actuator according to claim 3, characterized in that: The guide rail (6) and the guide rail slider (7) are provided with a guide rail groove and a slider groove on opposite sides respectively. The openings of the guide rail groove and the slider groove are opposite to each other. A rolling body movably connected is provided between the guide rail groove and the slider groove.

6. The high-rigidity linear-rotary actuator according to claim 1, characterized in that: A first mounting groove (20) and a second mounting groove (11) are provided in the housing (1); the first mounting groove (20) is used to mount the guide rail (6); the second mounting groove (11) is used to mount the magnetic spring (8); the depth of the second mounting groove (11) is less than the depth of the first mounting groove (20).

7. The high-rigidity linear-rotary actuator according to claim 5, characterized in that: The central axis of the magnetic spring mover (10), the central axis of the guide rail groove and the central axis of the slider groove are located in the same plane.

8. The high-rigidity linear-rotary actuator according to claim 1, characterized in that: A protrusion (13) is provided on one side of the connecting member (5) facing the guide rail, and the bottom of the magnetic spring mover (10) is connected to the protrusion (13).

9. The high-rigidity linear-rotary actuator according to claim 1, characterized in that: The output shaft (2) and the rotary drive mechanism (4) are mounted on a connecting piece (5) on one side of the guide rail (6); the rotary drive mechanism (4) is disposed above the output shaft (2); and the rotary drive mechanism (4) is configured to drive the output shaft (2) to rotate.

10. The high-rigidity linear-rotary actuator according to claim 1, characterized in that: The linear drive mechanism comprises a stator (14) and a mover (15), wherein the stator (14) is installed in a cavity (3) beside the guide rail (6), the guide rail (6) is arranged between the output shaft (2) and the stator (14), one end of the mover (15) is movably arranged in the stator (14), and the other end of the mover (15) is fixedly connected to the connecting member (5).

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