Efficient ozone solution preparation system

Abstract

An efficient ozone solution preparation system comprises a liquid mixing cylinder used for generating an ozone solution and at least one group of internally communicated liquid mixing pipe assemblies, and an inflow pipe is arranged along the approximately tangential direction of the liquid mixing cylinder and is close to the inner wall of the liquid mixing cylinder. In the liquid mixing pipe assembly, ozone gas is crushed into small bubbles in the flowing direction and then is mixed with a liquid solvent to form mixed liquid of gas and liquid, and the mixed liquid is fed into a liquid mixing cylinder through an inflow pipe. The inflow pipe is arranged close to the inner wall of the liquid mixing cylinder in the tangential direction, mixed liquid output by the inflow pipe flows close to the inner wall in the tangential direction to form spirally downward quiet flow, ozone bubbles carried in the mixed liquid are further dissolved in the flowing process, and a relatively stable ozone solution is formed and output through the liquid outlet. In addition, by prolonging the flowing path of the mixed liquid and reducing the flowing speed of the mixed liquid, the mixed liquid can flow in a laminar flow state, the stable state of the mixed liquid is further maintained, and ozone precipitation caused by possible disturbance in the flowing process is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of cleaning, in particular to a highly efficient ozone solution preparation system. Background Art

[0002] Ozone is a strong oxidant, second only to fluorine in oxidizing power. It can react with many substances and can be used as a disinfectant and bleaching agent. Under standard conditions (0°C, 1atm), the density of ozone is about 2.144 g / L. Under standard conditions, one liter of water can dissolve about 1.37 g (641 ml) of pure ozone. Ozone concentration is often measured in ppm, and 1 ppm of ozone aqueous solution means that one cubic meter of water contains 1 ml (or 2.14 mg) of ozone.

[0003] In the semiconductor manufacturing industry, the surface of silicon wafers is often seriously contaminated after being cut by wire cutting machines. Therefore, in order to meet industrial application standards, they must undergo a strict cleaning process. Silicon wafer surface contamination can be roughly divided into three categories: organic impurities such as grease, rosin, wax, epoxy resin, polyethylene glycol, etc. (cleaned with organic solvents); dust and other particles (cleaned with physical methods such as mechanical scrubbing or ultrasonic cleaning); and metal, metal ions and some inorganic compounds (cleaned with chemical methods).

[0004] In the prior art, chemical cleaning methods are usually used to clean silicon wafers. The traditional RCA method for cleaning silicon wafers involves the use and discharge of chemicals such as ammonia water, hydrogen peroxide, and potassium hydroxide, which causes great pollution to the environment. The traditional cleaning process uses an aqueous solution of alkali (such as KOH or ammonia water) and hydrogen peroxide to remove organic pollution on the surface of the silicon wafer, and then uses an aqueous solution of hydrogen peroxide + hydrochloric acid to remove metal ions in the solution. However, hydrogen peroxide itself is very easy to decompose, difficult to store, and the concentration will decrease rapidly when heated or illuminated, causing instability in industrial production. On the other hand, the consumption of hydrogen peroxide in the cleaning process is huge, and the corresponding consumption of hydrochloric acid or alkali is also very considerable, and the waste liquid treatment is difficult. The traditional RCA method for cleaning silicon wafers involves the use and discharge of chemicals such as ammonia water, hydrogen peroxide, and potassium hydroxide, which causes great pollution to the environment. Therefore, in photovoltaic cleaning, for example, ozone water cleaning is gradually replacing hydrogen peroxide cleaning, that is, using ozone to oxidize organic and metal pollutants in the water phase.

[0005] The main process of cleaning silicon wafers with ozone water is as follows: an oxide film is formed on the surface of the silicon wafer using ozone water, and then HF (hydrofluoric acid) is used to remove the oxide film, and SC1 and SC2 are used to remove particles and metal pollution, and then ozone water is used to form an oxide film on the surface of the silicon wafer to prevent the surface of the silicon wafer from being contaminated again.

[0006] In the application of using ozone to clean silicon wafers, the common ozone cleaning method is to introduce ozone into an aqueous solution containing acid. The concentration of ozone dissolved in water is generally 10-100ppm. The silicon wafer is then cleaned in this acidic solution containing ozone to achieve the purpose of cleaning the silicon wafer or chemical polishing.

[0007] In the prior art, after ozone is prepared, it is introduced into a mixed liquid pipeline assembly through an air pipe and an ejector (for generating bubbles), and the ozone bubbles are mixed with a liquid (such as water) in the mixed liquid pipeline assembly to form an ozone solution (ozone water). However, considering that under working conditions, ozone is in a gaseous state and the solution is in a liquid state, ozone will quickly float up and gather in the solution, so most of the ozone only passes through the water, rather than dissolving, that is, the dissolution rate of ozone in the solution will be slow, which also affects the concentration of the generated ozone solution. The current technology generally reaches 50ppm (about 0.1mg / L). That is, in the current technology, the preparation efficiency of the ozone solution is still relatively low.

[0008] Therefore, an efficient ozone solution preparation system is needed in practice. Summary of the invention

[0009] The utility model aims to provide an efficient ozone solution preparation system, which can quickly prepare an ozone solution with a relatively high concentration.

[0010] To achieve the above-mentioned purpose, the utility model provides an efficient ozone solution preparation system, including a mixing liquid cylinder for generating ozone solution, and at least one group of internally connected mixing liquid tube components; the mixing liquid tube components include in sequence along the flow direction: a liquid inlet for connecting an external liquid solvent, an ozone inlet for connecting an external ozone gas source, a mixing liquid tube for crushing ozone and mixing ozone and liquid solvent to generate a mixed liquid, and an inlet pipe connected to the interior of the mixing liquid cylinder for outputting the mixed liquid; the mixing liquid cylinder is also provided with at least one liquid outlet for discharging the mixed ozone solution; the inlet pipe is arranged close to the inner wall of the mixing liquid cylinder along the approximate tangent of the mixing liquid cylinder, and the opening of the inlet pipe points approximately along the tangent. Preferably, the opening of the inlet pipe is inclined toward the inner wall of the mixing liquid cylinder at a set angle. More preferably, at the opening of the inlet pipe, close to the side of the center of the mixing liquid cylinder, an outflow guide is provided to help limit the mixed liquid to move along the tangent.

[0011] The ozone solution preparation system of the utility model, through at least one group of mixing liquid pipe components, crushes the ozone gas into small bubbles along the flow direction and then mixes it with a liquid solvent to form a gas-liquid mixture. When entering the mixing liquid cylinder, because the inlet pipe is arranged tangentially close to the inner wall of the mixing liquid cylinder and the opening points roughly in the tangential direction, the mixed liquid output from the inlet pipe opening flows tangentially and close to the inner wall, forming a quiet flow field spiraling downward, further dissolving the ozone bubbles carried in the mixed liquid during the flow to form a relatively stable ozone solution, which is then output from the liquid outlet. By extending the flow path of the mixed liquid and reducing the flow rate of the mixed liquid, the mixed liquid can also flow in a laminar state, further maintaining the stable state of the mixed liquid and avoiding ozone precipitation due to possible disturbances during the flow process. Therefore, the preparation time can be shortened and the preparation concentration can be improved.

[0012] Preferably, a group of guide vanes spiraling downward are circumferentially arranged inside the mixing cylinder, and the inlet pipe opens near the guide vanes. Because the specific gravity of ozone is greater than that of air, on each layer of guide vanes, ozone is located in the lowest layer of gas above the liquid flow, close to the mixed liquid. Adding guide vanes and spreading the mixed liquid further increases the contact area between the ozone gas and the mixed liquid, and prolongs the contact time, so it is more conducive to the generation of ozone solution. By increasing the contact area and setting the flow path, the flow of the mixed liquid in the mixing cylinder is made as smooth as possible, the flow velocity is relatively small, and it flows in a laminar state, which reduces possible disturbances, prolongs the flow time, and increases the contact and dissolution of the ozone gas and the mixed liquid.

[0013] More preferably, the radial width of the guide plate is greater than the opening diameter of the inlet pipe, that is, the guide plate is wider than the opening of the inlet pipe to ensure that the mixed liquid falls on the guide plate after leaving the opening.

[0014] More preferably, at the same spiral angle, the outer edge of the guide plate in contact with the inner wall of the mixing cylinder is lower in height than the inner edge of the guide plate close to the spiral center line. That is, the guide plate is inclined toward the inner wall to form a groove channel, which can ensure that the mixed liquid flows quietly downward along the guide plate spiral.

[0015] More preferably, the inlet pipe is provided with an inlet guide plate at the opening in the mixing cylinder, which is used to guide the mixed liquid sent out from the inlet pipe opening to the guide plate; the upper end of the inlet guide plate is connected to the inlet pipe opening, and the lower end of the inlet guide plate is directly opposite to and close to or falls on the guide plate. Considering that there may be a height difference between the opening of the inlet pipe and the guide plate, the inlet guide plate is provided to guide the mixed liquid to fall on the guide plate, which can further ensure the stability of the flow and prevent the precipitation of ozone bubbles carried by vibration or turbulence.

[0016] Or more preferably, the inlet pipe is further provided with a streamlined bulky portion at the opening in the mixing tube, which is used to decelerate the relatively high-speed mixed liquid in the mixing tube assembly before it flows into the mixing tube, for example, flows onto the guide plate, so as to achieve quiet flow and reduce the possibility of gas precipitation due to interference with the fluid.

[0017] Preferably, a tail gas outlet is provided at the upper portion of the mixing cylinder to discharge tail gas precipitated from the mixed liquid. Considering that the ozone gas mixed in the mixed liquid may not be completely dissolved at one time and may precipitate from the liquid, a tail gas outlet is required to discharge excess ozone gas and to discharge possible air inside the mixing cylinder when the machine starts working.

[0018] More preferably, a recovery pipe is further included, connecting the tail gas outlet and the ozone inlet, for passing the tail gas into the mixing pipe. The recovery pipe is provided to return the discharged undissolved ozone gas to the mixing pipe, where it contacts the solvent liquid again, thereby increasing the chance of dissolution, reducing tail gas emissions, and reducing possible damage to the environment.

[0019] Preferably, the liquid outlet is arranged at the lower part of the liquid mixing cylinder. Moving the liquid outlet downwards can extend the flow path and time of the mixed liquid, which can help ensure that the ozone gas in the mixed liquid is fully dissolved.

[0020] Preferably, a jet tube is provided inside the mixing liquid tube assembly, connecting the ozone inlet and the mixing liquid tube, and used to spray into the mixing liquid tube to break up the ozone bubbles. The jet tube is provided to help accelerate the ozone airflow, and after hitting the liquid solvent, it increases the possibility of airflow breakage, reduces the volume of generated bubbles, and relatively increases the surface area of ​​the bubbles, thereby increasing the contact area between the ozone bubbles and the liquid solvent, increasing the surface tension of the liquid solvent on the bubbles, and helping the liquid to carry the bubbles to flow together.

[0021] Preferably, a mesh or porous breaking component is provided inside the mixing tube to break the ozone gas. By providing a mesh or porous structure, the gas can be forced to be broken during the flow to form small bubbles. Relatively speaking, small bubbles have a smaller weight / buoyancy and a larger surface area, so the surface adhesion between the small bubbles and the solvent liquid can be increased to overcome gravity / buoyancy and keep the bubbles relatively stable to follow the flow of the liquid. At the same time, a larger surface area also means that the small bubbles are dissolved by the liquid solvent more quickly.

[0022] In one embodiment, the crushing assembly includes multiple layers of porous plates, wherein the through holes on two adjacent layers of porous plates are staggered. More preferably, a crushing net is also provided on the through holes to further break up the ozone gas flow. The staggered arrangement of the through holes in two adjacent layers and the provision of a crushing net can obviously further extend the contact time between the gas and the liquid.

[0023] In another embodiment, the crushing assembly includes a crushing piece with a three-dimensional structure, and the crushing piece includes a three-dimensional structure formed by a plurality of barrier bars, and a plurality of interconnected holes are formed between the barrier bars. When the crushing piece is set, the crushing piece can be directly placed in the mixing tube when making the mixing tube, which is convenient for production and manufacturing.

[0024] In another embodiment, the breaking assembly further comprises a group of blades or protrusions fixed on the inner wall of the mixing tube. The blades or protrusions are arranged to disturb the flow of the solvent liquid in the mixing tube, helping to form turbulence to entrain more ozone bubbles.

[0025] In another embodiment, the crushing assembly is placed in a low temperature environment above the freezing point, for example, a cooling device is wrapped around the outer wall of the mixing tube to cool the solvent liquid inside the tube to increase the amount of ozone carried and dissolved in the solvent liquid and to slow down the overflow rate of ozone bubbles.

[0026] The working method of the preparation system of the utility model comprises the steps of:

[0027] a. The liquid solvent is input into the mixing tube through the liquid inlet;

[0028] b. Ozone gas is input into the mixing tube through the ozone inlet;

[0029] c. Ozone gas and liquid solvent are mixed in the mixing tube to generate a mixed liquid;

[0030] d. The mixed liquid is discharged from the inlet pipe into the mixing cylinder along the roughly tangential direction of the mixing cylinder;

[0031] e. The mixed liquid flows downward along the roughly tangential spiral of the mixing cylinder;

[0032] f. The mixed liquid flows to the liquid outlet and is output.

[0033] That is, by mixing the liquid solvent and ozone gas in the mixing tube, the liquid solvent carries the ozone bubbles into the mixing cylinder, and then flows quietly downward in a spiral along the tangential direction, gradually dissolving the ozone bubbles it carries during the flow, and generating a relatively stable ozone solution. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 This is a three-dimensional diagram of the overall structure of the ozone solution preparation system of the utility model;

[0035] Figure 2 This is a cross-sectional view of the overall structure of the ozone solution preparation system of the utility model;

[0036] Figure 3 It is a cross-sectional view of a liquid mixing cylinder in the ozone solution preparation system of the utility model;

[0037] Figure 4 This is a schematic diagram of the internal structure of the mixing pipe of the ozone solution preparation system of the utility model;

[0038] Figure 5 This is a schematic diagram of the structure of the crushing net in the mixing pipe of the ozone solution preparation system of the utility model;

[0039] Figure 6 This is a schematic diagram of the structure of the broken parts in the mixing pipe of the ozone solution preparation system of the utility model;

[0040] Figure 7 A schematic diagram of the structure of a cooling chamber in the ozone solution preparation system of the utility model;

[0041] In the figure: 1-mixing liquid cylinder; 2-bracket; 3-first mixing liquid pipe assembly; 4-second mixing liquid pipe assembly; 5-liquid outlet, 6-liquid inlet, 7-exhaust gas outlet, 8-recovery pipe, 9-ozone inlet, 10-jet pipe, 11-mixing liquid pipe, 111-first crushing baffle, 112-second crushing baffle, 113-through hole, 114-crushing net, 115-crushing piece, 116-blade, 12-inlet pipe, 121-inlet guide vane, 122-bell mouth, 123-guide vane, 13-cooling bin. DETAILED DESCRIPTION

[0042] In order to make the purpose, technical solution and advantages of the utility model clearer, the technical solution in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the utility model. Unless otherwise defined, the technical terms or scientific terms used herein should be understood by people with general skills in the field to which the utility model belongs. "Including" and similar words used in this article mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects.

[0043] The ozone solution preparation system of the utility model has an overall structure as follows Figure 1As shown, it includes a mixing liquid cylinder 1 for generating ozone solution, which is placed on a bracket 2. At least one liquid outlet 5 is opened on the mixing liquid cylinder 1, and the liquid outlet 5 is preferably arranged at the lower part or even the bottom of the mixing liquid cylinder 1, so as to facilitate the natural outflow of the ozone solution under the action of gravity. The mixing liquid cylinder 1 is also connected with at least one group of internally connected mixing liquid pipe components that form a channel. The mixing liquid pipe components are used to generate a mixed liquid of ozone bubbles and solvent liquid in the channel. The mixed liquid is not stable and is affected by vibrations, etc., and the ozone bubbles carried therein are easily precipitated. Specifically, the mixing liquid pipe component is connected to the mixing liquid cylinder 1, preferably the upper part of the mixing liquid cylinder 1, through the inlet pipe 12 at its end. The inlet pipe 12 is inserted into the inside of the mixing liquid cylinder 1 along the tangent close to the inner wall of the mixing liquid cylinder 1, and opens inside the mixing liquid cylinder 1 to send the mixed liquid into the mixing liquid cylinder 1. The opening of the inlet pipe 12 points to the tangent direction of the mixing tube 1 to ensure that when the mixed liquid enters the mixing tube 1 , it moves in a spiral close to the inner wall surface, gradually sinks to the bottom in the spiral, and then flows out from the liquid outlet 5 .

[0044] The mixing tube assembly can be provided in multiple groups as required, and the figure shows two groups: a first mixing tube assembly 3 and a second mixing tube assembly 4. The mixing tube assembly includes, along the flow direction of the liquid / gas in the internal channel (the ascending direction in the figure), a liquid inlet 6 for connecting to an external liquid solvent, an ozone inlet 9 for connecting to an external ozone gas source, a mixing tube 11 for crushing ozone and mixing ozone and liquid solvent to generate a mixed liquid, and an inlet pipe 12 connected to the interior of the mixing tube 1 and used to output the mixed liquid.

[0045] During operation, the liquid inlet 6 is connected to an external liquid solvent pool, or even to a primary ozone solution pool flowing out of the liquid outlet. The liquid solvent is input under power drive and enters the mixing pipe 11 at a certain initial velocity. At the same time, ozone gas is also input into the mixing pipe 11 from the ozone inlet 9, especially injected through a jet tube 10, and is broken into small bubbles by a crushing component and then mixed into the solvent liquid. Thus, the gas and liquid are mixed in the mixing pipe 11, and the solvent liquid is mixed with and carries ozone bubbles and flows into the inlet pipe 12.

[0046] Among them, because the diameters of the mixing tube 11 and the inlet tube 12 are much smaller than the diameter of the mixing cylinder 1, the mixed liquid fluid with a larger flow rate in the mixing component will have its flow rate greatly reduced after entering the mixing cylinder 1, and will be converted from turbulent flow to laminar flow.

[0047] In a more preferred embodiment, the interior of the mixing cylinder 1 is as follows Figure 2As shown in the cross-sectional view, a group of guide vanes 123 spiraling downward can also be arranged circumferentially, and the inlet pipe 12 opens near the guide vanes 123. In particular, the radial width of the guide vanes 123 is greater than the opening diameter of the inlet pipe 12 to ensure that all the mixed liquid is received. More preferably, the guide vanes 123 are arranged slightly inclined to face the inner wall, that is, along the length direction of the spiral, at the same length, the inner edge of the guide vane 123 close to the center of the mixing tube 1 is higher than the outer edge of the guide vane 123 contacting the inner wall. In this way, an approximately V-shaped groove flow channel is formed between the guide vane 123 and the inner wall, which further constrains the mixed liquid to flow stably in a laminar flow along the guide vane 123, reduces the overflow of ozone bubbles on the way of the spiral, and helps the ozone bubbles to be dissolved by the mixed liquid.

[0048] The guide plate 12 is provided to help ensure that the mixed liquid flows in a spiral flow in a low-speed laminar flow. During the flow, on the one hand, the mixed liquid dissolves the ozone bubbles mixed therein, and on the other hand, because the mixed liquid is spread on the guide plate 123, the surface area in contact with the gas above is increased, and because ozone is concentrated in the lower layer of the gas due to its high specific gravity, the contact surface between the mixed liquid and the ozone gas is increased, which also helps the ozone gas to dissolve in the mixed liquid. In addition, because there is a sufficiently long process and relative standing time, before the mixed liquid approaches the liquid outlet 5, the ozone bubbles that have not been dissolved in the mixed liquid will also be almost completely precipitated, gathered into large bubbles, and rise from the middle of the spiral to leave the mixed liquid, preventing them from being mixed in the mixed liquid and being output.

[0049] In another embodiment, Figure 3 As shown in the first liquid mixing tube assembly 3 at the opening of the liquid mixing cylinder 1, an inlet guide plate 121 is further provided between the opening of the inlet pipe 12 and the guide plate 123, the upper end of which is connected to the opening of the inlet pipe 12, and the lower end is directly opposite to and close to or falls on a layer of the guide plate 123. In this way, the unstable mixed liquid sent out from the opening of the inlet pipe 12 is guided to the guide plate 123 to prevent vibration caused by the drop, which causes bubbles to overflow in advance.

[0050] In another embodiment, Figure 3 As shown in the connection between the second mixing tube assembly 4 and the mixing tube 1, a streamlined bulky portion, such as a bell mouth 122, is provided at the end of the mixing tube 12. By enlarging the flow channel diameter and raising the fluid pressure at the outlet, the relatively high-speed mixed liquid in the second mixing tube assembly 4 is smoothly decelerated and then flows into the mixing tube 1, for example, flows onto the guide plate 123, so as to achieve quiet flow and reduce the possibility of precipitation of ozone gas mixed in the solvent liquid due to interference with the fluid.

[0051] In a more preferred embodiment, a tail gas outlet 7 is provided at the upper part, such as the top, of the mixing tube 1 to discharge the gas precipitated from the mixed liquid, including ozone gas. More preferably, the tail gas can also be returned to a certain ozone inlet 9 through an additional recovery pipe 8 and then sent to the mixing tube 11 again to maximize the utilization of ozone gas and reduce emissions.

[0052] In the utility model, the mixing tube 11 is mainly used to provide a mixture of ozone and solvent liquid. In order to carry the gas, the gas needs to be broken up to form small bubbles, which are then mixed into the solvent liquid. If the bubbles are too large, they are easily lifted by buoyancy and leave the solvent liquid prematurely. In order to carry the bubbles, the fluid flow rate in the mixing tube 11 needs to be relatively large, preferably forming turbulence, so that the bubbles are more easily mixed and enter the mixing tube 1 before the bubbles leave. In order to break up the ozone gas and form small bubbles to facilitate contact and carrying of the solvent liquid, a mesh or porous crushing component is also provided in the mixing tube 11. The crushing component also helps to prolong the passage time of the solvent liquid and increase the contact time with the ozone bubbles. In one embodiment, the internal structure of the mixing tube 11 is as follows Figure 4 As shown, the crushing assembly is composed of multiple layers of porous plates arranged along the gas path, and the positions of the through holes in two adjacent layers of porous plates are staggered. Figure 4 In the embodiment, the through hole 113 of the upper first crushing baffle 111 is arranged at the central position, and the through hole 113 of the lower second crushing baffle 112 is arranged at the peripheral position, so that the airflow can be forced to be separated, the path can be extended, small bubbles can be formed, and the passing time of the solvent liquid can be extended, thereby increasing the contact between the gas and the liquid. In particular, Figure 5 As shown, a crushing net 114 is also provided in the through hole 113 to further crush the airflow and generate small bubbles.

[0053] In another embodiment, Figure 6 As shown, considering the convenience of manufacturing, a three-dimensional mesh breaking piece 115 can also be directly used to fill the mixing liquid tube 11. The breaking piece 115 can be constructed by weaving multiple layers of barrier strips or barrier wires, and has a certain thickness, so that the gaps inside the breaking piece 115 can be interconnected to ensure that the gas and liquid pass through and contact each other during the passage to be fully mixed. The breaking piece 115 can be made separately in advance and inserted into the mixing liquid tube 11 when the mixing liquid tube 11 is produced.

[0054] In another embodiment, Figure 6 As shown, a group of obstacles can be arranged on the inner wall of the mixing tube 11 to disturb the high-speed solvent liquid and help form turbulence, which is more conducive to entraining bubbles. The obstacles can be blades 116 or similar protrusions fixed on the inner wall.

[0055] Because the solubility of gas in liquid is inversely proportional to the temperature, in a more preferred embodiment, the working environment temperature of the entire system can be lowered to a temperature close to the freezing point of the solvent liquid. For example, a cooling device, such as a water cooling bag or an ice bath device, or even an active cooling device, is wrapped around the mixing tube 11 to cool the mixing tube 11 and the solvent liquid inside. At the same time, the viscosity resistance of the solvent liquid also increases at low temperatures, which can slow down the overflow speed of the ozone bubbles. In one embodiment, the inlet Figure 7 As shown, the liquid mixing cylinder 1 can also be placed in a cooling chamber 13, and the temperature of the cooling chamber 13 can be adjusted and kept close to the freezing point of the solvent liquid. Of course, on the outer wall surface of the cooling chamber 13, corresponding to each inlet pipe 12, outlet 7, and recovery pipe 8 (if any), a corresponding through hole window is opened.

[0056] Therefore, the working method of the high-efficiency ozone solution preparation system of the utility model comprises the following steps:

[0057] a. The liquid solvent is input into the mixing tube 11 through the liquid inlet 6;

[0058] b. Ozone gas is input into the mixing pipe 11 through the ozone inlet 9;

[0059] c. The ozone gas and the liquid solvent are mixed in the mixing tube 11 to generate a mixed liquid;

[0060] d. The mixed liquid is discharged from the inlet pipe 12 into the mixing cylinder 1 along the substantially tangential direction of the mixing cylinder 1;

[0061] e. The mixed liquid flows downward along the generally tangential spiral of the mixing tube 1;

[0062] f. The mixed liquid flows to the liquid outlet 7 and is output.

[0063] Of course, the mixed liquid flowing out of the liquid outlet 7 can also be sent to the liquid inlet 6 again according to the concentration requirement, and accept ozone gas to be dissolved in order to obtain a higher ozone concentration.

[0064] In summary, the utility model sets the inlet pipe 12 tangentially close to the inner wall of the mixing liquid barrel 1, so that after the mixed liquid flows out from the outlet, it moves forward tangentially to form a spiral path and quietly descends, and dissolves the ozone bubbles carried in it during the flow, while contacting and absorbing the ozone gas in the mixing liquid barrel 1, so that a stable relatively high concentration ozone solution can be quickly generated, and the ozone concentration in the mixed liquid flowing out of the liquid outlet 5 is stable at more than 70ppm. After being used for cleaning silicon wafers in the photovoltaic industry, compared with the 50ppm ozone solution commonly used in current technology, a better cleaning effect can be achieved under the same cleaning time, and the subsequent photovoltaic efficiency of the silicon wafer can be increased by about 0.01-0.03 percentage points; or when the same cleaning effect is met, the cleaning time can be reduced by 30%.

[0065] Although the embodiments of the present invention are described in detail above, it is obvious to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations are within the scope and spirit of the present invention as described in the claims. Moreover, the present invention described herein may have other embodiments and may be implemented or realized in a variety of ways.

Claims

1. An efficient ozone solution preparation system, characterized in that: The invention comprises a mixing liquid cylinder for generating an ozone solution, and at least one group of internally connected mixing liquid pipe components; the mixing liquid pipe components sequentially comprise, along the flow direction, a liquid inlet for connecting an external liquid solvent, an ozone inlet for connecting an external ozone gas source, a mixing liquid pipe for crushing ozone and mixing ozone and liquid solvent to generate a mixed liquid, and an inlet pipe connected to the interior of the mixing liquid cylinder and used to output the mixed liquid; The mixing cylinder is also provided with at least one liquid outlet for discharging the mixed ozone solution; The inlet pipe is arranged along the substantially tangential direction of the liquid mixing cylinder and close to the inner wall of the liquid mixing cylinder, and the opening of the inlet pipe is directed substantially along the tangential direction.

2. The efficient ozone solution preparation system according to claim 1, characterized in that: A group of guide plates spiraling downward are arranged in the circumferential direction inside the mixing cylinder, and the inlet pipe opens near the guide plates.

3. The efficient ozone solution preparation system according to claim 2 is characterized in that: The radial width of the guide vane is greater than the opening diameter of the inlet pipe.

4. The efficient ozone solution preparation system according to claim 2, characterized in that: At the same spiral angle, the outer edge of the guide plate that contacts the inner wall of the liquid mixing cylinder is lower in height than the inner edge of the guide plate close to the spiral center line.

5. The efficient ozone solution preparation system according to claim 2, characterized in that: The inlet pipe is also provided with an inlet guide plate at the opening in the mixing cylinder, which is used to guide the mixed liquid sent out from the inlet pipe opening to the guide plate; the upper end of the inlet guide plate is connected to the inlet pipe opening, and the lower end of the inlet guide plate is directly opposite to and close to or falls on the guide plate.

6. The efficient ozone solution preparation system according to any one of claims 1 to 5, characterized in that: The upper part of the mixing cylinder is provided with an exhaust gas outlet for discharging the exhaust gas precipitated from the mixed liquid.

7. The efficient ozone solution preparation system according to claim 6, characterized in that: It also includes a recovery pipe, which is connected to the tail gas outlet and the ozone inlet and is used to pass the tail gas into the mixing pipe.

8. The efficient ozone solution preparation system according to any one of claims 1 to 5, characterized in that: A jet pipe is also provided inside the mixing liquid pipe assembly, communicating with the ozone inlet and the mixing liquid pipe, and is used for spraying toward the mixing liquid pipe to break up ozone bubbles.

9. The efficient ozone solution preparation system according to any one of claims 1 to 5, characterized in that: A mesh or porous breaking component is arranged inside the mixing tube to break up the ozone gas and hinder the flow rate of the liquid solvent.

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