Automatic liquid dropping device

Abstract

The utility model relates to the technical field of liquid dropping devices, in particular to an automatic liquid dropping device which comprises a mounting support, the mounting support comprises an upper support and a lower support, a plurality of liquid storage tanks are arranged on the upper support, connecting covers are arranged at openings of the liquid storage tanks, feeding pipes are arranged on the connecting covers, one ends of the feeding pipes extend into the liquid storage tanks, and the other ends of the feeding pipes extend into the liquid storage tanks. A peristaltic pump is arranged on the feeding pipe, a connecting cavity is formed in the side wall of the connecting cover in the circumferential direction of the connecting cover, and a quick release assembly used for fixing the liquid storage tank is arranged in the connecting cavity; the upper support and the lower support are connected through a supporting plate, a fixing plate is further arranged between the upper support and the lower support, the fixing plate is connected to the lower support through a threaded rod, a moving groove is formed in the fixing plate in the length direction of the fixing plate, and a movable mounting base used for mounting a feeding pipe is arranged in the moving groove. When different types of liquid need to be replaced, namely different liquid storage tanks need to be replaced, the liquid storage tanks can be quickly detached from the upper bracket, so that different liquid storage tanks can be replaced.

Description

Technical Field

[0001] The utility model relates to the technical field of liquid dripping devices, in particular to an automatic liquid dripping device. Background Art

[0002] In semiconductor manufacturing processes, microelectronic IC manufacturing processes, and micro-nano manufacturing processes, substrates generally go through multiple process steps such as photolithography, etching, deposition, etching, and packaging. Some of these processes involve dripping liquid (photoresist, developer, chemical reagents, etc.) onto the substrate and then processing the substrate. At the same time, the amount of liquid (photoresist, developer, chemical reagents, etc.) added also needs to be precisely controlled to ensure its quality and production efficiency.

[0003] For example, patent number CN215910420U discloses an automatic liquid replenishment titration device. Although the structure of the bracket, liquid storage tank, liquid replenishment tube and peristaltic pump in the automatic liquid replenishment titration device can realize automatic dripping of the liquid in the liquid storage tank onto the silicon wafer on the spin coater, in actual use, the liquid storage tube is generally fixed to the bracket by fasteners such as bolts. Therefore, when replacing different liquid storage tanks in actual use, it is necessary to disassemble the liquid storage tank by screwing the bolts, which is inconvenient to operate and needs to be improved. Utility Model Content

[0004] The purpose of the utility model is to provide an automatic dripping device to solve the problems raised in the above background technology.

[0005] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0006] An automatic dripping device comprises a mounting bracket, the mounting bracket comprises an upper bracket and a lower bracket, a plurality of liquid storage tanks are arranged on the upper bracket, a connecting cover is arranged at the opening of the liquid storage tank, a feeding pipe with one end extending into the liquid storage tank is arranged on the connecting cover, a peristaltic pump is arranged on the feeding pipe, a connecting cavity is arranged along the circumference of the side wall of the connecting cover, a quick-release assembly for fixing the liquid storage tank is arranged in the connecting cavity; the upper bracket and the lower bracket are connected by a supporting plate, a fixing plate is also arranged between the upper bracket and the lower bracket, the fixing plate is connected to the lower bracket by a fixing rod, a movable groove is arranged on the fixing plate along the length direction thereof, a movable mounting seat for mounting the feeding pipe is arranged in the movable groove.

[0007] Preferably, an annular groove is provided on the outer wall of the liquid storage tank along its circumference, and the quick-release assembly includes locking rods arranged opposite to each other, with both ends of the locking rods respectively extending through the connecting cavity, the locking rods are movably arranged, a driving plate is provided on the locking rod located in the connecting cavity, a spring for driving the locking rod to extend into the annular groove is sleeved on the locking rod located in the connecting cavity, and a driving assembly for the locking rod to disengage from the annular groove is also provided in the connecting cavity.

[0008] Preferably, the driving assembly includes a driving rod with one end extending out of the connecting cavity, the extending ends of the driving rod are connected by a connecting rod, a first inclined surface is provided at the upper end of the driving plate, and a second inclined surface matching the corresponding first inclined surface is provided at the lower end of the driving rod. The driving rod moves downward to drive the first inclined surface to squeeze the second inclined surface to realize the locking rod disengaging from the annular groove.

[0009] Preferably, sliding grooves are provided on the side walls opposite to the connecting cavity along the height direction thereof, and the driving rod is provided with fixing blocks at both ends thereof which extend into the corresponding sliding grooves for movement.

[0010] Preferably, a notch groove corresponding to the movable groove is provided in the middle of the mounting seat, and the side wall of the movable groove slides into the corresponding notch groove. A fixing bolt for abutting against the fixing plate is provided at the bottom wall of the mounting seat, and the fixing bolt is tightened to keep the mounting seat in the current position.

[0011] Preferably, the upper end of the connecting cavity is opened, and a blocking ring for sealing the opening of the connecting cavity is provided at the opening of the connecting cavity.

[0012] Compared with the prior art, the beneficial effects of the utility model are:

[0013] 1. The automatic dripping device enables the liquid storage tank to be quickly removed from the upper bracket to replace different types of liquids, that is, when different liquid storage tanks need to be replaced. Compared with the existing ones, the dripping device in this embodiment can quickly replace the liquid storage tank to achieve the replacement of different liquids without the use of tools, which is more convenient.

[0014] 2. The automatic dripping device, through the movable setting of the mounting seat in the movable groove, makes it possible to change the position of the mounting seat in the movable groove when dripping is required at different positions of the silicon wafer, thereby adjusting the dripping position of the feed pipe.

[0015] 3. The automatic dripping device can achieve precise control of different liquids (photoresist, developer, chemical reagents, etc.) by accurately adjusting the pump speed and flow rate through the peristaltic pump, ensuring the accuracy and stability of liquid dripping during the manufacturing process, thereby improving the manufacturing effect of the substrate. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 The utility model is a schematic diagram of the overall structure of an automatic dripping device.

[0017] Figure 2 It is a structural schematic diagram of the upper bracket, the lower bracket and the spin coater in the utility model.

[0018] Figure 3 It is a schematic diagram of the cross-sectional structure of the liquid storage tank and the connecting cover in the utility model.

[0019] Figure 4 It is a structural schematic diagram of the mounting seat in the utility model.

[0020] Figure 5 It is a schematic diagram of the structure of the dripper and the dropper in the utility model when they correspond.

[0021] The meaning of the symbols in the figure is:

[0022] 100, upper bracket; 101, lower bracket; 102, fixing rod; 110, liquid storage tank; 120, connecting cover; 130, peristaltic pump; 131, feeding pipe; 140, fixing plate; 141, moving groove; 150, mounting seat; 160, spin coater;

[0023] 200, container mounting hole; 210, pump mounting hole;

[0024] 300, connecting cavity; 301, annular slot; 310, locking rod; 311, driving plate; 312, spring; 320, driving rod; 321, sliding groove; 322, fixing block; 330, connecting rod; 340, blocking ring;

[0025] 400, notched groove; 410, fixing bolt. DETAILED DESCRIPTION

[0026] In order to further understand the content of the utility model, the utility model is described in detail in conjunction with the accompanying drawings and embodiments. It should be understood that the embodiments are only used to explain the utility model but not to limit it.

[0027] The following is combined with Figure 1-Figure 4 This embodiment is described in further detail.

[0028] See also Figure 1 An automatic dripping device in this embodiment includes a mounting bracket, which includes an upper bracket 100 and a lower bracket 101. The upper bracket 100 is provided with a plurality of liquid storage tanks 110. A connecting cover 120 is provided at the opening of the liquid storage tank 110. A feeding pipe 131 with one end extending into the liquid storage tank 110 is provided on the connecting cover 120. A peristaltic pump 130 is provided on the feeding pipe 131. A connecting cavity 300 is provided along the circumference of the side wall of the connecting cover 120. A quick-release assembly for fixing the liquid storage tank 110 is provided in the connecting cavity 300. The upper bracket 100 and the lower bracket 101 are connected by a supporting plate. A fixing plate 140 is also provided between the upper bracket 100 and the lower bracket 101. The fixing plate 140 is connected to the lower bracket 101 through a fixing rod 102. A movable groove 141 is provided on the fixing plate 140 along its length direction. A movable mounting seat 150 for mounting the feeding pipe 131 is provided in the movable groove 141.

[0029] In this embodiment, a spin coater 160 is provided at the upper end surface of the lower bracket 101, which is an existing structure. The silicon wafer to be processed is placed on the spin coater 160, wherein the liquid storage tank 110 stores liquid for processing the silicon wafer, and the peristaltic pump 130 is used to extract the liquid in the liquid storage tank 110 and drip it into the upper surface of the silicon wafer on the spin coater 160 through the feeding pipe 131, and cooperate with the spin coater 160 to realize the processing of the silicon wafer; In this embodiment, the peristaltic pump 130 is an existing structure, which can automatically drip the liquid in the liquid storage tank 110 onto the upper surface of the silicon wafer on the spin coater 160 through the feeding pipe 131. When it is actually used, a pump mounting hole 210 for mounting the peristaltic pump 130 is provided on the upper bracket 100;

[0030] Among them, by setting the quick-release assembly, when it is necessary to replace different types of liquids, that is, when replacing different liquid storage tanks 110, the liquid storage tank 110 can be quickly removed from the upper bracket 100 to replace different liquid storage tanks 110. Compared with the existing ones, the dripping device in this embodiment can quickly replace the liquid storage tank 110 to achieve the replacement of different liquids, and can be adapted to different capacities, such as 100ML and 5L capacity liquid storage tanks, and no tools are needed, which is more convenient;

[0031] The mounting seat 150 is movably arranged in the movable groove 141, so that when it is necessary to drip liquid at different positions of the silicon wafer, the position of the mounting seat 150 in the movable groove 141 can be changed, thereby adjusting the dripping position of the feeding pipe 131;

[0032] In actual use of this embodiment, the upper bracket 100 is further provided with a container mounting hole 200 for mounting the liquid storage tank 110, and the connecting cover 120 is fixedly mounted at the container mounting hole 200, and the liquid storage tank 110 passes through the corresponding container mounting hole 200 and extends into the corresponding connecting cover 120, and the installation of the liquid storage tank 110 on the connecting cover 120 is realized by a quick release assembly;

[0033] The spin coating machine 160 is provided with a spin coating chamber for placing silicon wafers, a cover plate is provided at the opening of the spin coating chamber, a strip groove is provided on the cover plate, a plurality of movable dropper holders are provided in the strip groove, a dropper connected to the spin coating chamber is provided in the dropper holder, wherein a dripper connected to the feed pipe 131 is provided at the bottom end of the mounting seat 150, the dripper is made of hard material and will not be skewed with the movement of the mounting seat 150, and the dripper can discharge the liquid in the feed pipe 131 from the dropper into the spin coating chamber to process the silicon wafer;

[0034] The cover plate on the spin coater 160 is transparent and visible, so that the state of the spin coating can be observed in real time.

[0035] In actual use, one side of the strip groove is provided with a disengagement groove for the dropper bracket to disengage. When the dropper bracket slides from the strip groove to the disengagement groove, it can move upward to take out the dropper bracket. A gasket is also provided between the dropper brackets. The gasket can block the strip groove to prevent the liquid in the spin coating chamber from dripping out. The gasket has a certain elasticity and can be deformed to adapt to the distance between the dropper brackets.

[0036] Among them, a fixing rod 102 is relatively provided on the lower bracket 101, and a fixing plate 140 is arranged through the corresponding fixing rod 102. A vertical groove is provided along the height direction of the end faces of the fixing rod 102 that are away from each other. A hand screw is provided at the opposite end face of the fixing plate 140. Tighten the hand screw so that the hand screw presses against the vertical groove, thereby fixing the distance between the fixing plate 140 and the spin coater 160. Loosen the hand screw so that the hand screw is separated from the vertical groove. At this time, the fixing plate 140 can slide on the fixing rod 102, thereby adjusting the distance between the fixing plate 140 and the spin coater 160.

[0037] like Figure 1 and Figure 3 As shown, in this embodiment, an annular groove 301 is provided on the outer wall of the liquid storage tank 110 along its circumference, and the quick-release assembly includes relatively arranged locking rods 310, both ends of the locking rod 310 respectively penetrate the connecting cavity 300 and extend out, the locking rod 310 is movably arranged, a driving plate 311 is provided on the locking rod 310 located in the connecting cavity 300, and a spring 312 for driving the locking rod 310 to extend into the annular groove 301 is sleeved on the locking rod 310 located in the connecting cavity 300, and a driving assembly for the locking rod 310 to disengage from the annular groove 301 is also provided in the connecting cavity 300.

[0038] In this embodiment, the locking rod 310 extends into the annular slot 301, thereby fixing the liquid storage tank 110 that passes through the container mounting hole 200 and extends into the connecting cover 120, thereby achieving fixed installation of the liquid storage tank 110 on the upper bracket 100; when the locking rod 310 is out of the annular slot 301, the fixation of the liquid storage tank 110 can be released, so that the liquid storage tank 110 can be disassembled to replace the liquid storage tank 110 storing different liquids;

[0039] The annular slot 301 is arranged along the circumference of the liquid storage tank 110. With this structure, the locking rod 310 can be more easily inserted into the annular slot 301 to fix the liquid storage tank 110.

[0040] The driving plate 311 and the locking rod 310 are arranged perpendicular to each other. This structure facilitates the installation of the spring 312 on one side of the locking rod 310. When the liquid storage tank 110 needs to be fixed, the spring 312 can push the driving plate 311 to move, thereby driving one end of the locking rod 310 to extend into the annular slot 301.

[0041] In the process of the driving component driving the locking rod 310 to move, both ends of the locking rod 310 are overlapped on the inner wall of the connecting cover 120, and the force is more balanced. Through this structure, both ends of the locking rod 310 are subjected to force, and the locking rod 310 can move more smoothly during the movement.

[0042] like Figure 3 As shown, in this embodiment, the driving assembly includes a driving rod 320 with one end extending out of the connecting cavity 300, and the extending ends of the driving rod 320 are connected by a connecting rod 330. A first inclined surface is provided at the upper end of the driving plate 311, and a second inclined surface matching the corresponding first inclined surface is provided at the lower end of the driving rod 320. The driving rod 320 moves downward to drive the first inclined surface to squeeze the second inclined surface to realize the locking rod 310 to disengage from the annular groove 301.

[0043] In this embodiment, the driving rod 320 moves downward in the connecting cavity 300 to make the first inclined surface move downward, and the first inclined surface moves downward to squeeze the second inclined surface. Since the driving plate 311 is restricted by the locking rod 310, the spring 312 is compressed, and then one end of the locking rod 310 is retracted into the corresponding connecting cavity 300, that is, the locking rod 310 is separated from the annular groove 301 to release the fixation of the liquid storage tank 110. At this time, the liquid storage tank 110 containing different liquids can be replaced;

[0044] When the driving rod 320 moves downward and the second inclined surface slides along the first inclined surface until it is disengaged, one side surface of the driving plate 311 abuts against a side wall of the driving rod 320. At this time, the position of the driving plate 311 is fixed, so that the locking rod 310 remains disengaged from the annular slot 301. After the replacement of the liquid storage tank 110 is completed, the driving rod 320 can be lifted up to release the side wall of the driving rod 320 from the abutment against the side wall of the driving plate 311. Under the thrust of the spring 312, the driving plate 311 moves toward the annular slot 301, driving the locking rod 310 to extend into the annular slot 301.

[0045] In actual use of this embodiment, the locking rod 310 is in the shape of a square column, and the connecting cover 120 is provided with a square hole for the locking rod 310 to pass through. With this structure, the locking rod 310 is restricted when moving along the connecting cavity 300, and will not rotate in the circumferential direction, so that the first inclined surface is separated from the second inclined surface;

[0046] Among them, the upper end of the connecting cavity 300 is opened, and a blocking ring 340 for sealing the opening of the connecting cavity 300 is provided. The upper end of the driving rod 320 passes through the blocking ring 340 and extends out. Through the setting of the blocking ring 340, the driving rod 320 will not completely escape from the connecting cavity 300 when moving. At the same time, through the setting of the connecting rod 330, the driving rods 320 on both sides can be moved at the same time. The two second driving rods 320 can be moved synchronously in one operation, which reduces the operating steps and is more convenient to operate.

[0047] like Figure 3 As shown, in this embodiment, sliding grooves 321 are provided on the opposite side walls of the connecting cavity 300 along its height direction, and the driving rod 320 is provided with fixing blocks 322 at both ends extending into the corresponding sliding grooves 321 for movement.

[0048] In this embodiment, the sliding groove 321 and the fixing block 322 are provided to limit the moving direction of the driving rod 320, that is, the driving rod 320 can only slide up and down along the sliding groove 321. With this structure, the first inclined surface can be kept in a state of being pressed against the second inclined surface and will not be separated, which would affect its normal use.

[0049] The movement of the fixed block 322 in the sliding groove 321 also plays a limiting role, that is, the fixed block 322 can only move in the sliding groove 321, thereby limiting the moving distance of the second driving rod 320 and preventing one end of the driving rod 320 from completely detaching from the connecting cavity 300.

[0050] like Figure 1 and Figure 4 As shown, in this embodiment, a notch groove 400 corresponding to the movable groove 141 is provided in the middle of the mounting seat 150, and the side wall of the movable groove 141 slides into the corresponding notch groove 400. A fixing bolt 410 for abutting against the fixing plate 140 is provided at the bottom wall of the mounting seat 150, and tightening the fixing bolt 410 is used to keep the mounting seat 150 in the current position.

[0051] In this embodiment, the mounting seat 150 is provided with a through hole for the feed pipe 131 to pass through. When the position of the feed pipe 131 needs to be adjusted, the side wall of the movable groove 141 slides into the corresponding notch groove 400, so that the mounting seat 150 is slidably installed in the movable groove 141;

[0052] When the position of the mounting seat 150 needs to be fixed, the fixing bolts 410 can be tightened to make it close to the lower plate surface of the fixing plate 140, and the position of the feed pipe 131 is also fixed at this time. When the fixing bolts 410 are loosened, the fixing of the mounting seat 150 can be released, so that it can be moved;

[0053] Working principle: When it is necessary to use different liquids to process the silicon wafers in the spin coater 160, that is, when it is necessary to replace a different liquid storage tank 110, the connecting rod 330 can be pressed downward, and the second inclined surface moves along the first inclined surface and disengages from the second inclined surface. A side wall of the driving rod 320 abuts against a side wall of the driving plate 311. At this time, the position of the driving plate 311 is fixed, so that the locking rod 310 is kept out of the annular groove hole 301. At this time, the liquid storage tank 110 can be taken out and replaced. After the replacement of the liquid storage tank 110 is completed, it can be put on Lift the driving rod 320 so that one side wall of the driving rod 320 is released from the state of abutting against the side wall of the driving plate 311. Under the thrust of the spring 312, the driving plate 311 moves toward the annular groove 301, driving the locking rod 310 to extend into the annular groove 301 to fix the liquid storage tank 110. When it is necessary to drip liquid at different positions of the silicon wafer, the mounting seat 150 can be moved in the movable groove 141. When it moves to the desired position, tighten the fixing bolt 410 to fix the position of the mounting seat 150, thereby fixing the position of the feeding pipe 131.

[0054] In short, the above is only a preferred embodiment of the present utility model, and all equivalent changes and modifications made according to the scope of the patent application of the present utility model should fall within the scope of the present utility model patent.

Claims

1. An automatic dripping device, characterized in that: The invention comprises a mounting bracket, wherein the mounting bracket comprises an upper bracket (100) and a lower bracket (101), wherein a plurality of liquid storage tanks (110) are arranged on the upper bracket (100), a connecting cover (120) is arranged at the opening of the liquid storage tank (110), a feeding pipe (131) having one end extending into the liquid storage tank (110) is arranged on the connecting cover (120), a peristaltic pump (130) is arranged on the feeding pipe (131), a connecting cavity (300) is arranged in the side wall of the connecting cover (120) along the circumference thereof, and a fluid is arranged in the connecting cavity (300) for A quick-release assembly for fixing a liquid storage tank (110); an upper bracket (100) and a lower bracket (101) are connected via a support plate; a fixing plate (140) is further provided between the upper bracket (100) and the lower bracket (101); the fixing plate (140) is connected to the lower bracket (101) via a fixing rod (102); a movable groove (141) is provided on the fixing plate (140) along its length direction; a movable mounting seat (150) is provided in the movable groove (141) and is used to mount a feed pipe (131).

2. An automatic dripping device according to claim 1, characterized in that: An annular groove (301) is provided on the outer wall of the liquid storage tank (110) along its circumference. The quick-release assembly comprises locking rods (310) arranged opposite to each other. Two ends of the locking rod (310) respectively penetrate the connecting cavity (300) and extend out. The locking rod (310) is movably arranged. A driving plate (311) is provided on the locking rod (310) located in the connecting cavity (300). A spring (312) for driving the locking rod (310) to extend into the annular groove (301) is sleeved on the locking rod (310) located in the connecting cavity (300). A driving assembly for the locking rod (310) to separate from the annular groove (301) is also provided in the connecting cavity (300).

3. An automatic dripping device according to claim 2, characterized in that: The driving assembly comprises a driving rod (320) with one end extending out of the connecting cavity (300); the extending ends of the driving rod (320) are connected via a connecting rod (330); a first inclined surface is provided at the upper end of the driving plate (311); a second inclined surface matching the corresponding first inclined surface is provided at the lower end of the driving rod (320); the driving rod (320) moves downward to drive the first inclined surface to squeeze the second inclined surface so as to realize the locking rod (310) being separated from the annular groove (301).

4. The automatic dripping device according to claim 3, characterized in that: The side walls opposite to the connection cavity (300) are provided with sliding grooves (321) along the height direction thereof, and the driving rod (320) is provided with fixed blocks (322) at both ends thereof which extend into the corresponding sliding grooves (321) for movement.

5. The automatic dripping device according to claim 1, characterized in that: A notch groove (400) corresponding to the movable groove (141) is provided in the middle of the mounting seat (150), and the side wall of the movable groove (141) is slidably inserted into the corresponding notch groove (400). A fixing bolt (410) for abutting against the fixing plate (140) is provided at the bottom wall of the mounting seat (150), and the fixing bolt (410) is tightened to place the mounting seat (150) in the current position.

6. The automatic dripping device according to claim 1, characterized in that: The upper end of the connecting cavity (300) is provided with an opening, and a blocking ring (340) for sealing the opening of the connecting cavity (300) is provided at the opening.

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