Polishing device

Abstract

The utility model relates to the field of wafer processing, and discloses a polishing device which comprises a base, a clamping structure, a driving motor and a torque protector, the clamping structure and the driving motor are both installed on the base, the driving motor is used for driving the clamping structure to rotate, and the torque protector is used for protecting the clamping structure. And the torque protector is arranged between the driving motor and the base. And a torque protector is arranged, and when the clothes of the worker are stirred into the polishing device, the torque protector is triggered, so that the polishing device stops working, and danger is avoided.

Description

Technical Field

[0001] The utility model relates to the field of wafer processing, in particular to a wafer production auxiliary equipment, and specifically to a grinding device. Background Art

[0002] The carrier tool used in crystal processing is usually treated with boron nitride coating to increase the service life of the carrier tool. After the carrier tool is used to assist the crystal growth, the boron nitride on the surface of the carrier tool is easy to delaminate, and the boron nitride on the surface of the carrier tool needs to be polished, otherwise it will affect the reuse of the carrier tool.

[0003] CN215281306U discloses a polishing and grinding machine with a braking function, comprising a base, a three-jaw chuck rotatably connected to the base, a driving member for driving the three-jaw chuck to rotate provided on the base, and a braking member for braking the three-jaw chuck provided on the base. The above scheme helps to improve the polishing and grinding efficiency of the workpiece. However, when the staff operates the grinder to grind the workpiece, the clothes and gloves on the body are easily mixed into the grinder, causing danger. Utility Model Content

[0004] In view of the defects and shortcomings of the prior art, the utility model provides a grinding device.

[0005] A grinding device includes a base, a clamping structure, a driving structure and a torque protector, wherein the driving structure includes a driving motor, and the clamping structure and the driving motor are both installed on the base; the driving motor is used to drive the clamping structure to rotate, and the torque protector is arranged between the driving motor and the base.

[0006] Preferably, the clamping structure comprises a three-jaw chuck and a clamp, wherein the three-jaw chuck is rotatably connected to the base; the clamp is a hollow cylindrical structure, and the clamp is fixedly connected to the three-jaw chuck.

[0007] Preferably, the clamp is provided with air holes.

[0008] Preferably, it further comprises a lifting column and an auxiliary wheel, wherein the auxiliary wheel is mounted on the top of the lifting column and is located below the clamp.

[0009] Preferably, the driving structure also includes a belt, a driving wheel and a driven wheel, the driving wheel and the driven wheel are both rotatably connected to the base, the driving motor is used to drive the driving wheel to rotate, the driven wheel and the rotating shaft of the three-jaw chuck are fixedly connected and coaxial, and the belt is arranged around the driving wheel and the driven wheel; the torque protector is installed on the output shaft of the driving motor.

[0010] Preferably, the radius of the driving wheel is smaller than the radius of the driven wheel.

[0011] Preferably, a speed reduction structure for reducing the rotation speed of the driving wheel is provided on the base, and the speed reduction structure is installed on the output shaft of the driving motor.

[0012] Preferably, the torque protector includes a sensor, a control unit, an output unit and a reset unit, the sensor, the control unit, the output unit and the reset unit are electrically connected in sequence, the sensor is used to monitor the torque of the drive motor, and the output unit is connected to the output shaft of the drive motor.

[0013] Preferably, it also includes a foot switch and a PLC control box, the foot switch is electrically connected to the drive motor, and the PLC control box is electrically connected to the torque protector, the drive motor, and the deceleration structure respectively.

[0014] Compared with the prior art, the utility model has the following obvious beneficial effects:

[0015] (1) By setting a torque protector to monitor the torque of the drive structure, when the worker's clothes are entangled in the grinding device, the torque of the drive structure increases. When it exceeds the preset safety value, the torque protector is activated, causing the drive structure to stop running and the grinding device to stop working, avoiding danger.

[0016] (2) A speed reduction structure is provided to control the rotation speed of the three-jaw chuck to improve the stability and safety of the device; the radius of the driving wheel is smaller than the radius of the driven wheel to further reduce the rotation speed of the three-jaw chuck. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a schematic diagram of the overall structure of the grinding device in Example 1.

[0018] Figure 2 This is a side view of the grinding device in Example 1.

[0019] Figure 3 Schematic diagram of the structure of the driving structure in Example 1.

[0020] Explanation of reference numerals: 1. Base; 2. Clamping structure; 201. Three-jaw chuck; 202. Clamp; 203. Air hole; 3. Driving structure; 301. Driving motor; 302. Belt; 303. Driving wheel; 304. Driven wheel; 4. Auxiliary structure; 401. Lifting column; 402. Auxiliary wheel; 5. Torque protector; 6. Speed ​​reduction structure; 7. Control system; 701. Foot switch; 702. PLC control box; 7021. Fault reset button; 7022; Fault light; 7023. Speed ​​adjustment button; 7024. Emergency stop button. DETAILED DESCRIPTION

[0021] In order to make the technical problems, technical solutions and advantages to be solved by the present invention clearer, they will be described in detail below in conjunction with specific examples, but the protection scope of the present invention is not limited to the following specific embodiments.

[0022] Unless otherwise defined, all professional terms used below have the same meaning as those generally understood by those skilled in the art. The professional terms used herein are only for the purpose of describing specific embodiments and are not intended to limit the scope of protection of the present utility model.

[0023] Embodiment 1:

[0024] A grinding device, referring to Figure 1 and Figure 2 , including a base 1, a clamping structure 2, a driving structure 3 and an auxiliary structure 4, the clamping structure 2 is used to clamp the workpiece and is installed on the top of the base 1, the driving structure 3 is used to drive the clamping structure 2 to rotate, and the auxiliary structure 4 is used to support the clamping structure 2.

[0025] Reference Figure 2 , the clamping structure 2 includes a three-jaw chuck 201 and a fixture 202, the three-jaw chuck 201 is fixedly connected to the top of the base 1, the fixture 202 is a hollow cylindrical structure, the fixture 202 is used to install the workpiece, and the inner wall of the fixture 202 is adapted to the workpiece. The fixture 202 is fixedly connected to the three-jaw chuck 201, and the three clamping parts of the three-jaw chuck 201 are close to each other to fix the fixture 202, so that the fixture 202 and the three-jaw chuck 201 are coaxial. In this embodiment, the hollow cylindrical structure is formed by the clamping part 1 and the clamping part 2, and the clamping part 1 and the clamping part 2 are fixed by fixing screws. When installing the workpiece, the workpiece is placed on the clamping part 1, then the clamping part 2 is assembled, the clamping part 2 is fixed with a fixing screw, and then the three-jaw chuck 201 is used to fix the fixture 202, that is, the workpiece is assembled. In practical applications, a plurality of different types of fixtures 202 can be set to install different types of workpieces. The clamp 202 is provided to prevent the three-jaw chuck 201 from directly clamping the workpiece, thereby preventing the three-jaw chuck 201 from damaging the boron nitride material on the workpiece.

[0026] During the grinding process, the workpiece heats up due to friction, and the air in the fixture 202 flows out from the gap between the fixture 202 and the workpiece. After grinding, the fixture 202 is almost in a vacuum state, making it difficult to remove the workpiece. In order to avoid the above situation, an air hole 203 is opened on the side wall of the fixture 202 to balance the air pressure inside and outside the fixture 202, making it easier to remove the workpiece.

[0027] Reference Figure 2 and Figure 3The driving structure 3 includes a driving motor 301, a belt 302, a driving wheel 303 and a driven wheel 304. The driving motor 301 is installed at the lower part of the base 1. The driving wheel 303 and the driven wheel 304 are both rotatably connected to the base 1. The driving motor 301 is used to drive the driving wheel 303 to rotate. The driven wheel 304 and the rotating shaft of the three-jaw chuck 201 are fixedly connected and coaxial. The driven wheel 304 drives the three-jaw chuck 201 to rotate. The driven wheel 304 is used to drive the three-jaw chuck 201 to rotate. The driven wheel 304 and the rotating shaft of the three-jaw chuck 201 are coaxially arranged. The belt 302 is arranged around the driving wheel 303 and the driven wheel 304, and the belt 302 is in a tensioned state. When the grinding device is working, the driving motor 301 is started to drive the driving wheel 303 to rotate, and the belt 302 is used to drive the driven wheel 304 to rotate, that is, the three-jaw chuck 201 is driven to rotate.

[0028] Reference Figure 2 The grinding device further includes a torque protector 5 and a reduction structure 6. The torque protector 5 is installed between the base 1 and the drive motor 301. The torque protector 5 is connected to the output shaft of the drive motor 301. The reduction structure 6 is used to reduce the rotation speed of the driving wheel 303. The reduction structure 6 is installed between the torque protector and the base 1. The radius of the driving wheel 303 is smaller than the radius of the driven wheel 304. The reduction structure 6 is used to reduce the rotation speed of the three-jaw chuck 201, and the rotation speed of the three-jaw chuck 201 is controlled to be 0~500rpm.

[0029] The torque protector 5 includes a sensor, a control unit, an output unit and a reset unit. The sensor is used to monitor the torque of the drive motor and transmit the monitored data to the control unit. The control unit compares the received data with the preset safety value. If the clothes of the staff are caught in the grinding device, the torque of the drive motor increases. The control unit determines that the torque of the drive motor exceeds the preset safety value at this time, and then activates the protection function and transmits the danger signal to the output unit, and the output unit quickly stops the operation of the drive motor.

[0030] Reference Figure 2 The auxiliary structure 4 includes a lifting column 401 and an auxiliary wheel 402. The auxiliary wheel 402 is installed at the top of the lifting column 401. Two auxiliary wheels 402 are symmetrically arranged. When the three-jaw chuck 201 fixes the clamp 202, the clamp 202 is located between the two auxiliary wheels 402. The auxiliary structure 4 is provided to support the clamp 202 to improve the stability of the device during operation. When using a clamp 202 of a different model, the height of the lifting column 401 is adjusted according to the model of the replaced clamp 202 so that the auxiliary wheel 402 just supports the clamp 202.

[0031] Reference Figure 1The grinding device also includes a control system 7 for controlling the operation of the above-mentioned structures. The control system 7 includes a foot switch 701 and a PLC control box 702. The foot switch 701 is electrically connected to the drive motor 301. The foot switch 701 is used to start and stop the drive motor 301. In order to improve the safety of the staff and avoid accidentally touching the foot switch 701 to start the grinding device, a delay device is installed in the foot switch 701. The delay time can be set according to actual needs. In this embodiment, the delay time is set to 1s. When the grinding device is turned on, the foot device is pressed. If it is kept for more than 1s, the grinding device can be started; when the device is turned off, the foot device is pressed again, the foot device is reset, and the grinding device stops working.

[0032] The PLC control box 702 is electrically connected to the torque protector 5, the drive motor 301, and the reduction structure 6 respectively. The PLC control box 702 is provided with a fault reset button 7021, a fault light 7022, a speed adjustment button 7023 and an emergency stop button 7024. The reset button is used to reset the torque protector 5; when the grinding device fails, the fault light 7022 lights up, prompting the staff that the grinding device has failed and needs to be repaired; the speed adjustment button 7023 is used to adjust the speed of the drive motor 301; when an emergency occurs and the grinding work needs to be suspended, press the emergency stop button 7024 and the grinding device stops working.

[0033] When grinding the tool, the workpiece is installed in the fixture 202, and then the three-jaw chuck 201 is used to fix the fixture 202, and then the driving structure 3 is started to drive the three-jaw chuck 201 to rotate, and the workpiece can be grinded with sandpaper. The torque of the driving motor 301 is monitored by setting the torque protector 5. When the clothes of the staff are mixed into the grinding device, the torque of the driving motor 301 increases. When the preset safety value is exceeded, the torque protector 5 is started, the driving motor 301 is stopped, and the grinding device stops working to avoid danger.

[0034] The above embodiments are only preferred specific implementation methods of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope of the present invention according to the technical solution and concept of the present invention, which should be included in the protection scope of the present invention.

[0035] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0036] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present utility model, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0037] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0038] In the present utility model, unless otherwise clearly specified and limited, the first feature "above" or "below" the second feature may be that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature "above", "above" and "above" the second feature may be that the first feature is directly above or obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. The first feature "below", "below" and "below" the second feature may be that the first feature is directly below or obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature. It should be noted that when an element is referred to as "fixed to" or "set on" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected" to another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "up", "down", "left", "right" and similar expressions used herein are for illustrative purposes only and do not represent the only implementation method.

Claims

1. A grinding device, comprising a base (1), characterized in that: The invention also comprises a clamping structure (2), a driving structure (3) and a torque protector (5); the driving structure (3) comprises a driving motor (301); the clamping structure (2) and the driving motor (301) are both mounted on the base (1); the driving motor (301) is used to drive the clamping structure (2) to rotate; and the torque protector (5) is arranged between the driving motor (301) and the base (1).

2. The grinding device according to claim 1, characterized in that: The clamping structure (2) comprises a three-jaw chuck (201) and a clamp (202); the three-jaw chuck (201) is rotatably connected to the base (1); the clamp (202) is a hollow cylindrical structure; the clamp (202) and the three-jaw chuck (201) are fixedly connected.

3. The grinding device according to claim 2, characterized in that: The clamp (202) is provided with an air hole (203).

4. The grinding device according to claim 2, characterized in that: It also includes a lifting column (401) and an auxiliary wheel (402), wherein the auxiliary wheel (402) is installed at the top of the lifting column (401) and is located below the clamp (202).

5. The grinding device according to claim 2, characterized in that: The driving structure (3) further comprises a belt (302), a driving wheel (303) and a driven wheel (304); the driving wheel (303) and the driven wheel (304) are both rotatably connected to the base (1); the driving motor (301) is used to drive the driving wheel (303) to rotate; the driven wheel (304) and the rotating shaft of the three-jaw chuck (201) are fixedly connected and coaxial; the belt (302) is arranged around the driving wheel (303) and the driven wheel (304); and the torque protector (5) is installed on the output shaft of the driving motor (301).

6. The grinding device according to claim 5, characterized in that: The radius of the driving wheel (303) is smaller than the radius of the driven wheel (304).

7. The grinding device according to claim 5, characterized in that: The base (1) is provided with a speed reduction structure (6) for reducing the rotation speed of the driving wheel (303), and the speed reduction structure (6) is mounted on the output shaft of the driving motor (301).

8. The grinding device according to claim 1, characterized in that: The torque protector (5) comprises a sensor, a control unit, an output unit and a reset unit, wherein the sensor, the control unit, the output unit and the reset unit are electrically connected in sequence, the sensor is used to monitor the torque of the drive motor (301), and the output unit is connected to the output shaft of the drive motor (301).

9. The grinding device according to claim 7, characterized in that: It also includes a foot switch (701) and a PLC control box (702), wherein the foot switch (701) is electrically connected to the drive motor (301), and the PLC control box (702) is electrically connected to the torque protector (5), the drive motor (301), and the deceleration structure (6), respectively.

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