Single-wheel polishing device

Abstract

The utility model discloses a single-wheel polishing device which comprises a jig assembly, a first driving piece, a second driving piece, a polishing assembly and a supporting assembly, the first driving piece is connected with the jig assembly to drive the jig assembly to reciprocate in the X-axis direction, and the polishing assembly is located above the jig assembly; the polishing assembly comprises a polishing wheel and a plurality of polishing pads, the second driving part is connected with the supporting assembly, and an output shaft of the second driving part is connected with the polishing wheel so as to drive the polishing wheel to rotate. The multiple polishing pads are arranged on the side, away from the second driving piece, of the polishing wheel at intervals around the axis of the polishing wheel, and a chip groove is defined between every two adjacent polishing pads. The first driving part 3 enables the jig assembly 2 to do reciprocating rectilinear motion in the X-axis direction (the horizontal direction), high feeding motion is achieved, and the surface of a workpiece is helped to obtain a more uniform polishing effect.

Description

Technical Field

[0001] The utility model relates to the technical field of polishing, in particular to a single-wheel polishing device. Background Art

[0002] In the traditional polishing process, single-wheel polishing technology is widely used, which mainly relies on the rotation of the polishing wheel to grind and polish the surface of the substrate. However, most of the existing single-wheel polishing technologies can only provide rotation in a single direction (usually around the central axis of the workpiece), with low polishing accuracy, and the polishing debris is difficult to discharge and easily wears the substrate. Utility Model Content

[0003] The technical problem to be solved by the utility model is that most of the existing single-wheel polishing technologies can only provide rotational motion in a single direction, the polishing precision is low, and the polishing debris is difficult to discharge and is easy to wear the substrate.

[0004] In order to solve the above technical problems, the utility model provides a single-wheel polishing device, comprising a jig assembly, a first driving member, a second driving member, a polishing assembly and a supporting assembly, wherein the first driving member is connected to the jig assembly to drive the jig assembly to reciprocate along the X-axis direction, and the polishing assembly is located above the jig assembly;

[0005] The polishing assembly includes a polishing wheel and a plurality of polishing pads. The second driving member is connected to the supporting member, and the output shaft of the second driving member is connected to the polishing wheel to drive the polishing wheel to rotate. The plurality of polishing pads are arranged at intervals around the axis of the polishing wheel on the side of the polishing wheel away from the second driving member, and a chip groove is defined between adjacent polishing pads.

[0006] In some embodiments, the polishing wheel includes a polishing body, a connecting part and a fixing part, the connecting part is connected to the polishing body, and the end of the connecting part facing away from the polishing body is recessed to form a connecting hole, a fixing hole is opened on the side of the connecting part, the fixing hole is connected to the connecting hole, the output shaft of the second driving member is installed in the connecting hole, the fixing part passes through the fixing hole and is fixedly connected to the output shaft of the second driving member, and the polishing pad is connected to the side of the polishing body facing away from the connecting part.

[0007] In some embodiments, the polishing assembly also includes a mounting plate and a connecting frame, the connecting frame is connected to the mounting plate, and the connecting frame is provided with an avoidance groove for installing the second driving member on a side facing the mounting plate, the output shaft of the second driving member passes through the mounting plate and is connected to the connecting part, and the connecting frame is connected to the supporting assembly.

[0008] In some embodiments, there is a gap between the mounting plate and the connecting portion.

[0009] In some embodiments, a plurality of the polishing pads are enclosed to form a connecting groove located in the middle of the polishing body, and the connecting groove is connected to each of the chip removal grooves.

[0010] In some embodiments, the polishing pad is made of non-woven fabric.

[0011] In some embodiments, a third driving member is further included, wherein the third driving member is connected to the supporting assembly, and an output shaft of the third driving member is connected to the connecting frame to drive the polishing assembly to reciprocate along the Y-axis.

[0012] In some embodiments, the jig assembly includes a jig, a fourth driving member and a vacuum suction member, the jig has a suction hole, the vacuum suction member is connected to the suction hole, and the output shaft of the fourth driving member is connected to the jig to drive the jig to rotate along the Z axis.

[0013] In some embodiments, the fixture assembly further includes a plurality of position sensors, and the plurality of position sensors are sequentially spaced apart on the first driving member along the X-axis direction to sense the moving position of the fixture.

[0014] In some embodiments, the support assembly includes two support columns disposed at intervals and a fixing frame, two sides of the fixing frame are connected to the support columns, and the third driving member is connected to the fixing frame.

[0015] Compared with the prior art, the single-wheel polishing device of the utility model has the following beneficial effects:

[0016] The embodiment of the utility model uses the first driving member to make the fixture assembly reciprocate linearly along the X-axis direction (horizontal direction) to achieve a higher feed motion, so as to help the workpiece surface obtain a more uniform polishing effect. In addition, the grinding chips generated by polishing will gather in the chip discharge groove and be discharged with the rotation of the polishing wheel, so that the grinding chips are away from the workpiece and the polishing surface, preventing the grinding chips from scratching the polished surface again and maintaining the polishing quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a structural schematic diagram of a single-wheel polishing device provided by an embodiment of the utility model;

[0018] Figure 2 It is a structural schematic diagram of the single-wheel polishing device provided by an embodiment of the utility model, excluding the fixture assembly and the first driving member;

[0019] Figure 3 It is a structural schematic diagram of a second driving member and a polishing assembly provided in an embodiment of the utility model;

[0020] Figure 4 It is a structural schematic diagram of a polishing wheel provided in an embodiment of the utility model;

[0021] Figure 5 It is a structural schematic diagram of a polishing wheel and a polishing pad provided in an embodiment of the utility model;

[0022] Figure 6 It is a structural schematic diagram of a fixture assembly and a first driving member provided in an embodiment of the utility model;

[0023] In the figure, 1, substrate sheet; 2, fixture assembly; 21, fixture; 22, fourth drive member; 23, position sensor; 3, first drive member; 4, second drive member; 5, polishing assembly; 51, polishing wheel; 511, polishing body; 512, connecting part; 5121, connecting hole; 513, fixing member; 52, polishing pad; 53, chip groove; 54, mounting plate; 55, connecting frame; 551, avoidance groove; 56, connecting groove; 6, support assembly; 61, support column; 62, fixing frame; 7, third drive member. DETAILED DESCRIPTION

[0024] The following is a further detailed description of the specific implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0025] like Figure 1 As shown, the utility model provides a single-wheel polishing device, including a jig assembly 2, a first driving member 3, a second driving member 4, a polishing assembly 5 and a supporting assembly 6. The jig assembly 2 is used to fix the workpiece to be polished (that is, the substrate sheet 1) to ensure that the workpiece is in a stable position during the polishing process. The first driving member 3 is connected to the jig assembly 2 to drive the jig assembly 2 to reciprocate along the X-axis direction. The polishing assembly 5 is located above the jig assembly 2; the polishing assembly 5 includes a polishing wheel 51 and a plurality of polishing pads 52. The second driving member 4 is connected to the supporting assembly 6, and the output shaft of the second driving member 4 is connected to the polishing wheel 51 to drive the polishing wheel 51 to rotate. The plurality of polishing pads 52 are arranged around the axis of the polishing wheel 51 at intervals on the side of the polishing wheel 51 away from the second driving member 4, and a chip groove 53 is defined between adjacent polishing pads 52.

[0026] Based on the above structure, in this embodiment, the first driving member 3 is used to make the fixture assembly 2 reciprocate in a linear motion along the X-axis direction (horizontal direction), so as to achieve a higher feed motion, so as to help the workpiece surface obtain a more uniform polishing effect. In addition, the grinding chips generated by polishing will gather in the chip discharge groove 53 and be discharged with the rotation of the polishing wheel 51, so that the grinding chips are away from the workpiece and the polishing surface, preventing the grinding chips from scratching the polished surface again, and maintaining the polishing quality.

[0027] In some embodiments, the polishing wheel 51 includes a polishing body 511, a connecting portion 512 and a fixing member 513. The connecting portion 512 is connected to the polishing body 511, and the end of the connecting portion 512 facing away from the polishing body 511 is recessed to form a connecting hole 5121. The output shaft of the second driving member 4 is installed in the connecting hole 5121 to ensure that the polishing wheel 51 body can directly receive the power input from the first driving member 3 to achieve rotational movement. A fixing hole is opened on the side of the connecting portion 512, and the fixing hole is connected to the connecting hole 5121. The fixing member 513 passes through the fixing hole and is fixedly connected to the output shaft of the second driving member 4 to ensure a firm connection between the output shaft and the polishing wheel 51 to prevent loosening or falling off during high-speed rotation, so that the polishing wheel 51 can rotate stably at high speed. The polishing pad 52 is connected to the side of the polishing body 511 facing away from the connecting portion 512.

[0028] In some embodiments, the polishing assembly 5 also includes a mounting plate 54 and a connecting frame 55. The mounting plate 54 serves as a mounting component between the polishing wheel 51 and the second driving member 4, and provides a platform for mounting and fixing the polishing wheel 51. The output shaft of the second driving member 4 passes through the mounting plate 54 and is connected to the connecting part 512 to enhance the stability of the polishing wheel 51. The connecting frame 55 is connected to the mounting plate 54, and the connecting frame 55 is provided with an avoidance groove 551 for installing the second driving member 4 on one side of the mounting plate 54 to avoid interference between the mechanical structure of the second driving member 4 and other components of the polishing assembly 5, thereby ensuring the compactness of the installation and the smoothness of the transmission. The connecting frame 55 is connected to the support assembly 6 to ensure that the polishing wheel 51 can be firmly mounted on the support assembly 6 through the connecting frame 55 and the mounting plate 54.

[0029] In some embodiments, there is a gap between the mounting plate 54 and the connecting portion 512 to serve as a "buffer zone" to absorb and mitigate vibrations generated when the device is running. In addition, the gap can increase air circulation and help heat dissipate from the polishing wheel 51 and the transmission components.

[0030] In some embodiments, a plurality of polishing pads 52 enclose a connection groove 56 located in the middle of the polishing body 511, and the connection groove 56 is connected to each chip groove 53. It can be understood that at this time, each chip groove 53 is radially arranged from the connection groove 56, which not only ensures that the polishing pad 52 can fully contact and process the workpiece surface, but also communicates with each chip groove 53 through the central connection groove 56, plays a role in guiding the wear chips, so that the wear chips can be discharged from all directions.

[0031] In some embodiments, the polishing pad 52 is made of non-woven fabric. Based on the characteristics of the non-woven fabric, the polishing pad 52 can better fit the contour of the workpiece surface and ensure the stable output of the grinding force during the polishing process, thereby obtaining a consistent surface treatment effect.

[0032] In some embodiments, a third driving member 7 is further included. The third driving member 7 is connected to the supporting assembly 6, and the output shaft of the third driving member 7 is connected to the connecting frame 55 to drive the polishing assembly 5 to reciprocate along the Y-axis.

[0033] In this embodiment, the polishing assembly 5 is driven to rise and fall by the third driving member 7, so as to ensure that the polishing pad 52 always maintains effective contact with the workpiece surface, so that the polishing assembly 5 can adapt to workpieces of different thicknesses. In addition, during the process of loading and unloading the workpiece, the third driving member 7 can raise the polishing assembly 5 to provide sufficient space for the operator to facilitate the placement and removal of the workpiece, while reducing the potential risk of injury during operation.

[0034] In some embodiments, the jig assembly 2 includes a jig 21, a fourth driving member 22 and a vacuum adsorption member. The jig 21 has an adsorption hole. The vacuum adsorption member is connected to the adsorption hole to form a negative pressure environment to tightly adsorb the workpiece to prevent displacement or sliding due to external force during polishing. The output shaft of the fourth driving member 22 is connected to the jig 21 to drive the jig 21 to rotate along the Z axis, so that the polishing pad 52 can polish in more directions, more efficiently complete the uniform polishing of the workpiece surface, reduce the need for manual adjustment of the workpiece, save time, and ensure the consistency of polishing quality.

[0035] In addition, through the cooperation between the fourth driving member 22 and the first driving member 3 and the third driving member 7, the polishing assembly 5 can polish the substrate sheet 1 more flexibly in three-dimensional space, thereby improving the flexibility of polishing.

[0036] In some embodiments, the fixture assembly 2 further includes a plurality of position sensors 23 , which are sequentially spaced apart on the first driving member 3 along the X-axis direction to sense the moving position of the fixture 21 .

[0037] In this embodiment, the position sensor 23 senses the position of the fixture 21 in the X-axis direction and feeds back to the control system so as to instantly adjust the motion state of the first driving member 3 to ensure that the fixture 21 moves accurately along the predetermined path, thereby improving the position accuracy and processing quality during the polishing process.

[0038] In some embodiments, the support assembly 6 includes two support columns 61 and a fixing frame 62. The two support columns 61 are arranged at intervals, and both sides of the fixing frame 62 are connected to the support columns 61, which is conducive to dispersing the load and enhancing the overall stability and rigidity. The third driving member 7 is connected to the fixing frame 62 to provide a stable installation platform for the installation of various components.

[0039] In summary, the embodiment of the utility model provides a single-wheel polishing device, which enables the fixture assembly 2 to perform reciprocating linear motion along the X-axis direction (horizontal direction) through the first driving member 3, thereby achieving a higher feed motion to help the workpiece surface obtain a more uniform polishing effect. In addition, the grinding chips generated by polishing will gather in the chip discharge groove 53 and be discharged as the polishing wheel 51 rotates, so that the grinding chips are away from the workpiece and the polishing surface, preventing the grinding chips from scratching the polished surface again and maintaining the polishing quality.

[0040] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and substitutions can be made without departing from the technical principle of the present invention. These improvements and substitutions should also be regarded as the protection scope of the present invention.

Claims

1. A single-wheel polishing device, characterized in that: It includes a jig assembly, a first driving member, a second driving member, a polishing assembly and a supporting assembly, wherein the first driving member is connected to the jig assembly to drive the jig assembly to reciprocate along the X-axis direction, and the polishing assembly is located above the jig assembly; The polishing assembly includes a polishing wheel and a plurality of polishing pads. The second driving member is connected to the supporting member, and the output shaft of the second driving member is connected to the polishing wheel to drive the polishing wheel to rotate. The plurality of polishing pads are arranged at intervals around the axis of the polishing wheel on the side of the polishing wheel away from the second driving member, and a chip groove is defined between adjacent polishing pads.

2. The single-wheel polishing device according to claim 1, characterized in that: The polishing wheel includes a polishing body, a connecting part and a fixing part. The connecting part is connected to the polishing body, and the end of the connecting part facing away from the polishing body is recessed to form a connecting hole. A fixing hole is opened on the side of the connecting part, and the fixing hole is communicated with the connecting hole. The output shaft of the second driving member is installed in the connecting hole. The fixing part passes through the fixing hole and is fixedly connected to the output shaft of the second driving member. The polishing pad is connected to the side of the polishing body facing away from the connecting part.

3. The single-wheel polishing device according to claim 2, characterized in that: The polishing assembly also includes a mounting plate and a connecting frame, wherein the connecting frame is connected to the mounting plate, and a side of the connecting frame facing the mounting plate is provided with an avoidance groove for installing the second driving member, the output shaft of the second driving member passes through the mounting plate and is connected to the connecting portion, and the connecting frame is connected to the supporting assembly.

4. The single-wheel polishing device according to claim 3, characterized in that: There is a gap between the mounting plate and the connecting portion.

5. The single-wheel polishing device according to claim 2, characterized in that: A plurality of the polishing pads are enclosed to form a connecting groove located in the middle of the polishing body, and the connecting groove is communicated with each of the chip removal grooves.

6. The single-wheel polishing device according to claim 1, characterized in that: The polishing pad is made of non-woven fabric.

7. The single-wheel polishing device according to claim 3, characterized in that: It also includes a third driving member, which is connected to the supporting assembly, and an output shaft of the third driving member is connected to the connecting frame to drive the polishing assembly to reciprocate along the Y axis.

8. The single-wheel polishing device according to claim 1, characterized in that: The jig assembly includes a jig, a fourth driving member and a vacuum adsorption member. The jig has an adsorption hole, the vacuum adsorption member is connected to the adsorption hole, and the output shaft of the fourth driving member is connected to the jig to drive the jig to rotate along the Z axis.

9. The single-wheel polishing device according to claim 8, characterized in that: The fixture assembly further includes a plurality of position sensors, which are sequentially spaced apart from each other on the first driving member along the X-axis direction to sense the moving position of the fixture.

10. The single-wheel polishing device according to claim 7, characterized in that: The support assembly includes two support columns and a fixing frame arranged at intervals, two sides of the fixing frame are connected to the support columns, and the third driving member is connected to the fixing frame.

Images