Conveying device

Abstract

The utility model provides a conveying device, which is used for transferring a photomask, and comprises a base, a plurality of first supporting pieces are arranged on the top surface of the base, and the plurality of first supporting pieces are used for bearing the photomask; the cover body is arranged on the top face of the base, a closed cavity is formed by the cover body and the top face of the base, and a plurality of second supporting pieces corresponding to the first supporting pieces in position are arranged on the face, opposite to the top face of the base, of the cover body; the photomask can be fixed between the second supporting piece and the first supporting piece through the gap between any pair of the second supporting piece and the first supporting piece, wherein the positions of the second supporting piece and the first supporting piece correspond to each other. According to the conveying device, the photomask can be fixed in the photomask transferring process, and displacement of the photomask in the transferring process is avoided.

Description

Technical Field

[0001] The present application relates to the field of semiconductor manufacturing technology, and in particular to a conveying device. Background Art

[0002] In the mask production process, a standard mechanical interface (SMIF) device is required for transportation between various machines to transfer the mask into or out of the production machine. The current SMIF device only has legs on the base to support the mask. Therefore, when transporting the SMIF device, the SMIF device must not be flipped or tilted significantly to prevent the mask from sliding or even falling off from the original position. In addition, since the existing SMIF device only fixes the mask on one side, it will cause slight sliding during long-distance transportation, and then rub against the legs to generate particles. These particles will adhere to the surface of the mask, affecting the production yield of the mask.

[0003] Therefore, a conveying device is needed, which can fix the photomask during the transportation process to prevent the photomask from being displaced during the transportation process. Utility Model Content

[0004] The purpose of the present application is to provide a conveying device, which can fix the photomask during the transportation process to prevent the photomask from being displaced during the transportation process.

[0005] An embodiment of the present application provides a conveying device for transferring photomasks, comprising: a base, a top surface of the base being provided with a plurality of first support members, the plurality of first support members being used to carry the photomasks; a cover body, the cover body being provided on the top surface of the base and forming a closed chamber with the top surface of the base, a surface of the cover body opposite to the top surface of the base being provided with a plurality of second support members corresponding to the positions of the first support members; the gap between any pair of corresponding second support members and the first support members can fix the photomask between the second support members and the first support members.

[0006] In some embodiments, a first limiting portion and a second limiting portion are respectively provided at opposite ends of the first supporting member and the second supporting member, the first limiting portion having a first inclined surface extending toward the outside of the base; the second limiting portion having a second inclined surface extending toward the outside of the cover body; and the light cover is fixedly arranged in a recess formed by the first inclined surface and the second inclined surface at corresponding positions.

[0007] In some embodiments, the ratio of the height of the second inclined surface along the axial direction of the second support member to the height of the first inclined surface along the axial direction of the first support member is 1:(0.8-1).

[0008] In some embodiments, the included angle between the first inclined surface and the end surface of the first support member is 120° to 135°; and the included angle between the second inclined surface and the end surface of the second support member is 120° to 135°.

[0009] In some embodiments, the ratio of the area of ​​the bottom surface of the first limiting portion to the area of ​​the first end surface of the first support member is 1:(0.5-0.8); and the ratio of the area of ​​the bottom surface of the second limiting portion to the area of ​​the first end surface of the second support member is 1:(0.5-0.8).

[0010] In some embodiments, the projection of the vertical surface of the first limiting portion along the axis perpendicular to the first support member coincides with the projection of the circumferential surface of the first support member along the axis perpendicular to the first support member; and the projection of the vertical surface of the second limiting portion along the axis perpendicular to the second support member coincides with the projection of the circumferential surface of the second support member along the axis perpendicular to the second support member.

[0011] In some embodiments, the first limiting portion is integrally formed with the first supporting member; and the second limiting portion is integrally formed with the second supporting member.

[0012] In some embodiments, a handle is connected to the outer peripheral surface of the cover.

[0013] In some embodiments, the cover is made of transparent material.

[0014] In some embodiments, a top surface of the base is provided with a slot matching the cover, and a sealing ring is provided in the slot.

[0015] The beneficial effects of the transmission device provided by the embodiment of the present application include but are not limited to the following:

[0016] The conveying device provided by the present application fixes both the upper and lower surfaces of the mask by respectively setting a plurality of first supporting members and a plurality of second supporting members on the base and the cover, thereby preventing the mask from shifting during transportation, thereby preventing the mask from generating particles due to sliding friction during long-distance transportation, thereby affecting the production yield of the mask. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The following figures describe in detail the exemplary embodiments disclosed in this application. The same reference numerals represent similar structures in several views of the drawings. Those skilled in the art will understand that these embodiments are non-limiting, exemplary embodiments, and the drawings are only for the purpose of illustration and description, and are not intended to limit the scope of this application. Other embodiments may also accomplish the inventive intent in this application. It should be understood that the drawings are not drawn to scale.

[0018] in:

[0019] Figure 1 is a schematic structural diagram of a conveying device according to some embodiments of the present application;

[0020] Figure 2 is a schematic structural diagram of a base according to some embodiments of the present application; and

[0021] Figure 3 It is a schematic diagram of the structure when the conveying device according to some embodiments of the present application is deflected. DETAILED DESCRIPTION

[0022] The following description provides specific application scenarios and requirements of the present application, with the purpose of enabling those skilled in the art to make and use the content in the present application. It will be apparent to those skilled in the art that various local modifications to the disclosed embodiments are apparent, and the general principles defined herein may be applied to other embodiments and applications without departing from the spirit and scope of the present application. Therefore, the present application is not limited to the embodiments shown, but to the widest scope consistent with the claims.

[0023] The present application provides a conveying device for transferring photomasks, comprising: a base, the top surface of the base being provided with a plurality of first support members, the plurality of first support members being used to carry the photomasks; a cover body, the cover body being provided on the top surface of the base and forming a closed chamber with the top surface of the base, the cover body being provided with a plurality of second support members corresponding to the positions of the first support members on a surface opposite to the top surface of the base; the gap between any pair of corresponding second support members and the first support members can enable the photomask to be fixed between the second support members and the first support members.

[0024] The conveying device provided in the present application fixes both the upper and lower surfaces of the photomask by respectively arranging a plurality of first supporting members and a plurality of second supporting members on the base and the cover body, thereby preventing the photomask from being displaced during transportation.

[0025] The conveying device provided in the present application will be described in detail below in conjunction with the embodiments and drawings.

[0026] refer to Figure 1 An embodiment of the present application provides a conveying device, including a base 100 and a cover 200 , wherein the cover 200 is disposed on the top surface of the base 100 and forms a closed chamber with the top surface of the base 100 to accommodate a photomask 11 .

[0027] In some embodiments, a slot 102 matching the cover 200 is disposed on the top surface of the base 100 , and a sealing ring is disposed in the slot to prevent foreign matter from entering the chamber during the transportation of the mask 11 .

[0028] In some embodiments, a plurality of first support members 101 are disposed on the top surface of the base 100 , and the plurality of first support members 101 are used to support the photomask 11 .

[0029] In some embodiments, the number of the first support members 101 is 4, which are respectively engaged with the four sides of the mask 11. In some embodiments, the cross section of the first support member 101 is rectangular, circular or irregular, and optionally, the cross section of the first support member 101 is rectangular.

[0030] In some embodiments, a first stopper 101 a is disposed at the first end of the first support member 101 to prevent the light mask 11 from circumferential displacement.

[0031] In some embodiments, the ratio of the bottom area of ​​the first limiting portion 101a to the first end surface area of ​​the first support member 101 is 1:(0.5-0.8). The first surface of the light mask 11 contacts the first end surface of the first support member 101, and the peripheral side of the light mask 11 contacts the first limiting portion 101a.

[0032] In some embodiments, the first position-limiting portion 101a has a first inclined surface extending toward the outside of the base 100. When the light mask 11 is of standard size, the first surface of the light mask 11 contacts the first end surface of the first support member 101, and the peripheral side of the light mask 11 contacts the bottom edge of the first position-limiting portion 101a; when the light mask 11 is larger than a light mask of standard size, the peripheral side of the light mask 11 can also be clamped to the first inclined surface to prevent the light mask 11 from circumferential displacement.

[0033] In some embodiments, the angle between the first bevel and the end surface of the first end of the first support member 101 is 120° to 135°, preferably, the angle between the first bevel and the end surface of the first end of the first support member 101 is 135°. In some embodiments, the height of the first bevel along the axial direction of the first support member 101 is 4 mm to match most photomasks on the market.

[0034] In some embodiments, the projection of the vertical surface of the first limiting portion 101a along the axis perpendicular to the first support member 101 coincides with the projection of the circumferential surface of the first support member 101 along the axis perpendicular to the first support member 101, so as to improve the stability of the connection between the first limiting portion 101a and the first support member 101.

[0035] In some embodiments, the first limiting portion 101 a and the first supporting member 101 are integrally formed.

[0036] In some embodiments, the second end of the first support member 101 is fixedly connected to the base 100 .

[0037] In some embodiments, the material of the first support member 101 may be selected to include polyvinyl chloride (PVC), polymethyl methacrylate (PMMA), polystyrene (PS), polyethylene (PE), polypropylene (PP), polyetheretherketone (PEEK), polyetherimide (PI), and epoxy resin (EP); preferably, the material of the first support member 101 is polyetheretherketone, which has good wear resistance and can avoid the generation of particles due to friction in the process of transporting the mask 11, thereby affecting the yield of the mask 11.

[0038] In some embodiments, a plurality of second support members 201 corresponding to the positions of the first support members 101 are provided on the surface of the cover body 200 opposite to the top surface of the base 100; the gap between any pair of corresponding second support members 201 and the first support member 101 enables the light mask 11 to be fixed between the second support members 201 and the first support member 101.

[0039] In some embodiments, the first end of the second support member 201, that is, the end of the second support member 201 opposite to the first support member 101, is provided with a second limiting portion 201a; the second limiting portion 201a has a second inclined surface extending toward the outside of the cover body 200; and the light cover 11 is fixedly arranged in a recess formed by the first inclined surface and the second inclined surface at corresponding positions.

[0040] In some embodiments, the included angle between the second inclined surface and the end surface of the first end of the second support member 201 is 120° to 135°, preferably, the included angle between the second inclined surface and the end surface of the first end of the second support member 201 is 135°. In some embodiments, the ratio of the area of ​​the bottom surface of the second position-limiting portion 201a to the area of ​​the first end surface of the second support member 201 is 1:(0.5-0.8) to match the first position-limiting portion 101a.

[0041] In some embodiments, the projection of the vertical surface of the second limiting portion 201a along the axis perpendicular to the second support member 201 coincides with the projection of the circumferential surface of the second support member 201 along the axis perpendicular to the second support member 201, so as to improve the stability of the connection between the second limiting portion 201a and the second support member 201.

[0042] In some embodiments, the ratio of the height of the second slope along the axial direction of the second support member 201 to the height of the first slope along the axial direction of the first support member 101 is 1:(0.8-1) to match most masks on the market and avoid displacement of the mask in the recess.

[0043] In some embodiments, the second limiting portion 201 a and the second supporting member 201 are integrally formed.

[0044] In some embodiments, the second end of the second support member 201 is fixedly connected to the cover body 200 .

[0045] In some embodiments, the cover body 200 is made of a transparent material, so that an operator can observe whether the second limiting portion 201 a is aligned and matched with the first limiting portion 101 a when the cover body 200 is placed on the base 100 .

[0046] In some embodiments, the material of the cover 200 includes polyetheretherketone (PEEK).

[0047] In some embodiments, a handle 300 is connected to the outer circumference of the cover body 200 to facilitate operators to take the cover body 200. In some embodiments, the handle 300 is fixedly connected to the cover body 200.

[0048] In some embodiments, the cover 200 includes a first portion and a second portion, the first portion is used to connect to the base 100, the second portion is used to connect to the handle 300, and the cross-sectional area of ​​the second portion is smaller than the cross-sectional area of ​​the first portion.

[0049] In some embodiments, when the light mask 11 needs to be transferred, the operator first removes the cover body 200 from the base 100 and places the light mask 11 between multiple first limiting portions 101a so that the light mask 11 is clamped by multiple first supporting members 101. Then, the operator covers the base 100 with the cover body 200, and observes the alignment and matching of the second limiting portion 201a with the first limiting portion 101a during the covering process to ensure that the light mask 11 is fixedly set in the recess formed by the first inclined surface and the second inclined surface at corresponding positions.

[0050] refer to Figure 3 During the transfer process, even if the conveying device is tilted or turned over, the mask 11 will not slide, thereby ensuring that the mask 11 will not be accidentally damaged or particles will not fall due to vibration during handling and transportation, thereby improving the yield rate of the mask 11.

[0051] The beneficial effects of the transmission device provided by the embodiment of the present application include but are not limited to the following:

[0052] The conveying device provided by the present application fixes both the upper and lower surfaces of the mask by respectively setting a plurality of first supporting members and a plurality of second supporting members on the base and the cover, thereby preventing the mask from shifting during transportation, thereby preventing the mask from generating particles due to sliding friction during long-distance transportation, thereby affecting the production yield of the mask.

[0053] It should be noted that different embodiments may produce different beneficial effects. In different embodiments, the beneficial effects that may be produced may be any one or a combination of the above, or any other possible beneficial effects.

[0054] The basic concepts have been described above. Obviously, for those skilled in the art, the above detailed disclosure is only for example and does not constitute a limitation of this specification. Although not explicitly stated here, those skilled in the art may make various modifications, improvements and corrections to this application. Such modifications, improvements and corrections are suggested in this specification, so such modifications, improvements and corrections still belong to the spirit and scope of the exemplary embodiments of this application.

[0055] It should be noted that in the description of this application, unless otherwise clearly specified and limited, the terms "install", "connect", "connect", and "fix" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a rotating connection or a sliding connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood in combination with specific circumstances.

[0056] In addition, when terms such as "first", "second", and "third" are used in the specification of this application to describe various features, these terms are only used to distinguish these features and cannot be understood as indicating or implying the relationship between the features, the relative importance, or implicitly indicating the number of features indicated.

[0057] In addition, the present specification describes exemplary embodiments by reference to idealized exemplary cross-sectional views and / or plan views and / or stereograms. Therefore, differences from the illustrated shapes due to, for example, manufacturing techniques and / or tolerances are foreseeable. Therefore, the exemplary embodiments should not be interpreted as being limited to the shapes of the regions shown herein, but should include deviations in shapes caused by, for example, manufacturing. Therefore, the regions shown in the figures are schematic in nature, and their shapes are not intended to illustrate the actual shapes of the regions of the device nor to limit the scope of the exemplary embodiments.

[0058] At the same time, the present application uses specific words to describe the embodiments of this specification. For example, "one embodiment", "an embodiment", and / or "some embodiments" refer to a certain feature, structure or characteristic related to at least one embodiment of the present application. Therefore, it should be emphasized and noted that "one embodiment" or "an embodiment" or "an alternative embodiment" mentioned twice or more in different positions in the present application does not necessarily refer to the same embodiment. In addition, some features, structures or characteristics in one or more embodiments of the present application can be appropriately combined.

[0059] Similarly, it should be noted that in order to simplify the description of the disclosure of this application and thus help understand one or more embodiments of the invention, in the above description of the embodiments of this application, multiple features are sometimes combined into one embodiment, figure or description thereof. However, this disclosure method does not mean that the features required by the object of this application are more than the features mentioned in the claims. In fact, the features of the embodiments are less than all the features of the single embodiment disclosed above.

[0060] Finally, it should be understood that the embodiments described in this application are only used to illustrate the principles of the embodiments of the present application. Other variations may also fall within the scope of the present application. Therefore, as an example and not a limitation, the alternative configurations of the embodiments of the present application may be considered to be consistent with the teachings of the present application. Accordingly, the embodiments of the present application are not limited to the embodiments explicitly introduced and described in the present application.

Claims

1. A conveying device for transporting a photomask, characterized in that: include: A base, a top surface of which is provided with a plurality of first supporting members, and the plurality of first supporting members are used to carry the light mask; A cover body, wherein the cover body is arranged on the top surface of the base and forms a closed chamber with the top surface of the base, and a plurality of second support members corresponding to the position of the first support member are arranged on the surface of the cover body opposite to the top surface of the base; the gap between any pair of corresponding second support members and the first support member can fix the light mask between the second support member and the first support member.

2. The conveying device according to claim 1, characterized in that The first and second supporting members are provided with a first limiting portion and a second limiting portion at opposite ends thereof, respectively. The first limiting portion has a first inclined surface extending toward the outside of the base; the second limiting portion has a second inclined surface extending toward the outside of the cover body; And the light mask is fixedly arranged in a concave portion formed by the first inclined surface and the second inclined surface at corresponding positions.

3. The conveying device according to claim 2, characterized in that A ratio of a height of the second inclined surface along an axial direction of the second support member to a height of the first inclined surface along an axial direction of the first support member is 1:(0.8-1).

4. The conveying device according to claim 3, characterized in that The included angle between the first inclined surface and the end surface of the first support member is 120° to 135°; and the included angle between the second inclined surface and the end surface of the second support member is 120° to 135°.

5. The conveying device according to claim 4, characterized in that The ratio of the area of ​​the bottom surface of the first limiting portion to the area of ​​the first end surface of the first support member is 1:(0.5-0.8); and the ratio of the area of ​​the bottom surface of the second limiting portion to the area of ​​the first end surface of the second support member is 1:(0.5-0.8).

6. The conveying device according to claim 5, characterized in that The projection of the vertical surface of the first limiting portion along the direction perpendicular to the axial direction of the first support member coincides with the projection of the peripheral surface of the first support member along the direction perpendicular to the axial direction of the first support member; and the projection of the vertical surface of the second limiting portion along the direction perpendicular to the axial direction of the second support member coincides with the projection of the peripheral surface of the second support member along the direction perpendicular to the axial direction of the second support member.

7. The conveying device according to claim 2, characterized in that The first limiting portion is integrally formed with the first supporting member; and the second limiting portion is integrally formed with the second supporting member.

8. The conveying device according to claim 1, characterized in that The outer peripheral surface of the cover body is connected with a handle.

9. The conveying device according to claim 1, characterized in that The cover is made of transparent material.

10. The conveying device according to claim 1, characterized in that The top surface of the base is provided with a slot matching the cover body, and a sealing ring is provided in the slot.

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