Auxiliary device for producing mask plate

Abstract

The utility model provides an auxiliary device for producing a mask plate, and particularly relates to the field of mask plate production. The problems that in the prior art, an auxiliary device for producing a mask cannot quickly fix the mask, the mask falls off during production, later production operation of the mask is affected, and use requirements cannot be met are solved. Comprising an auxiliary table, supporting blocks are installed on the two sides of the top of the auxiliary table, positioning columns are installed on the front sides and the rear sides of the inner sides of the supporting blocks, positioning plates are installed on the inner sides of the positioning columns, sliding plates are installed on the two sides, penetrating through an inner cavity of the auxiliary table, of the bottoms of the supporting blocks, and double-shaft telescopic rods are installed on the inner sides of the sliding plates; a connecting block is installed on the front face of the sliding plate. Compared with an original auxiliary device, the device can quickly fix the mask plate, the mask plate cannot fall off during production, the later production operation of the mask plate cannot be influenced, and the use requirements can be met.

Description

Technical Field

[0001] The utility model relates to a device in the field of mask production, in particular to an auxiliary device for producing mask. Background Art

[0002] The mask, also known as a photomask or photolithography mask, is an important component used in the photolithography process in semiconductor process technology. Its main function is to open various doping windows, electrode contact holes on the dielectric layer on the surface of the semiconductor crystal or to etch metal interconnection patterns on the conductive layer. The pattern on the mask is transmitted by light, and the design pattern is accurately copied to the photoresist, thereby defining the characteristics of the integrated circuit or semiconductor device. The mask needs to be assisted by auxiliary devices during production.

[0003] The existing auxiliary devices for producing masks cannot quickly fix the masks, which may cause the masks to fall during production, affect the subsequent production operations of the masks, and cannot meet the use requirements.

[0004] Therefore, it is necessary to provide an auxiliary device for producing masks to solve the above-mentioned technical problems. The information disclosed in this background technology section is only intended to increase the understanding of the overall background of the invention, and is not necessarily regarded as an admission or suggestion in any form that the information constitutes prior art that is already known to ordinary technicians in the field. Utility Model Content

[0005] The purpose of the utility model is to provide an auxiliary device for producing a mask, so as to solve the problem that the auxiliary device for producing a mask in the prior art cannot quickly fix the mask, which will cause the mask to fall during production, affect the later production operation of the mask, and cannot meet the use requirements. The many technical effects that can be produced by the preferred technical solution among the many technical solutions provided by the utility model are described in detail below.

[0006] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0007] The utility model provides an auxiliary device for producing mask plates, comprising: an auxiliary table, support blocks are installed on both sides of the top of the auxiliary table, and positioning columns are installed on the front and rear sides of the inner side of the support block, and a positioning plate is installed on the inner side of the positioning column, and a slide plate is installed on the bottom of the support block, which passes through the inner cavity of the auxiliary table and has two axis telescopic rods installed on the inner side of the slide plate, and a connecting block is installed on the front side of the slide plate, and the front side of the connecting block passes through the two sides of the front side of the auxiliary table, and a movable plate is installed on the front side of the connecting block, and the back side of the movable plate contacts the two sides of the front side of the auxiliary table, and mounting pins are provided on the top and bottom of the front side of the movable plate, and the back side of the mounting pins passes through the back side of the movable plate and is screwed to the four sides of the front side of the auxiliary table, and sliding columns are provided on the front and rear sides of the inner side of the slide plate, and a fixing ring is sleeved on the surface of the sliding column, and the outer side of the sliding column is fixed to the two sides of the inner cavity of the auxiliary table.

[0008] Preferably, threaded holes for use with mounting pins are provided on the top and bottom of the front side of the auxiliary platform.

[0009] Preferably, a protective pad is adhered to the inner side of the positioning plate, and the protective pad is made of silicone rubber.

[0010] Preferably, mounting blocks are installed at the bottom of both sides of the front side and the bottom of both sides of the back side of the auxiliary table, and mounting holes are opened on both sides of the top of the mounting blocks.

[0011] Preferably, sliding grooves are provided on both sides of the back side of the inner cavity of the auxiliary platform, a sliding block is slidably connected to the inner cavity of the sliding groove, and the front side of the sliding block is fixed to the back side of the sliding plate.

[0012] Preferably, a tension spring is sleeved on both sides of the sliding column surface, the inner side of the tension spring is fixed to both sides of the fixing ring, and a collar is installed on the outer side of the tension spring, and the collar is sleeved on both sides of the sliding column surface.

[0013] The auxiliary device for producing mask plates provided by the utility model has the beneficial effect that, compared with the original auxiliary device, the device can quickly fix the mask plates, will not cause the mask plates to fall during production, will not affect the later production operations of the mask plates, and can meet the use requirements. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 The utility model is a schematic diagram of the overall structure of an auxiliary device for producing a mask.

[0015] Figure 2 The utility model is a top view of the auxiliary stage structure of an auxiliary device for producing a mask.

[0016] Figure 3The utility model is a top view of the auxiliary stage structure of an auxiliary device for producing a mask.

[0017] In the figure: 1. Auxiliary table; 2. Support block; 3. Positioning column; 4. Positioning plate; 5. Slide plate; 6. Double-axis telescopic rod; 7. Connecting block; 8. Moving plate; 9. Sliding column; 10. Mounting block; 11. Sliding groove; 12. Tension spring. DETAILED DESCRIPTION

[0018] In order to make the purpose, technical solution and advantages of the utility model clearer, the technical solution of the utility model will be described in detail below. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other implementation methods obtained by ordinary technicians in this field without creative work belong to the scope of protection of the utility model.

[0019] The specific implementation of the utility model is described in detail below with reference to the accompanying drawings. In each of the accompanying drawings, the same reference numerals represent the same or corresponding technical features. Each of the accompanying drawings is only a schematic diagram and is not necessarily drawn according to the actual scale.

[0020] See also Figure 1 , Figure 2 and Figure 3 As shown in the figure, an auxiliary device for producing mask plates includes: an auxiliary table 1, support blocks 2 are installed on both sides of the top of the auxiliary table 1, positioning columns 3 are installed on the front and rear sides of the inner side of the support block 2, and a positioning plate 4 is installed on the inner side of the positioning column 3. The bottom of the support block 2 passes through the inner cavity of the auxiliary table 1 and is installed with a slide plate 5 on both sides, and a double-axis telescopic rod 6 is installed on the inner side of the slide plate 5. A connecting block 7 is installed on the front of the slide plate 5, and the front of the connecting block 7 passes through both sides of the front of the auxiliary table 1. A moving plate 8 is installed on the front of the connecting block 7, and the back of the moving plate 8 contacts the two sides of the front of the auxiliary table 1. Mounting pins are provided on the top and bottom of the front of the moving plate 8, and the back of the mounting pins passes through the back of the moving plate 8 and is fixed to the four sides of the front of the auxiliary table 1 by threads, and sliding columns 9 are provided on the front and rear sides of the inner side of the slide plate 5. A fixing ring is sleeved on the surface of the sliding column 9, and the outer side of the sliding column 9 is fixed to both sides of the inner cavity of the auxiliary table 1.

[0021] Furthermore, threaded holes for use with mounting pins are provided on the top and bottom of the front side of the auxiliary platform 1 .

[0022] In this embodiment, the worker first moves the mounting pin out of one side of the auxiliary table 1 , and then places the mask to be fixed above the auxiliary table 1 , and drives the connecting block 7 to move via the moving plate 8 .

[0023] Furthermore, a protective pad is adhered to the inner side of the positioning plate 4, and the protective pad is made of silicone rubber.

[0024] In this embodiment, the connecting block 7 drives the slide plate 5 to slide on the surface of the slide column 9, which effectively prevents the slide plate 5 from tilting or shaking when moving, and increases the stability of the slide plate 5 when moving.

[0025] Furthermore, mounting blocks 10 are installed at the bottom of both sides of the front side and the bottom of both sides of the back side of the auxiliary table 1, and mounting holes are opened on both sides of the top of the mounting blocks 10.

[0026] In this embodiment, the slide plate 5 drives the positioning column 3 to move through the support block 2, and the positioning column 3 drives the positioning plate 4 to fix the mask. After fixation, it is convenient to perform post-processing on the mask without causing displacement or falling of the mask.

[0027] Furthermore, sliding grooves 11 are provided on both sides of the back side of the inner cavity of the auxiliary platform 1 , and a sliding block is slidably connected to the inner cavity of the sliding groove 11 , and the front side of the sliding block is fixed to the back side of the slide plate 5 .

[0028] In this embodiment, after the fixing is completed, the movable plate 8 is fixed by the mounting pins to prevent the movable plate 8 from moving, and the mounting block 10 and the mounting holes are used to install and fix the auxiliary table 1 through the external fixing pins.

[0029] Furthermore, a tension spring 12 is sleeved on both sides of the surface of the sliding column 9 , the inner side of the tension spring 12 is fixed to both sides of the fixing ring, and a sleeve ring is installed on the outer side of the tension spring 12 , and the sleeve ring is sleeved on both sides of the surface of the sliding column 9 .

[0030] In this embodiment, with the assistance of the biaxial telescopic rod 6, the sliding groove 11 and the sliding block, the slide plate 5 can be more stable when moving, and the slide plate 5 can be effectively prevented from shaking when moving.

[0031] When in use, the worker first moves the mounting pin out of one side of the auxiliary table 1, and then places the mask to be fixed above the auxiliary table 1, and drives the connecting block 7 to move through the moving plate 8, and the connecting block 7 drives the slide plate 5 to slide on the surface of the sliding column 9, effectively preventing the slide plate 5 from tilting or shaking when moving, thereby increasing the stability of the slide plate 5 when moving. The slide plate 5 drives the positioning column 3 to move through the supporting block 2, and the positioning column 3 drives the positioning plate 4 to fix the mask. After the fixing is completed, it is convenient to carry out post-processing on the mask without causing the mask to be displaced or dropped. After the fixing is completed, the moving plate 8 is fixed by the mounting pin to prevent the moving plate 8 from moving. The mounting block 10 and the mounting hole are installed and fixed to the auxiliary table 1 through the external fixing pin, and the dual-axis telescopic rod 6 and the sliding groove 11 are assisted by the sliding block to make the slide plate 5 more stable when moving, effectively preventing the slide plate 5 from shaking when moving.

[0032] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-restrictive from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the present invention. Any reference numeral in a claim should not be regarded as limiting the claim to which it relates.

[0033] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. An auxiliary device for producing a mask, characterized in that: include: An auxiliary table (1), wherein support blocks (2) are installed on both sides of the top of the auxiliary table (1), positioning columns (3) are installed on the front and rear sides of the inner side of the support block (2), and a positioning plate (4) is installed on the inner side of the positioning column (3); a slide plate (5) is installed on both sides of the bottom of the support block (2) passing through the inner cavity of the auxiliary table (1), a double-axis telescopic rod (6) is installed on the inner side of the slide plate (5), and a connecting block (7) is installed on the front side of the slide plate (5), and the front side of the connecting block (7) passes through the front side of the auxiliary table (1). On both sides, a movable plate (8) is installed on the front of the connecting block (7), and the back of the movable plate (8) contacts the two sides of the front of the auxiliary platform (1). The top and bottom of the front of the movable plate (8) are provided with mounting pins, and the back of the mounting pins penetrates the back of the movable plate (8) and is screwed to the four sides of the front of the auxiliary platform (1). The front and rear sides of the inner side of the slide plate (5) are provided with sliding columns (9), and the surface of the sliding column (9) is sleeved with a fixing ring. The outer side of the sliding column (9) is fixed to the two sides of the inner cavity of the auxiliary platform (1).

2. The auxiliary device for producing a mask according to claim 1, characterized in that: The top and bottom of the front side of the auxiliary platform (1) are both provided with threaded holes for use with mounting pins.

3. The auxiliary device for producing a mask according to claim 1, characterized in that: A protective pad is adhered to the inner side of the positioning plate (4), and the protective pad is made of silicone rubber.

4. The auxiliary device for producing a mask according to claim 1, characterized in that: The bottoms of both sides of the front side and the bottoms of both sides of the back side of the auxiliary platform (1) are both installed with mounting blocks (10), and both sides of the top of the mounting blocks (10) are provided with mounting holes.

5. The auxiliary device for producing a mask according to claim 1, characterized in that: Sliding grooves (11) are provided on both sides of the back side of the inner cavity of the auxiliary platform (1), and a sliding block is slidably connected to the inner cavity of the sliding groove (11), and the front side of the sliding block is fixed to the back side of the sliding plate (5).

6. The auxiliary device for producing a mask according to claim 1, characterized in that: Tension springs (12) are sleeved on both sides of the surface of the slide column (9), the inner side of the tension spring (12) is fixed to both sides of the fixing ring, and the outer side of the tension spring (12) is installed with a sleeve ring, and the sleeve ring is sleeved on both sides of the surface of the slide column (9).

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