Spraying device capable of controlling thickness of PVD (Physical Vapor Deposition) coating

Abstract

The utility model relates to the technical field of spraying processing, and discloses a spraying device capable of controlling the thickness of a PVD (Physical Vapor Deposition) coating, the spraying device capable of controlling the thickness of the PVD coating comprises a spraying device main body, a motor, a substrate support, a deposition source, a heat shield, a heat dissipation grid, a power interface and an equipment switch, the heat insulation cover protects the interior of the device from being influenced by high temperature generated by a deposition source, the safe and stable operation environment is ensured, the base plate support fixes a base plate needing to be sprayed, and the position can be adjusted through the motor so as to meet the requirements of base plates of different sizes and different coatings. According to the spraying device capable of controlling the thickness of the PVD coating, through integration of the quartz crystal microbalance and the efficient control system, the device can monitor the thickness and the growth rate of the coating in real time, it is ensured that the preset coating specification can be achieved in each time of deposition, and therefore the consistency and the quality of the coating are ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of spraying processing, in particular to a spraying device capable of controlling the thickness of a PVD coating. Background Art

[0002] Physical vapor deposition (PVD) technology is an advanced material processing method used to prepare thin films and coatings on various substrates. This technology originated from scientific research in the mid-20th century. With the in-depth understanding of the performance of ultra-thin film materials and the advancement of manufacturing technology, PVD has gradually become an indispensable processing technology in the fields of microelectronics, aerospace, medical devices, automotive industry and daily consumer products.

[0003] Conventional spraying devices usually have insufficient control over coating thickness and uniformity. In actual use, it may be difficult for conventional spraying devices to accurately control coating thickness and uniformity, and uneven heating leads to poor spraying effects. Utility Model Content

[0004] 1. Technical issues to be resolved

[0005] The utility model aims to provide a spraying device capable of controlling the thickness of a PVD coating, so as to solve the problem that the conventional spraying device mentioned in the above background technology is insufficient in controlling the thickness and uniformity of the coating.

[0006] (II) Technical solution

[0007] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a spraying device capable of controlling the thickness of a PVD coating, the spraying device capable of controlling the thickness of a PVD coating comprising a spraying device body, a motor, a substrate holder, a deposition source, a heat shield, an infrared heating lamp, a lamp tube, a reflective cover, a vacuum pump, a fan, a quartz crystal microbalance, a buffer pad, a visual window, a pressure gauge, a control panel, a loading door, a handle, a heat dissipation grille, a power interface and an equipment switch; a motor is arranged at the inner bottom end of the spraying device body, a substrate holder is arranged at the upper end of the motor, a deposition source is arranged at the upper end of the substrate holder, a heat shield is arranged at the inner top end of the spraying device body, an infrared heating lamp is arranged at the lower end of the heat shield, the heat shield protects the interior of the device from the high temperature generated by the deposition source, and ensures a safe and stable operating environment; the substrate holder fixes the substrate to be sprayed, and the position can be adjusted by a motor to adapt to substrates of different sizes and different coating requirements.

[0008] Preferably, a lamp tube is provided at the lower end of the infrared heating lamp, and a reflective cover is provided on the outer ring of the lamp tube to reflect the heat emitted by the infrared heating lamp so that the heat can act more concentratedly on a specific area, thereby improving the heating efficiency.

[0009] Preferably, a vacuum pump is provided at the rear end of the inner wall of the spray device body, and a fan is provided at the rear end of the vacuum pump to create and maintain the low-pressure environment required during the spraying process to reduce the impact of air and impurities on the coating quality.

[0010] Preferably, a quartz crystal microbalance is provided at the rear end of the substrate support, and buffer pads are provided around the bottom of the spraying device body. The quartz crystal microbalance monitors the thickness and deposition rate of the coating in real time to ensure the uniformity and accuracy of the coating.

[0011] Preferably, a visual window is provided at the right end of the spray device body, and a pressure gauge is provided on the upper side of the visual window, allowing the operator to directly observe the spraying process without opening the device.

[0012] Preferably, a control panel is provided at the top of the spray device body, a loading door is provided at the front end of the spray device body, and a handle is provided at the front end of the loading door for opening and closing the device to load or remove the substrate.

[0013] Preferably, a heat dissipation grille is provided at the rear end of the spray device body, a power interface is provided on the lower side of the heat dissipation grille, and a device switch is provided on the left side of the power interface. The heat dissipation grille is located at the rear of the device to help dissipate heat and maintain the temperature balance inside the device.

[0014] Compared with the prior art, the beneficial effects of the utility model are:

[0015] 1. The spraying device that can control the thickness of the PVD coating can monitor the thickness and growth rate of the coating in real time by integrating a quartz crystal microbalance and an efficient control system, ensuring that each deposition can reach the predetermined coating specifications, thereby ensuring the consistency and quality of the coating;

[0016] 2. The spraying device that can control the thickness of the PVD coating, the design of the infrared heating lamp with the lamp tube and the reflector cover can ensure that the substrate is evenly heated, which is crucial for achieving uniform deposition of the coating. The addition of the heat shield further protects the internal structure of the device to prevent damage to the equipment due to high temperature;

[0017] 3. The spraying device can control the thickness of the PVD coating. The loading door is equipped with a handle, which makes the loading and unloading of the substrate simple and quick, while ensuring the safety of the operation process. The application of vacuum pumps and fans ensures that the required vacuum environment can be quickly reached and maintained during the deposition process, while effectively managing the temperature inside the device to prevent overheating. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the three-dimensional structure of the utility model;

[0019] Figure 2 This is a schematic diagram of the back structure of the spraying device of the utility model;

[0020] Figure 3 This is a schematic diagram of the cross-sectional structure of the device of the utility model;

[0021] Figure 4 For this utility model Figure 3 A is an enlarged view of the middle image.

[0022] In the figure: 1. Spraying device body; 2. Motor; 3. Substrate bracket; 4. Deposition source; 5. Heat shield; 6. Infrared heating lamp; 7. Lamp tube; 8. Reflection cover; 9. Vacuum pump; 10. Fan; 11. Quartz crystal microbalance; 12. Buffer pad; 13. Visual window; 14. Pressure gauge; 15. Control panel; 16. Loading door; 17. Handle; 18. Heat dissipation grille; 19. Power interface; 20. Equipment switch. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0024] See also Figure 1-Figure 4 The utility model provides a technical solution: a spraying device capable of controlling the thickness of a PVD coating, the spraying device capable of controlling the thickness of a PVD coating comprising a spraying device body 1, a motor 2, a substrate support 3, a deposition source 4, a heat shield 5, an infrared heating lamp 6, a lamp tube 7, a reflective cover 8, a vacuum pump 9, a fan 10, a quartz crystal microbalance 11, a buffer pad 12, a visual window 13, a pressure gauge 14, a control panel 15, a loading door 16, a handle 17, a heat dissipation grille 18, a power interface 19 and an equipment switch 20. The motor 2 is arranged at the bottom end of the spraying device body 1, the substrate support 3 is arranged at the upper end of the motor 2, the deposition source 4 is arranged at the upper end of the substrate support 3, the heat shield 5 is arranged at the top end of the spraying device body 1, the infrared heating lamp 6 is arranged at the lower end of the heat shield 5, the substrate support 3 fixes the substrate to be sprayed, and the position can be adjusted by the motor to adapt to substrates of different sizes and different coating requirements, and the heat shield protects the interior of the device from the high temperature generated by the deposition source to ensure a safe and stable operating environment.

[0025] A lamp tube 7 is provided at the lower end of the infrared heating lamp 6, and a reflective cover 8 is provided on the outer ring of the lamp tube 7. A vacuum pump 9 is provided at the rear end of the inner wall of the spray device body 1, and a fan 10 is provided at the rear end of the vacuum pump 9. A quartz crystal microbalance 11 is provided at the rear end of the substrate holder 3. Buffer pads 12 are provided around the bottom of the spray device body 1. The infrared heating lamp 6 and the lamp tube 7 thereunder provide the required heat, and the heat is evenly distributed on the substrate through the reflective cover 8 to promote uniform deposition of the thin film. At the same time, the heat insulation cover 5 protects other parts of the device from overheating. The quartz crystal microbalance 11 monitors the thickness of the coating in real time to ensure precise control.

[0026] A visual window 13 is provided at the right end of the spray device body 1, a pressure gauge 14 is provided on the upper side of the visual window 13, a control panel 15 is provided at the top of the spray device body 1, a loading door 16 is provided at the front end of the spray device body 1, a handle 17 is provided at the front end of the loading door 16, a heat dissipation grille 18 is provided at the rear end of the spray device body 1, a power interface 19 is provided on the lower side of the heat dissipation grille 18, and an equipment switch 20 is provided on the left side of the power interface 19. The visual window 13 allows the operator to observe the internal situation, and the fan 10 and the heat dissipation grille 18 assist in heat dissipation to maintain stable operation of the equipment. After spraying is completed, the deposition source 4 and the infrared heating lamp 6 are turned off through the control panel 15, and the loading door 16 is opened to remove the substrate. The whole process is powered by the power interface 19, and the equipment switch 20 is used to control the total power supply of the equipment. The buffer pad 12 protects the equipment from external vibration.

[0027] Working principle: First, operate the loading door 16 through the handle 17, and place the substrate to be sprayed on the substrate holder 3 driven by the motor 2 through the loading door. Once the substrate is installed, close the loading door 16 to ensure that the vacuum chamber is sealed. Then, start the equipment through the control panel 15, and the vacuum pump 9 starts to work, extracting the air in the spray device body 1 to create the required low-pressure environment. At the same time, the pressure gauge 14 monitors the internal pressure to reach the vacuum level required for the PVD process. When the deposition process starts, the deposition source 4 is activated and begins to generate the material vapor to be deposited. The infrared heating lamp 6 and the lamp tube 7 below it provide the required heat, and the heat is evenly distributed through the reflector 8. The device is arranged on the substrate to promote uniform deposition of the thin film. Meanwhile, the heat shield 5 protects other parts of the device from overheating. The quartz crystal microbalance 11 monitors the thickness of the coating in real time to ensure precise control. During the whole process, the visual window 13 allows the operator to observe the internal situation. The fan 10 and the heat dissipation grille 18 assist in heat dissipation to keep the equipment running stably. After spraying is completed, the deposition source 4 and the infrared heating lamp 6 are turned off through the control panel 15, and the loading door 16 is opened to remove the substrate. The whole process is powered by the power interface 19. The equipment switch 20 is used to control the total power supply of the equipment. The buffer pad 12 protects the equipment from external vibration to ensure the smooth progress of the spraying process.

[0028] Finally, it should be noted that the above content is only used to illustrate the technical solution of the utility model, rather than to limit the protection scope of the utility model. Simple modifications or equivalent substitutions of the technical solution of the utility model by ordinary technicians in this field do not deviate from the essence and scope of the technical solution of the utility model.

Claims

1. A spraying device capable of controlling the thickness of a PVD coating, the spraying device capable of controlling the thickness of a PVD coating comprising a spraying device body (1), a motor (2) and a substrate support (3), characterized in that: A motor (2) is arranged at the bottom of the spray device body (1), a substrate support (3) is arranged at the upper end of the motor (2), a deposition source (4) is arranged at the upper end of the substrate support (3), a heat insulation cover (5) is arranged at the top of the spray device body (1), and an infrared heating lamp (6) is arranged at the lower end of the heat insulation cover (5).

2. A spraying device capable of controlling the thickness of a PVD coating according to claim 1, characterized in that: A lamp tube (7) is arranged at the lower end of the infrared heating lamp (6), and a reflective cover (8) is arranged on the outer ring of the lamp tube (7).

3. A spraying device capable of controlling the thickness of a PVD coating according to claim 1, characterized in that: A vacuum pump (9) is arranged at the rear end of the inner wall of the spray device body (1), and a fan (10) is arranged at the rear end of the vacuum pump (9).

4. A spraying device capable of controlling the thickness of a PVD coating according to claim 1, characterized in that: A quartz crystal microbalance (11) is arranged at the rear end of the substrate support (3), and buffer pads (12) are arranged around the bottom of the spraying device body (1).

5. A spraying device capable of controlling the thickness of a PVD coating according to claim 1, characterized in that: A visual window (13) is provided at the right end of the spray device body (1), and a pressure gauge (14) is provided on the upper side of the visual window (13).

6. A spraying device capable of controlling the thickness of a PVD coating according to claim 1, characterized in that: A control panel (15) is arranged at the top of the spray device body (1), a loading door (16) is arranged at the front end of the spray device body (1), and a handle (17) is arranged at the front end of the loading door (16).

7. A spraying device capable of controlling the thickness of a PVD coating according to claim 1, characterized in that: A heat dissipation grille (18) is provided at the rear end of the spray device body (1), a power supply interface (19) is provided at the lower side of the heat dissipation grille (18), and a device switch (20) is provided at the left side of the power supply interface (19).

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