Sealing structure, sealing device and photovoltaic material manufacturing equipment
By designing cooling channels and installation space on the outer flange of the photovoltaic material manufacturing equipment and setting a first seal, the sealing problem caused by waste gas solidification is solved, and better sealing effect and equipment maintenance extension are achieved.
Patent Information
- Application Number
- CN202421543919.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-28
- Publication Date
- 2025-03-21
- Estimated Expiration
- 2034-06-28
AI Technical Summary
During the manufacturing process of photovoltaic materials, the reaction waste gas is prone to gush out and cooled to solidify on the surface of the outer flange, resulting in uneven surfaces of the outer flange and cannot be completely sealed, affecting the reuse of the equipment.
A sealing structure is designed, including an outer flange and a first seal. The outer flange is provided with a cooling channel and an installation space in the axial direction. The first seal is arranged in the installation space for contacting the furnace door and curing the exhaust gas on the outside through the cooling channel to reduce the risk of concave and convexity of the seal.
It effectively reduces the risk of concave and convexity between the seal and the furnace door, ensures the sealing between the outer flange and the furnace door, and extends the maintenance interval of photovoltaic material manufacturing equipment.
Smart Images
Figure CN222650559U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the field of photovoltaic manufacturing equipment, and in particular to a sealing structure, a sealing device and photovoltaic material manufacturing equipment. Background Art
[0002] The processing of semiconductor or photovoltaic materials is usually achieved by feeding sheet materials into a reactor to react under certain temperature and low pressure conditions. The reactor must form a closed low-pressure chamber, and the sealing structure between the external flanges plays a vital role.
[0003] After the reactor is processed and the furnace door is opened, the waste gas after the reaction easily flows out and contacts the surface of the outer flange. Part of the waste gas cools and solidifies on the surface of the outer flange, causing the surface of the outer flange to be uneven and unable to completely fit with the seal on the furnace door, making it difficult for the external flange to seal the reactor again. Utility Model Content
[0004] In view of this, the present application provides a sealing structure for sealing a furnace door of a hot furnace.
[0005] The present application provides a sealing structure for sealing a furnace door of a hot furnace, comprising: an outer flange and a first sealing member. The outer flange is arranged in an annular shape, and has a first end and a second end opposite to each other in the axial direction. The first end is provided with a first cooling channel, an installation space, and a second cooling channel. In the radial direction of the outer flange, the first cooling channel, the installation space, and the second cooling channel are arranged in sequence from the inner side of the outer flange to the outer side of the outer flange. A first cooling medium flows through both the first cooling channel and the second cooling channel. The first sealing member is arranged in the installation space, and a part of the first sealing member protrudes from the installation space to the first end of the outer flange. The first sealing member is used to contact the furnace door.
[0006] In the above embodiment, the first cooling channel and the second cooling channel are respectively arranged on both sides of the installation space, so that the exhaust gas is solidified on the outside of the installation space, reducing the risk that the first sealing member and the furnace door cannot be completely fitted due to unevenness. In addition, the first sealing member protrudes toward the furnace door to increase the gap between the outer flange and the furnace door, thereby ensuring the sealing between the outer flange and the furnace door while facilitating the accumulation of more exhaust gas solids, which helps to extend the maintenance interval of the photovoltaic material manufacturing equipment.
[0007] In some embodiments, the width of the installation space in the radial direction of the outer flange gradually decreases from the second end to the first end.
[0008] In some embodiments, the second end is provided with a protrusion and a mounting groove, wherein the protrusion protrudes outward along the axial direction of the outer flange for embedding into an external structure, and the mounting groove is located on the inner side of the protrusion along the radial direction of the outer flange for accommodating another external structure.
[0009] A sealing device comprises an inner flange, a second sealing member and the above sealing structure, wherein the inner flange is arranged at the furnace opening of a hot furnace, the outer flange is detachably connected to the inner flange, and the second end faces the inner flange. The second sealing member is located between the outer flange and the inner flange.
[0010] In some embodiments, a third cooling channel is provided on a side of the inner flange away from the outer flange, and a second cooling medium flows through the third cooling channel.
[0011] A photovoltaic material manufacturing device comprises a furnace tube, a furnace door and the above-mentioned sealing device. Along a first direction, the furnace tube is provided with a furnace opening, and the furnace opening protrudes outward of the furnace tube in a radial direction to form a limiting portion. Along the radial direction of the furnace tube, an inner flange is sleeved on the outer side of the limiting portion. Along the axial direction of the furnace tube, an outer flange is located on one side of the inner flange and the limiting portion, and the furnace door is detachably connected to the outer flange, and the furnace door is configured to cover the furnace opening. The first direction is parallel to the axial direction of the outer flange.
[0012] In some embodiments, along the first direction, a first recess and a second recess are provided at one end of the inner flange facing the outer flange, the first recess and the second recess are connected to each other, and the second recess is closer to the outer flange relative to the first recess, and the limiting portion is at least partially located in the first recess and the second recess. The inner flange includes an inclined surface, which is respectively connected to the side wall of the second recess and the side wall of the first recess, and the inclined surface faces the limiting portion and the outer flange. The limiting portion has an outer surface on a side away from the furnace tube; the second sealing member is at least partially located in the second recess, and the second sealing member is located between the inner flange, the outer flange and the limiting portion.
[0013] In some embodiments, a portion of the outer flange extends into the second recess and acts on the second seal toward the ramp.
[0014] In some embodiments, the photovoltaic material manufacturing equipment further includes a buffer bar, which is located between the limiting portion of the furnace tube and the second end of the outer flange.
[0015] In some embodiments, the photovoltaic material manufacturing equipment further comprises an isolating member detachably connected to the outer flange, and when the furnace door opens the furnace opening, the isolating member covers the furnace opening and / or the first sealing member. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] Figure 1 A partial structural schematic diagram of a photovoltaic material manufacturing device in one of its working states provided in one embodiment of the present application.
[0017] Figure 2 for Figure 1 Schematic diagram of the partial structure of the photovoltaic material manufacturing equipment.
[0018] Figure 3 for Figure 1 A cross-sectional view of a partial structure of a photovoltaic material manufacturing device after being cut along the cutting line III-III.
[0019] Figure 4 for Figure 3 A partial enlarged view of point A in the middle.
[0020] Figure 5 for Figure 4 Schematic diagram of the outer flange.
[0021] Figure 6 A partial structural schematic diagram of a photovoltaic material manufacturing device in another working state provided in one embodiment of the present application.
[0022] Main component symbols
[0023] Photovoltaic material manufacturing equipment 10
[0024] Furnace pipe 11
[0025] Furnace mouth 111
[0026] Limiting part 112
[0027] Outer surface 1121
[0028] Furnace door 12
[0029] Sealing device 13
[0030] Inner flange 131
[0031] The first depression 1311
[0032] The second depression 1312
[0033] Incline 1313
[0034] The third cooling channel 1314
[0035] Second sealing member 132
[0036] Sealing structure 133
[0037] External flange 1331
[0038] First End 13311
[0039] Second end 13312
[0040] First cooling channel 13313
[0041] Installation space 13314
[0042] Second cooling channel 13315
[0043] Protrusion 13316
[0044] First seal 1332
[0045] Buffer bar 14
[0046] Isolation 15
[0047] First direction X DETAILED DESCRIPTION
[0048] The technical solutions in the embodiments of the present application will be described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all of the embodiments.
[0049] It should be noted that when a component is considered to be "connected" to another component, it may be directly connected to the other component or there may be a central component at the same time. When a component is considered to be "located on" another component, it may be directly located on the other component or there may be a central component at the same time. The terms "top", "bottom", "upper", "lower", "left", "right", "front", "back", and similar expressions used herein are for illustrative purposes only.
[0050] The terms "first", "second", etc. are only used to distinguish different objects and shall not be understood as indicating or implying relative importance or implying the quantity, specific order or primary and secondary relationship of the indicated technical features.
[0051] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art to which this application belongs. The terms used herein in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application.
[0052] Some embodiments of the present application will be described below in conjunction with the accompanying drawings. In the absence of conflict, the following embodiments and features in the embodiments may be combined with each other.
[0053] In some embodiments, see Figure 1The present application discloses a photovoltaic material manufacturing device 10, comprising a furnace tube 11, a furnace door 12 and a sealing device 13, wherein the sealing device 13 is arranged on the furnace tube 11. Along a first direction X, the furnace tube 11 has a furnace opening 111, the furnace door 12 is used to cover the furnace opening 111 so that the furnace tube 11 forms a closed state, and the sealing device 13 is located between the furnace door 12 and the furnace tube 11 to improve the sealing between the furnace door 12 and the furnace opening 111, thereby meeting the requirements of the photovoltaic material manufacturing device 10 for reaction processing of photovoltaic materials.
[0054] In some embodiments, see Figure 2 The sealing device 13 includes an inner flange 131, a second sealing member 132 and a sealing structure 133. The sealing structure 133 includes an outer flange 1331 and a first sealing member 1332. The outer flange 1331 has a first end 13311 and a second end 13312 opposite to each other. The outer flange 1331 and the inner flange 131 are both arranged in an annular shape. The furnace port 111 protrudes outwardly of the furnace tube 11 in the radial direction with a limiting portion 112, and the inner flange 131 and the outer flange 1331 are respectively located on opposite sides of the limiting portion 112 in the first direction X.
[0055] When the sealing device 13 is installed, the limiting part 112 is used to limit the inner flange 131, so that the inner flange 131 is arranged on the furnace tube 11, the second end 13312 faces the inner flange 131, the second sealing member 132 is located between the outer flange 1331 and the inner flange 131, and the outer flange 1331 and the inner flange 131 are detachably connected by threads or bolts, so that the outer flange 1331 and the inner flange 131 simultaneously squeeze the second sealing member 132, so that the second sealing member 132 seals between the outer flange 1331 and the inner flange 131. Finally, the furnace door 12 is detachably connected to the outer flange 1331, and the furnace door 12 covers the furnace opening 111, so that the furnace tube 11 forms a closed state. In addition, because the limiting part 112 limits the inner flange 131, the inner flange 131 and the outer flange 1331 are close to and fixedly connected in the first direction X, so that the outer flange 1331 is fixed on the furnace tube 11.
[0056] The axial directions are parallel to the first direction X, and the radial directions are perpendicular to the first direction X.
[0057] In some embodiments, see Figure 3 and Figure 4In the first direction X, a first recess 1311 and a second recess 1312 are provided at one end of the inner flange 131 facing the outer flange 1331. The second recess 1312 and the first recess 1311 are connected to each other. The second recess 1312 is closer to the outer flange 1331 relative to the first recess 1311. The first recess 1311 and the second recess 1312 jointly accommodate the limiting portion 112 to avoid that part of the limiting portion 112 protrudes from the end surface of the inner flange 131 toward the outer flange 1331, thereby avoiding interference between the limiting portion 112 and the outer flange 1331, so that the outer flange 1331 can be closer to the inner flange 131 to reduce the gap between the inner flange 131 and the outer flange 1331, which helps the inner flange 131 and the outer flange 1331 to fully fit, thereby improving the sealing between the inner flange 131 and the outer flange 1331.
[0058] In some embodiments, see Figure 3 and Figure 4 The second sealing member 132 is at least partially disposed in the second recess 1312. The inner flange 131 also has an inclined surface 1313 located between the second recess 1312 and the first recess 1311, and the inclined surface 1313 faces the limiting portion 112 and the outer flange 1331. The limiting portion 112 has an outer surface 1121 on a side away from the furnace tube 11.
[0059] When the second sealing member 132 is located in the second recess 1312, the inner diameter of the second recess 1312 is larger than the inner diameter of the first recess 1311, and the second sealing member 132 is also radially sleeved on the outer side of the limiting portion 112. Since the opening of the second recess 1312 faces the outer flange 1331, the second sealing member 132 located outside the second recess 1312 can face the outer flange 1331, thereby making the second sealing member 132 located between the inner flange 131, the outer flange 1331 and the limiting portion 112. Since the second sealing member 132 can respectively contact the inclined surface 1313, the second end 13312 of the outer flange 1331 and the outer surface 1121 of the limiting portion 112, during the connection process of the outer flange 1331 and the inner flange 131, the gap between the outer flange 1331 and the inner flange 131 gradually decreases, and the second end 13312 of the outer flange 1331 acts on the second sealing member 132 toward the inclined surface 1313, and presses the second sealing member 132 against the inclined surface 1313. Under the reaction of the inclined surface 1313, the second sealing member 132 is pressed against the outer surface 1121 of the limiting portion 112, so that the second sealing member 132 simultaneously seals the inner flange 131, the outer flange 1331 and the limiting portion 112, thereby improving the sealing between the sealing device 13 and the furnace tube 11.
[0060] In some embodiments, see Figure 4The first end 13311 has a protrusion 13316 protruding toward the inner flange 131. When the sealing device 13 is installed, the outer flange 1331 and the inner flange 131 are close to each other, and the protrusion 13316 extends into the recess and acts on the second sealing member 132 toward the inclined surface 1313. When the second sealing member 132 is completely located in the second recess 1312, the second sealing member 132 is limited by the inner flange 131 and the limiting portion 112, thereby improving the accuracy of the installation of the second sealing member 132. At the same time, the protrusion 13316 is extended into the second recess 1312 to improve the accuracy of the outer flange 1331 acting on the second seal 132 toward the inclined surface 1313, and helps to reduce the contact area between the outer flange 1331 and the second seal 132, thereby helping to increase the pressure between the outer flange 1331 and the second seal 132, thereby reducing the gap between the outer flange 1331 and the second seal 132, and improving the fit between the outer flange 1331 and the second seal 132.
[0061] In some embodiments, see Figure 4 A third cooling channel 1314 is provided on the inner flange 131, and a second cooling medium (not shown) flows through the third cooling channel 1314. When the photovoltaic material manufacturing equipment 10 is working, the inner flange 131 and the second sealing member 132 are cooled by the flowing second cooling medium, thereby protecting the second sealing member 132 and helping to increase the service life of the second sealing member 132.
[0062] In some embodiments, see Figure 4 The third cooling channel 1314 is opened on the side of the inner flange 131 away from the outer flange 1331, so that the third cooling channel 1314 is away from the gap between the inner flange 131 and the outer flange 1331. When the second cooling medium in the third cooling channel 1314 leaks, the risk of the second cooling medium flowing from the gap between the inner flange 131 and the outer flange 1331 to the furnace port 111 can be reduced.
[0063] In some embodiments, see Figure 4 The photovoltaic material manufacturing equipment 10 further includes a buffer strip 14 disposed between the outer flange 1331 and the furnace tube 11. When the outer flange 1331 is connected to the inner flange 131, the second end 13312 of the outer flange 1331 is disposed toward the furnace opening 111, and the buffer strip 14 buffers the second end 13312 and the end surface of the furnace opening 111, thereby reducing the collision between the outer flange 1331 and the furnace tube 11, which helps to reduce the damage to the furnace tube 11. The buffer strip 14 is a high temperature resistant elastic member.
[0064] In some embodiments, a mounting groove (not marked) is provided at the second end 13312 of the outer flange 1331. Along the radial direction of the outer flange 1331, the mounting groove is located on the inner side of the protrusion 13316. The mounting groove is used to accommodate the buffer bar 14 to fix the buffer bar 14, thereby improving the stability of the buffer bar 14 and helping to reduce the risk of the buffer bar 14 being offset.
[0065] In some embodiments, see Figure 4 and Figure 5 The first end 13311 of the outer flange 1331 is provided with a first sealing member 1332, and the first sealing member 1332 is pressed together by the outer flange 1331 and the furnace door 12, so that the first sealing member 1332 seals the outer flange 1331 and the furnace door 12. In addition, by providing the first sealing member 1332 on the outer flange 1331, it is possible to avoid installing the first sealing member 1332 on the furnace door 12, so that the end face of the furnace door 12 becomes a plane, which helps to reduce the processing cost of the furnace door 12 and maintain the integrity of the furnace door 12.
[0066] In some embodiments. Figure 4 and Figure 5 The first end 13311 of the outer flange 1331 is provided with a first cooling channel 13313, an installation space 13314 and a second cooling channel 13315. In the radial direction of the outer flange 1331, the first cooling channel 13313, the installation space 13314 and the second cooling channel 13315 are sequentially arranged from the inner side of the outer flange 1331 to the outer side of the outer flange 1331. A first cooling medium (not shown) flows through the first cooling channel 13313 and the second cooling channel 13315. The installation space 13314 is used for the installation of the first sealing member 1332. The first cooling channel 13313 and the second cooling channel 13315 are respectively arranged on both sides of the installation space 13314 to cool the first sealing member 1332, which helps to increase the service life of the first sealing member 1332. Furthermore, the first cooling channel 13313 and the second cooling channel 13315 are respectively spaced apart from the installation space 13314, so that the exhaust gas after the reaction of the photovoltaic material manufacturing equipment 10 is solidified on the outside of the installation space 13314, so that the exhaust gas solidified material avoids the first seal 1332, so as to reduce the risk of the furnace door 12 and the first seal 1332 not being able to fully fit together due to the presence of bumps and depressions between the furnace door 12 when the furnace door 12 approaches the first seal 1332 in the first direction X and fits with the first seal 1332.
[0067] In some embodiments, see Figure 4The first sealing member 1332 partially protrudes from the installation space 13314 toward the furnace door 12 to increase the gap between the outer flange 1331 and the furnace door 12, thereby ensuring the sealing between the outer flange 1331 and the furnace door 12 while facilitating the accumulation of more waste gas solids between the outer flange 1331 and the furnace door 12, thereby helping to extend the maintenance time interval of the photovoltaic material manufacturing equipment 10.
[0068] In some embodiments, see Figure 5 , the width of the installation space 13314 in the radial direction of the outer flange 1331 decreases from the second end 13312 to the first end 13311. Specifically, the installation space 13314 is a dovetail groove opened at the first end 13311 of the outer flange 1331. The dovetail groove is wide inside and narrow outside to increase the resistance of the dovetail groove port to the first seal 1332, thereby reducing the risk of the first seal 1332 easily falling off from the installation space 13314 and improving the stability of the first seal 1332 in the installation space 13314.
[0069] In some embodiments, see Figure 6 The photovoltaic material manufacturing equipment 10 also includes an isolating member 15 detachably connected to the outer flange 1331. When the photovoltaic material manufacturing equipment 10 is finished reacting, the furnace door 12 is removed from the outer flange 1331 to open the furnace port 111, and then the isolating member 15 is connected to the outer flange 1331, and the isolating member 15 is covered on the first sealing member 1332. The isolating member 15 is attached to the first sealing member 1332 to reduce the risk of hot air in the furnace tube 11 convection with the external air and passing through the first sealing member 1332, causing the waste gas to solidify on the first sealing member 1332.
[0070] In some embodiments, the isolation member 15 also covers the furnace mouth 111 to maintain the sealing of the furnace tube 11 after the furnace door 12 is removed from the outer flange 1331, thereby reducing heat loss from the furnace tube 11 due to heat convection, and helping to maintain the high temperature inside the furnace tube 11, so as to facilitate the energy consumption of the photovoltaic material manufacturing equipment 10 for further reaction processing.
[0071] In some embodiments, the isolation member 15 is made of a high temperature resistant material.
[0072] In some embodiments, the isolation member 15 is made of a thermal insulation material.
[0073] In some embodiments, the partition 15 is consistent with the oven door 12 , but the thickness of the partition 15 is smaller than that of the oven door 12 , thereby helping to reduce the production cost of the partition 15 .
[0074] In addition, those skilled in the art should recognize that the above embodiments are only used to illustrate the present application, and are not intended to limit the present application. As long as they are within the essential scope of the present application, appropriate changes and modifications to the above embodiments are within the scope disclosed in the present application.
Claims
1. A sealing structure for sealing a door of a hot furnace, characterized in that: include: An outer flange, wherein the outer flange is arranged in an annular shape, and the outer flange has a first end and a second end opposite to each other in the axial direction, and the first end is provided with a first cooling channel, a mounting space, and a second cooling channel, and in the radial direction of the outer flange, the first cooling channel, the mounting space, and the second cooling channel are sequentially arranged at intervals from the inner side of the outer flange to the outer side of the outer flange, and a first cooling medium flows through both the first cooling channel and the second cooling channel; A first seal is provided in the installation space, a portion of the first seal protrudes from the installation space to the first end of the outer flange, and the first seal is used to contact the furnace door.
2. The sealing structure according to claim 1, characterized in that: The width of the installation space in the radial direction of the outer flange decreases from the second end to the first end.
3. The sealing structure according to claim 1, characterized in that: The second end is provided with a protrusion and a mounting groove, and along the axial direction of the outer flange, the protrusion protrudes outwards and is used to be embedded in an external structure; Along the radial direction of the outer flange, the mounting groove is located at the inner side of the protrusion, and the mounting groove is used to accommodate another external structure.
4. A sealing device, characterized in that: It comprises an inner flange, a second sealing member and a sealing structure according to any one of claims 1 to 3, wherein the inner flange is arranged at the furnace opening of the hot furnace, the outer flange is detachably connected to the inner flange, and the second end faces the inner flange; The second seal is located between the outer flange and the inner flange.
5. The sealing device according to claim 4, characterized in that: A third cooling channel is provided on a side of the inner flange away from the outer flange, and a second cooling medium flows through the third cooling channel.
6. A photovoltaic material manufacturing device, characterized in that: It comprises a furnace tube, a furnace door and the sealing device as claimed in claim 4, wherein the furnace tube is provided with a furnace opening along a first direction, and the furnace opening protrudes a limiting portion outward of the furnace tube in a radial direction; Along the radial direction of the furnace tube, the inner flange is sleeved on the outer side of the limiting portion; Along the axial direction of the furnace tube, the outer flange is located on one side of the inner flange and the limiting portion, the furnace door is detachably connected to the outer flange, and the furnace door is configured to cover the furnace opening; The first direction is parallel to the axial direction of the outer flange.
7. The photovoltaic material manufacturing equipment according to claim 6, characterized in that: Along the first direction, one end of the inner flange facing the outer flange is provided with a first recess and a second recess, the first recess and the second recess are connected to each other, and the second recess is closer to the outer flange than the first recess, and the limiting portion is at least partially located in the first recess and the second recess; The inner flange comprises an inclined surface, the inclined surface is respectively connected to the side wall of the second recess and the side wall of the first recess, and the inclined surface faces the limiting portion and the outer flange; At least a portion of the second sealing member is disposed in the second recess, and the second sealing member is located between the inner flange, the outer flange and the limiting portion.
8. The photovoltaic material manufacturing equipment according to claim 7, characterized in that: A portion of the outer flange extends into the second recess and acts on the second seal toward the inclined surface.
9. The photovoltaic material manufacturing equipment according to claim 6, characterized in that: The photovoltaic material manufacturing equipment also includes a buffer bar, which is located between the limiting portion of the furnace tube and the second end of the outer flange.
10. The photovoltaic material manufacturing equipment according to claim 6, characterized in that: The photovoltaic material manufacturing equipment also includes an isolation member detachably connected to the outer flange, and when the furnace door opens the furnace opening, the isolation member covers the furnace opening and / or the first sealing member.