Linkage alarm device based on different semiconductor devices

Abstract

The utility model provides a linkage alarm device based on different semiconductor devices, which comprises a device bottom shell, a programmable logic controller is arranged above the device bottom shell, one side of the programmable logic controller is provided with a bubble machine external connection port, the other side of the programmable logic controller is provided with a liquid adding machine external connection port, and the liquid adding machine external connection port is provided with a liquid adding machine external connection port. A signal output port is formed in the front end face of the programmable logic controller, and a shielding switch is arranged on one side of the device bottom shell, so that the problem that existing semiconductor cutting equipment and auxiliary equipment of the semiconductor cutting equipment such as a liquid adding machine and a foaming machine cannot be linked to give an alarm at the same time is solved.

Description

Technical Field

[0001] The utility model mainly relates to the field of semiconductor equipment alarm, and in particular to a linkage alarm device based on different semiconductor equipment. Background Art

[0002] At present, in semiconductor packaging companies, chip cutting is a very important production link. In the production process of cutting, a certain proportion of bubblers and liquid adding machines are needed around the wafer cutting equipment to assist. Generally, one bubbler or liquid adding machine is used to detect multiple cutting machines. If these two types of equipment detect gas or hydraulic anomalies, they will alarm. At this time, the cutting equipment in operation needs to be suspended to ensure that no accidents occur.

[0003] However, the existing alarms of these two types of equipment are not related to the wafer cutting machine. After the alarm, personnel are required to manually stop the cutting equipment operation. Once the personnel fail to stop the equipment in time, it is very easy to cause a production accident. Utility Model Content

[0004] 1. Technical problems to be solved by the utility model:

[0005] The utility model provides a linkage alarm device based on different semiconductor equipment, which is used to solve the problem that the existing semiconductor cutting equipment and its auxiliary equipment liquid adding machine and bubbler cannot be linked to alarm at the same time.

[0006] 2. Technical solution:

[0007] To achieve the above-mentioned purpose, the technical solution provided by the utility model is: a linkage alarm device based on different semiconductor devices, comprising a device bottom shell, a programmable logic controller is installed above the device bottom shell, a signal input port is arranged on one side of the programmable logic controller, a signal output terminal is arranged on the other side of the programmable logic controller, and a shielding switch is arranged on one side of the signal input port.

[0008] The signal input port collects the alarm signals of the liquid adding machine and the foaming machine through relays installed in the liquid adding machine and the foaming machine, and the shielding switch is interconnected with the programmable logic controller.

[0009] Furthermore, the shielding switch is a time-delay relay, which receives the alarm signal from the relay installed in the liquid adding machine and the foaming machine through the signal input port, and a plurality of the signal input ports are arranged on both sides of the programmable logic controller.

[0010] Furthermore, windows for ventilation and heat dissipation are arranged on both sides of the bottom shell of the device, a display is arranged on the front of the programmable logic controller, and a programming button is arranged on one side of the display.

[0011] Furthermore, the programmable logic controller model is AFP0RC14RS.

[0012] Furthermore, when the device gives a false alarm due to various factors or the floating of the meter when coolant is just added or gas is injected causes an alarm, the shielding switch can set the device not to alarm within a time through the programmable logic controller.

[0013] 3. Beneficial effects:

[0014] The utility model is reasonably designed. The device links the alarms between the devices through customized transformation. After the auxiliary equipment alarms, the cutting equipment needs to be stopped manually. After the auxiliary equipment alarms, the corresponding cutting equipment will also alarm and stop the operation at the same time, which greatly reduces the production accidents caused by the equipment not shutting down in time due to human negligence. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the structure of the utility model;

[0016] Figure 2 This is a schematic diagram of the workflow of the utility model;

[0017] Figure 3 It is a program schematic diagram of the programmable logic controller of the utility model.

[0018] Reference numerals:

[0019] 1. Device bottom shell; 2. Programmable logic controller; 3. Signal input port; 4. Signal output port; 5. Shielding switch. DETAILED DESCRIPTION

[0020] To facilitate the understanding of the present invention, the present invention will be described more comprehensively below with reference to the relevant drawings. Several embodiments of the present invention are given in the drawings. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present invention more thorough and comprehensive.

[0021] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "page", "bottom", "inside", "outside", "clockwise", "counterclockwise", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0022] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0023] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed", "provided with", etc. should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances. Example

[0024] Refer to the attached Figure 1-3 , including a device bottom shell 1, a programmable logic controller 2 is installed on the top of the device bottom shell 1, a signal input port 3 is provided on one side of the programmable logic controller 2, a signal output terminal 4 is provided on the other side of the programmable logic controller 2, and a shielding switch 5 is provided on one side of the signal input port 3, wherein the signal input port 3 collects the alarm signals of the liquid adding machine and the foaming machine through the relays installed in the liquid adding machine and the foaming machine, and the shielding switch 5 is interconnected with the programmable logic controller 2, and the alarm signals of the foaming machine and the liquid adding machine are extracted and integrated through the system composed of the programmable logic controller 2 and the relay, and transmitted to the alarm receiving terminal of the cutting device through the signal input port 3, and the alarm information of the control in the software is modified to the expected content. In this way, when one of the liquid adding machine and the foaming machine alarms, the associated cutting device will alarm at the same time and suspend operation.

[0025] A programmable logic controller 2 is installed above the bottom shell 1 of the device, a signal input port 3 is provided on one side of the programmable logic controller 2, a signal output port 4 is provided on the other side of the programmable logic controller 2, a shielding switch 5 is provided on one side of the signal input port 3, and the shielding switch 5 is a time-delay relay, which receives the alarm signal from the relay installed in the liquid adding machine and the foaming machine through the signal input port 3. Windows for ventilation and heat dissipation are provided on both sides of the bottom shell 1 of the device, a display is provided on the front of the programmable logic controller 2, and a programming button is provided on one side of the display. The model of the programmable logic controller 2 is AFP0RC14RS. When the device falsely alarms due to various factors or the floating of the meter when the coolant is just added or the gas is injected causes an alarm, the shielding switch 5 can set the time for the device not to alarm.

[0026] In the present technical solution, after the alarm signals of the liquid adding machine and the foaming machine are collected by the relay, they are input to the programmable logic controller 2 in the form of electrical signals. A program is written through the programmable logic controller 2, and several output signals output by the programmable logic controller 2 are connected to the alarm terminals of the devices to be connected, thereby achieving the purpose of making the devices alarm.

[0027] In this embodiment, since the bubbler may occasionally exceed or fall below the set range for a short time and alarm when the air pressure is restored, the device sends a delayed signal by shielding the switch 5 to prevent the bubbler and the liquid adding machine from causing transient false alarms due to parameter errors.

[0028] The above-described embodiments only express a certain implementation method of the utility model, and the description thereof is relatively specific and detailed, but it cannot be understood as limiting the scope of the patent of the utility model. It should be pointed out that, for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the utility model, which all belong to the protection scope of the utility model. Therefore, the protection scope of the patent of the utility model shall be based on the attached claims.

Claims

1. A linkage alarm device based on different semiconductor devices, characterized in that : comprising a device bottom shell (1), a programmable logic controller (2) being installed above the device bottom shell (1), a signal input port (3) being arranged on one side of the programmable logic controller (2), a signal output port (4) being arranged on the other side of the programmable logic controller (2), a shielding switch (5) being arranged on one side of the signal input port (3), The signal input port (3) collects alarm signals from the liquid adding machine and the foaming machine through relays installed in the liquid adding machine and the foaming machine, and the shielding switch (5) is interconnected with the programmable logic controller (2).

2. A linkage alarm device based on different semiconductor devices according to claim 1, characterized in that: The shielding switch (5) is a time-delay relay, which receives an alarm signal from a relay installed in the liquid adding machine and the foaming machine through a signal input port (3), and a plurality of signal input ports (3) are arranged on both sides of the programmable logic controller (2).

3. A linkage alarm device based on different semiconductor devices according to claim 1, characterized in that: Windows for ventilation and heat dissipation are arranged on both sides of the device bottom shell (1); a display is arranged on the front of the programmable logic controller (2); and programming buttons are arranged on one side of the display.

4. The linkage alarm device based on different semiconductor devices according to claim 1, characterized in that: The model of the programmable logic controller (2) is AFP0RC14RS.

5. The linkage alarm device based on different semiconductor devices according to claim 1, characterized in that: When the device alarms due to a false alarm or the floating of the meter when coolant or gas is just added, the shielding switch (5) can set the device not to alarm within a time through the programmable logic controller (2).

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