Test sample table and detection equipment

Abstract

The utility model provides a test sample table and detection equipment, and relates to the technical field of sample detection equipment, the test sample table provided by the utility model is suitable for being installed in a detection area of a scanning electron microscope, and the test sample table comprises a base and a bearing table; the base is provided with a connecting part which is detachably connected with the scanning electron microscope; the bearing table is hinged to the base around the axis parallel to the horizontal plane and used for adjusting the included angle between the bearing face of the bearing table and the scanning electron microscope lens, then the shooting angle is adjusted, the bearing table and the base are relatively locked through a locking piece or frictional resistance, the sample stability is ensured, and the shooting efficiency is improved. And the stable detection effect of the scanning electron microscope can be ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of sample detection equipment, in particular to a test sample platform and detection equipment. Background Art

[0002] The existing scanning electron microscope (SEM) detection area is equipped with a flat sample stage, which can only be used to carry flat samples during electron microscope detection. When the sample needs to be tilted, or the sample has an inclined surface and needs to adjust its angle relative to the lens, it is usually necessary to add a pad or other methods to adjust the sample angle. On the one hand, the operation is inconvenient and the detection efficiency is reduced. On the other hand, the pad placed at the bottom of the sample will lead to poor sample stability, which will affect the detection effect of the scanning electron microscope. Utility Model Content

[0003] The utility model aims to provide a test sample platform and detection equipment to alleviate the technical problem that the shooting angle of a scanning electron microscope to a sample is difficult to adjust.

[0004] In a first aspect, the test sample stage provided by the utility model is suitable for being installed in a detection area of ​​a scanning electron microscope, and the test sample stage comprises: a base and a carrier platform;

[0005] The base has a connection portion that is detachably connected to the scanning electron microscope;

[0006] The carrying platform is hinged to the base around an axis parallel to the horizontal plane, so as to adjust the angle between the carrying surface of the carrying platform and the scanning electron microscope lens;

[0007] The bearing platform and the base are relatively locked by a locking member or friction resistance.

[0008] In combination with the first aspect, the utility model provides a first possible implementation of the first aspect, wherein the connecting portion is configured as a screw rod, the screw rod extends along a plumb direction and is adapted to a base of the scanning electron microscope.

[0009] In combination with the first possible implementation of the first aspect, the utility model provides a second possible implementation of the first aspect, wherein the base includes a base body matched with the screw rod, and the bearing platform is hinged to the base body around an axis parallel to the horizontal plane;

[0010] The screw rod passes through the base body from bottom to top, and the top end of the screw rod abuts against the supporting platform.

[0011] In combination with the first aspect, the utility model provides a third possible implementation manner of the first aspect, wherein the base and the bearing platform are hingedly connected via a hinge shaft;

[0012] The end of the hinge shaft is connected with an angle dial;

[0013] One of the base and the supporting platform is fixed relative to the hinge shaft, and the other is provided with a marking position pointing to the angle dial.

[0014] In combination with the first aspect, the utility model provides a fourth possible implementation of the first aspect, wherein the base is provided with a limiting portion for limiting the maximum upward angle of the supporting platform.

[0015] In combination with the fourth possible implementation of the first aspect, the utility model provides a fifth possible implementation of the first aspect, wherein, under the condition that the supporting platform reaches a maximum upward angle relative to the base, the overall height dimension of the base and the supporting platform is less than 5 cm.

[0016] In combination with the first aspect, the utility model provides a sixth possible implementation of the first aspect, wherein the scanning electron microscope has a planar sample stage, and the connecting portion is configured as a clamping member for clamping the planar sample stage.

[0017] In combination with the first aspect, the utility model provides a seventh possible implementation of the first aspect, wherein the locking member is connected to one of the base and the supporting platform, and the locking member abuts against the other of the base and the supporting platform so that the supporting platform is locked relative to the base.

[0018] In combination with the first aspect, the utility model provides an eighth possible implementation of the first aspect, wherein the locking member is configured as an elastic clip connected to the base, and the supporting platform is provided with a plurality of slots that are spaced apart and adapted to the elastic clip.

[0019] In a second aspect, the detection equipment provided by the utility model is equipped with the test sample platform recorded in the first aspect.

[0020] The embodiments of the utility model bring the following beneficial effects: a base is provided with a connection portion detachably connected to a scanning electron microscope, and a support platform is hinged to the base around an axis parallel to a horizontal plane, so that the angle between the support surface of the support platform and the lens of the scanning electron microscope can be adjusted, thereby realizing adjustment of the shooting angle, and the support platform and the base are relatively locked by a locking member or friction resistance, thereby ensuring the stability of the sample, thereby ensuring the stability of the detection effect of the scanning electron microscope.

[0021] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, preferred embodiments are given below and described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the related technologies, the drawings required for use in the specific implementation methods or the related technical descriptions will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0023] Figure 1 A schematic diagram of a first test sample platform provided by an embodiment of the utility model;

[0024] Figure 2 A schematic diagram of a second test sample platform provided by an embodiment of the utility model;

[0025] Figure 3 A schematic diagram of a third test sample platform provided in an embodiment of the utility model.

[0026] Icons: 100 - base; 101 - hinge axis; 110 - connection part; 120 - base body; 200 - bearing platform; 201 - bearing surface; 202 - slot; 300 - angle dial; 400 - locking piece. DETAILED DESCRIPTION

[0027] The technical solution of the utility model will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0028] In the description of the present utility model, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", and "third" are only used to describe the difference in names, and cannot be understood as indicating or implying relative importance. The physical quantities in the formula, if not separately marked, should be understood as basic quantities of the basic units of the International System of Units, or derived quantities derived from the basic quantities through mathematical operations such as multiplication, division, differentiation or integration.

[0029] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0030] like Figure 1 , Figure 2 and Figure 3 As shown, the test sample stage provided by the embodiment of the utility model is suitable for installation in the detection area of ​​a scanning electron microscope, and the test sample stage includes: a base 100 and a supporting platform 200; the base 100 has a connecting portion 110 detachably connected to the scanning electron microscope; the supporting platform 200 is hinged to the base 100 around an axis parallel to the horizontal plane to adjust the angle between the supporting surface 201 of the supporting platform 200 and the scanning electron microscope lens; the supporting platform 200 and the base 100 are relatively locked by a locking member 400 or friction resistance.

[0031] Specifically, the connecting portion 110 can be connected to the base of the scanning electron microscope or its original flat sample stage. The sample is placed and fixed on the carrying surface 201 by means of connecting parts or bonding. The carrying platform 200 is swung relative to the base 100 around an axis parallel to the horizontal plane, and the friction between the carrying platform 200 and the base 100 is used to achieve the angle locking of the carrying platform 200. Alternatively, the locking member 400 is used to lock the carrying platform 200 relative to the base 100, so that the sample can be adjusted to a specific angle relative to the lens of the scanning electron microscope, which makes it more convenient to adjust the shooting angle, shortens the debugging time, and is conducive to improving the utilization rate of the scanning electron microscope.

[0032] In the embodiment of the present invention, the connection portion 110 is configured as a screw rod, which extends along the plumb direction and is adapted to the base of the scanning electron microscope.

[0033] When the screw is rotated, on the one hand, the base 100 is connected to the base of the scanning electron microscope, and on the other hand, the height adjustment and the angle adjustment of the base 100 and the supporting platform 200 around the axis of the screw are realized.

[0034] See also Figure 2As shown, in an optional embodiment, the base 100 includes a base body 120 matched with a screw rod, and the carrying platform 200 is hinged to the base body 120 around an axis parallel to the horizontal plane; the screw rod passes through the base body 120 from bottom to top, and the top end of the screw rod abuts against the carrying platform 200. Thus, the top end of the screw rod abuts against the carrying platform 200, thereby improving the stability of the carrying platform 200, which is particularly suitable for the case where the sample weight is large, and improves the weighing capacity of the carrying platform 200.

[0035] like Figure 1 As shown, the base 100 and the support platform 200 are hinged via a hinge shaft 101; an angle dial 300 is connected to the end of the hinge shaft 101; one of the base 100 and the support platform 200 is fixed relative to the hinge shaft 101, and the other is provided with a marking position pointing to the angle dial 300.

[0036] When the support platform 200 swings relative to the base 100 around the hinge axis 101, the scale of the angle dial 300 indicated by the marking position changes accordingly, so that the angle of the support surface 201 relative to the horizontal plane can be known, and thus the shooting angle can be obtained.

[0037] The base 100 is provided with a limiter for limiting the maximum upward angle of the carrying platform 200. The limiter can be configured as a block connected to the base 100, a rod, or a flexible cable connected between the base 100 and the carrying platform 200, so as to limit the maximum upward angle of the carrying platform 200, thereby ensuring that the angle of the carrying surface 201 relative to the horizontal plane is less than 90 degrees.

[0038] In addition, when the supporting platform 200 reaches the maximum upward angle relative to the base 100, the overall height dimension of the base 100 and the supporting platform 200 is less than 5 cm. In this case, the angle between the supporting surface 201 and the horizontal plane can be further limited and reduced. By ensuring that the overall height dimension of the base 100 and the supporting platform 200 is less than 5 cm, the test sample stage can be prevented from exceeding the height range of the scanning electron microscope detection area, thereby preventing devices from colliding with and being damaged.

[0039] In an optional embodiment, the scanning electron microscope has a planar sample stage, and the connecting portion 110 is configured as a clamping member for clamping the planar sample stage. There is no need to disassemble the original planar sample stage, and the clamping member is clamped on the planar sample stage by a plurality of clamping arms being relatively contracted, so that the test sample stage can be added to the scanning electron microscope.

[0040] like Figure 3As shown, in an optional embodiment, the locking member 400 is connected to one of the base 100 and the carrying platform 200, and the locking member 400 abuts against the other of the base 100 and the carrying platform 200, so that the carrying platform 200 is locked relative to the base 100. The locking member 400 can be configured as a bolt, which is connected to one of the base 100 and the carrying platform 200, and the end of the bolt abuts against the other of the base 100 and the carrying platform 200, preferably the bolt is parallel to the hinge shaft 101, so that the carrying platform 200 is locked relative to the base 100.

[0041] In another optional embodiment, the locking member 400 is configured as an elastic buckle connected to the base 100, and the carrier 200 is provided with a plurality of slots 202 that are spaced and adapted to the elastic buckle. The elastic buckle is provided with a handle portion, which is used to manually drive it to overcome the elastic force and disengage the elastic buckle from the slot 202, and the carrier 200 can adjust the angle relative to the base 100 around the hinge axis 101; after the adjustment is completed, the handle portion is released, and the elastic buckle rebounds under the action of the elastic force and matches the slot 202, so that the carrier 200 is locked relative to the base 100.

[0042] The detection device provided in the embodiment of the utility model is equipped with the test sample table described in the above-mentioned embodiment. In the embodiment of the utility model, the detection device can also use a device other than a scanning electron microscope as a detector, and can adjust the angular position of the sample relative to the detector. Its technical effect is basically the same as that of the above-mentioned test sample table and will not be repeated here.

[0043] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, ordinary technicians in this field should understand that they can still modify the technical solutions recorded in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not make the essence of the corresponding technical solution deviate from the scope of the technical solution of the embodiments of the utility model.

Claims

1. A test sample stage, suitable for installation in the detection area of ​​a scanning electron microscope, characterized in that: The test sample platform comprises: a base (100) and a carrying platform (200); The base (100) has a connection portion (110) that is detachably connected to the scanning electron microscope; The support platform (200) is hinged to the base (100) around an axis parallel to a horizontal plane, so as to adjust the angle between the support surface (201) of the support platform (200) and the scanning electron microscope lens; The support platform (200) and the base (100) are relatively locked via a locking member (400) or friction resistance.

2. The test sample platform according to claim 1, characterized in that: The connecting portion (110) is configured as a screw rod, which extends along a plumb direction and is compatible with a base of the scanning electron microscope.

3. The test sample platform according to claim 2, characterized in that: The base (100) comprises a base body (120) matched with the screw rod, and the bearing platform (200) is hinged to the base body (120) around an axis parallel to a horizontal plane; The screw rod passes through the base body (120) from bottom to top, and the top end of the screw rod abuts against the supporting platform (200).

4. The test sample platform according to claim 1, characterized in that: The base (100) and the bearing platform (200) are hingedly connected via a hinge shaft (101); The end of the hinge shaft (101) is connected to an angle dial (300); One of the base (100) and the bearing platform (200) is fixed relative to the hinge shaft (101), and the other is provided with a marking position pointing to the angle scale (300).

5. The test sample platform according to claim 1, characterized in that: The base (100) is provided with a limiting portion for limiting the maximum upward angle of the supporting platform (200).

6. The test sample platform according to claim 5, characterized in that: Under the condition that the supporting platform (200) reaches a maximum upward angle relative to the base (100), the overall height dimension of the base (100) and the supporting platform (200) is less than 5 cm.

7. The test sample platform according to claim 1, characterized in that: The scanning electron microscope has a planar sample stage, and the connecting portion (110) is configured as a clamping member for clamping the planar sample stage.

8. The test sample platform according to claim 1, characterized in that: The locking member (400) is connected to one of the base (100) and the carrying platform (200), and the locking member (400) abuts against the other of the base (100) and the carrying platform (200), so that the carrying platform (200) is locked relative to the base (100).

9. The test sample platform according to claim 1, characterized in that: The locking member (400) is configured as an elastic snap-fit ​​member connected to the base (100), and the supporting platform (200) is provided with a plurality of slots (202) distributed at intervals and adapted to the elastic snap-fit ​​member.

10. A detection device, characterized in that: The detection device is equipped with the test sample platform according to any one of claims 1 to 9.

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