Waste gas filtering equipment utilizing high-frequency heat source
By introducing a catalyst barrel into the heating part of the exhaust gas filtration and purification equipment, the catalyst is used to reduce the reaction temperature of the exhaust gas, and the problem of high-frequency AC power consumption in the existing equipment is solved, and the effect of energy saving and equipment life is achieved.
Patent Information
- Application Number
- CN202421263877.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-04
- Publication Date
- 2025-03-25
- Estimated Expiration
- 2034-06-04
AI Technical Summary
The existing exhaust gas filtering and cleaning equipment that utilizes high-circuit wave heat sources uses high-reaction temperature waste gases, high-frequency AC power is high, resulting in large energy consumption and shorter equipment service life.
A heating section including a reactor, an induction heating tube, a high-circumferential coil, a coil protector, a flow guide and a catalyst barrel are designed. By reacting with the exhaust gas in the catalyst barrel, the reaction temperature of the exhaust gas is reduced, thereby reducing the high-frequency alternating current power required for the high-circumferential coil.
It effectively reduces the high frequency AC power required for high-circuit coils, achieves energy savings, and extends the service life of the heating unit, while helping to crack special gases that are difficult to deal with.
Smart Images
Figure CN222658317U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to a waste gas filtering device, in particular to a waste gas filtering device utilizing a high-frequency heat source. Background Art
[0002] Nitrous oxide (N 2 O) are widely used in semiconductor industry processes, and their concentration can be as high as 99.999%. However, nitrous oxide and carbon dioxide (CO 2 ) are also greenhouse gases, and the temperature effect caused by nitrous oxide is about 296 times that of carbon dioxide. Therefore, based on the concept of environmental protection and sustainable development of the earth, it is necessary to try to reduce the concentration of waste gases such as nitrous oxide (also called special gases) emitted during industrial manufacturing.
[0003] See also Figure 1 For example, Taiwan Patent Certificate No. TWI827194 discloses an existing waste gas filtration device using a high-frequency heat source, which mainly uses a heating unit 1 including a reaction furnace 11, an induction heating tube 12, a high-frequency coil 13 and a coil protection member 17 to heat the waste gas 19. The high-frequency coil 13 uses high-frequency alternating current to generate an induced current in the induction heating tube 12 to heat the induction heating tube 12. However, because the reaction temperature of the waste gas 19 is as high as 1050°C, the high-frequency alternating current used by the high-frequency coil 13 has a high power, resulting in more energy consumption, so it is necessary to find a solution. Utility Model Content
[0004] The purpose of the utility model is to provide an exhaust gas filtration device utilizing a high frequency heat source.
[0005] Therefore, the utility model is an exhaust gas purification device using a high-frequency heat source, which is suitable for treating exhaust gas and includes a heating part for heating the exhaust gas. The heating part includes: a reaction furnace, which defines an exhaust gas reaction space for the exhaust gas to react, and has a bottom wall, a surrounding wall extending upward from the bottom wall, and a top wall that is covered on the top of the surrounding wall and defines the exhaust gas reaction space together with the bottom wall and the surrounding wall; an induction heating tube, which is arranged in the exhaust gas reaction space of the reaction furnace; a high-frequency coil, which is separated from the induction heating tube and is wound around the periphery of the induction heating tube, and is used to generate an induced current in the induction heating tube to heat the induction heating tube to heat the exhaust gas flowing through the exhaust gas reaction space of the reaction furnace; a coil protection member, which is arranged in the exhaust gas reaction space of the reaction furnace and covers the high-frequency coil to separate the high-frequency coil from the induction heating tube, and separates the high-frequency coil from the induction heating tube. The high-frequency coil and the exhaust gas to prevent the high-frequency coil from being corroded by the exhaust gas; a guide pipe that penetrates the bottom wall of the reactor and extends into the exhaust gas reaction space of the reactor and is spaced apart from the top wall of the reactor. The exhaust gas from the upstream is guided by the guide pipe to the exhaust gas reaction space of the reactor. The induction heating tube is concentrically arranged between the guide pipe and the coil protection member; and a catalyst barrel that is sleeved on the guide pipe and has a barrel body for accommodating a catalyst and having a plurality of through holes that are connected to the exhaust gas reaction space of the reactor. The exhaust gas can enter the interior of the barrel body through the through holes and react with the catalyst to reduce the reaction temperature of the exhaust gas, thereby reducing the power of the high-frequency alternating current used by the high-frequency coil.
[0006] The utility model is an exhaust gas filtration device utilizing a high-frequency heat source, wherein the coil protection member comprises: a lower ring plate, which is arranged on the bottom wall of the reaction furnace; an inner tube, which extends upward from the inner edge of the lower ring plate and blocks the high-frequency coil and the induction heating tube; an outer tube, which extends upward from the outer edge of the lower ring plate; and an upper ring plate, which is connected to the top ends of the outer tube and the inner tube, and covers the high-frequency coil together with the lower ring plate, the inner tube and the outer tube, so as to isolate the high-frequency coil from the exhaust gas.
[0007] The utility model uses a waste gas filtration device of a high-frequency heat source. The heating part also includes a heat insulation unit. The heat insulation unit is coated on the outer surface of the surrounding wall of the reaction furnace and blocks heat from escaping to the outside of the reaction furnace through the surrounding wall.
[0008] The utility model discloses an exhaust gas filtration device utilizing a high-frequency heat source. The heat insulation unit comprises an air layer, a ceramic cotton layer, and a water layer which are arranged from the inside to the outside.
[0009] The utility model discloses an exhaust gas filtration device utilizing a high-frequency heat source. The heat insulation unit comprises an air layer, a ceramic cotton layer, and a nanofiber blanket layer which are arranged from the inside to the outside.
[0010] The utility model discloses an exhaust gas purifying device utilizing a high-frequency heat source, wherein the coil protection component is made of a high-nickel alloy or ceramic.
[0011] The utility model discloses an exhaust gas purifying device utilizing a high-frequency heat source, wherein the induction heating tube is made of graphite or conductive metal.
[0012] The utility model discloses waste gas filtering equipment which utilizes a high-frequency heat source, wherein the catalyst is an organic gas catalytic metal catalyst.
[0013] The utility model discloses an exhaust gas purifying device utilizing a high-frequency heat source, wherein the catalyst is a fluorine catalyst.
[0014] The utility model discloses an exhaust gas filtering device utilizing a high-frequency heat source. The barrel body of the catalyst barrel is annular and the catalyst barrel is also provided with an annular upper cover which is detachably covered on the upper opening of the barrel body.
[0015] The beneficial effect of the utility model is that when the exhaust gas enters the exhaust gas reaction space for heating reaction, the exhaust gas can enter the interior of the barrel through the through hole of the catalyst barrel and react with the catalyst, so that the reaction temperature of the exhaust gas is reduced to about 905°C, thereby reducing the power of the high-frequency alternating current required for the high-frequency coil, thereby achieving energy saving, and having the effect of extending the service life of the heating part, and the catalyst also helps to crack the special gases in the exhaust gas that are more difficult to handle. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] Figure 1 This is a device configuration diagram, illustrating a heating portion of an existing exhaust gas filtration device utilizing a high-frequency heat source disclosed in Taiwan Patent Certificate No. TWI827194;
[0017] Figure 2 is a device configuration diagram, illustrating an embodiment of the waste gas filtration device of the utility model using a high-frequency heat source, including a heating part for heating the waste gas;
[0018] Figure 3 is a partially enlarged cross-sectional side view illustrating the heating portion in the embodiment;
[0019] Figure 4 It is a partially enlarged cross-sectional view illustrating the catalyst barrel of the heating unit. DETAILED DESCRIPTION
[0020] The utility model is described in detail below with reference to the accompanying drawings and embodiments.
[0021] See also Figures 2 to 4 The embodiment of the waste gas purification device using high frequency heat source of the utility model is suitable for treating waste gas 9 (such as nitrous oxide, etc.). In this embodiment, the waste gas purification device using high frequency heat source includes an inlet 2, a front water washing part 3, a waste gas transmission pipe 4, a heating part 5, a rear water washing part 6, an exhaust part 8, and a water tank 7.
[0022] In this embodiment, the air inlet of the inlet portion 2 is connected to a front-end manufacturing device (not shown) and is used to allow the exhaust gas 9 from the front-end manufacturing device to enter the exhaust gas purification device of the utility model using a high-frequency heat source.
[0023] In this embodiment, the air inlet of the front-stage water washing section 3 is connected to the air outlet of the inlet section 2, and wet washing is used to remove dust, water-soluble gas and other components in the exhaust gas 9 by flushing with clean water.
[0024] Next, the waste gas 9 after preliminary washing leaves the front-stage water washing section 3 and enters the waste gas transmission pipe 4 , and then flows into the heating section 5 .
[0025] In this embodiment, the heating unit 5 includes a reaction furnace 51 , an induction heating tube 52 , a high-frequency coil 53 , a coil protection member 57 , a flow guide tube 58 , a catalyst barrel 59 , and a heat insulation unit 54 .
[0026] like Figure 3 As shown, in this embodiment, the reaction furnace 51 has a bottom wall 511, a surrounding wall 512 extending upward from the bottom wall 511, and a top wall 513 covering the top of the surrounding wall 512 and defining the exhaust gas reaction space 510 together with the bottom wall 511 and the surrounding wall 512.
[0027] In this embodiment, the induction heating tube 52 is disposed in the exhaust gas reaction space 510 of the reaction furnace 51, and is concentrically disposed between the guide pipe 58 and the coil protection member 57. The induction heating tube 52 is spaced a distance from the guide pipe 58 to define the exhaust gas reaction space 510 between the induction heating tube 52 and the guide pipe 58. In this embodiment, the material of the induction heating tube 52 can be graphite, or conductive metal or other conductive materials.
[0028] In this embodiment, the high-frequency coil 53 is spaced apart from the induction heating tube 52 and is wound around the periphery of the induction heating tube 52, and is used to generate an induced current in the induction heating tube 52 to heat the induction heating tube 52, so as to heat the exhaust gas 9 flowing through the exhaust gas reaction space 510. Therefore, since the high-frequency coil 53 generates an induced current for the induction heating tube 52 to heat the induction heating tube 52, the exhaust gas 9 entering the reaction furnace 51 can be heated and decomposed to reduce the concentration.
[0029] The coil protection member 57 is disposed in the exhaust gas reaction space 510 and covers the high-frequency coil 53 to separate the high-frequency coil 53 from the induction heating tube 52 and separate the high-frequency coil 53 from the exhaust gas 9 to prevent the high-frequency coil 53 from being corroded by the exhaust gas 9. In this embodiment, the material of the coil protection member 57 can be, for example, a high-nickel alloy or ceramic.
[0030] In this embodiment, the coil protection member 57 comprises a lower ring plate 571, an inner tube 572, an outer tube 573, and an upper ring plate 574. The lower ring plate 571 is disposed on the bottom wall 511 of the reaction furnace 51. The inner tube 572 extends upward from the inner edge of the lower ring plate 571 and blocks between the high-frequency coil 53 and the induction heating tube 52. The outer tube 573 extends upward from the outer edge of the lower ring plate 571. The upper ring plate 574 is airtightly connected to the top of the outer tube 573 and the inner tube 572, and airtightly covers the high-frequency coil 53 together with the lower ring plate 571, the inner tube 572 and the outer tube 573, so as to isolate the high-frequency coil 53 from the exhaust gas 9, so as to protect the high-frequency coil 53 from being corroded by the exhaust gas 9, thereby extending the service life of the high-frequency coil 53.
[0031] The heat insulation unit 54 is coated on the outer surface of the surrounding wall 512 of the reaction furnace 51, and provides heat insulation and heat preservation effect in the form of an insulation jacket, which can prevent heat from escaping to the outside of the reaction furnace 51 through the surrounding wall 512. In this embodiment, the heat insulation unit 54 has an air layer 541, a ceramic wool layer 542, and a nanofiber blanket layer 543 arranged from the inside to the outside. However, in a variation of this embodiment, the nanofiber blanket layer 543 can also be replaced by a water layer 543.
[0032] In this embodiment, the guide pipe 58 penetrates the bottom wall 511 of the reaction furnace 51, extends into the exhaust gas reaction space 510 of the reaction furnace 51, and is spaced apart from the top wall 513 of the reaction furnace 51. The exhaust gas 9 from upstream can be guided to the exhaust gas reaction space 510 by the guide pipe 58.
[0033] like Figure 3 , 4 As shown, in this embodiment, the catalyst barrel 59 is sleeved on the guide tube 58, and has a barrel body 591 in an annular shape that accommodates the catalyst 599 and is provided with a plurality of through holes 590 that are connected to the exhaust gas reaction space 510, and an annular upper cover 592 that is detachably covered on the upper opening of the barrel body 591. When a new catalyst 599 needs to be added, the annular upper cover 592 can be opened to pour the reagent particles of the catalyst 599 into the barrel body 591 from the upper opening of the barrel body 591. In this embodiment, the catalyst 599 is an organic gas catalytic metal catalyst (PBN), or a fluorine catalyst catalyst (PFC), etc.
[0034] Therefore, when the exhaust gas 9 enters the exhaust gas reaction space 510 for heating reaction, the exhaust gas 9 can enter the barrel body 591 through the through hole 590 and react with the catalyst 599, thereby reducing the reaction temperature of the exhaust gas 9 to about 905°C, thereby reducing the power of the high-frequency alternating current required by the high-frequency coil 53 to achieve energy saving and extend the service life of the heating unit 5. In addition, the catalyst 599 also helps to crack the special gas in the exhaust gas 9 that is more difficult to handle.
[0035] like Figure 2 As shown, in this embodiment, the rear water washing section 6 is arranged downstream of the heating section 5, and is used to wash the product after the thermal decomposition reaction with water again and reduce the temperature thereof.
[0036] In the present embodiment, the exhaust section 8 is disposed downstream of the rear-stage water washing section 6 and is used to reduce the concentration of various components in the gas after being washed by the rear-stage water washing section 6 .
[0037] In this embodiment, the water tank 7 is disposed below the heating part 5, the front water washing part 3 and the rear water washing part 6, and is used to receive waste liquid generated after the front water washing part 3 and the rear water washing part 6 perform wet washing.
[0038] In summary, the utility model has at least the following advantages and effects: (a) when the exhaust gas 9 enters the exhaust gas reaction space 510 for heating reaction, the exhaust gas 9 can enter the barrel body 591 through the through hole 590 and react with the catalyst 599, so that the reaction temperature of the exhaust gas 9 is reduced to 905°C, thereby reducing the power of the high-frequency alternating current required for the high-frequency coil 53 to achieve energy saving, and has the effect of extending the service life of the heating part 5, and the catalyst 599 also helps to crack the special gas in the exhaust gas 9 that is more difficult to handle; (b) the coil protection member 57 can be airtight The high-frequency coil 53 is covered to isolate the high-frequency coil 53 from the exhaust gas 9, thereby protecting the high-frequency coil 53 from being corroded by the exhaust gas 9, thereby extending the service life of the high-frequency coil 53; (c) the heat insulation unit 54 utilizes the air layer 541, the ceramic wool layer 542, and the nanofiber blanket layer 543 (or the water liquid layer 543) arranged from the inside to the outside to cover the outer surface of the surrounding wall 512 of the reactor 51, and is in the form of a heat insulation sleeve, which can provide excellent heat insulation and heat preservation effects to prevent heat from escaping to the outside of the reactor 51 through the surrounding wall 512; therefore, the purpose of this utility model can be achieved.
Claims
1. An exhaust gas purification device using a high frequency heat source, suitable for treating exhaust gas, and comprising a heating unit for heating the exhaust gas, characterized in that: The heating unit comprises: A reaction furnace, defining an exhaust gas reaction space for the exhaust gas to react, and comprising a bottom wall, a surrounding wall extending upward from the bottom wall, and a top wall covering the top of the surrounding wall and defining the exhaust gas reaction space together with the bottom wall and the surrounding wall; An induction heating pipe is arranged in the exhaust gas reaction space of the reactor; a high-frequency coil, which is spaced apart from the induction heating tube and is wound around the periphery of the induction heating tube, and is used to generate an induced current in the induction heating tube to heat the induction heating tube, so as to heat the exhaust gas flowing through the exhaust gas reaction space of the reaction furnace; A coil protection member is disposed in the exhaust gas reaction space of the reactor and covers the high-frequency coil to separate the high-frequency coil from the induction heating tube and separate the high-frequency coil from the exhaust gas to prevent the high-frequency coil from being corroded by the exhaust gas; A flow guide pipe, which penetrates the bottom wall of the reactor and extends into the exhaust gas reaction space of the reactor and is spaced apart from the top wall of the reactor. The exhaust gas from the upstream is guided by the flow guide pipe to the exhaust gas reaction space of the reactor. The induction heating tube is concentrically arranged between the flow guide pipe and the coil protection member; and The catalyst barrel is sleeved on the guide tube and has a barrel body for accommodating the catalyst and provided with a plurality of through holes connected to the exhaust gas reaction space of the reactor. The exhaust gas can enter the interior of the barrel body through the through holes and react with the catalyst to reduce the reaction temperature of the exhaust gas, thereby reducing the power of the high-frequency alternating current used by the high-frequency coil.
2. The exhaust gas purification device using a high frequency heat source according to claim 1 is characterized in that: The coil protection member comprises: A lower ring plate, arranged on the bottom wall of the reaction furnace; An inner tube extending upward from the inner edge of the lower ring plate and blocking between the high-frequency coil and the induction heating tube; an outer tube extending upward from an outer edge of the lower ring plate; and The upper ring plate is connected to the top ends of the outer tube and the inner tube, and together with the lower ring plate, the inner tube and the outer tube, covers the high-frequency coil to isolate the high-frequency coil from the exhaust gas.
3. The exhaust gas purification device using a high frequency heat source according to claim 1, characterized in that: The heating part further includes a heat insulating unit, which is coated on an outer surface of a surrounding wall of the reaction furnace and blocks heat from escaping to the outside of the reaction furnace through the surrounding wall.
4. The exhaust gas purification device using a high frequency heat source according to claim 3 is characterized in that: The heat insulation unit comprises an air layer, a ceramic wool layer, and a water layer which are arranged from inside to outside.
5. The exhaust gas purification device using a high frequency heat source according to claim 3 is characterized in that: The heat insulation unit comprises an air layer, a ceramic wool layer, and a nanofiber blanket layer which are arranged from inside to outside.
6. The exhaust gas purification device using a high frequency heat source according to claim 1, characterized in that: The coil protection component is made of high nickel alloy or ceramic.
7. The exhaust gas purification device using a high frequency heat source according to claim 1 is characterized in that: The induction heating tube is made of graphite or conductive metal.
8. The exhaust gas purification device using a high frequency heat source according to claim 1, characterized in that: The catalyst is an organic gas catalytic metal catalyst.
9. The exhaust gas purification device using a high frequency heat source according to claim 1, characterized in that: The catalyst is a fluorine catalyst.
10. The exhaust gas purification device using a high frequency heat source according to claim 1, characterized in that: The barrel body of the catalyst barrel is annular, and the catalyst barrel is also provided with an annular upper cover which is detachably covered on the upper opening of the barrel body.