Substrate cleaning device for optical element machining

Abstract

The utility model discloses a substrate cleaning device for optical element processing, which comprises a shell, a first motor is fixedly mounted in the shell, the output end of the first motor is movably connected with a threaded rod, a lifting plate is arranged on the outer side of the threaded rod, a connecting rod is arranged on the lifting plate, and the top of the connecting rod is movably connected with the output end of a second motor. The outer side of the second motor is fixedly connected with a driving gear, the center of the lifting plate is rotationally connected with the outer side of a first rotating shaft, the bottom of the first rotating shaft is fixedly connected with a driven gear, and the inner wall of the shell is fixedly connected with two symmetrical spraying plates. Through the movable clamping plate, the sliding block, the rack, the worm gear, the worm and the adjusting gear, the clamping and fixing difficulty of an optical element substrate is effectively reduced, the clamping efficiency of an operator is improved, through the threaded rod, the lifting plate, the connecting rod, the driving gear and the driven gear, the cleaning box is made to rotate, and therefore the cleaning effect of the spraying plate is enhanced, and the cleaning efficiency is improved. And the optical element cleaning quality is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of optical element processing, in particular to a substrate cleaning device for optical element processing. Background Art

[0002] With the continuous progress of society and the continuous development of the industry, precision optical systems have higher and higher requirements for the spectral control ability and accuracy of optical thin films. At present, the common method of optical thin film technology is to coat thin films on glass substrates by vacuum sputtering, and control the reflectivity and transmittance of the incident light beam through the glass substrate to meet different needs. In the processing of optical components, the glass substrate is generally required to undergo a spray cleaning process before and after coating, in order to remove dirt, oil stains and particles attached to the surface of these glass substrates.

[0003] Most of the existing optical element substrates are clamped and fixed by bolts and fixing plates, which takes a long time and brings inconvenience to the operators. In addition, the position of the substrate is fixed during the spray cleaning process, which makes the cleaning effect of the sprayed water limited, easily leading to incomplete cleaning and affecting the cleaning efficiency of the substrate. Utility Model Content

[0004] The purpose of the utility model is to provide a substrate cleaning device for optical element processing to solve the problems raised in the above background technology.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a substrate cleaning device for optical element processing, comprising a shell, a motor 1 is fixedly installed inside the shell, the output end of the motor 1 is movably connected to a threaded rod, a lifting plate is arranged on the outside of the threaded rod, a connecting rod is arranged on the lifting plate, the top of the connecting rod is movably connected to the output end of the motor 2, the outside of the motor 2 is fixedly connected to a driving gear, the center position of the lifting plate is rotatably connected to the outside of a rotating shaft 1, the bottom of the rotating shaft 1 is fixedly connected to a driven gear, and the inner wall of the shell is fixedly connected to two symmetrical spray plates The side of the spray plate is fixedly connected to one end of the water pipe, the other end of the water pipe is fixedly connected to the water pump, the top of the rotating shaft is fixedly connected to the cleaning box, slide grooves are provided on both sides of the cleaning box, the interior of the cleaning box is fixedly connected to two symmetrical fixed splints, a movable splint is provided inside the cleaning box, the two sides of the movable splint are fixedly connected to the slider, the bottom of the movable splint is fixedly connected to the rack, the bottom of the cleaning box is rotatably connected to the rotating shaft 2, the outer side of the rotating shaft 2 is fixedly connected to the worm gear, the outer side of the rotating shaft 2 is fixedly connected to the worm, and the side of the cleaning box is rotatably connected to one end of the adjusting gear.

[0006] Preferably, the top of the shell is hinged to the sealing cover plate, a controller is fixedly mounted on the side of the shell, the side of the shell is fixedly connected to the mounting plate, and the bottom of the water pump is fixedly connected to the mounting plate.

[0007] Preferably, the threaded rod and the bottom surface of the connecting rod are rotatably connected to the shell through bearings, the threaded rod and the connecting rod are located on both sides of the shell, the threaded rod is threadedly connected to the lifting plate, and the lifting plate is slidably connected to the connecting rod through a circular through hole.

[0008] Preferably, the outer diameter of the driving gear matches the outer diameter of the driven gear, the driving gear is meshed with the driven gear, and both the driving gear and the driven gear are located below the lifting plate.

[0009] Preferably, the interior of the spray plate is hollow, the sides of the spray plate are fixedly connected to a plurality of spray heads, and the spray plate is located on both sides of the cleaning box.

[0010] Preferably, the inner diameter of the slide groove is matched with the outer diameter of the slider, the movable splint is slidably connected to the slide groove through the slider, the number of the movable splint and the fixed splint is evenly two and evenly and symmetrically distributed, and several arc grooves for placing optical elements are opened on the sides of the fixed splint and the movable splint.

[0011] Preferably, the worm wheel is located at the bottom of the worm, the outer side of the worm wheel is meshed with the adjusting gear, one end of the adjusting gear extends to the outside of the cleaning box and is fixedly linked to the handwheel, and the worm is simultaneously meshed with two racks, which are located on both sides of the worm.

[0012] Compared with the prior art, the beneficial effects of the utility model are:

[0013] 1. The utility model effectively reduces the difficulty of clamping and fixing the optical element substrate by arranging a fixed clamping plate, a movable clamping plate, a slider, a rack, a worm wheel, a worm and an adjusting gear, improves the clamping efficiency of the operator, and at the same time, the cooperation of the fixed clamping plate and the movable clamping plate can clamp and fix substrates of different sizes, thereby enhancing the applicability of the overall device.

[0014] 2. The utility model also further improves the convenience of placing and taking out optical elements by arranging motor 1, threaded rod, lifting plate, connecting rod, motor 2, driving gear and driven gear. The lifting plate drives the cleaning box to move upward, and the driving gear can be used to rotate the cleaning box, thereby enhancing the cleaning effect of the spray plate and improving the quality of cleaning the optical elements. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0016] Figure 2 It is a front view of the overall structure of the utility model;

[0017] Figure 3 This is a cross-sectional view of the cleaning box structure of the utility model;

[0018] Figure 4 This is a cross-sectional view of the cleaning box structure of the utility model from another angle.

[0019] In the figure: 1. Shell; 2. Motor 1; 3. Threaded rod; 4. Lifting plate; 5. Connecting rod; 6. Motor 2; 7. Driving gear; 8. Rotating shaft 1; 9. Driven gear; 10. Spray plate; 11. Water pipe; 12. Water pump; 13. Cleaning box; 14. Slide; 15. Fixed splint; 16. Moving splint; 17. Sliding block; 18. Rack; 19. Rotating shaft 2; 20. Worm wheel; 21. Worm; 22. Adjusting gear. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0021] See also Figure 1-4The utility model provides a technical solution: a substrate cleaning device for optical element processing, comprising a shell 1, the interior of the shell 1 is fixedly connected to the top surface of a motor 2, the output end of the motor 2 is movably connected to a threaded rod 3, the outer side of the threaded rod 3 is threadedly connected to a threaded hole on a lifting plate 4, the lifting plate 4 is slidably connected to a connecting rod 5 through a circular through hole, the top of the connecting rod 5 is movably connected to the output end of a motor 6, the bottom of the threaded rod 3 and the connecting rod 5 are both rotatably connected to the shell 1, the outer side of the motor 6 is welded and fixed to a driving gear 7, the center position of the lifting plate 4 is rotatably connected to the outer side of a rotating shaft 8, the bottom of the rotating shaft 8 is fixedly connected to a driven gear 9, the driving gear 7 is meshedly connected to the driven gear 9, the inner wall of the shell 1 is fixedly connected to two symmetrical spray plates 10, the side of the spray plate 10 is fixedly connected to a plurality of spray heads, the side of the spray plate 10 is fixedly connected to one end of a water pipe 11, and the other end of the water pipe 11 passes through the shell 1 It is fixedly connected to the input end flange of the water pump 12, the top of the rotating shaft 8 is welded and fixed to the bottom of the cleaning box 13, and chutes 14 are provided on both sides of the cleaning box 13. The inside of the cleaning box 13 is fixedly connected to two symmetrical fixed splints 15, and the inside of the cleaning box 13 is slidably connected to the movable splint 16. There are two fixed splints 15 and movable splints 16, and arc grooves are provided on the sides of the fixed splints 15 and movable splints 16. The two sides of the movable splint 16 are welded and fixed to sliders 17, and the slider 17 is slidably connected to the chute 14. The bottom of the movable splint 16 is fixedly connected to the rack 18, the bottom of the cleaning box 13 is rotatably connected to the rotating shaft 2 19, the outer side of the rotating shaft 2 19 is welded and fixed to the worm gear 20, the outer side of the rotating shaft 2 19 is welded and fixed to the worm 21, and the outer side of the worm 21 is meshed and connected with the two racks 18, the side of the cleaning box 13 is rotatably connected to one end of the adjusting gear 22, and the adjusting gear 22 is meshed and connected to the worm gear 20.

[0022] The top of the housing 1 is hinged to the sealing cover plate, a controller is fixedly installed on the side of the housing 1, the side of the housing 1 is fixedly connected to the mounting plate, and the bottom of the water pump 12 is fixedly connected to the mounting plate. The bottom surfaces of the threaded rod 3 and the connecting rod 5 are both rotatably connected to the housing 1 through bearings, the threaded rod 3 and the connecting rod 5 are located on both sides of the housing 1, the threaded rod 3 is threadedly connected to the lifting plate 4, and the lifting plate 4 is slidably connected to the connecting rod 5 through a circular through hole. The threaded rod 3 is rotated by driving the motor 2, and the lifting plate 4 is further lifted and moved under the limiting action of the connecting rod 5, so as to facilitate the installation and removal of the optical element from the cleaning box 13, and improve the actual use effect. The outer diameter size of the driving gear 7 is adapted to the outer diameter size of the driven gear 9, and the driving gear 7 is meshed and connected with the driven gear 9, and the driving gear 7 and the driven gear 9 are both located below the lifting plate 4. The connecting rod 5 is rotated by driving the motor 2 6, and the driving gear 7 is rotated by the connecting rod 5, so that the rotating shaft 1 8 and the driven gear 9 are rotated synchronously, and the rotation of the cleaning box 13 is realized, so as to improve the cleaning effect of the substrate. The inside of the spray plate 10 is hollow, and the side of the spray plate 10 is fixedly connected with a plurality of nozzles, and the spray plate 10 is located on both sides of the cleaning box 13. The cleaning water is fed from the water pipe 11 into the inside of the spray plate 10 by the water pump 12, and finally sprayed out from the nozzle for cleaning. The inner diameter of the chute 14 is matched with the outer diameter of the slider 17. The movable clamping plate 16 is slidably connected with the chute 14 through the slider 17. The number of the movable clamping plate 16 and the fixed clamping plate 15 is uniform and two and evenly and symmetrically distributed. The fixed clamping plate 15 and the movable clamping plate 16 are provided with a plurality of arc grooves for placing optical elements on the side. The worm wheel 20 is located at the bottom of the worm 21. The outer side of the worm wheel 20 is meshed with the adjusting gear 22. One end of the adjusting gear 22 extends to the outside of the cleaning box 13 and is fixedly connected to the hand wheel. The worm 21 is also meshed with two racks 18. The racks 18 are located on both sides of the worm 21. By rotating the adjusting gear 22, the rotating shaft 19 and the worm wheel 20 rotate synchronously, and the worm 21 further drives the racks 18 on both sides to move, so that the moving clamps 16 on both sides move outward and cooperate with the fixed clamps 15 to clamp and fix the substrate.

[0023] Working principle: When in use, the staff opens the sealing cover plate on the top of the shell 1, and then drives the motor 12 to rotate the threaded rod 3, and through the threaded rod 3, the lifting plate 4 moves upward under the limiting action of the connecting rod 5 until it moves out of the top of the shell 1, and then the substrate is placed in the arc groove on the side of the fixed clamping plate 15, and then the adjusting gear 22 is rotated to drive the worm wheel 20 and the rotating shaft 2 19 to rotate synchronously, and then the rotating shaft 2 19 drives the worm 21 to rotate so that the racks 18 on both sides move in the opposite direction, and drives the two moving clamping plates 16 to move to both sides respectively, so that the substrate is clamped and fixed between the fixed clamping plate 15 and the moving clamping plate 16; then the motor 12 is driven to make the lifting plate 4 move downward until the rotating shaft 18 and the driving gear 7 are meshed with each other, at this time, the driving motor 26 makes the driving gear 7 rotate, and the driving gear 7 drives the rotating shaft 18 and the driven gear 9 to rotate synchronously, and the rotating shaft 18 will further drive the cleaning box 13 to rotate, and at this time, the cleaning water is sprayed from the nozzle on the side of the spray plate 10 under the action of the water pump 12, thereby improving the cleaning effect of the substrate.

[0024] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0025] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A substrate cleaning device for optical element processing, comprising a housing (1), characterized in that: A motor 1 (2) is fixedly installed inside the shell (1), the output end of the motor 1 (2) is movably connected to the threaded rod (3), a lifting plate (4) is arranged outside the threaded rod (3), a connecting rod (5) is arranged on the lifting plate (4), the top of the connecting rod (5) is movably connected to the output end of the motor 2 (6), the outside of the motor 2 (6) is fixedly connected to the driving gear (7), the center position of the lifting plate (4) is rotatably connected to the outside of the rotating shaft 1 (8), the bottom of the rotating shaft 1 (8) is fixedly connected to the driven gear (9), the inner wall of the shell (1) is fixedly connected to two symmetrical spray plates (10), the side of the spray plate (10) is fixedly connected to one end of the water pipe (11), and the other end of the water pipe (11) is connected to the water pump (1). 2) fixedly connected, the top of the rotating shaft 1 (8) is fixedly connected to the cleaning box (13), the two sides of the cleaning box (13) are provided with sliding grooves (14), the inside of the cleaning box (13) is fixedly connected to two symmetrical fixed clamps (15), the inside of the cleaning box (13) is provided with a movable clamp (16), the two sides of the movable clamp (16) are fixedly connected to the slider (17), the bottom of the movable clamp (16) is fixedly connected to the rack (18), the bottom of the cleaning box (13) is rotatably connected to the rotating shaft 2 (19), the outer side of the rotating shaft 2 (19) is fixedly connected to the worm gear (20), the outer side of the rotating shaft 2 (19) is fixedly connected to the worm (21), and the side of the cleaning box (13) is rotatably connected to one end of the adjusting gear (22).

2. The optical element processing substrate cleaning device according to claim 1, characterized in that: The top of the shell (1) is hinged to the sealing cover plate, a controller is fixedly mounted on the side of the shell (1), the side of the shell (1) is fixedly connected to the mounting plate, and the bottom of the water pump (12) is fixedly connected to the mounting plate.

3. The optical element processing substrate cleaning device according to claim 1, characterized in that: The bottom surfaces of the threaded rod (3) and the connecting rod (5) are both rotatably connected to the housing (1) via bearings; the threaded rod (3) and the connecting rod (5) are located on both sides of the housing (1); the threaded rod (3) is threadedly connected to the lifting plate (4); and the lifting plate (4) is slidably connected to the connecting rod (5) via a circular through hole.

4. The optical element processing substrate cleaning device according to claim 1, characterized in that: The outer diameter of the driving gear (7) matches the outer diameter of the driven gear (9), the driving gear (7) is meshingly connected with the driven gear (9), and the driving gear (7) and the driven gear (9) are both located below the lifting plate (4).

5. The optical element processing substrate cleaning device according to claim 1, characterized in that: The interior of the spray plate (10) is hollow, the side of the spray plate (10) is fixedly connected to a plurality of spray heads, and the spray plate (10) is located on both sides of the cleaning box (13).

6. The optical element processing substrate cleaning device according to claim 1, characterized in that: The inner diameter of the slide groove (14) is matched with the outer diameter of the slider (17); the movable clamping plate (16) is slidably connected to the slide groove (14) via the slider (17); the number of the movable clamping plate (16) and the fixed clamping plate (15) is uniform and two and they are evenly and symmetrically distributed; the sides of the fixed clamping plate (15) and the movable clamping plate (16) are provided with a plurality of arc grooves for placing optical elements.

7. The optical element processing substrate cleaning device according to claim 1, characterized in that: The worm wheel (20) is located at the bottom of the worm (21), the outer side of the worm wheel (20) is meshed with the adjusting gear (22), one end of the adjusting gear (22) extends to the outside of the cleaning box (13) and is fixedly connected with the hand wheel, and the worm (21) is meshed with two racks (18) at the same time, and the racks (18) are located on both sides of the worm (21).

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