Manipulator carrying structure under thousand-level dust-free environment
By using a robotic handling structure and roller transportation in the substrate conveying system, the problems of dust pollution and fragile substrate damage in traditional belt transportation are solved, and dust-free and efficient substrate transmission and positioning are achieved.
Patent Information
- Application Number
- CN202421115939.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-17
- Publication Date
- 2025-03-25
- Estimated Expiration
- 2034-05-17
AI Technical Summary
The traditional substrate conveying method is transported through belts, resulting in dust pollution caused by friction, and the fragile substrate is prone to fragmentation during the transmission process, increasing production costs.
The robot handling structure is adopted in a level 1,000-level dust-free environment, including the board inlet module, the substrate positioning module, the board out module and the robot handling module. The dust-free transmission and positioning of the substrate are achieved through roller transportation and the robot handling fork.
It effectively avoids powder loss and collision problems in traditional belt transportation, meets the use requirements in a level 1,000-level dust-free environment, and reduces substrate damage and production costs.
Smart Images
Figure CN222664776U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of substrate conveying devices, and more specifically, to a manipulator conveying structure in a Class 1000 dust-free environment. Background Art
[0002] The traditional method of conveying substrates in printing machines is to transport substrates by belt conveyor. In this method, the belt will produce friction with the pulley and guide rail during the transportation process, resulting in a large amount of dust during transportation; the dust falling on the surface of the substrate will cause contamination of the substrate, resulting in defective and scrapped products.
[0003] On the other hand, some substrates are made of fragile materials (such as glass, ceramics, solar silicon wafers, etc.). When using traditional substrate transportation methods, there are collisions between the substrate and the guide rails and retaining edges during the transportation and clamping of the substrate. Problems such as substrate breakage and edge collapse often occur, thereby increasing the company's production costs and wasting materials. Utility Model Content
[0004] In order to overcome the deficiencies of the prior art, the utility model provides a manipulator transport structure in a Class 1000 dust-free environment, which can meet the requirements of working in a dust-free environment and realize the transportation and positioning of a substrate.
[0005] The technical solution adopted by the utility model to solve the technical problem is: a manipulator handling structure in a Class 1000 dust-free environment, the improvement of which is that it includes a board inlet module, a substrate positioning module, a board outlet module and a manipulator handling module;
[0006] The substrate positioning module is located between the board input module and the board output module, and the arrangement direction of the board input module, the substrate positioning module and the board output module is consistent with the transmission direction of the substrate;
[0007] The robot handling module includes an X-axis transfer module, a Y-axis transfer module, a Z-axis transfer module and a transfer fork. The X-axis transfer module is arranged on one side of the board input module, the substrate positioning module and the board output module along the transmission direction of the substrate. The Z-axis transfer module is slidably installed on the X-axis transfer module. The Y-axis transfer module is installed at the output end of the Z-axis transfer module. The transfer fork is installed at the output end of the Y-axis transfer module. The substrate is transferred from the board input module to the substrate positioning module, and the substrate is transferred from the substrate positioning module to the board output module through the transfer fork.
[0008] In the above structure, the X-axis transfer module includes a motor and a screw module, the Z-axis transfer module is a first cylinder, and the Y-axis transfer module is a second cylinder;
[0009] The screw rod module is provided with a sliding block, the first cylinder is fixedly mounted on the sliding block, and the second cylinder is fixedly mounted on the top end of the cylinder rod of the first cylinder.
[0010] In the above structure, the transport fork comprises a main body and a bearing portion located at two ends of the main body and extending vertically outwards, and a groove for placing the substrate is provided on the bearing portion.
[0011] In the above structure, the board feeding module includes a fixing seat, a power motor and a plurality of transport rollers;
[0012] The multiple groups of transport rollers are rotatably mounted on a fixed seat along the transmission direction of the substrate, the power motor is arranged below the transport rollers, and a transmission belt is sleeved between the motor shaft of the power motor and at least one group of transport rollers to drive the group of transport rollers to rotate and realize the transmission of the substrate.
[0013] In the above structure, a raised rib is provided at the end of the fixing seat along the transmission direction of the substrate to achieve positioning of the substrate.
[0014] In the above structure, a guide block is provided at the head end of the fixing seat along the transmission direction of the substrate, for guiding the substrate.
[0015] In the above structure, the transport roller, the rib and the guide block are made of polyurethane.
[0016] In the above structure, the substrate positioning module includes a vacuum adsorption module, an X-direction side clamping block, an X-direction positioning block, a Y-direction side clamping plate and a Y-direction positioning plate;
[0017] The X-direction side clamping block and the X-direction positioning block are arranged on both sides of the vacuum adsorption module along the X-axis direction, and the substrate is pushed against the X-direction positioning block by the X-direction side clamping block;
[0018] The Y-direction side clamping plate and the Y-direction positioning plate are arranged on both sides of the vacuum adsorption module along the Y-axis direction, and the substrate is pushed to abut against the Y-direction positioning block by the Y-direction side clamping plate.
[0019] In the above structure, the vacuum adsorption module includes a vacuum adsorption chamber, and a plurality of vacuum adsorption through holes communicating with the vacuum adsorption chamber are arranged on the top of the vacuum adsorption module.
[0020] The beneficial effect of the utility model is that compared with the traditional belt transport track, the utility model has a manipulator transport structure in a Class 1,000 dust-free environment, and the roller transport combined with the manipulator transport structure can effectively avoid the powder falling during the traditional belt transport process, and can meet the use requirements of the equipment in a Class 1,000 dust-free environment. BRIEF DESCRIPTION OF THE DRAWINGS
[0021] Figure 1 It is a three-dimensional schematic diagram of a manipulator handling structure in a Class 1000 dust-free environment of the utility model.
[0022] Figure 2 This is a top view of a manipulator handling structure in a Class 1000 dust-free environment of the utility model.
[0023] Figure 3 It is a structural schematic diagram of the inlet plate module in the utility model.
[0024] Figure 4 It is a structural schematic diagram of the plate output module in the utility model.
[0025] Figure 5 It is a structural schematic diagram of the manipulator handling module in the utility model.
[0026] Figure 6 It is a structural schematic diagram of the substrate positioning module in the utility model.
[0027] In the figure: a board feed module 10, a fixing seat 101, a power motor 102, a transport roller 103, a transmission belt 104, a rib 105, a guide block 106, a substrate positioning module 20, a vacuum adsorption module 201, an X-direction side clamping block 202, an X-direction positioning block 203, a Y-direction side clamping plate 204, a Y-direction positioning plate 205, a board output module 30, a robot handling module 40, an X-axis transfer module 401, a Y-axis transfer module 402, a Z-axis transfer module 403, a handling fork 404, a sliding block 405, a substrate 50, a board feed position 100, an intermediate board stop position 200, and a board output position 300. DETAILED DESCRIPTION
[0028] The utility model is further described below in conjunction with the accompanying drawings and embodiments.
[0029] The following will clearly and completely describe the concept, specific structure and technical effects of the utility model in combination with the embodiments and drawings, so as to fully understand the purpose, characteristics and effects of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of them. Based on the embodiments of the utility model, other embodiments obtained by technicians in this field without creative work are all within the scope of protection of the utility model. In addition, all the connection / connection relationships involved in the patent do not refer to the direct connection of components, but refer to the formation of a better connection structure by adding or reducing connection accessories according to the specific implementation situation. The various technical features in the creation of the utility model can be combined interchangeably without conflicting with each other.
[0030] It should be noted that all directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of the present invention are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.
[0031] It should also be noted that when an element is referred to as being "fixed on" or "disposed on" another element, it may be directly on the other element or there may be an intermediate element at the same time. When an element is referred to as being "connected to" another element, it may be directly connected to the other element or there may be an intermediate element at the same time.
[0032] In addition, the descriptions of "first", "second", etc. in the present utility model are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, the technical solutions between the various embodiments can be combined with each other, but they must be based on the ability of ordinary technicians in this field to implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present utility model.
[0033] Combination Figure 1 , Figure 2 As shown, the utility model provides a manipulator handling structure in a Class 1000 dust-free environment, which includes a board-in module 10, a substrate positioning module 20, a board-out module 30 and a manipulator handling module 40; the substrate positioning module 20 is located between the board-in module 10 and the board-out module 30, and the arrangement direction of the board-in module 10, the substrate positioning module 20 and the board-out module 30 is consistent with the transmission direction of the substrate; in this embodiment, as Figure 1 As shown in , the substrate is transferred from the board input module 10 to the substrate positioning module 20, and then transferred from the substrate positioning module 20 to the board output module 30; Figure 2 In the embodiment, the transmission direction of the substrate 50 is from left to right, so the arrangement direction of the board input module 10, the substrate positioning module 20 and the board output module 30 is also from left to right.
[0034] Further, combined with Figure 1 , Figure 2 as well as Figure 5As shown, the manipulator transport module 40 includes an X-axis transfer module 401, a Y-axis transfer module 402, a Z-axis transfer module 403 and a transport fork 404. The X-axis transfer module 401 is arranged on one side of the board input module 10, the substrate positioning module 20 and the board output module 30 along the transmission direction of the substrate. In this embodiment, the X-axis transfer module 401 includes a motor and a screw module. The motor is located at one end of the screw module, and the screw module is parallel to the transmission direction of the substrate. Figure 5 As shown, the Z-axis transfer module is slidably installed on the X-axis transfer module 401, and the Z-axis transfer module is driven to reciprocate in the X-axis direction by the driving of the X-axis transfer module 401; the Y-axis transfer module 402 is installed at the output end of the Z-axis transfer module, and the Y-axis transfer module 402 is driven to reciprocate in the Z-axis direction by the driving of the Z-axis transfer module; the carrying fork 404 is installed at the output end of the Y-axis transfer module 402, and the Y-axis transfer module 404 is driven to reciprocate in the Z-axis direction by the driving of the Y-axis transfer module 404. 02 is driven to drive the transport fork 404 to reciprocate in the Y-axis direction; based on this, through the cooperation of the X-axis transfer module 401, the Y-axis transfer module 402, and the Z-axis transfer module 403, the transport fork 404 can be reciprocated in the X-axis direction, the Y-axis direction and the Z-axis direction; therefore, through the transport fork 404, the substrate is transferred from the board input module 10 to the substrate positioning module 20, and the substrate is transferred from the substrate positioning module 20 to the board output module 30.
[0035] In addition, Figure 1 , Figure 2 It should be noted that there are three Y-axis transfer modules 402 on the X-axis transfer module 401, but in actual situations only one Y-axis transfer module 402 is provided. Figure 1 , Figure 2 The three Y-axis transfer modules 402 are only used to represent the three positions of the robot handling module 40 , which are the board entry position 100 , the middle board stop position 200 , and the board exit position 300 .
[0036] Combined with the above structure, we explain the working principle of the robot handling structure in a Class 1000 dust-free environment of the utility model. First, the feed module is connected to the external feeding equipment to transfer the substrate to the feed module and reach the board feeding position. The handling fork 404 of the robot handling module 40 takes down the substrate and transfers it to the substrate positioning module 20. After positioning is achieved by the substrate positioning module 20, other processing equipment can process the substrate. After the processing is completed, the handling fork 404 of the robot handling module 40 transfers the substrate to the board output module 30 to achieve the board output action. The robot handling structure in a Class 1000 dust-free environment of the utility model replaces the original belt transmission structure. During the substrate conveying process, the robot arm and the substrate are in a relatively static state, thereby avoiding the powder loss and collision problems existing in the transportation of the traditional structure. The robot handling module 40 adopts a fully enclosed structure to prevent dust generated during the movement of the robot from being scattered onto the substrate.
[0037] For the X-axis transfer module 401, the Y-axis transfer module 402 and the Z-axis transfer module 403, the utility model provides a specific embodiment, the Z-axis transfer module 403 is a first cylinder, the Y-axis transfer module 402 is a second cylinder; a sliding block 405 is provided on the screw module, the first cylinder is fixedly mounted on the sliding block 405, and the second cylinder is fixedly mounted on the top of the cylinder rod of the first cylinder. In addition, for the structure of the carrying fork 404, as shown in FIG. Figure 5 As shown, a specific embodiment is also provided, the transport fork 404 includes a main body and a bearing portion located at both ends of the main body and extending vertically outward, and a groove for placing a substrate is provided on the bearing portion.
[0038] For the board entry module 10, Figure 3 As shown, the utility model provides a specific embodiment, the board feeding module 10 includes a fixed seat 101, a power motor 102 and multiple groups of transport rollers 103; the multiple groups of transport rollers 103 are rotatably installed on the fixed seat 101 along the transmission direction of the substrate, the power motor 102 is arranged below the transport rollers 103, and a transmission belt 104 is sleeved between the motor shaft of the power motor 102 and at least one group of transport rollers 103 to drive the group of transport rollers 103 to rotate and realize the transmission of the substrate. In addition, a raised rib 105 is provided at the end of the fixed seat 101 along the transmission direction of the substrate to realize the positioning of the substrate; a guide block 106 is provided at the head end of the fixed seat 101 along the transmission direction of the substrate to guide the substrate. As shown Figure 4 As shown, for the board output module 30, its structure is similar to Figure 3The structure of the center feed plate module 10 is substantially the same, and also includes a fixing seat 101, a power motor 102 and a plurality of transport rollers 103. Since the structure is the same, it will not be described in detail in this embodiment.
[0039] In this embodiment, the transport rollers 103, the sidewalls 105, and the guide blocks 106 of the board-in module 10 and the board-out module are made of non-metallic materials such as polyurethane and nylon to absorb the impact generated during the transportation of the substrate and avoid the problems of substrate fragmentation and edge collapse. In addition, the substrate is transported by rollers during the transportation of the board-in module 10 and the board-out module 30, which solves the problem of belt dust contaminating the product caused by the direct transmission of the substrate by the belt in the traditional structure.
[0040] Furthermore, for the substrate positioning module 20, refer to Figure 6 As shown, the utility model provides a specific embodiment, the substrate positioning module 20 includes a vacuum adsorption module 201, an X-direction side clamping block 202, an X-direction positioning block 203, a Y-direction side clamping plate 204 and a Y-direction positioning plate 205; the X-direction side clamping block 202 and the X-direction positioning block 203 are arranged on both sides of the vacuum adsorption module 201 along the X-axis direction, and the substrate is pushed against the X-direction positioning block 203 by the X-direction side clamping block 202; the Y-direction side clamping plate 204 and the Y-direction positioning plate 205 are arranged on both sides of the vacuum adsorption module 201 along the Y-axis direction, and the substrate is pushed against the Y-direction positioning block by the Y-direction side clamping plate 204. In this embodiment, the vacuum adsorption module 201 includes a vacuum suction chamber, and the top of the vacuum adsorption module 201 is provided with a plurality of vacuum adsorption through holes connected to the vacuum suction chamber. With this structure, after the substrate is placed on the vacuum adsorption module 201, the X-direction side clamp block 202 moves to push the substrate to the X-direction positioning block 203; then the Y-direction side clamp plate 204 extends to push the substrate against the Y-direction positioning block and then returns to its original position, the vacuum suction chamber of the vacuum adsorption module 201 adsorbs the substrate, and other processing modules process the substrate. It should be noted that since the structure of the substrate positioning module 20 is relatively common in the art, its structure will not be described in more detail.
[0041] In summary, compared with the track of traditional belt transport, the utility model has a manipulator transport structure in a Class 1000 dust-free environment, which uses roller transport in combination with a manipulator transport structure, which can effectively avoid the powder loss caused by traditional belt transport, and can meet the use requirements of the equipment in a Class 1000 dust-free environment. On the other hand, during the transportation of the substrate by the left substrate module and the right output board module 30, the transport roller 103, the stopper, the guide block 106 and other parts that are in direct contact with the substrate are all made of flexible materials that do not drop powder and can absorb impact, so as to solve the problem of damage to the substrate during transportation.
[0042] The above is a specific description of the preferred implementation of the utility model, but the invention of the utility model is not limited to the described embodiments. Technical personnel familiar with the field can also make various equivalent deformations or substitutions without violating the spirit of the utility model. These equivalent deformations or substitutions are all included in the scope defined by the claims of this application.
Claims
1. A manipulator handling structure in a Class 1000 dust-free environment, characterized in that: Including board inlet module, substrate positioning module, board outlet module and robot handling module; The substrate positioning module is located between the board input module and the board output module, and the arrangement direction of the board input module, the substrate positioning module and the board output module is consistent with the transmission direction of the substrate; The robot handling module includes an X-axis transfer module, a Y-axis transfer module, a Z-axis transfer module and a transfer fork. The X-axis transfer module is arranged on one side of the board input module, the substrate positioning module and the board output module along the transmission direction of the substrate. The Z-axis transfer module is slidably installed on the X-axis transfer module. The Y-axis transfer module is installed at the output end of the Z-axis transfer module. The transfer fork is installed at the output end of the Y-axis transfer module. The substrate is transferred from the board input module to the substrate positioning module, and the substrate is transferred from the substrate positioning module to the board output module through the transfer fork.
2. According to the robot handling structure in a Class 1000 dust-free environment of claim 1, it is characterized in that: The X-axis transfer module includes a motor and a screw module, the Z-axis transfer module is a first cylinder, and the Y-axis transfer module is a second cylinder; The screw rod module is provided with a sliding block, the first cylinder is fixedly mounted on the sliding block, and the second cylinder is fixedly mounted on the top end of the cylinder rod of the first cylinder.
3. According to the robot handling structure in a Class 1000 dust-free environment of claim 1, it is characterized in that: The transport fork comprises a main body and a bearing part located at two ends of the main body and extending vertically outwards, and a groove for placing a substrate is arranged on the bearing part.
4. The manipulator handling structure in a Class 1000 dust-free environment according to claim 1, characterized in that: The board feeding module includes a fixing seat, a power motor and multiple sets of transport rollers; The multiple groups of transport rollers are rotatably mounted on a fixed seat along the transmission direction of the substrate, the power motor is arranged below the transport rollers, and a transmission belt is sleeved between the motor shaft of the power motor and at least one group of transport rollers to drive the group of transport rollers to rotate and realize the transmission of the substrate.
5. The manipulator handling structure in a Class 1000 dust-free environment according to claim 4, characterized in that: The end of the fixing seat along the transmission direction of the substrate is provided with a raised rib to realize the positioning of the substrate.
6. The manipulator handling structure in a Class 1000 dust-free environment according to claim 4, characterized in that: A guide block is provided at the head end of the fixing seat along the transmission direction of the substrate, for guiding the substrate.
7. The manipulator handling structure in a Class 1000 dust-free environment according to claim 6, characterized in that: The transport roller, the rib and the guide block are made of polyurethane.
8. The manipulator handling structure in a Class 1000 dust-free environment according to claim 1, characterized in that: The substrate positioning module comprises a vacuum adsorption module, an X-direction side clamping block, an X-direction positioning block, a Y-direction side clamping plate and a Y-direction positioning plate; The X-direction side clamping block and the X-direction positioning block are arranged on both sides of the vacuum adsorption module along the X-axis direction, and the substrate is pushed against the X-direction positioning block by the X-direction side clamping block; The Y-direction side clamping plate and the Y-direction positioning plate are arranged on both sides of the vacuum adsorption module along the Y-axis direction, and the substrate is pushed to abut against the Y-direction positioning block by the Y-direction side clamping plate.
9. The manipulator handling structure in a Class 1000 dust-free environment according to claim 8, characterized in that: The vacuum adsorption module comprises a vacuum adsorption cavity, and a plurality of vacuum adsorption through holes communicating with the vacuum adsorption cavity are arranged on the top of the vacuum adsorption module.