Static seal magnetic push rod device for evaporation equipment

Abstract

The utility model belongs to the technical field of vacuum coating, and relates to a static seal magnetic push rod device for evaporation equipment, which comprises a bracket, a magnetic permeable sleeve, a push rod unit and a linear driving unit, the bracket comprises a base, a first end plate and a second end plate; the magnetic permeable sleeve is fixed between the first end plate and the second end plate, a flange face is arranged at one end of the magnetic permeable sleeve, and a sealing ring is clamped between the flange face and the first end plate. The linear driving unit is arranged on the base and comprises an outer ring magnetic group and a linear driving assembly; the push rod unit penetrates through the interior of the magnetic permeable sleeve and comprises a push rod, the head of the push rod penetrates out of the first end plate, and the tail of the push rod is provided with an inner-ring magnetic set attracted with the outer-ring magnetic set inside and outside through the magnetic permeable sleeve. According to the device, the outer ring magnetic group is firstly driven by the linear driving assembly, then the magnetic force of the outer ring magnetic group drives the inner ring magnetic group to move through the magnetic permeable sleeve, so that the linear motion of the push rod is realized, the sealing position is the sealing ring, a static sealing mode is adopted, and compared with a magnetic fluid bearing, the cost is lower, and the vacuum stability is higher.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating, in particular to a static sealing magnetic push rod device for evaporation equipment. Background Art

[0002] In the production process of perovskite solar cells, vacuum evaporation is required for coating. Different evaporation materials need to be deposited on the substrate during evaporation, and the evaporation has different ranges and thicknesses, so different masks need to be used in different evaporation steps to cover the evaporation surface of the substrate, so that the range that needs evaporation is selectively exposed. The uniformity of the film layer and the convenience of taking and placing the substrate will affect its commercial value.

[0003] In evaporation equipment, push rod type robotic arms are mainly used to transfer workpieces horizontally to fixed positions. They have the advantages of simple structure and convenient operation. However, the magnetic fluid sealing method used in vacuum equipment is expensive on the one hand, and dynamic seals have a greater risk of leakage than static seals on the other hand. In addition, the general push rod structure is prone to rotation in the tangential direction of the axis due to the lack of position limitation.

[0004] Chinese patent CN219643729U discloses an electric push rod suitable for a vacuum environment. A magnetic fluid seal is provided between the servo motor and the push rod body, thereby avoiding a gap between the servo motor and the screw rod and enhancing the sealing reliability. However, the cost of the magnetic fluid seal is relatively high, and the stability of the vacuum seal is not high enough.

[0005] Therefore need to improve the push rod device to solve the above problems. Summary of the invention

[0006] The main purpose of the utility model is to provide a static sealing magnetic push rod device for evaporation equipment, which can seal the gap of the push rod device in a static sealing manner, has low cost and higher vacuum stability.

[0007] The utility model achieves the above-mentioned purpose through the following technical solutions: A static sealed magnetic push rod device for evaporation equipment, comprising a bracket, a magnetically permeable sleeve, a push rod unit and a linear drive unit;

[0008] The bracket comprises a base and a first end plate and a second end plate fixed in parallel to two sides of the base;

[0009] The magnetically permeable sleeve is fixed between the first end plate and the second end plate, the magnetically permeable sleeve is provided with a flange surface at one end close to the first end plate, and the other end is closed, and a sealing ring is sandwiched between the flange surface and the first end plate;

[0010] The linear drive unit is arranged on the base, and comprises an outer ring magnetic group sleeved outside the magnetic permeable sleeve and a linear drive component driving the outer ring magnetic group to move along the axis of the magnetic permeable sleeve;

[0011] The push rod unit passes through the interior of the magnetically permeable sleeve, and includes a push rod coaxially arranged in the magnetically permeable sleeve. The head of the push rod passes through the first end plate and is fixed with a support plate, and the tail is provided with an inner ring magnetic group that attracts the outer ring magnetic group inside and outside through the magnetically permeable sleeve.

[0012] Specifically, the outer circle magnetic group is composed of a plurality of overlapping large arc magnetic sheets, the inner arc of the large arc magnetic sheets is opposite to the outer arc magnetic pole, and the NS poles of adjacent large arc magnetic sheets are arranged alternately; the inner circle magnetic group is composed of a plurality of overlapping small arc magnetic sheets, the inner arc of the small arc magnetic sheets is opposite to the outer arc magnetic pole, and the NS poles of adjacent small arc magnetic sheets are arranged alternately; the thickness of the large arc magnetic sheets is equal to the thickness of the small arc magnetic sheets and the opposite poles are opposite.

[0013] Furthermore, the outer ring magnetic assembly also includes a sliding seat that stacks and assembles all the large arc-shaped magnetic sheets into one, and the sliding seat is provided with a sleeve that surrounds all the large arc-shaped magnetic sheets.

[0014] Furthermore, a plurality of linear bearings whose axes are parallel to the axis of the magnetically permeable sleeve are provided on both sides of the sliding seat, and guide rods for guiding the linear movement of the linear bearings are provided on both sides of the base.

[0015] Furthermore, the linear drive assembly includes a drive motor arranged at the bottom of the base, an active synchronous wheel driven by the drive motor, a driven synchronous wheel rotatably arranged on the other side of the base, and a synchronous belt wound around the active synchronous wheel and the driven synchronous wheel, and the sliding seat is connected to the synchronous belt.

[0016] Furthermore, a sensing sheet is provided on a side of the sliding seat, and a plurality of position sensors for sensing the position of the sensing sheet are provided on one side of the base.

[0017] Furthermore, it also includes an adjustment component, which includes a positioning ring and a pressure block. The positioning ring is connected to the first end plate and is passed through by the push rod. The positioning ring is provided with a notch groove for embedding the pressure block. The upper part of the push rod is provided with a cutting plane. The bottom surface of the pressure block is a plane close to the cutting plane. The pressure block is provided with a waist-shaped hole. The pressure block is fixed in the notch groove by a bolt passing through the waist-shaped hole.

[0018] The beneficial effects of the technical solution of the utility model are:

[0019] This device first drives the outer ring magnetic group through the linear drive component, and then the magnetic force of the outer ring magnetic group drives the inner ring magnetic group to move through the magnetic permeable sleeve, thereby realizing the linear movement of the push rod. The sealing position is on the sealing ring, which is a static sealing method. Compared with the application of magnetic fluid bearings, it has lower cost and higher vacuum stability. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 A three-dimensional diagram of a static sealing magnetic push rod device for a vapor deposition device according to an embodiment;

[0021] Figure 2 The figure is a relative position diagram of the bracket, the linear drive assembly, the adjustment assembly and the sealing ring;

[0022] Figure 3 is a three-dimensional diagram of a magnetically permeable sleeve;

[0023] Figure 4 It is a three-dimensional picture of the outer ring magnetic group;

[0024] Figure 5 is a stereogram of a push rod unit;

[0025] Figure 6 is a position relationship diagram of the large arc magnetic piece and the small arc magnetic piece;

[0026] Figure 7 Exploded view of the adjustment component.

[0027] The numbers in the figure represent:

[0028] 1- bracket, 11- base, 12- first end plate, 13- second end plate, 14- position sensor, 15- guide rod;

[0029] 2-magnetic permeable sleeve, 21-flange surface;

[0030] 3-push rod unit, 31-push rod, 32-inner ring magnetic group, 321-small arc-shaped magnetic sheet, 33-support plate;

[0031] 4- linear drive unit, 41- outer ring magnetic group, 411- large arc magnetic sheet, 412- sliding seat, 413- sleeve, 414- linear bearing, 415- induction sheet, 42- linear drive assembly, 421- driving motor, 422- active synchronous wheel, 423- driven synchronous wheel, 424- synchronous belt;

[0032] 5-adjusting assembly, 51-positioning ring, 511-notch groove, 52-pressing block, 521-bottom surface, 522-waist-shaped hole, 53-bolt;

[0033] 6- Sealing ring. DETAILED DESCRIPTION

[0034] The utility model is further described in detail below in conjunction with specific embodiments.

[0035] Example:

[0036] like Figure 1 As shown, a static sealed magnetic push rod device for evaporation equipment of the utility model includes a bracket 1, a magnetically permeable sleeve 2, a push rod unit 3, a linear drive unit 4 and an adjustment component 5.

[0037] like Figure 2 and Figure 3 As shown, the bracket 1 includes a base 11 and a first end plate 12 and a second end plate 13 fixed parallel to both sides of the base 11. The magnetically permeable sleeve 2 is fixed between the first end plate 12 and the second end plate 13. The magnetically permeable sleeve 2 is provided with a flange surface 21 at one end close to the first end plate 12, and a sealing ring 6 is clamped between the flange surface 21 and the first end plate 12.

[0038] The bracket 1 is the fixed foundation of the whole device, the magnetic sleeve 2 and the bracket 1 are kept in a fixed relative position, and the push rod unit 3 and the linear drive unit 4 have parts that can move. The magnetic sleeve 2 isolates the inner and outer spaces of the evaporation equipment, and the sealing position is the sealing ring 6, which is a static sealing method. Compared with the application of magnetic fluid bearings, the cost is lower and the vacuum stability is higher.

[0039] like Figures 4 to 6 As shown, the linear drive unit 4 is arranged on the base 11, including an outer ring magnetic group 41 sleeved outside the magnetic permeable sleeve 2 and a linear drive component 42 driving the outer ring magnetic group 41 to move along the axis of the magnetic permeable sleeve; the push rod unit 3 passes through the interior of the magnetic permeable sleeve 2, including a push rod 31 coaxially arranged in the magnetic permeable sleeve 2, the head of the push rod 31 passes through the first end plate 12 and is fixed with a support plate 33, and the tail is provided with an inner ring magnetic group 32 that attracts the outer ring magnetic group 41 inside and outside through the magnetic permeable sleeve 2.

[0040] The magnetically permeable sleeve 2 will not hinder the penetration of magnetic force, so the device first drives the outer ring magnetic group 41 through the linear drive component 42, and then the magnetic force of the outer ring magnetic group 41 drives the inner ring magnetic group 32 to move through the magnetically permeable sleeve 2, thereby realizing the linear motion of the push rod 31.

[0041] like Figure 6 As shown, the outer circle magnetic group 41 is composed of a plurality of overlapping large arc magnetic sheets 411, the inner arc of the large arc magnetic sheet 411 is opposite to the outer arc magnetic pole, and the N and S poles of adjacent large arc magnetic sheets 411 are arranged alternately, and the inner circle magnetic group 32 is composed of a plurality of overlapping small arc magnetic sheets 321, the inner arc of the small arc magnetic sheet 321 is opposite to the outer arc magnetic pole, and the N and S poles of adjacent small arc magnetic sheets 321 are arranged alternately, and the thickness of the large arc magnetic sheet 411 is equal to that of the small arc magnetic sheet 421, and the opposite poles are opposite.

[0042] There is a relative equilibrium position along the axis between the outer ring magnetic group 41 and the inner ring magnetic group 32. Axial offset between the two will increase the repulsive force, so they can always return to the equilibrium position in the end.

[0043] like Figure 4 As shown, the outer ring magnetic group 41 also includes a sliding seat 412 that stacks and assembles all the large arc-shaped magnetic sheets 411 into one body, and a sleeve 413 is provided on the sliding seat 412 to surround the large arc-shaped magnetic sheets 411. A plurality of linear bearings 414 whose axes are parallel to the axis of the magnetic permeable sleeve 2 are provided on both sides of the sliding seat 412, and guide rods 15 are provided on both sides of the base 11 to guide the linear bearings 414 to move linearly.

[0044] The large arc-shaped magnetic piece 411 is surrounded by the sleeve 413 and will not be scattered. The linear bearing 414 cooperates with the guide rod 15 to enable the outer ring magnetic group 41 to move accurately along the extension direction of the push rod 31 (that is, the axial direction of the magnetic permeable sleeve 2).

[0045] like Figure 2 As shown, the linear drive assembly 42 includes a driving motor 421 disposed at the bottom of the base 11, an active synchronous wheel 422 driven by the driving motor 421, a driven synchronous wheel 423 rotatably disposed on the other side of the base 11, and a synchronous belt 424 wound around the active synchronous wheel 422 and the driven synchronous wheel 423, and the sliding seat 412 is connected to the synchronous belt 424. A sensing sheet 415 is disposed on the side of the sliding seat 412, and a plurality of position sensors 14 for sensing the position of the sensing sheet 415 are disposed on one side of the base 11.

[0046] This linear drive assembly 42 uses a driving motor 421 to linearly drive the outer ring magnetic group 41. The synchronous belt 424 is used to realize the transmission of the active synchronous wheel 422 and the driven synchronous wheel 423. The part of the synchronous belt 424 between the active synchronous wheel 422 and the driven synchronous wheel 423 will be tightened to form a linear structure, and the direction is parallel to the axis direction of the push rod 31. Therefore, as long as the driving motor 421 drives the active synchronous wheel 422 to rotate forward or reverse, it can cause the outer ring magnetic group 41 to move forward and backward, and then cause the push rod 31 to push forward and pull backward. The induction plate 415 can represent the position of the push rod 31. Whenever the induction plate 415 is sensed by the position sensor 14, the driving motor 421 will stop, so that the push rod 31 will stop at the appropriate position. However, the above is only one form of the linear drive assembly 42. In actual applications, it can be replaced by components with linear drive functions such as cylinders, oil cylinders, and linear motion modules.

[0047] like Figure 5 and Figure 7As shown, the adjustment assembly 5 includes a positioning ring 51 and a pressure block 52. The positioning ring 51 is connected to the first end plate 12 and is passed through by the push rod 31. The positioning ring 51 is provided with a notch groove 511 for embedding the pressure block 52. The upper part of the push rod 31 is provided with a cutting plane 311. The bottom surface 521 of the pressure block 52 is a plane close to the cutting plane 311. The pressure block 52 is provided with a waist-shaped hole 522. The pressure block 52 is fixed in the notch groove 511 by a bolt 53 passing through the waist-shaped hole 522.

[0048] In this embodiment, the cross section of the push rod 31 is not circular but arcuate, so the pressing block 52 can press the cutting plane 311, so that the push rod 31 can only move along the axial direction, which can prevent the support plate 33 from rotating and causing the supported object to fall. The waist-shaped hole 522 allows the position of the pressing block 52 in the notch groove 511 to be finely adjusted. When the pressing block 52 presses the push rod 31 without causing much resistance, the pressing block 52 is fixed with a bolt 53.

[0049] The above are only some embodiments of the present invention. For those skilled in the art, several modifications and improvements can be made without departing from the inventive concept of the present invention, which all belong to the protection scope of the present invention.

Claims

1. A static sealed magnetic push rod device for evaporation equipment, characterized in that: It includes a bracket, a magnetically permeable sleeve, a push rod unit and a linear drive unit; The bracket comprises a base and a first end plate and a second end plate fixed in parallel to two sides of the base; The magnetically permeable sleeve is fixed between the first end plate and the second end plate, the magnetically permeable sleeve is provided with a flange surface at one end close to the first end plate, and the other end is closed, and a sealing ring is sandwiched between the flange surface and the first end plate; The linear drive unit is arranged on the base, and comprises an outer ring magnetic group sleeved outside the magnetic permeable sleeve and a linear drive component driving the outer ring magnetic group to move along the axis of the magnetic permeable sleeve; The push rod unit passes through the interior of the magnetically permeable sleeve, and includes a push rod coaxially arranged in the magnetically permeable sleeve. The head of the push rod passes through the first end plate and is fixed with a support plate, and the tail is provided with an inner ring magnetic group that attracts the outer ring magnetic group inside and outside through the magnetically permeable sleeve.

2. The static sealed magnetic push rod device for evaporation equipment according to claim 1, characterized in that: The outer circle magnetic group is composed of a plurality of overlapping large arc magnetic sheets, the inner arc of the large arc magnetic sheets is opposite to the outer arc magnetic pole, and the NS poles of adjacent large arc magnetic sheets are arranged alternately; the inner circle magnetic group is composed of a plurality of overlapping small arc magnetic sheets, the inner arc of the small arc magnetic sheets is opposite to the outer arc magnetic pole, and the NS poles of adjacent small arc magnetic sheets are arranged alternately; the thickness of the large arc magnetic sheets is equal to the thickness of the small arc magnetic sheets and the opposite poles are opposite.

3. The static sealed magnetic push rod device for evaporation equipment according to claim 2, characterized in that: The outer ring magnetic group also includes a sliding seat on which all the large arc-shaped magnetic sheets are stacked and assembled into one body, and a sleeve surrounding all the large arc-shaped magnetic sheets is provided on the sliding seat.

4. The static sealed magnetic push rod device for evaporation equipment according to claim 3, characterized in that: A plurality of linear bearings whose axes are parallel to the axis of the magnetically permeable sleeve are arranged on both sides of the sliding seat, and guide rods for guiding the linear movement of the linear bearings are arranged on both sides of the base.

5. The static sealed magnetic push rod device for evaporation equipment according to claim 3, characterized in that: The linear drive assembly includes a driving motor arranged at the bottom of the base, an active synchronous wheel driven by the driving motor, a driven synchronous wheel rotatably arranged on the other side of the base, and a synchronous belt wound around the active synchronous wheel and the driven synchronous wheel, and the sliding seat is connected to the synchronous belt.

6. The static sealed magnetic push rod device for evaporation equipment according to claim 3, characterized in that: A sensing sheet is arranged on the side of the sliding seat, and a plurality of position sensors for sensing the position of the sensing sheet are arranged on one side of the base.

7. The static sealed magnetic push rod device for evaporation equipment according to claim 1, characterized in that: It also includes an adjustment component, which includes a positioning ring and a pressure block. The positioning ring is connected to the first end plate and is passed through by the push rod. The positioning ring is provided with a notch groove for embedding the pressure block. The upper part of the push rod is provided with a cutting plane. The bottom surface of the pressure block is a plane close to the cutting plane. The pressure block is provided with a waist-shaped hole. The pressure block is fixed in the notch groove by a bolt passing through the waist-shaped hole.

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