Single crystal furnace and energy-saving electrode thereof
By using the first electrode body of copper material and the second electrode body of carbon-based composite material in a single crystal furnace, combined with the quartz sheath and thermal insulation structure, the problem of high heat generation in the existing electrodes under high power conditions is solved, and the effect of reducing power consumption and extending service life is achieved.
Patent Information
- Application Number
- CN202420436272.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-07
- Publication Date
- 2025-03-25
- Estimated Expiration
- 2034-03-07
AI Technical Summary
The existing single crystal furnace electrodes generate a large amount of heat in high power conditions, resulting in short service life, affecting the service life of the heater legs, the heat field components are prone to corrosion, insufficient heat transfer, and the lack of thermal insulation structure leads to high power consumption.
The first electrode body of copper material and the second electrode body of carbon-based composite material are combined with a quartz sheath and thermal insulation structure to reduce heat loss through screw locking and staggered joint structures and increase the electrical energy transfer efficiency.
It effectively reduces the heat generation and power consumption of the electrode, extends the service life of the electrode and heater legs, reduces the corrosion of heat field components, and reduces the energy consumption of crystal rod pulling.
Smart Images
Figure CN222666084U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of crystal rod production equipment, in particular to a single crystal furnace and an energy-saving electrode thereof. Background Art
[0002] In the process of pulling single crystal silicon rods, the heater needs to heat up to melt the silicon material in the furnace, and then continue to heat up to maintain the temperature in a state where solid and liquid silicon material coexist until the furnace is stopped. Specifically, the heater is energized after connecting its legs to the electrodes at the bottom of the single crystal furnace, and forms a thermal field in the form of resistive heating to provide heat for melting the silicon material.
[0003] At present, a single crystal furnace consumes about 20,000 to 30,000 kWh of electricity to produce a whole furnace, including the power loss caused by the electrodes of the existing single crystal furnace due to self-heating. This is mainly because the electrodes of the existing single crystal furnace have the following disadvantages:
[0004] 1. Under high power conditions, the existing material of the electrode generates a lot of heat, which shortens its own service life and may affect the service life of the heater legs. In severe cases, it may cause sparks;
[0005] 2. The existing electrodes generate a lot of heat and have high temperatures, which makes the components at the bottom of the thermal field (sheath, felt, etc.) more susceptible to corrosion, thereby reducing their service life;
[0006] 3. The existing electrode part is far away from the crucible / silicon material, so the heat cannot be effectively transferred and is easily lost from the bottom of the heat field;
[0007] 4. The existing electrode only has a quartz sheath, which will soften at high temperatures and come into contact and react with surrounding components, causing corrosion;
[0008] 5. The existing electrodes have no insulation structure, the insulation effect is poor, the heat is easily lost, the power consumption of the electrodes is further increased, and the corrosion of surrounding components is accelerated.
[0009] Therefore, in order to produce single crystal silicon rods in a more energy-saving and environmentally friendly manner and reduce electricity costs, an energy-saving electrode and a single crystal furnace equipped with the electrode are needed to reduce the power consumption of each furnace. Utility Model Content
[0010] In view of the shortcomings of the prior art, the utility model provides a single crystal furnace and an energy-saving electrode thereof. The energy-saving electrode has a low resistivity and low self-heating. After use, it can effectively reduce the heat loss near the electrode in the thermal field, reduce the power required for crystal rod pulling, and achieve the purpose of reducing consumption and saving energy.
[0011] In order to achieve the above purpose, the utility model provides the following technical solutions:
[0012] An energy-saving electrode for a single crystal furnace, comprising:
[0013] The first electrode body is fixed on the bottom of the single crystal furnace;
[0014] A second electrode body, the lower end of which is threadedly fastened to the top of the first electrode body, and the upper end of which is in contact with the bottom of the heater leg and is locked by screws; and
[0015] A quartz sheath, supported on the first electrode body and sleeved on the second electrode body;
[0016] The first electrode body is a copper electrode, and the second electrode body is a main electrode made of a carbon-based composite material.
[0017] In one embodiment disclosed in the present application, the carbon-based composite material is mainly composed of a carbon-carbon composite material and an inorganic carbide in a secondary composite.
[0018] In one embodiment disclosed in the present application, a threaded hole is respectively formed at the upper and lower ends of the second electrode body, and the two threaded holes are connected by a channel;
[0019] The threaded hole at the lower end of the second electrode body is threadedly connected to the stud arranged on the top of the first electrode body, and the threaded hole at the upper end of the second electrode body is threadedly connected to the screw passing through the heater leg.
[0020] In one embodiment disclosed in the present application, a through hole is provided on the side wall of the second electrode body;
[0021] The through hole is vertically connected to the channel and is close to the threaded hole at the upper end.
[0022] In one embodiment disclosed in the present application, a first annular boss is provided at the upper end of the second electrode body radially outwardly;
[0023] The first annular boss is in abutting contact with the bottom of the heater leg.
[0024] In one embodiment disclosed in the present application, the head of the screw is covered with a protective cover.
[0025] In one embodiment disclosed in the present application, there are two quartz sheaths stacked one above the other.
[0026] In one embodiment disclosed in the present application, it also includes a heat preservation structure arranged outside the quartz jacket for heat preservation and insulation;
[0027] The thermal insulation structure is mainly composed of an upper thermal insulation jacket and a lower thermal insulation jacket which are plugged into each other from top to bottom;
[0028] A second annular boss is provided at one end of the upper thermal insulation jacket, and the lower thermal insulation jacket is supported on the bottom of the single crystal furnace and has an annular groove inside one end thereof;
[0029] When the upper thermal insulation sheath is inserted into the lower thermal insulation sheath from above, the second annular boss and the annular groove are tightly fitted to form a staggered structure.
[0030] In one embodiment disclosed in the present application, the surfaces of the upper thermal insulation jacket and the lower thermal insulation jacket are coated with an anti-oxidation coating.
[0031] A single crystal furnace comprises the energy-saving electrode mentioned above.
[0032] Compared with the prior art, the beneficial effects of the utility model are:
[0033] 1. Compared with the graphite electrodes commonly used in the industry, the second electrode body made of carbon-based composite materials has lower resistivity and thermal conductivity, low self-heating, low power consumption, and less thermal corrosion to surrounding thermal field components. After use, it can effectively reduce the heat loss near the electrode in the thermal field, reduce the power required for crystal rod pulling, and achieve the purpose of reducing consumption and energy.
[0034] 2. The through hole can protect the second electrode body and prevent it from generating vacuum negative pressure during loading and unloading.
[0035] 3. The first annular boss can increase the contact area between the upper end of the second electrode body and the bottom of the heater leg, which is beneficial to the transmission of electric energy and reduces the heat loss at the bottom of the thermal field.
[0036] 4. The protective cover can prevent oxides from entering the holes of the heater legs to avoid sparks.
[0037] 5. The staggered structure formed by the close fit between the second annular boss and the annular groove can reduce heat leakage in the gap between the upper insulation jacket and the lower insulation jacket, improve the insulation performance to a certain extent, reduce heat loss, and thus reduce the power consumption of the energy-saving electrode itself.
[0038] 6. The anti-oxidation coating applied on the surface of the upper insulation jacket and the lower insulation jacket can protect the insulation material of the inner layer and prevent impurities such as carbon powder from contacting the energy-saving electrode and causing sparks. BRIEF DESCRIPTION OF THE DRAWINGS
[0039] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.
[0040] Figure 1A schematic diagram of the three-dimensional structure of the energy-saving electrode provided by the utility model after being connected to the heater legs;
[0041] Figure 2 for Figure 1 Schematic diagram of the main cross-sectional structure;
[0042] Figure 3 is a schematic diagram of the main cross-sectional structure of the second electrode body;
[0043] Figure 4 Schematic diagram of the three-dimensional structure of the upper thermal insulation jacket;
[0044] Figure 5 It is a schematic diagram of the three-dimensional structure of the lower thermal insulation jacket. DETAILED DESCRIPTION
[0045] In the following, only some exemplary embodiments are briefly described. As those skilled in the art will appreciate, the described embodiments may be modified in various ways without departing from the spirit or scope of the present invention. Therefore, the drawings and descriptions are considered to be exemplary and non-restrictive in nature.
[0046] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.
[0047] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.
[0048] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected or indirectly connected through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
[0049] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.
[0050] The disclosure below provides many different embodiments or examples to implement different structures of the present invention. In order to simplify the disclosure of the present invention, the components and settings of specific examples are described below. Of course, they are only examples and are not intended to limit the present invention.
[0051] The embodiments of the present utility model are described in detail below with reference to the accompanying drawings.
[0052] See also Figure 1 to Figure 5 As shown, on the one hand, the utility model provides an energy-saving electrode for a single crystal furnace, comprising:
[0053] The first electrode body 10 is fixed on the bottom 1 of the single crystal furnace;
[0054] The second electrode body 20 has a lower end threadedly fastened to the top of the first electrode body 10 and an upper end in contact with the bottom of the heater leg 2 and then locked by a screw 3; and
[0055] The quartz sheath 30 is supported on the first electrode body 10 and sleeved outside the second electrode body 20;
[0056] The first electrode body 10 is a copper electrode, and the second electrode body 20 is a main electrode made of a carbon-based composite material.
[0057] Compared with the graphite electrodes commonly used in the industry, the second electrode body 20 made of carbon-based composite materials has lower resistivity and thermal conductivity, low self-heating, low power consumption, and less thermal corrosion to surrounding thermal field components. After use, it can effectively reduce heat loss near the electrode in the thermal field, reduce the power required for crystal rod pulling, and achieve the purpose of reducing consumption and energy.
[0058] In this embodiment, the carbon-based composite material is mainly formed by secondary compounding of a carbon-carbon composite material and an inorganic carbide.
[0059] A threaded hole is provided at the upper and lower ends of the second electrode body 20, and the two threaded holes are connected by a channel; the threaded hole at the lower end of the second electrode body 20 is threadedly connected to the stud set at the top of the first electrode body 10, and the threaded hole at the upper end of the second electrode body 20 is threadedly connected to the screw 3 passing through the heater leg 2.
[0060] A through hole 21 is provided on the side wall of the second electrode body 20, and the through hole 21 is vertically connected to the channel and is close to the threaded hole at the upper end. The through hole 21 can protect the second electrode body 20 and prevent it from generating vacuum negative pressure during loading and unloading.
[0061] A first annular boss 22 is provided radially outwardly at the upper end of the second electrode body 20, and the first annular boss 22 contacts the bottom of the heater leg 2. The first annular boss 22 can increase the contact area between the upper end of the second electrode body 20 and the bottom of the heater leg 2, which is beneficial to the transmission of electric energy and reduces the heat loss at the bottom of the thermal field.
[0062] The head cover of the screw 3 is provided with a protective cover 4. The protective cover 4 can prevent oxides from entering the holes of the heater legs 2 to avoid causing ignition.
[0063] In this embodiment, two quartz sheaths 30 are stacked one above the other.
[0064] The energy-saving electrode of the single crystal furnace mentioned above further includes a heat preservation structure 40 disposed outside the quartz jacket 30 for heat preservation and heat insulation. Adding the heat preservation structure 40 outside the quartz jacket 30 can greatly reduce the radiation loss of heat and protect the soft felt around the energy-saving electrode. Specifically, the heat preservation structure 40 is mainly composed of an upper heat preservation jacket 41 and a lower heat preservation jacket 42 which are plugged into each other from top to bottom; see Figure 4 and Figure 5 As shown, the upper insulation jacket 41 is provided with a second annular boss at one end, and the lower insulation jacket 42 is supported on the single crystal furnace bottom 1, and an annular groove is provided inside one end thereof; when the upper insulation jacket 41 is inserted into the lower insulation jacket 42 from above, the second annular boss and the annular groove are closely fitted to form a staggered structure. The staggered structure can reduce the heat leakage in the gap between the upper insulation jacket 41 and the lower insulation jacket 42, improve the insulation performance to a certain extent, reduce heat loss, and thus reduce the power consumption of the energy-saving electrode itself.
[0065] The surfaces of the upper insulation jacket 41 and the lower insulation jacket 42 are coated with an anti-oxidation coating, which can protect the insulation materials of the inner layers of the upper insulation jacket 41 and the lower insulation jacket 42 and prevent impurities such as carbon powder from contacting the energy-saving electrode and causing ignition.
[0066] On the other hand, the utility model provides a single crystal furnace, including the above energy-saving electrode. After the single crystal furnace uses the energy-saving electrode, the ineffective heat generation and heat loss near the electrode are effectively reduced, the energy consumption of crystal rod pulling is reduced, and the power of a single furnace is estimated to be reduced by 3kW.
[0067] The above embodiments are only preferred embodiments of the present utility model and are not limitations on the technical solutions of the present utility model. Any technical solution that can be implemented on the basis of the above embodiments without creative work should be deemed to fall within the scope of protection of the patent of the present utility model.
Claims
1. An energy-saving electrode for a single crystal furnace, characterized in that: include: The first electrode body is fixed on the bottom of the single crystal furnace; A second electrode body, the lower end of which is threadedly fastened to the top of the first electrode body, and the upper end of which is in contact with the bottom of the heater leg and is locked by screws; and A quartz sheath, supported on the first electrode body and sleeved on the second electrode body; The first electrode body is a copper electrode, and the second electrode body is a main electrode made of a carbon-based composite material.
2. The energy-saving electrode for a single crystal furnace according to claim 1, characterized in that: The carbon-based composite material is mainly formed by secondary compounding of a carbon-carbon composite material and an inorganic carbide.
3. The energy-saving electrode for a single crystal furnace according to claim 1 or 2, characterized in that: A threaded hole is respectively formed at the upper and lower ends of the second electrode body, and the two threaded holes are connected by a channel; The threaded hole at the lower end of the second electrode body is threadedly connected to the stud arranged on the top of the first electrode body, and the threaded hole at the upper end of the second electrode body is threadedly connected to the screw passing through the heater leg.
4. The energy-saving electrode for a single crystal furnace according to claim 3, characterized in that: A through hole is formed on the side wall of the second electrode body; The through hole is vertically connected to the channel and is close to the threaded hole at the upper end.
5. The energy-saving electrode for a single crystal furnace according to claim 1 or 4, characterized in that: The upper end of the second electrode body is provided with a first annular boss radially outwardly; The first annular boss is in abutting contact with the bottom of the heater leg.
6. The energy-saving electrode for a single crystal furnace according to claim 3, characterized in that: The head of the screw is covered with a protective cover.
7. The energy-saving electrode for a single crystal furnace according to claim 1 or 6, characterized in that: There are two quartz sheaths stacked up and down.
8. The energy-saving electrode for a single crystal furnace according to claim 1, characterized in that: It also includes a heat preservation structure arranged outside the quartz jacket for heat preservation and insulation; The thermal insulation structure is mainly composed of an upper thermal insulation jacket and a lower thermal insulation jacket which are plugged into each other from top to bottom; A second annular boss is provided at one end of the upper thermal insulation jacket, and the lower thermal insulation jacket is supported on the bottom of the single crystal furnace and has an annular groove inside one end thereof; When the upper thermal insulation sheath is inserted into the lower thermal insulation sheath from above, the second annular boss and the annular groove are tightly fitted to form a staggered structure.
9. The energy-saving electrode for a single crystal furnace according to claim 8, characterized in that: The surfaces of the upper thermal insulation jacket and the lower thermal insulation jacket are coated with an anti-oxidation coating.
10. A single crystal furnace, characterized in that: The energy-saving electrode comprises the energy-saving electrode as claimed in any one of claims 1 to 9.