Fluid heating device and semiconductor equipment

Abstract

The utility model provides a fluid heating device and semiconductor equipment. The fluid heating device comprises an input pipeline, a heating system and an output pipeline, wherein the input pipeline is used for inputting fluid to be heated; the heating system is arranged at the downstream of the input pipeline; the heating system comprises at least two parallel heating pipelines, at least two heaters arranged on the heating pipelines and sequentially arranged in the flowing direction of fluid, and a first temperature sensor used for monitoring the temperature variation of the fluid heated by the heaters. The flow meter and the first adjusting valve are arranged on the heating pipelines and used for metering and adjusting the flow of fluid entering the heating pipelines respectively, and the mixing pipeline collects the heating fluid output by all the heating pipelines and is communicated with the output pipeline. By means of the heating system, the flexibility of fluid temperature regulation and control and more accurate temperature control are achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor equipment, in particular to a fluid heating device and a semiconductor equipment. Background Art

[0002] In the field of semiconductor equipment, fluid heating devices, as one of the key auxiliary equipment, are closely related to the precision, cleanliness requirements and stringent standards for temperature control of semiconductor manufacturing processes. In the semiconductor manufacturing process, links such as chemical vapor deposition (CVD), ion implantation, photoresist coating, development, and cleaning all require the temperature of the fluids used (including chemicals, ultrapure water, inert gases, etc.) to be accurately controlled within a range of ±1°C or even smaller. The fluid heating device is required to have extremely high temperature stability, fast response capability and precise closed-loop control mechanism. High-precision PID controllers, thermocouple sensors and microprocessor technology are usually used to ensure that the fluid temperature fluctuates accurately within the set range to maintain constant process conditions and ensure chip yield.

[0003] The international invention patent application with publication number WO2009037775A1 discloses a fluid temperature control device and method, wherein a feedforward control unit calculates the required power based on the target temperature of the fluid, the flow rate per unit time and the inlet temperature, distributes the required power to each heater, and distributes the required power to determine the operation amount for operation according to the distributed power, calculates the target temperature of each heating box, and then a feedback control unit determines the operation amount of each heater according to the target temperature and outlet temperature of the heating box, and the power module.

[0004] However, the fluid temperature control device in the above-mentioned prior art adopts a single-path three-channel heating device, and the fluid can only pass through three independent heating channels in sequence along a single path. Although each channel can be set to a different temperature, the temperature of the fluid has been affected by the heating of the previous channel after passing through the previous channel. The heating effect of the subsequent channel is an addition or correction based on the heating of the previous channel, which limits the flexibility of fluid temperature regulation and makes it difficult for the above-mentioned prior art to achieve more precise temperature control of the fluid.

[0005] In view of this, it is necessary to improve the fluid temperature control device in the prior art to solve the above problems. Utility Model Content

[0006] The purpose of the utility model is to disclose a fluid heating device and a semiconductor device, which are used to solve the many defects existing in the fluid temperature control device in the prior art, especially to achieve flexibility in fluid temperature regulation and more accurate temperature control.

[0007] To achieve the above-mentioned object, in a first aspect, the utility model provides a fluid heating device, comprising: an input pipeline for inputting a fluid to be heated, a heating system arranged downstream of the input pipeline, and an output pipeline connected to the heating system to output the heated fluid;

[0008] The heating system includes: at least two parallel heating pipelines, at least two heaters arranged in the heating pipelines and in sequence along the fluid flow direction, a first temperature sensor for monitoring the temperature change of the fluid after being heated by the heaters, a flow meter and a first regulating valve arranged in the heating pipelines and respectively used to measure and adjust the fluid flow entering the heating pipeline, and a mixing pipeline that collects all the heating fluids output by the heating pipelines and connects to the output pipelines.

[0009] As a further improvement of the present invention, the downstream branch of the input pipeline forms a second shunt pipeline connected to the heating system, and the second shunt pipeline is configured with a constant pressure valve for maintaining a constant pressure of the fluid entering the heating system.

[0010] As a further improvement of the present invention, the fluid heating device also includes a drainage system, the downstream branch of the input pipeline forms a first shunt pipeline connected to the drainage system, and the first shunt pipeline is configured with a second regulating valve for regulating the fluid flow entering the drainage system.

[0011] As a further improvement of the present invention, the heating system also includes: a flow sensor configured downstream of the heating pipeline to detect the flow rate of the heating fluid output by the heating pipeline, and a second temperature sensor configured downstream of the heating pipeline to detect the temperature of the heating fluid output by the heating pipeline.

[0012] As a further improvement of the present invention, a pressure sensor for detecting the pressure of the heating fluid output from the mixing pipeline is arranged downstream of the mixing pipeline.

[0013] As a further improvement of the present invention, a first flow guiding pipeline and a second flow guiding pipeline are constructed downstream of the mixing pipeline, which are connected to the output pipeline and the drainage system respectively.

[0014] As a further improvement of the present invention, the second flow guiding pipeline is constructed into a third flow guiding pipeline equipped with a pressure relief valve.

[0015] As a further improvement of the present invention, a pump body for pumping the heated fluid to the output pipeline is arranged between the first flow guiding pipeline and the output pipeline.

[0016] As a further improvement of the present invention, the fluid heating device further comprises: a nitrogen purge device, which is arranged in a shutdown state of the heating device to purge the residual fluid in the heating pipeline and the mixing pipeline with nitrogen and discharge it through the output pipeline;

[0017] The nitrogen purge device includes: a nitrogen source, and a nitrogen control valve arranged between the nitrogen source and the heating pipeline.

[0018] In a second aspect, the utility model further provides a semiconductor device, comprising: a fluid heating device as described in any one of the first aspects.

[0019] Compared with the prior art, the beneficial effects of the utility model are: at least two heaters are arranged in sequence along the fluid flow direction of the heating pipeline, so that multiple heating pipelines can heat the fluid in sections, and the temperature change of the fluid after being heated by each heater is monitored by the first temperature sensor to ensure that the fluid temperature is always within the target temperature range during the heating process of the fluid by the heater, so as to achieve precise temperature control. Compared with the fluid temperature control device in the prior art, in which the fluid can only be heated along a single path through three independent heating channels in sequence, the fluid heating device achieves flexibility in fluid temperature regulation and more precise temperature control through the heating system. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the principle of the fluid heating device disclosed by the utility model;

[0021] Figure 2 It is a schematic diagram of the structure of the heating pipeline. DETAILED DESCRIPTION

[0022] The present invention is described in detail below in conjunction with the various embodiments shown in the accompanying drawings, but it should be noted that these embodiments are not limitations of the present invention, and any equivalent transformations or substitutions in functions, methods, or structures made by ordinary technicians in the field based on these embodiments are all within the scope of protection of the present invention.

[0023] Please refer to Figure 1 and 2 A specific implementation of a fluid heating device and a semiconductor device is disclosed.

[0024] Ginseng Figure 1 and Figure 2As shown, in this embodiment, the fluid heating device 100 includes: an input pipeline 10 for inputting the fluid to be heated, a heating system 20 arranged downstream of the input pipeline 10, and an output pipeline 30 connected to the heating system 20 to output the heated fluid; the heating system 20 includes: at least two parallel heating pipelines 21, at least two heaters 22 arranged in sequence along the fluid flow direction on the heating pipeline 21, a first temperature sensor 23 for monitoring the temperature change of the fluid after being heated by the heater 22, a flow meter 24 and a first regulating valve 25 arranged on the heating pipeline 21 and respectively used to measure and adjust the fluid flow entering the heating pipeline 21, and a mixing pipeline 26 that collects the heated fluid output from all heating pipelines 21 and is connected to the output pipeline 30.

[0025] In this embodiment, first, the fluid to be heated is input through the input pipeline 10, and the fluid to be heated enters the heating system 20 for heating. The heating system 20 heats the fluid respectively through at least two parallel heating pipelines 21, so that the fluid can be heated in multiple independent heating pipelines 21 at the same time, thereby improving the heating efficiency. Even if a certain heating pipeline 21 fails or needs maintenance, the other heating pipelines 21 can continue to work to ensure the normal operation of the fluid heating device 100; secondly, at least two heaters 22 are arranged in sequence along the fluid flow direction of the heating pipeline 21, so that multiple heating pipelines 21 can heat the fluid in sections, and the temperature change of the fluid after being heated by each heater 22 is monitored by the first temperature sensor 23, ensuring that the fluid temperature is always within the target temperature range during the heating process of the heater 22 to achieve precise temperature control. Again, the flow rate of the fluid entering each heating pipeline 21 is accurately measured by the flow meter 24, and combined with the first regulating valve 25, the flow rate entering each heating pipeline 21 is accurately adjusted according to the preset process parameters or real-time monitoring data to ensure the heating efficiency of the fluid and the accuracy of temperature control. By adjusting the flow meter 24 and the first regulating valve 25 of each heating pipeline 21, the flow of each heating pipeline 21 is evenly distributed to avoid uneven heating or pipeline pressure imbalance caused by uneven flow, so as to ensure the stable operation of the heating system 20. Finally, the heating fluid output from all heating pipelines 21 is collected through the mixing pipeline 26, so that the independently heated fluids can be evenly mixed, ensuring that the fluid output to the downstream equipment (not shown) through the output pipeline 30 has a uniform and required temperature.

[0026] In summary, compared with the fluid temperature control device in the prior art in which the fluid can only be heated along a single path through three independent heating channels in sequence, the fluid heating device 100 achieves flexibility in fluid temperature regulation and more precise temperature control through the heating system 20.

[0027] In this embodiment, Figure 1 As shown, the downstream branch of the input pipeline 10 forms a second shunt pipeline 12 connected to the heating system 20, and the second shunt pipeline 12 is configured with a constant pressure valve 121 for maintaining a constant pressure of the fluid entering the heating system 20. By providing the constant pressure valve 121, the flow rate of the fluid entering the heating system 20 can be ensured to be stable, which is conducive to maintaining the smooth operation of the heating system 20 during the heating process, and can eliminate the flow instability caused by factors such as upstream pressure fluctuations.

[0028] In this embodiment, Figure 1 As shown, the fluid heating device 100 also includes a drainage system 40, and the downstream branch of the input pipeline 10 forms a first shunt pipeline 11 connected to the drainage system 40, and the first shunt pipeline 11 is configured with a second regulating valve 111 for regulating the fluid flow entering the drainage system 40. The second regulating valve 111 can adjust the fluid flow entering the first shunt pipeline 11 (i.e. directly entering the drainage system 40), which is compared with the fluid flow entering the second shunt pipeline 12 (i.e. entering the heating system 20), so as to achieve accurate management of the heated part fluid and the non-heated part fluid. When the fluid heating device 100 fails or needs to be shut down urgently, more fluid can be quickly discharged directly to the drainage system 40 by increasing the opening of the second regulating valve 111 of the first shunt pipeline 11, so as to avoid the accumulation of fluid in the heating system 20 or the temperature runaway, which helps to protect the safety of the heating system 20 and downstream equipment. At the same time, for fluids containing impurities or components that do not need to be heated, by adjusting the flow of the first shunt pipeline 11, they can be quickly discharged to avoid contamination of the heating system 20 or affecting the heating efficiency. Preferably, in this embodiment, the second regulating valve 111 includes a needle valve 1111 and a pneumatic diaphragm valve 1112 which are sequentially arranged along the fluid flow direction.

[0029] In this embodiment, Figure 1 and Figure 2As shown, the heating system 20 also includes: a flow sensor 27 configured downstream of the heating pipeline 21 to detect the flow rate of the heating fluid output by the heating pipeline 21, and a second temperature sensor 28 configured downstream of the heating pipeline 21 to detect the temperature of the heating fluid output by the heating pipeline 21. The flow sensor 27 monitors and records the flow rate of the heating fluid output by the heating pipeline 21 in real time, and according to the monitoring result of the flow sensor 27, the opening of the first regulating valve 25 can be adjusted to accurately control the flow rate of the heating pipeline 21 to maintain the balance of the flow rate of each heating pipeline 21. At the same time, it can play a role in fault warning and diagnosis. The monitoring data of the flow sensor 27 can help to timely discover potential problems (such as sudden increase, decrease or fluctuation of flow rate), trigger alarms or take preventive maintenance measures to avoid work interruption or device damage. The second temperature sensor 28 monitors and records the temperature of the heating fluid output by the heating pipeline 21 in real time. According to the monitoring result of the second temperature sensor 28, the power of the heater 22 can be adjusted to accurately control the temperature of the heating fluid to meet the set requirements or production process standards. Furthermore, the second temperature sensor 28 monitors the output temperature of each heating pipeline 21 to identify whether the heating pipeline 21 where the second temperature sensor 28 is located has problems such as heat loss and uneven heat distribution.

[0030] In this embodiment, Figure 1 and Figure 2 As shown, a pressure sensor 261 is configured downstream of the mixing pipeline 26 for detecting the pressure of the heating fluid output from the mixing pipeline 26. Since the heating fluids of multiple heating pipelines 21 converge in the mixing pipeline 26, the pressure of the mixed fluid is monitored by the pressure sensor 261 to ensure that the pressure of the heating fluid delivered to the downstream equipment is appropriate.

[0031] In this embodiment, Figure 1 As shown, the first guide pipe 262 and the second guide pipe 263 are constructed downstream of the mixing pipe 26 to connect the output pipe 30 and the drainage system 40 respectively. The temperature and flow rate of the heating fluid before entering the mixing pipe 26 are detected by the flow sensor 27 and the second temperature sensor 28. When the temperature of the heating fluid is too high or the flow rate is too large, the mixing pipe 26 directly discharges the fluid into the drainage system 40 through the second guide pipe 263 to achieve safety protection against overheating or excessive flow. Furthermore, the second guide pipe 263 is provided with a pneumatic diaphragm valve 2631. When the temperature of the heated fluid exceeds the set threshold or the flow rate is too large, the pneumatic diaphragm valve 2631 can respond quickly and open automatically, allowing part of the fluid to directly enter the drainage system 40, so as to prevent the fluid with too high temperature or too large flow rate from continuing to flow to the downstream equipment and causing damage to the equipment.

[0032] Furthermore, in this embodiment, Figure 1As shown, the second flow guiding pipeline 263 is constructed to form a third flow guiding pipeline 264 equipped with a pressure relief valve 265. When the pressure of the heated fluid in the mixing pipeline 26 rises to a set threshold due to various reasons (such as too fast heating, too large flow, thermal expansion, etc.), the pressure relief valve 265 will automatically open to release part of the fluid into the drainage system 40, thereby quickly reducing the pressure in the mixing pipeline 26, preventing excessive pressure from causing damage to components such as pipelines and valves, and ensuring the safe operation of the fluid heating device 100.

[0033] In this embodiment, Figure 1 As shown, a pump body 50 for pumping the heated fluid to the output pipeline 30 is arranged between the first guide pipeline 262 and the output pipeline 30. After the mixed heated fluid is detected by the pressure sensor 261, it is transported by the pump body 50 to the downstream equipment for use. Further, a pneumatic diaphragm valve 301 and a needle valve 302 are sequentially arranged downstream of the pump body 50. The pneumatic diaphragm valve 301 is located between the pump body 50 and the downstream equipment, and serves as the first control valve. It has a fast response speed and decisive switching action. It can quickly cut off the fluid flowing to the downstream equipment in an emergency, prevent abnormal conditions such as excessive fluid temperature and excessive flow from causing damage to the downstream equipment, and ensure system safety; the needle valve 302 is located immediately behind the pneumatic diaphragm valve 301, and is used to perform more precise flow regulation on the fluid that has passed through the pneumatic diaphragm valve 301. It can fine-tune the fluid flow according to process requirements to ensure that the downstream equipment is stably supplied with heating fluid that meets the requirements.

[0034] In this embodiment, the fluid heating device 100 further includes: a nitrogen purge device (not shown), which is arranged in the shutdown state of the heating device to purge the residual fluid in the heating pipeline 21 and the mixing pipeline 26 with nitrogen and discharge it through the output pipeline 30; when the fluid heating device 100 is shut down, the nitrogen purge device purges the residual fluid in the heating pipeline 21 and the mixing pipeline 26 with nitrogen to ensure that the inside of the pipeline is dry and prevent corrosion and other problems caused by fluid residue. Specifically, the nitrogen purge device includes: a nitrogen source (not shown), and a nitrogen control valve (not shown) arranged between the nitrogen source and the heating pipeline 21. The nitrogen source provides the required nitrogen for nitrogen purging; the nitrogen control valve is connected between the nitrogen source and the heating pipeline 21 and the mixing pipeline 26 to control the on-off and flow rate of the nitrogen; cooperates with the pressure sensor 261 to monitor the pressure inside the pipeline during the purging process to ensure that the purging pressure is within a safe range; cooperates with the flow sensor 27 to monitor the flow rate of the purging nitrogen to ensure the purging effect and prevent excessive nitrogen flow from damaging the pipeline.

[0035] Ginseng Figure 1 and Figure 2As shown, in this embodiment, the downstream of the input pipeline 10 is divided into a first shunt pipeline 11 and a second shunt pipeline 12. The first shunt pipeline 11 is directly connected to the drainage system 40, and the second shunt pipeline 12 leads to the heating system 20, so as to realize the shunt treatment of the fluid of the input pipeline 10, so as to facilitate the heating operation or discharge of the fluid as needed. A needle valve 101 and a pneumatic diaphragm valve 102 are arranged between the downstream of the input pipeline 10 and the upstream of the first shunt pipeline 11 and the second shunt pipeline 12. The needle valve 101 can accurately control the fluid flow entering the first shunt pipeline 11 and the second shunt pipeline 12, and the pneumatic diaphragm valve 102 can quickly open or close the flow path leading to the first shunt pipeline 11 and the second shunt pipeline 12 to deal with emergencies. The second regulating valve 111 can adjust the fluid flow entering the first bypass line 11 (i.e. directly entering the drainage system 40) to contrast with the fluid flow entering the second bypass line 12 (i.e. entering the heating system 20), thereby achieving precise management of the heated part fluid and the non-heated part fluid.

[0036] The heating system 20 includes two parallel heating pipelines 21, namely, a heating pipeline 21a and a heating pipeline 21b. The heating pipeline 21 is provided with a first regulating valve 25, a flow meter 24, a heater 22a, a first temperature sensor 23a, a heater 22b, a first temperature sensor 23b, a heater 22c, a first temperature sensor 23c, a second temperature sensor 28 and a flow sensor 27 arranged in sequence along the fluid flow direction. The first regulating valve 25 is located at the inlet of the heating pipeline 21 and is used to adjust the initial flow rate entering the heating pipeline 21; the fluid flow entering the heating pipeline 21 is controlled by adjusting the opening of the first regulating valve 25; the flow meter 24 is arranged after the first regulating valve 25 and is used to measure the flow rate of the fluid entering the heating pipeline 21 in real time. The fluid flow of the heating pipeline 21; multiple heaters 22a~c are arranged along the fluid flow direction to achieve segmented heating of the fluid; the first temperature sensors 23a~c are correspondingly arranged after the heaters 22a~c, and monitor the temperature changes of the fluid after passing through the heaters 22 in real time to ensure that each heating process remains within the set temperature range; the second temperature sensor 28 is located at the end of the heating pipeline 21 to monitor the temperature of the fluid after the final heating, and combined with the temperature data of the first temperature sensor 23a, to ensure that the output fluid meets the process temperature requirements; the flow sensor 27 is located at the end of the heating pipeline 21 to monitor the actual output flow of the heated fluid, identify whether there is a flow abnormality, and ensure the stability and precise control of the output flow.

[0037] Please refer to Figure 1 and Figure 2 A specific implementation of a fluid heating device and a semiconductor device is disclosed.

[0038] Ginseng Figure 1As shown, in this implementation, the semiconductor device includes the fluid heating device 100 disclosed in the above embodiments.

[0039] The series of detailed descriptions listed above are only specific descriptions of feasible implementation methods of the utility model. They are not intended to limit the protection scope of the utility model. Any equivalent implementation methods or changes that do not deviate from the technical spirit of the utility model should be included in the protection scope of the utility model.

[0040] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-restrictive from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the present invention. Any reference numeral in a claim should not be regarded as limiting the claim to which it relates.

[0041] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A fluid heating device, characterized in that: include: An input pipeline for inputting a fluid to be heated, a heating system disposed downstream of the input pipeline, and an output pipeline connected to the heating system to output the heated fluid; The heating system includes: at least two parallel heating pipelines, at least two heaters arranged in the heating pipelines and in sequence along the fluid flow direction, a first temperature sensor for monitoring the temperature change of the fluid after being heated by the heaters, a flow meter and a first regulating valve arranged in the heating pipelines and respectively used to measure and adjust the fluid flow entering the heating pipeline, and a mixing pipeline that collects all the heating fluids output by the heating pipelines and connects to the output pipelines.

2. The fluid heating device according to claim 1, characterized in that: The downstream branch of the input pipeline forms a second shunt pipeline connected to the heating system, and the second shunt pipeline is equipped with a constant pressure valve for maintaining a constant pressure of the fluid entering the heating system.

3. The fluid heating device according to claim 1, characterized in that: The fluid heating device further comprises a drainage system, wherein the downstream branch of the input pipeline forms a first branch pipeline connected to the drainage system, and the first branch pipeline is provided with a second regulating valve for regulating the flow of the fluid entering the drainage system.

4. The fluid heating device according to claim 1, characterized in that: The heating system further includes: a flow sensor disposed downstream of the heating pipeline to detect the flow rate of the heating fluid output by the heating pipeline, and a second temperature sensor disposed downstream of the heating pipeline to detect the temperature of the heating fluid output by the heating pipeline.

5. The fluid heating device according to claim 1, characterized in that: A pressure sensor is disposed downstream of the mixing line for detecting the pressure of the heating fluid output from the mixing line.

6. The fluid heating device according to claim 3, characterized in that: A first flow guiding pipeline and a second flow guiding pipeline are constructed downstream of the mixing pipeline, which are connected to the output pipeline and the drainage system respectively.

7. The fluid heating device according to claim 6, characterized in that: The second flow guiding line is constructed to form a third flow guiding line equipped with a pressure relief valve.

8. The fluid heating device according to claim 6, characterized in that: A pump body for pumping the heated fluid to the output pipeline is arranged between the first flow guiding pipeline and the output pipeline.

9. The fluid heating device according to claim 1, characterized in that: The fluid heating device further comprises: a nitrogen purge device, which is arranged in a shutdown state of the heating device to purge the residual fluid in the heating pipeline and the mixing pipeline with nitrogen and discharge it through the output pipeline; The nitrogen purge device includes: a nitrogen source, and a nitrogen control valve arranged between the nitrogen source and the heating pipeline.

10. A semiconductor device, characterized in that: include: A fluid heating device as claimed in any one of claims 1 to 9.

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