Novel diffusion furnace body

Abstract

The utility model relates to the technical field of diffusion furnaces, and discloses a novel diffusion furnace body, a water cooling assembly is arranged between a furnace cover and a heating furnace core, the water cooling assembly comprises a plurality of groups of water cooling coil pipes surrounding the outer side of the heating furnace core, water inlets of the plurality of groups of water cooling coil pipes penetrate through the furnace cover and are communicated with a water inlet header pipe, and the water inlet header pipe is communicated with a water outlet header pipe. And water outlets of the plurality of groups of water-cooling coil pipes penetrate through the furnace cover and are communicated with the backflow main pipe. In the using process of the diffusion furnace body, after the diffusion furnace body is used, the diffusion furnace body has a good split-flow cooling effect through split-flow cooling of multiple groups of water-cooling coil pipes in the water-cooling cooling assembly, a traditional cooling mode of a single pipeline can be converted into a cooling mode of parallel multiple groups of pipelines, the cooling efficiency is improved, and meanwhile the service life of the diffusion furnace body is prolonged. And the cooling uniformity can be ensured, and the situation that the cooling effects of the front end and the rear end of the furnace body are different when the cooling medium circulates and exchanges heat is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of diffusion furnaces, in particular to a novel diffusion furnace body. Background Art

[0002] The diffusion furnace is one of the important process equipment in the front process of the semiconductor production line. It is used for diffusion, oxidation, annealing, alloying and sintering processes in industries such as large-scale integrated circuits, discrete devices, power electronics, optoelectronic devices and optical fibers. There are two types of diffusion furnaces: vertical diffusion furnaces and horizontal diffusion furnaces. Among them, the horizontal diffusion furnace is a quartz boat parallel to the horizontal plane. One can have 4 or more process furnace tubes. The average furnace tube occupies a smaller area, and the process parameters between wafers are better than those of the vertical diffusion furnace.

[0003] The furnace tube is the furnace body of the diffusion furnace. After use, it is necessary to dissipate heat and cool it down in time to avoid the softening of the quartz tube due to long-term high temperature. However, the existing cooling method usually has only one set of cooling pipelines, which results in the cooling medium only cooling the front end of the furnace body due to heat conduction and heat exchange during cooling and circulation, and the rear end of the furnace body cannot be cooled down synchronously and quickly. The cooling performance is relatively single and the cooling uniformity is poor. To this end, those skilled in the art provide a new type of diffusion furnace body to solve the problems raised in the above background technology. Utility Model Content

[0004] The main purpose of the utility model is to provide a novel diffusion furnace body, which can effectively solve the problem of poor self-cooling performance of the existing diffusion furnace body in the background technology.

[0005] To achieve the above-mentioned purpose, the technical solution adopted by the utility model is: a new type of diffusion furnace body, including a furnace cover and a heating furnace core installed inside the furnace cover;

[0006] A water cooling component is arranged between the furnace cover and the heating furnace core, and a bottom support platform component is arranged inside the core body of the heating furnace core along the furnace tube direction;

[0007] The water cooling component includes multiple groups of water cooling coils surrounding the outside of the heating furnace core, the water inlets of the multiple groups of water cooling coils all pass through the furnace cover and are connected to the water inlet main pipe, and the drainage outlets of the multiple groups of water cooling coils all pass through the furnace cover and are connected to the reflux main pipe.

[0008] As a further solution of the utility model: the multiple groups of water cooling coils are all spiral coil structures, and the multiple groups of water cooling coils are arranged at equal intervals.

[0009] As a further solution of the utility model: the middle part of the pipe of the water inlet main pipe is symmetrically connected to a water inlet valve, and the middle part of the pipe of the return main pipe is symmetrically connected to a drain valve.

[0010] As a further solution of the utility model: the bottom support platform assembly includes two groups of bottom support guide rails facing each other horizontally, and both ends of the tracks of the two groups of bottom support guide rails are equipped with bottom support supports fixedly connected to the heating furnace core, the upper end of the track of the bottom support guide rails is slidably connected with a bottom support slide, and a compression chamber is opened in the middle of the plate surface of the bottom support slide, and a compression guide rod is inserted through the middle of the chamber of the compression chamber, and the top end of the arm of the compression guide rod is provided with an opening and closing pressure seat flush with the plate surface of the bottom support slide, and the bottom end of the arm of the compression guide rod is symmetrically provided with a stop buckle, and a locking tooth row staggered with the stop buckle is symmetrically provided between the tracks of the two groups of bottom support guide rails.

[0011] As a further solution of the utility model: the opening and closing pressure seat is a semicircular structure.

[0012] As a further solution of the utility model: a compression spring is sleeved on the outer side of the arm rod of the compression guide rod and is pressed against the bottom support slide.

[0013] As a further solution of the utility model: the distance between two adjacent locking tooth rows is matched with the outer diameter of the stop buckle.

[0014] Compared with the prior art, the utility model has the following beneficial effects:

[0015] 1. During the use of the diffusion furnace body of the utility model, when it is used up, by utilizing the shunt cooling of multiple groups of water cooling coils in the water cooling and cooling components, it has a good shunt cooling effect, and can convert the traditional single pipeline cooling form into a multi-group pipeline parallel cooling mode, which improves the cooling efficiency while ensuring the cooling uniformity, and avoids the situation where the cooling medium has different cooling effects on the front and rear ends of the furnace body when circulating and exchanging heat.

[0016] 2. During the use of the diffusion furnace body of the utility model, when the quartz boat carrying silicon wafers moves toward the inside of the diffusion furnace body, the sliding bottom support of the quartz boat by the bottom support platform assembly can play a role of pressure sharing and support, thereby reducing the unilateral tilting pressure of the quartz boat and increasing the load-bearing weight of the quartz boat, making it easier to place more silicon wafers. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a schematic diagram of the structure of a new type of diffusion furnace body of the utility model;

[0018] Figure 2 It is a partial cross-sectional view of a new type of diffusion furnace body of the utility model;

[0019] Figure 3 This is a structural schematic diagram of a water-cooling component in a new type of diffusion furnace body of the utility model;

[0020] Figure 4 This is a structural schematic diagram of a bottom support platform assembly in a new type of diffusion furnace body of the utility model;

[0021] Figure 5 It is a partial cross-sectional view of a bottom support platform assembly in a novel diffusion furnace body of the utility model.

[0022] In the figure: 1. furnace cover; 2. heating furnace core; 3. water cooling assembly; 31. water cooling coil; 32. water inlet main pipe; 33. water inlet valve; 34. return main pipe; 35. drain valve; 4. bottom support platform assembly; 41. bottom support guide rail; 42. bottom support support; 43. bottom support slide; 44. opening and closing pressure seat; 45. compression chamber; 46. compression spring; 47. compression guide rod; 48. stop buckle; 49. locking gear row. DETAILED DESCRIPTION

[0023] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further described below in conjunction with specific implementation methods.

[0024] In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", "front end", "rear end", "two ends", "one end", "the other end" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0025] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "provided with", "connected", etc. should be understood in a broad sense. For example, "connected" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0026] Please refer to Figure 1-5As shown, a novel diffusion furnace body comprises a furnace cover 1 and a heating furnace core 2 installed inside the furnace cover 1, a bottom support platform assembly 4 is arranged inside the core body of the heating furnace core 2 along the furnace tube direction thereof, the bottom support platform assembly 4 comprises two sets of bottom support guide rails 41 facing each other horizontally, and both ends of the tracks of the two sets of bottom support guide rails 41 are equipped with bottom support seats 42 fixedly connected to the heating furnace core 2, a bottom support slide 43 is slidably connected to the upper end of the track of the bottom support guide rail 41, and a compression chamber 45 is opened in the middle of the plate surface of the bottom support slide 43, a compression guide rod 47 is inserted through the middle of the chamber of the compression chamber 45, an opening and closing pressure seat 44 flush with the plate surface of the bottom support slide 43 is arranged at the top end of the arm of the compression guide rod 47, the opening and closing pressure seat 44 is a semicircular structure, and a compression spring 46 pressing against the bottom support slide 43 is sleeved on the outer side of the arm of the compression guide rod 47 When the quartz boat is in use, when the quartz boat loaded with silicon wafers is pushed to the inside of the heating furnace body, its bottom surface contacts the bottom support slide 43. At this time, due to the locking engagement between the locking tooth row 49 and the stop buckle 48, the thrust of the quartz boat cannot push the bottom support slide 43 to slide parallel with it. When the quartz boat continues to move forward, it presses the opening and closing pressure seat 44 into the compression chamber 45. When the opening and closing pressure seat 44 is pressed down, the compression guide rod 47 is pressed down, so that the stop buckle 48 moves down and is offset from the locking tooth row 49, and the locked state is released. At this time, under the thrust of the quartz boat, the bottom support slide 43 slides parallel to the quartz boat along the bottom support guide rail 41, which supports and divides the pressure on the quartz boat, reduces the unilateral tilting pressure of the quartz boat, and at the same time can increase the bearing weight of the quartz boat, making it easier to place more silicon wafers.

[0027] The bottom end of the arm of the compression guide rod 47 is symmetrically provided with a stop buckle 48, and a locking tooth row 49 staggered with the stop buckle 48 is symmetrically provided between the tracks of the two groups of bottom support guide rails 41. The spacing between two adjacent locking tooth rows 49 is adapted to the outer diameter of the stop buckle 48. By utilizing the locking engagement between the stop buckle 48 and the locking tooth row 49, it can be used as a delayed switch component, so that the meshing state between the two can be unlocked only after the quartz boat component is pressed onto the bottom support slide 43, pushing the bottom support slide 43 to slide in parallel, and after the subsequent quartz boat component is removed from the bottom support slide 43, the compression guide rod 47, under the elastic reset support of the compression spring 46, lifts the stop buckle 48 and re-locks it between the locking tooth rows 49 to facilitate cyclic locking and unlocking.

[0028] A water cooling component 3 is arranged between the furnace cover 1 and the heating furnace core 2. The water cooling component 3 includes a plurality of water cooling coils 31 surrounding the outside of the heating furnace core 2. The plurality of water cooling coils 31 are all spiral coil structures, and the plurality of water cooling coils 31 are arranged at equal intervals. By arranging the plurality of water cooling coils 31 on the outside of the heating furnace core 2, it replaces the traditional single-pipe cooling circulation form, and can convert the cooling medium into a cooling method in which multiple pipes are parallel, which has a good shunt cooling effect, improves the cooling efficiency, and can ensure the uniformity of cooling, avoiding the situation where the cooling medium has different cooling effects on the front and rear ends of the furnace body when circulating and exchanging heat.

[0029] The water inlets of the plurality of water cooling coils 31 are all connected through the furnace cover 1 and are connected to the water inlet main pipe 32, and the water outlets of the plurality of water cooling coils 31 are all connected through the furnace cover 1 and are connected to the return main pipe 34. The middle part of the pipe of the water inlet main pipe 32 is connected to the water inlet valve 33 in a symmetrical manner, and the middle part of the pipe of the return main pipe 34 is connected to the water drain valve 35 in a symmetrical manner. When the furnace body of the diffusion furnace needs to be cooled after use, the water inlet pipe and the drain pipe of the cooling equipment are connected to the water inlet valve 33 and the drain valve 35 in advance. 35 are connected, and then the cooling water is diverted and transported to the multiple groups of water-cooling coils 31 through the combination of the water inlet valve 33 and the water inlet main pipe 32. The diffusion furnace body is subjected to a segmented, integrated synchronous cooling process by utilizing the diverted cooling of the multiple groups of water-cooling coils 31. Then, the cooling water after heat exchange is refluxed to the cooling equipment under the combination of the reflux main pipe 34 and the drain valve 35. According to this cycle, the used diffusion furnace body is cooled quickly, efficiently and evenly.

[0030] The working principle of the utility model is as follows: during the use of the diffusion furnace body, when the quartz boat component loaded with silicon wafers is pushed to the inside of the heating furnace body, its bottom surface contacts the bottom support slide 43 of the bottom support platform assembly 4. At this time, by utilizing the locking engagement between the stop buckle 48 and the locking tooth row 49, it can be used as a delay switch component to press the quartz boat component onto the bottom support slide 43 and cover the opening and closing pressure seat 44. Only then can the meshing state between the two be unlocked, and the bottom support slide 43 can be pushed along the track direction of the bottom support guide rail 41 to contact the stone The quartz boats slide in parallel, which plays a supporting and pressure-dividing role on the quartz boats, reduces the unilateral tilting pressure of the quartz boats, and can increase the bearing weight of the quartz boats, making it easier to place more silicon wafers. After the silicon wafers on the quartz boat parts are processed, when they are removed from the furnace body of the diffusion furnace, the bottom support platform assembly 4 is driven to reset to its original position. At this time, the elastic reset of the compression guide rod 47 and the compression spring 46 is used to lift the stop buckle 48 and re-lock it between the locking tooth row 49, forming a cycle of locking and unlocking, which is convenient for the use of the cyclic bottom support of the bottom support platform assembly 4.

[0031] Furthermore, when the diffusion furnace body needs to be cooled after use, the cooling water is diverted and transported to multiple groups of water-cooling coils 31 through the combination of the water inlet valve 33 and the water inlet main pipe 32. The diffusion furnace body is subjected to a segmented, integrated synchronous cooling process by utilizing the diverted cooling of the multiple groups of water-cooling coils 31. Then, the cooling water after heat exchange is refluxed to the cooling equipment under the conduction combination of the reflux main pipe 34 and the drain valve 35. According to this cycle, the used diffusion furnace body is cooled quickly, efficiently and evenly. It replaces the traditional single-pipe cooling circulation form, and can convert the cooling medium into a cooling method in which multiple groups of pipelines are parallel. It has a good diversion and cooling effect, which improves the cooling efficiency while ensuring the uniformity of cooling.

[0032] The above shows and describes the basic principle and main features of the utility model and the advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments. The above embodiments and descriptions are only for explaining the principle of the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, which fall within the scope of the utility model to be protected. The scope of protection claimed by the utility model is defined by the attached claims and their equivalents.

Claims

1. A new type of diffusion furnace body, characterized in that: It comprises a furnace cover (1) and a heating furnace core (2) installed inside the furnace cover (1); A water cooling component (3) is provided between the furnace cover (1) and the heating furnace core (2), and a bottom support platform component (4) is provided inside the core body of the heating furnace core (2) along the furnace tube direction thereof; The water cooling component (3) comprises a plurality of groups of water cooling coils (31) surrounding the outside of the heating furnace core (2); the water inlets of the plurality of groups of water cooling coils (31) all pass through the furnace cover (1) and are conductively connected to the water inlet main pipe (32); and the water outlets of the plurality of groups of water cooling coils (31) all pass through the furnace cover (1) and are conductively connected to the return main pipe (34).

2. A new type of diffusion furnace body according to claim 1, characterized in that: The multiple groups of water cooling coils (31) are all spiral coil structures, and the multiple groups of water cooling coils (31) are arranged at equal intervals.

3. The novel diffusion furnace body according to claim 1 is characterized in that: The middle part of the pipe of the water inlet main pipe (32) is symmetrically connected to a water inlet valve (33), and the middle part of the pipe of the return main pipe (34) is symmetrically connected to a water discharge valve (35).

4. The novel diffusion furnace body according to claim 1 is characterized in that: The bottom support platform assembly (4) comprises two groups of bottom support guide rails (41) which are horizontally opposite to each other, and bottom support seats (42) which are fixedly connected to the heating furnace core (2) are installed at both ends of the tracks of the two groups of bottom support guide rails (41), the upper end of the track of the bottom support guide rails (41) is slidably connected to a bottom support slide (43), and a compression chamber (45) is opened in the middle of the plate surface of the bottom support slide (43), and a compression guide rod (47) is inserted through the middle of the chamber of the compression chamber (45), and an opening and closing pressure seat (44) which is flush with the plate surface of the bottom support slide (43) is arranged at the top end of the arm of the compression guide rod (47), and a stop buckle (48) is symmetrically arranged at the bottom end of the arm of the compression guide rod (47), and a locking tooth row (49) which is staggered with the stop buckle (48) is symmetrically arranged between the tracks of the two groups of the bottom support guide rails (41).

5. The novel diffusion furnace body according to claim 4 is characterized in that: The opening and closing pressure seat (44) is a semicircular structure.

6. The novel diffusion furnace body according to claim 4 is characterized in that: The outer side of the arm of the compression guide rod (47) is sleeved with a compression spring (46) which is pressed against the bottom support slide (43).

7. The novel diffusion furnace body according to claim 4 is characterized in that: The distance between two adjacent locking tooth rows (49) is matched with the outer diameter of the stop buckle (48).

Images