Micro device and comb driven by micro electro mechanical system

By designing complex metal structures in MEMS drivers, the problems of narrow range, low sensitivity and susceptibility to vibration are solved in traditional MEMS drivers, achieving higher sensitivity and robustness.

CN222684289UActive Publication Date: 2025-03-28TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
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Patent Information

Application Number
CN202420997101.X
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Priority Date
2023-05-16
Filing Date
2024-05-09
Publication Date
2025-03-28
Estimated Expiration
2034-05-09

AI Technical Summary

Technical Problem

Traditional MEMS drivers have problems such as narrow range, low sensitivity, limited dynamic range and susceptibility to vibration, resulting in limitations in their applications.

Method used

A micro device is designed, including a first base, a second base, a conformal dielectric layer and a metal structure, by forming a metal structure on the conformal dielectric layer, especially a first part surrounding the protrusion and a second part parallel to the top surface of the second base, connecting the third part of the two parts to form a complex metal structure to improve the performance of the driver.

Benefits of technology

Through improved structural design, the dynamic range, robustness and conductivity of the MEMS driver are enhanced, sensitivity is improved and the risk of failure due to vibration is reduced.

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Abstract

The utility model provides a micro device and a comb-shaped object driven by a micro electro mechanical system. The micro device includes a first base, a second base parallel to the first base, the second base including a first protrusion on a top surface thereof. The device also includes a conformal dielectric layer and a metal structure formed over a portion of the conformal dielectric layer. The metal structure includes a first portion surrounding the first protrusion, a second portion parallel to the top surface of the polysilicon pedestal, and a third portion connecting the first portion and the second portion. The utility model can be more sensitive and is not easy to break down.
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