Ozone water decomposition device

Abstract

The utility model discloses an ozone water decomposition device which comprises a shell, a top plate, a bottom plate, at least one ultraviolet lamp, a baffling assembly and at least one lamp protection piece, the shell is cylindrical; the top plate is circular, is mounted at the upper end of the shell and covers an upper end opening; at least one first through hole is formed in the substrate; the bottom plate is circular, is mounted at the lower end of the shell and covers the opening in the lower end; a lamp holder is arranged at one end of the ultraviolet lamp; the ultraviolet lamp is mounted in the shell; the top plate is fixedly connected; the baffle assembly comprises a plurality of baffle plates which are cambered plates, and at least one second through hole is formed in the baffle plates; the baffle plates are arranged at intervals in the axis direction of the shell, and angle dislocation exists between every two adjacent baffle plates; the second through holes correspond to each other in the length direction of at least one shell; the lamp protection piece is of a pipe structure with one closed end and is fixedly installed in the first through hole and the second through holes, and the open end of the lamp protection piece faces upwards. The ultraviolet lamp is mounted in the lamp protector. The ozone water decomposition device improves the reliability of ozone water decomposition.

Description

Technical Field

[0001] The utility model belongs to the technical field of wastewater treatment, and specifically relates to an ozone water decomposition device. Background Art

[0002] In the semiconductor industry, deionized ozone water is often used for wafer cleaning to remove organic and inorganic substances on the surface of the wafer, and is also often used for surface oxidation. Ozone is a strong oxidant, and if the wastewater generated by cleaning is directly discharged without treatment, it will cause great damage to the factory pipeline system and the environment.

[0003] At present, the commonly used methods for ozone water decomposition include heating method, liquid reaction method, activated carbon adsorption method, bubbling method, etc. The heating method has high energy efficiency, but the volume is large; the liquid reaction method requires the addition of other chemicals and waste liquid treatment; the activated carbon adsorption method requires frequent replacement of activated carbon; the bubbling method requires a large amount of compressed air, and the ozone gas blown out also needs a catalyst to decompose, which has low decomposition efficiency and is inconvenient to use. Summary of the invention

[0004] The utility model provides an ozone water decomposition device, which reduces the ozone water treatment cost used in the semiconductor industry and improves the reliability of ozone water decomposition.

[0005] In order to solve the above technical problems, the utility model adopts the following technical solutions:

[0006] An ozone water decomposition device comprises a shell, a top plate, a bottom plate, at least one ultraviolet lamp, a baffle assembly, and at least one lamp protection member;

[0007] The shell is cylindrical;

[0008] The top plate is a circular plate structure, fixedly mounted on the upper end of the shell, covering the upper end opening of the shell; at least one first through hole is formed, which is a circular hole;

[0009] The bottom plate is a circular plate structure, fixedly mounted on the lower end of the shell, covering the lower end opening of the shell;

[0010] The ultraviolet lamp is a long strip lamp, and a lamp holder is provided at one end; the ultraviolet lamp is installed in the housing through each of the first through holes; and is fixedly connected to the top plate;

[0011] The baffle assembly comprises a plurality of baffles; the baffles are arched plates, formed with at least one second through hole; the baffles are arranged at intervals along the axial direction of the shell, and adjacent baffles are angularly misaligned; the second through holes correspond to each other in the length direction of at least one shell;

[0012] The lamp protection piece is a tube structure with one end closed, which is installed and adapted to the first through hole and the second through hole, and is fixedly installed in the first through hole and each of the second through holes, with one open end facing upward; the ultraviolet lamp is installed in the lamp protection piece.

[0013] In some specific embodiments, it also includes:

[0014] The upper cover plate is a square plate structure, formed with a first groove adapted to be installed with the top plate; a third through hole corresponding to the first through hole is formed in the first groove; the upper cover plate is installed above the top plate; the first groove opens downward; the top plate is installed in the first groove; fourth through holes are respectively formed at the four corners of the upper cover plate; the lamp protection member is installed in the third through hole; the lamp holder is fixedly connected to the upper cover plate;

[0015] The lower cover plate is a square plate structure, formed with a second groove adapted for installation with the base plate; the lower cover plate is installed below the base plate; the second groove opens upward; the base plate is installed in the second groove; fifth through holes are respectively formed at the four corners of the lower cover plate, which respectively correspond to the fourth through holes; the upper cover plate and the lower cover plate are fixedly connected by bolts passing through the fourth through holes and the fifth through holes.

[0016] In some specific embodiments, a sealing assembly is further included, which includes a flange member and a first sealing ring;

[0017] The flange is a flange with a neck, including a fixing portion and a neck; the inner diameter of the neck is adapted to be installed with the lamp protection member, and the outer diameter is adapted to be installed with the third through hole;

[0018] The neck is installed in the third through hole; the lamp protection piece is installed in the neck; the first sealing ring is sleeved on the lamp protection piece and is located between the end of the neck and the top plate; the fixing part is fixedly connected to the upper cover plate.

[0019] In some specific embodiments, the sealing assembly further includes a second sealing ring;

[0020] The lamp holder is located above the flange and is fixedly connected to the fixing portion; the second sealing ring is installed and adapted to the end of the lamp protection member, installed at the end of the lamp protection member, and located between the lamp holder and the lamp protection member.

[0021] In some specific embodiments, the baffle is an arched plate that is larger than a semicircle; the straight sides of each of the arched plates tend to be arranged in parallel.

[0022] In some specific embodiments, each of the baffles is a plurality of first baffles and a plurality of second baffles; each of the first baffles and each of the second baffles are arranged alternately;

[0023] The first baffle is formed with two second through holes; the second baffle is formed with one second through hole and two partial second through holes located at the straight edge of the second baffle.

[0024] In some specific embodiments, the baffle assembly further comprises a plurality of support members, which are elongated columnar structures and have a plurality of evenly distributed clamping portions formed along the length direction thereof, and the third grooves surrounding the support members;

[0025] A plurality of sixth through holes which are snap-fitted with the snap-fitting parts are respectively formed on each of the baffles, and are arranged at the edge of the baffles and have openings; the sixth through holes of each of the baffles correspond respectively; the snap-fitting parts are installed in the sixth through holes through the openings of the sixth through holes; and the baffles are installed in the third grooves.

[0026] In some specific embodiments, a plurality of fourth grooves adapted to be installed at the ends of the support members are formed on the top plate, with openings facing downward and corresponding to the support members respectively; the upper ends of the support members are respectively installed in the fourth grooves.

[0027] In some specific embodiments, a plurality of fifth grooves adapted to be installed at the ends of the support members are formed on the bottom plate, with openings facing upward and corresponding to the support members respectively; the lower ends of the support members are respectively installed in the fifth grooves.

[0028] In some specific embodiments, the sixth through hole is square; the line thereof is located in the radial direction of the baffle;

[0029] The cross section of the support member is square.

[0030] Compared with the prior art, the advantages and positive effects of the utility model are as follows: the ozone water decomposition device of the utility model decomposes ozone wastewater by using ultraviolet light, thereby reducing the volume of the ozone water decomposition device, reducing the space occupied by ozone wastewater treatment equipment used in the semiconductor industry, and thus reducing the cost of wastewater treatment; in addition, the ozone wastewater flowing from bottom to top is blocked and reversed by the baffle assembly, the stroke of the water flow channel is extended, and the residence time of the ozone wastewater in the ozone water decomposition device is extended, so that the efficiency and reliability of its decomposition by ultraviolet light are improved; furthermore, at least one second through hole is formed on each baffle plate in the baffle assembly for installing and fixing a lamp protector, thereby improving the stability of the lamp protector and the ultraviolet lamp installation, reducing the probability of them being damaged by water flow impact, and reducing the maintenance cost of the ozone water decomposition device; and the ultraviolet lamp is installed in the middle of the baffle assembly, so that the ozone wastewater flows through the ultraviolet light irradiation area multiple times, thereby improving the reliability and decomposition rate of ozone decomposition, and improving the safety of wastewater discharge. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, a brief introduction will be given below to the drawings required for use in the embodiments. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0032] Figure 1 It is a structural schematic diagram of an embodiment of an ozone water decomposition device proposed by the utility model;

[0033] Figure 2 yes Figure 1 A schematic cross-sectional structure diagram of an embodiment of an ozone water decomposition device;

[0034] Figure 3 yes Figure 1 A schematic diagram of the local enlarged structure at B in FIG.

[0035] Figure 4 It is a schematic diagram of the flange structure;

[0036] Figure 5 is a schematic diagram of the top plate structure;

[0037] Figure 6 Schematic diagram of the upper cover structure;

[0038] Figure 7 is a schematic diagram of the baffle assembly structure;

[0039] Figure 8 is a schematic diagram of the structure of the second baffle;

[0040] Fig. 9 is a schematic diagram of the structure of the first baffle;

[0041] Fig.10 is a schematic diagram of the support structure;

[0042] Fig.11 This is a schematic diagram of the axonometric structure of some support parts.

[0043] In the figure,

[0044] 1. Shell; 2. Top plate; 3. Bottom plate; 4. UV lamp; 5. Upper cover plate; 6. Lower cover plate; 7. Baffle assembly; 8. Sealing assembly; 9. Lamp protection part; 11. Water inlet; 12. Water outlet; 13. Drain outlet; 21. First through hole; 22. Fourth groove; 31. Fifth groove; 41. Lamp holder; 51. First groove; 52. Third through hole; 53. Fourth through hole; 61. Second groove; 62. Fifth through hole; 71. Baffle; 711. First baffle; 712. Second baffle; 713. Second through hole; 714. Sixth through hole; 72. Support member; 721. Clamping part; 722. Third groove; 81. Flange member; 811. Fixing part; 812. Neck; 82. First sealing ring; 83. Second sealing ring. DETAILED DESCRIPTION

[0045] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, and should not be construed as limiting the present invention.

[0046] Reference Figure 1 , Figure 2 , Figure 5 , Figure 7 The utility model discloses an ozone water decomposition device, which is at least used to treat ozone water for cleaning wafers to meet the discharge standard.

[0047] The ozone water decomposition device comprises a shell 1 , a top plate 2 , a bottom plate 3 , at least one ultraviolet lamp 4 , a deflection assembly 7 , and at least one lamp protection member 9 .

[0048] The shell 1 is cylindrical and has openings at both ends; the top plate 2 is a circular plate structure, fixedly mounted on the upper end of the shell 1, covering the upper end opening of the shell 1; at least one first through hole 21 is formed on the top plate 2, which is a circular hole; the bottom plate 3 is a circular plate structure, fixedly mounted on the lower end of the shell 1, covering the lower end opening of the shell 1.

[0049] The ultraviolet lamp 4 is a long strip lamp for emitting ultraviolet light in all directions along its length direction; the ultraviolet lamp 4 is cylindrical, and a coaxial lamp holder 41 is provided at one end; the ultraviolet lamp 4 is installed in the housing 1 through the first through hole 21; the lamp holder 41 is fixedly connected to the top plate 2.

[0050] The baffle assembly 7 includes a plurality of baffles 71; the baffles 71 are arched plates, formed with at least one second through hole 713, which is a circular hole; each baffle 71 is fixedly arranged in the shell 1 along the radial direction of the shell 1 and is spaced apart along the axial direction of the shell 1; there is an angular misalignment between adjacent baffles 71; each second through hole 713 corresponds in the length direction of at least one shell 1; that is, each second through hole 713 on each baffle 71 forms a plurality of corresponding groups in the length direction of the shell 1; that is, each second through hole 713 on the baffles 71 with the same installation position corresponds respectively; each second through hole 713 on each baffle 71 with different installation positions may correspond or may not correspond, or the second through holes 713 of each baffle 71 with the same installation position may be an open hole, which corresponds to the open second through holes 713 of each baffle 71 with the same installation position in another group to form a complete circular hole projection.

[0051] The lamp protection member 9 is a tube structure with one end closed and the other end open, and is installed and adapted to the first through hole 21 and the second through hole 713, and is fixedly installed in the first through hole 21 and each second through hole 713, with one open end facing upward; the ultraviolet lamp 4 is installed in the lamp protection member 9. The lamp protection member 9 is used to protect the ultraviolet lamp 4 from the ozone wastewater and protect the ultraviolet lamp 4.

[0052] A water inlet 11 is formed at the lower end of the shell 1 for connecting a water supply pipe to transport ozone wastewater to the ozone water decomposition device; a water outlet 12 is formed at the upper end of the shell 1 for connecting a water outlet pipe to output the treated ozone wastewater; a drain outlet 13 is formed on the bottom plate 3 for cleaning the ozone water decomposition device.

[0053] The ozone water decomposition device of the utility model uses ultraviolet light to decompose ozone wastewater, thereby reducing the volume of the ozone water decomposition device, reducing the space occupied by ozone wastewater treatment equipment used in the semiconductor industry, and thus reducing the cost of wastewater treatment; in addition, the ozone wastewater flowing from bottom to top is blocked and reversed by the baffle assembly 7, the stroke of the water flow channel is extended, and the residence time of the ozone wastewater in the ozone water decomposition device is extended, so that the efficiency and reliability of its decomposition by ultraviolet light are improved; furthermore, at least one second through hole 713 is formed on each baffle plate 71 in the baffle assembly 7, which is used to install and fix the lamp protection part 9, improve the stability of the installation of the lamp protection part 9 and the ultraviolet lamp 4, reduce the probability of them being damaged by the impact of water flow, and reduce the maintenance cost of the ozone water decomposition device; and the ultraviolet lamp 4 is installed in the middle of the baffle assembly 7, so that the ozone wastewater flows through the ultraviolet light irradiation area multiple times, improves the reliability and decomposition rate of ozone decomposition, and improves the safety of wastewater discharge.

[0054] The specific structure and principle of the ozone water decomposition device of the present invention are described in detail below through specific embodiments.

[0055] In some specific embodiments, reference Figure 1 , Figure 2 , Figure 3 , Figure 5 , Figure 6 The ozone water decomposition device also includes an upper cover plate 5 and a lower cover plate 6.

[0056] The upper cover plate 5 is a square plate structure, formed with a first groove 51 adapted for installation with the top plate 2; a third through hole 52 corresponding to the first through hole 21 is formed in the first groove 51; the upper cover plate 5 is installed above the top plate 2; the first groove 51 opens downward; the top plate 2 is installed in the first groove 51 or partially installed in the first groove 51; fourth through holes 53 are respectively formed at the four corners of the upper cover plate 5; the lamp protection part 9 is installed in the third through hole 52; the lamp holder 41 is fixedly connected to the upper cover plate 5 to achieve its fixed connection with the top plate 2.

[0057] The lower cover plate 6 is a square plate structure, formed with a second groove 61 adapted for installation with the bottom plate 3; the lower cover plate 6 is installed below the bottom plate 3; the second groove 61 opens upward; the bottom plate 3 is installed in the second groove 61 or partially installed in the second groove 61; fifth through holes 62 are formed at the four corners of the lower cover plate 6, which correspond to the fourth through holes 53 respectively; the upper cover plate 5 and the lower cover plate 6 are fixedly connected by bolts passing through the fourth through holes 53 and the fifth through holes 62, thereby fixing the top plate 2, the bottom plate 3 and the shell 1.

[0058] In some specific embodiments, reference Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 The ozone water decomposition device also includes a sealing assembly 8, which includes a flange 81 and a first sealing ring 82.

[0059] The flange 81 is a flange with a neck, including a fixing portion 811 and a neck 812 ; the inner diameter of the neck 812 is mounted and adapted to the lamp protection member 9 , and the outer diameter is mounted and adapted to the third through hole 52 .

[0060] The neck 812 is installed in the third through hole 52 ; the lamp protection member 9 is installed in the neck 812 ; the first sealing ring 82 is sleeved on the lamp protection member 9 and is located between the end of the neck 812 and the top plate 2 ; the fixing portion 811 is fixedly connected to the upper cover plate 5 .

[0061] The ozone water decomposition device of this embodiment realizes the sealing of the lamp protection part 9 installed in the housing 1 through the sealing component 8, thereby protecting the ultraviolet lamp 4, and facilitating disassembly and assembly, facilitating the replacement of the ultraviolet lamp 4, and improving maintenance efficiency.

[0062] In some specific embodiments, reference Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 The sealing assembly 8 also includes a second sealing ring 83.

[0063] The lamp holder 41 is located above the flange 81 and is fixedly connected to the fixing portion 811 ; the second sealing ring 83 is installed and adapted to the end of the lamp protection member 9 , installed at the end of the lamp protection member 9 , and located between the lamp holder 41 and the lamp protection member 9 .

[0064] The ozone water decomposition device of this embodiment not only realizes the sealing of the lamp protection part 9 installed in the shell 1 through the sealing component 8, but also realizes the sealing of the ultraviolet lamp 4 installed in the lamp protection part 9, thereby protecting the ultraviolet lamp 4, facilitating disassembly and assembly, facilitating the replacement of the ultraviolet lamp 4, and improving maintenance efficiency.

[0065] In some specific embodiments, reference Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 The connection between the flange 81 and the upper cover 5 and the connection between the lamp holder 41 and the flange 81 are both achieved by bolts.

[0066] In some specific embodiments, reference Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6The lamp protection member 9 is made of quartz material, preferably ultraviolet optically adapted glass, which has the characteristics of high strength, corrosion resistance, and high light transmittance, ensuring the transmittance of ultraviolet light.

[0067] In some specific embodiments, the ultraviolet lamp 4 is a 253.7 nm ultraviolet lamp 4, which uses a low-pressure mercury arc discharge method to efficiently generate 253.7 nm high-power ultraviolet light to achieve efficient decomposition of ozone molecules in ozone wastewater.

[0068] In some specific embodiments, reference Figure 2 , Figure 7 The baffle 71 is an arcuate plate larger than a semicircle; the straight edges of each arcuate plate tend to be arranged in parallel.

[0069] In some specific embodiments, reference Figure 2 , Figure 7 , each baffle 71 includes a plurality of first baffles 711 and a plurality of second baffles 712; each first baffle 711 and each second baffle 712 are alternately arranged.

[0070] The first baffle plate 711 is formed with two evenly distributed second through holes 713 ; the second baffle plate 712 is formed with one second through hole 713 and two partial second through holes 713 located at the straight edge of the second baffle plate 712 .

[0071] The two second through holes 713 of each first baffle 711 of the ozone water decomposition device of this embodiment respectively correspond to the two partial second through holes 713 of the straight edge of each second baffle 712; the second through holes 713 of each second baffle 712 correspond to each other and are respectively used to install the lamp protection part 9 and then install the ultraviolet lamp 4.

[0072] In some specific embodiments, reference Figure 2 , Figure 5 , Figure 7 , Figure 8 , Fig. 9 , Fig.10 , Fig.11 The deflector assembly 7 also includes a plurality of support members 72, which are elongated cylindrical structures and have a plurality of evenly distributed clamping portions 721 formed along their length direction, including a third groove 722 that rings the support member 72; that is, the third groove 722 is annular, and its axis is parallel to the length direction of the support member 72.

[0073] A plurality of sixth through holes 714 are respectively formed on each baffle plate 71 and are adapted to be snapped into and fitted with the snap-fitting portion 721. The sixth through holes 714 are arranged on the arc-shaped edge of the baffle plate 71 and have an opening. The sixth through holes 714 of each baffle plate 71 correspond respectively. The snap-fitting portion 721 is installed in the sixth through hole 714 through the opening of the sixth through hole 714. The baffle plate 71 is installed in the third groove 722.

[0074] The ozone water decomposition device of this embodiment is installed by snap-fitting each baffle plate 71 with each support member 72 , which reduces the difficulty of installation and improves the efficiency of installation; and each support member 72 is arranged around the baffle plate 71 to improve the stability of the baffle assembly 7.

[0075] In some specific embodiments, reference Figure 2 , Figure 5 , Figure 7 , Fig.10 , Fig.11 A plurality of fourth grooves 22 are formed on the top plate 2 to fit with the ends of the support members 72 , with their openings facing downward and corresponding to the support members 72 , respectively; the upper ends of the support members 72 are respectively installed in the fourth grooves 22 .

[0076] The ozone water decomposition device of this embodiment fixes one end of each support member 72 by installing the end of each support member 72 in each fourth groove 22, thereby improving the stability of the installation of the baffle assembly 7.

[0077] In some specific embodiments, reference Figure 2 , Figure 5 , Figure 7 , Fig.10 , Fig.11 A plurality of fifth grooves 31 are formed on the bottom plate 3 to fit with the ends of the support members 72 , with their openings facing upward and corresponding to the support members 72 , respectively; the lower ends of the support members 72 are respectively installed in the fifth grooves 31 .

[0078] The ozone water decomposition device of this embodiment fixes the other end of each support member 72 by installing the end of each support member 72 in each fifth groove 31, thereby improving the stability of the installation of the baffle assembly 7.

[0079] In some specific embodiments, reference Figure 2 , Figure 5 , Figure 7 , Fig.10 , Fig.11 , the sixth through hole 714 is square; its midline is located in the radial direction of the baffle 71; and the cross-section of the support member 72 is square.

[0080] In the description of the present invention, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be understood as a limitation on the present invention.

[0081] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present utility model, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0082] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0083] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0084] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0085] Although the embodiments of the present invention have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be understood as limitations of the present invention. Ordinary technicians in the field can change, modify, replace and modify the above embodiments within the scope of the present invention.

Claims

1. An ozone water decomposition device, characterized in that: include: A shell, which is cylindrical; A top plate, which is a circular plate structure, is fixedly mounted on the upper end of the shell and covers the upper end opening of the shell; and is formed with at least one first through hole, which is a circular hole; A bottom plate, which is a circular plate structure, is fixedly mounted on the lower end of the shell and covers the lower end opening of the shell; At least one ultraviolet lamp, which is a long strip lamp with a lamp holder at one end; the ultraviolet lamp is installed in the housing through each of the first through holes; and is fixedly connected to the top plate; A baffle assembly, comprising a plurality of baffles; the baffles are arcuate plates, formed with at least one second through hole; the baffles are arranged at intervals along the axial direction of the shell, and adjacent baffles are angularly misaligned; the second through holes correspond to each other in the length direction of at least one shell; At least one lamp protection member is a tube structure with one end closed, which is adapted to be installed with the first through hole and the second through hole, and is fixedly installed in the first through hole and each of the second through holes, with one open end facing upward; the ultraviolet lamp is installed in the lamp protection member.

2. The ozone water decomposition device according to claim 1, characterized in that: Also includes: The upper cover plate is a square plate structure, formed with a first groove adapted to be installed with the top plate; a third through hole corresponding to the first through hole is formed in the first groove; the upper cover plate is installed above the top plate; the first groove opens downward; the top plate is installed in the first groove; fourth through holes are respectively formed at the four corners of the upper cover plate; the lamp protection member is installed in the third through hole; the lamp holder is fixedly connected to the upper cover plate; The lower cover plate is a square plate structure and is formed with a second groove adapted to be installed with the bottom plate; the lower cover plate is installed below the bottom plate; The second groove opens upward; The base plate is installed in the second groove; fifth through holes are formed at the four corners of the lower cover plate, which correspond to the fourth through holes respectively; the upper cover plate and the lower cover plate are fixedly connected by bolts passing through the fourth through holes and the fifth through holes.

3. The ozone water decomposition device according to claim 2, characterized in that: Also included is a sealing assembly, which includes a flange member and a first sealing ring; The flange is a flange with a neck, including a fixing portion and a neck; the inner diameter of the neck is adapted to be installed with the lamp protection member, and the outer diameter is adapted to be installed with the third through hole; The neck is installed in the third through hole; the lamp protection piece is installed in the neck; the first sealing ring is sleeved on the lamp protection piece and is located between the end of the neck and the top plate; the fixing part is fixedly connected to the upper cover plate.

4. The ozone water decomposition device according to claim 3, characterized in that: The sealing assembly also includes a second sealing ring; The lamp holder is located above the flange and is fixedly connected to the fixing portion; the second sealing ring is installed and adapted to the end of the lamp protection member, installed at the end of the lamp protection member, and located between the lamp holder and the lamp protection member.

5. The ozone water decomposition device according to claim 1, characterized in that: The baffle is an arcuate plate larger than a semicircle; the straight edges of each arcuate plate tend to be arranged in parallel.

6. The ozone water decomposition device according to claim 5, characterized in that: Each of the baffles is a plurality of first baffles and a plurality of second baffles; each of the first baffles and each of the second baffles are arranged alternately; The first baffle is formed with two second through holes; the second baffle is formed with one second through hole and two partial second through holes located at the straight edge of the second baffle.

7. The ozone water decomposition device according to any one of claims 1 to 6, characterized in that: The baffle assembly further comprises a plurality of support members, which are elongated columnar structures and have a plurality of evenly distributed clamping portions formed along the length direction thereof, and the third grooves surrounding the support members; A plurality of sixth through holes which are snap-fitted with the snap-fitting parts are respectively formed on each of the baffles, and are arranged at the edge of the baffles and have openings; the sixth through holes of each of the baffles correspond respectively; the snap-fitting parts are installed in the sixth through holes through the openings of the sixth through holes; and the baffles are installed in the third grooves.

8. The ozone water decomposition device according to claim 7, characterized in that: A plurality of fourth grooves adapted to be installed with the ends of the support members are formed on the top plate, with their openings facing downward and corresponding to the support members respectively; the upper ends of the support members are respectively installed in the fourth grooves.

9. The ozone water decomposition device according to claim 8, characterized in that: A plurality of fifth grooves adapted to be installed at the ends of the support members are formed on the bottom plate, with openings facing upward and corresponding to the support members respectively; the lower ends of the support members are respectively installed in the fifth grooves.

10. The ozone water decomposition device according to claim 7, characterized in that: The sixth through hole is square; the middle line of which is located in the radial direction of the baffle; The cross section of the support member is square.

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