Special-shaped CVD (chemical vapor deposition) coating heater

Abstract

The utility model relates to a special-shaped CVD (Chemical Vapor Deposition) coating heater and belongs to the field of CVD heaters. The heater comprises a base which is provided with a boss, and the area of the cross section of the boss is smaller than that of the cross section of the base; the supporting piece is fixed to the boss and provided with a first groove and second grooves, the first groove and the second grooves are communicated with each other, and the second grooves are arranged in a circumferential array with the first groove as the center; the heating cover is arranged on the base and is provided with a film coating cavity; and when the heating cover and the base are fixed, the first groove, the second groove and the coating cavity are communicated with one another. The workpiece to be coated is placed on the supporting piece, the contact area between the workpiece and the supporting piece is reduced through the first groove and the second groove, meanwhile, atoms or molecules generated by organic gas decomposition at high temperature can conveniently dissociate to the bottom of the workpiece from the first groove and the second groove in the coating process, synchronous coating can be conveniently conducted on the bottom of the workpiece, and the coating efficiency is improved. Operation is easy, using is convenient, and working efficiency is improved.

Description

Technical Field

[0001] The utility model relates to a CVD heater, in particular to a special-shaped CVD film-plating heater. Background Art

[0002] CVD (Chemical vapor deposition) is a chemical technology that mainly uses one or more gas phase compounds or single substances containing thin film elements to react chemically on the surface of a substrate under medium or high temperature conditions to generate a thin film. In the prior art, when a workpiece is subjected to CVD coating, the workpiece is usually placed directly on the inner cavity base of a CVD coating heater, and then the organic gas is decomposed at high temperature to produce atoms or molecules, which are adsorbed on the surface of the workpiece and form a thin film. Due to the large contact area between the workpiece and the base, it is difficult to coat the bottom surface of the workpiece. Therefore, a special-shaped CVD coating heater is urgently needed. Utility Model Content

[0003] Based on this, it is necessary to provide a special-shaped CVD coating heater to address the problem that in the prior art, when performing CVD coating processing on the workpiece, the workpiece is usually placed directly on the inner cavity base of the CVD coating heater. Due to the large contact area between the workpiece and the base, it is difficult to perform coating processing on the bottom surface of the workpiece.

[0004] The utility model provides a special-shaped CVD film coating heater, comprising:

[0005] A base having a boss, wherein the cross-sectional area of ​​the boss is smaller than the cross-sectional area of ​​the base;

[0006] A support member is fixed on the boss and has a first groove and a second groove, the first groove and the second groove are connected to each other, and the second groove is arranged in a circular array with the first groove as the center;

[0007] A heating cover is arranged on the base and has a coating cavity;

[0008] When the heating cover is fixed to the base, the first groove, the second groove and the coating cavity are interconnected.

[0009] In one embodiment, the support member is in a hemispherical shell shape, and has a first protrusion between adjacent second grooves.

[0010] In one embodiment, a third groove is formed on the surface of the first protrusion.

[0011] In one embodiment, the groove depth of the third groove is smaller than the groove depth of the second groove, and the groove depth of the second groove is smaller than the groove depth of the first groove.

[0012] In one embodiment, a second protrusion is provided between the second groove and the third groove, and an upper end surface of the second protrusion is a curved surface.

[0013] In one embodiment, a threaded hole is formed on the side wall of the first protrusion, and a threaded rod is threadedly connected in the threaded hole.

[0014] In one of the embodiments, a plurality of third protrusions are fixedly connected to one end of the threaded rod close to the support member. The third protrusions are arranged in a circular array with the axis of the threaded rod as the center, and the third protrusions are perpendicular to the threaded rod.

[0015] In one embodiment, a heating wire is fixedly connected to the inner wall of the heating cover, and the heating wire is spirally wound around the inner wall of the heating cover.

[0016] In one of the embodiments, a gas connecting pipe is fixedly connected to the surface of the heating hood.

[0017] The above-mentioned special-shaped CVD coating heater places the workpiece to be coated on the support, and the first groove and the second groove reduce the contact area between the workpiece and the support. At the same time, during the coating process, it is convenient for atoms or molecules produced by the decomposition of organic gas at high temperature to be freed from the first groove and the second groove to the bottom of the workpiece, so as to facilitate the synchronous coating of the bottom of the workpiece. The operation is simple, the use is convenient, and the work efficiency is improved.

[0018] When the workpiece is placed on the first protrusion, the traditional surface contact is changed to point contact, which reduces the contact area between the workpiece and the support, thereby facilitating the synchronous coating of the bottom of the workpiece. At the same time, since the first groove, the second groove, the third groove and the coating cavity are interconnected, it can ensure that the workpiece is heated evenly during the coating process, thereby improving the coating quality.

[0019] By rotating the threaded rod, the distance between the third protrusions at the ends of adjacent threaded rods can be adjusted, making it convenient to place a smaller workpiece on the third protrusion for coating the workpiece. The special-shaped CVD coating heater of this embodiment can be applied to workpieces of different sizes, has a wide range of uses, and is easy to operate. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions in the present invention or the prior art, a brief introduction will be given below to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0021] Figure 1A schematic diagram of an explosion structure of a special-shaped CVD film coating heater in one embodiment;

[0022] Figure 2 It is a schematic diagram of the three-dimensional structure of a special-shaped CVD coating heater in one embodiment;

[0023] Figure 3 It is a schematic diagram of the support structure in one embodiment.

[0024] Reference numerals:

[0025] 100, base; 110, boss; 200, support member; 210, first groove; 220, second groove; 230, first protrusion; 240, third groove; 250, second protrusion; 260, threaded hole; 270, threaded rod; 280, third protrusion; 300, heating cover; 310, coating chamber; 320, heating wire; 330, gas connecting pipe. DETAILED DESCRIPTION

[0026] In order to make the purpose, technical solution and advantages of the embodiment of the utility model clearer, the technical solution in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments. Based on the embodiment of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0027] It should be noted that when a component is referred to as being "fixed to" or "disposed on" another component, it may be directly on the other component or there may also be a central component. When a component is considered to be "connected to" another component, it may be directly connected to the other component or there may be a central component at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in the specification of the utility model are for illustrative purposes only and do not represent the only implementation method.

[0028] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present utility model, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0029] In the present utility model, unless otherwise clearly specified and limited, a first feature being “above” or “below” a second feature may mean that the first feature is directly in contact with the second feature, or the first feature and the second feature are indirectly in contact through an intermediate medium. Moreover, a first feature being “above”, “above” or “above” a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being “below”, “below” or “below” a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0030] Unless otherwise defined, all technical and scientific terms used in the specification of the present utility model have the same meaning as those commonly understood by technicians in the technical field of the present utility model. The terms used in the specification of the present utility model are only for the purpose of describing specific embodiments and are not intended to limit the present utility model. The term "and / or" used in the specification of the present utility model includes any and all combinations of one or more related listed items.

[0031] Combine the following Figure 1-Figure 3 The utility model is described as a special-shaped CVD film coating heater.

[0032] like Figure 1 and Figure 2 As shown, in one embodiment, a special-shaped CVD coating heater includes a base 100 , a support member 200 and a heating cover 300 .

[0033] The base 100 has a boss 110 , and the cross-sectional area of ​​the boss 110 is smaller than the cross-sectional area of ​​the base 100 .

[0034] The support member 200 is fixed on the boss 110 . The support member 200 has a first groove 210 and a second groove 220 . The first groove 210 and the second groove 220 are connected to each other. The second groove 220 is arranged in a circular array with the first groove 210 as the center.

[0035] The heating cover 300 is disposed on the base 100 , and has a coating cavity 310 thereon.

[0036] When the heating cover 300 is fixed to the base 100 , the first groove 210 , the second groove 220 , and the coating cavity 310 are interconnected.

[0037] It should be noted that a heating wire 320 is fixedly connected to the inner wall of the heating hood 300, and the heating wire 320 is spirally wound around the inner wall of the heating hood 300 to increase the temperature of the coating cavity 310. A gas connecting pipe 330 is fixedly connected to the surface of the heating hood 300 to facilitate the input of organic gas into the coating cavity 310.

[0038] When using the special-shaped CVD coating heater of this embodiment, the workpiece to be coated is placed on the support 200. The first groove 210 and the second groove 220 reduce the contact area between the workpiece and the support 200. At the same time, during the coating process, it is convenient for atoms or molecules produced by the decomposition of organic gas at high temperature to be freed from the first groove 210 and the second groove 220 to the bottom of the workpiece, so as to facilitate the synchronous coating of the bottom of the workpiece. The operation is simple, the use is convenient, and the work efficiency is improved.

[0039] like Figure 3 As shown, in one embodiment, the support member 200 is in a hemispherical shell shape, and has a first protrusion 230 between adjacent second grooves 220 .

[0040] A third groove 240 is formed on the surface of the first protrusion 230 . The groove depth of the third groove 240 is smaller than that of the second groove 220 . The groove depth of the second groove 220 is smaller than that of the first groove 210 .

[0041] In this embodiment, a second protrusion 250 is provided between the second groove 220 and the third groove 240 , and an upper end surface of the second protrusion 250 is a curved surface.

[0042] When the workpiece is placed on the first protrusion 230, the traditional surface contact is changed to point contact, which reduces the contact area between the workpiece and the support 200, thereby facilitating the synchronous coating of the bottom of the workpiece. At the same time, since the first groove 210, the second groove 220, the third groove 240, and the coating cavity 310 are interconnected, it can ensure that the workpiece is heated evenly during the coating process, thereby improving the coating quality.

[0043] like Figure 3 As shown, in one embodiment, a threaded hole 260 is formed on the side wall of the first protrusion 230 , and a threaded rod 270 is threadedly connected to the threaded hole 260 .

[0044] A plurality of third protrusions 280 are fixedly connected to one end of the threaded rod 270 close to the support member 200 . The third protrusions 280 are arranged in a circular array with the axis of the threaded rod 270 as the center. The third protrusions 280 and the threaded rod 270 are perpendicular to each other.

[0045] By rotating the threaded rod 270, the distance between the third protrusions 280 at the ends of adjacent threaded rods 270 can be adjusted, thereby facilitating the placement of a smaller workpiece on the third protrusion 280 for coating the workpiece. The special-shaped CVD coating heater of this embodiment can be applied to workpieces of different sizes, has a wide range of uses, and is easy to operate.

[0046] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0047] The above-mentioned embodiments only express several implementation methods of the utility model, and the description is relatively specific and detailed, but it cannot be understood as limiting the scope of the utility model. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the utility model, which all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model shall be based on the attached claims.

Claims

1. A special-shaped CVD film-coated heater, characterized in that: include: A base having a boss, wherein the cross-sectional area of ​​the boss is smaller than the cross-sectional area of ​​the base; A support member is fixed on the boss and has a first groove and a second groove, the first groove and the second groove are connected to each other, and the second groove is arranged in a circular array with the first groove as the center; A heating cover is arranged on the base and has a coating cavity; When the heating cover is fixed to the base, the first groove, the second groove and the coating cavity are interconnected.

2. The special-shaped CVD film-coated heater according to claim 1, characterized in that: The support member is in a hemispherical shell shape, and has a first protrusion between adjacent second grooves.

3. The special-shaped CVD film-coated heater according to claim 2, characterized in that: A third groove is formed on the surface of the first protrusion.

4. The special-shaped CVD film-coated heater according to claim 3, characterized in that: The groove depth of the third groove is smaller than the groove depth of the second groove, and the groove depth of the second groove is smaller than the groove depth of the first groove.

5. The special-shaped CVD film-coated heater according to claim 3, characterized in that: A second protrusion is provided between the second groove and the third groove, and an upper end surface of the second protrusion is a curved surface.

6. The special-shaped CVD film-coated heater according to claim 2, characterized in that: A threaded hole is formed on the side wall of the first protrusion, and a threaded rod is threadedly connected in the threaded hole.

7. The special-shaped CVD film-coated heater according to claim 6, characterized in that: A plurality of third protrusions are fixedly connected to one end of the threaded rod close to the support member. The third protrusions are arranged in a circular array with the axis of the threaded rod as the center, and the third protrusions are perpendicular to the threaded rod.

8. The special-shaped CVD film-coated heater according to any one of claims 1 to 7, characterized in that: The inner wall of the heating cover is fixedly connected with a heating wire, and the heating wire is spirally wound on the inner wall of the heating cover.

9. The special-shaped CVD film-coated heater according to claim 8, characterized in that: A gas connecting pipe is fixedly connected to the surface of the heating cover.

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