Uniform light source system for chip detection

Abstract

The utility model discloses a uniform light source system for chip detection, which comprises a uniform light generation device and a power detection device, and is characterized in that the uniform light generation device comprises a light source for providing a constant light source; two ends of the optical fiber are respectively connected with the light source and the integrating sphere, and the optical fiber is used for transmitting the constant light source to the integrating sphere; the interior of the integrating sphere is of a spherical hollow structure, and the integrating sphere is used for performing internal homogenization on the constant light source to obtain uniform light; the light cylinder is connected with the integrating sphere through an adapter and is used for collimating the uniform light to obtain an area light source; the power detection device comprises a power meter which is connected with the integrating sphere and is used for detecting the power of uniform light in the integrating sphere in real time; and the adapter plate is fixedly connected with the power meter and is used for transmitting the power of the uniform light to an upper computer in real time.

Description

Technical Field

[0001] The utility model relates to the field of photoelectric chip detection, in particular to a uniform light source system for chip detection. Background Art

[0002] The imaging photosensitivity test of optoelectronic chips requires uniform light in a specific working band as an excitation source to test the photosensitivity of the chip, such as quantum efficiency, pixel photosensitivity uniformity, etc. The accuracy and reliability of the test place high demands on the uniformity of the light source; in addition, real-time monitoring and feedback of the light source power is of great help in timely detection of production line abnormalities. Utility Model Content

[0003] To this end, the utility model provides a uniform light source system for chip detection, which has a light source for real-time and accurate power monitoring.

[0004] In order to achieve the above purpose, the utility model mainly adopts the following technical solutions:

[0005] A uniform light source system for chip detection, the system comprising: a uniform light generating device and a power detection device, wherein the uniform light generating device comprises: a light source for providing a constant light source; an optical fiber, the two ends of which are respectively connected to the light source and an integrating sphere, for transmitting the constant light source to the integrating sphere; an integrating sphere, the interior of which is a spherical hollow structure, for internally homogenizing the constant light source to obtain uniform light; a light cylinder, connected to the integrating sphere via an adapter, for collimating the uniform light to obtain a surface light source; the power detection device comprises: a power meter, connected to the integrating sphere, for real-time detection of the power of the uniform light inside the integrating sphere; and an adapter plate, the adapter plate is fixedly connected to the power meter, for real-time transmission of the power of the uniform light to a host computer.

[0006] Preferably, the integrating sphere also includes: a first through hole connected to the optical fiber and used to receive the constant light source transmitted by the optical fiber; a second through hole connected to the light tube and used to output the uniform light to the light tube; and a third through hole, the upper cover of which is provided with the adapter plate for plugging in the power meter.

[0007] Preferably, the light tube comprises: a light tube inlet and a light tube body, and a filter is arranged at the light tube inlet.

[0008] Preferably, the size of the surface light source is controlled by adjusting the depth of the light tube.

[0009] Preferably, the system further comprises: an adjustable constant current source connected to the light source and configured to provide a constant current to the light source.

[0010] Preferably, the light source is an LED light source with a specific wavelength.

[0011] Preferably, the optical fiber is an SMA optical fiber.

[0012] The system provided by the utility model can generate a uniform light source on a designed target surface, adjust the wavelength and power as needed, and can monitor the irradiation power of the target surface in real time and feed it back to the host computer, thereby playing a role of online monitoring. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 This is a schematic diagram of the structure of a uniform light source system provided in an embodiment of the present application. DETAILED DESCRIPTION

[0014] The following will describe the specific implementation of the utility model in more detail with reference to the schematic diagram. The advantages and features of the utility model will become clearer according to the following description. It should be noted that the drawings are all in a very simplified form and are not in exact proportions, and are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the utility model.

[0015] The utility model provides a uniform light source system for chip detection. Figure 1 Schematic diagram of the structure of the uniform light source system provided in the embodiment of the present application. Figure 1 As shown, the uniform light source system 100 provided in the embodiment of the present application includes: a uniform light generating device and a power detection device, wherein the uniform light generating device includes: a light source 1 for providing a constant light source; preferably, the light source is an LED light source of a specific wavelength.

[0016] The optical fiber 2 has two ends respectively connected to the light source 1 and the integrating sphere 3, and is used to transmit the constant light source to the integrating sphere 3; preferably, the optical fiber is an SMA optical fiber.

[0017] The integrating sphere 3 has a spherical hollow structure inside and is used to homogenize the constant light source internally to obtain uniform light.

[0018] The light tube 4 is connected to the integrating sphere 3 through an adapter 12, and is used to collimate the uniform light to obtain a surface light source. Preferably, the light tube 4 includes: a light tube entrance 9 and a light tube body 8, and a filter is arranged at the light tube entrance 9, and the filter can be a filter of a target band designed in advance, so as to further eliminate stray light and reduce the half-width of the spectrum. In the embodiment of the present application, a surface light source with high uniformity can be provided by sequentially arranging the light source, the integrating sphere, and the light tube. The size of the surface light source can be controlled by adjusting the depth of the light tube 4, for example, adjusting the depth of the light tube body 8 and / or the depth of the light tube entrance 9 to meet the needs of optoelectronic chips of different sizes.

[0019] The power detection device includes: a power meter 5, connected to the integrating sphere 3, for real-time detection of the power of the uniform light inside the integrating sphere; and an adapter plate 6, fixedly connected to the power meter 5, for real-time transmission of the power of the uniform light to the host computer 7. The real-time power reading of the power meter is fed back to the host computer through the communication protocol.

[0020] Preferably, the integrating sphere 3 further comprises: a first through hole A, connected to the optical fiber 2, for receiving the constant light source transmitted by the optical fiber 2; a second through hole B, connected to the light tube 4 through an adapter 12, for outputting uniform light to the light tube 4; and a third through hole C, the upper cover of which is provided with an adapter plate 6, for plugging the power meter 5. Here, the first through hole A is also provided with an SMA optical fiber interface, and the opening size of the adapter 12 is consistent with the size of the second through hole B on the integrating sphere, so that all the uniform light obtained by homogenization inside the integrating sphere can be output to the light tube 4, and the power meter 5 is provided for real-time detection, and the power can be fed back in real time, which plays a role of online monitoring, and can accurately adjust the power of the surface light source in real time.

[0021] Here, the LED light source is coupled into the first through hole A of the integrating sphere through the SMA optical fiber, and after uniform diffuse scattering inside the integrating sphere, it emits approximately uniform light to the light tube 4 through the second through hole B (i.e., the light exit hole), and then further collimated and homogenized by the light tube 4 to produce a highly uniform surface light source on the predetermined design surface. In this process, the power meter 5 in the real-time power monitoring device is fixedly docked on the third through hole C of the integrating sphere 3 through the adapter plate 6. The light from the LED light source coupled into the integrating sphere 3 through the optical fiber is homogenized inside the sphere, measured by the power meter 5 at a constant ratio, and transmitted to the host computer 7 in real time through the adapter plate 6.

[0022] In the embodiment of the present application, the system 100 further includes an adjustable constant current source 11 connected to the light source 1 for providing a constant current to the light source 1 .

[0023] In the embodiment of the present application, since the optical path of the light source system is fixed, the power of the LED light source, the power of the power meter, and the power irradiated onto the predetermined uniform light surface, all maintain a constant ratio after the optical path is fixed, and can therefore be adjusted and monitored according to the ratio. In addition, since the light emitting part of the light source is connected to the main body of the optical path through an optical fiber, for high-temperature chip testing environments, the light source can be placed in a nearby normal temperature environment, avoiding the influence of temperature on the light source, and being able to maintain constant power during high and low temperature chip testing, meeting the need for the light source to maintain constant power in a high-temperature environment. The system is simple in design, reliable, and stable, and is suitable for mass production of optoelectronic chips.

[0024] The above description is only the preferred embodiment of the present invention and is not intended to limit the present invention. Any technician familiar with the profession can make various changes, modifications, substitutions and variations to these embodiments without departing from the principle and purpose of the present invention. The scope of the present invention is defined by the claims and their equivalents.

Claims

1. A uniform light source system for chip detection, characterized in that: The system includes: a uniform light generating device and a power detection device, wherein the uniform light generating device includes: A light source, used to provide a constant light source; An optical fiber, with two ends respectively connected to the light source and the integrating sphere, for transmitting the constant light source to the integrating sphere; The integrating sphere has a spherical hollow structure inside, which is used to homogenize the constant light source internally to obtain uniform light; A light cylinder, connected to the integrating sphere via an adapter, for collimating the uniform light to obtain a surface light source; The power detection device comprises: a power meter connected to the integrating sphere and used for detecting the power of the uniform light inside the integrating sphere in real time; and An adapter plate, the adapter plate is fixedly connected to the power meter and is used to transmit the power of the uniform light to a host computer in real time.

2. The system according to claim 1, characterized in that The integrating sphere further comprises: A first through hole, connected to the optical fiber, and used to receive a constant light source transmitted by the optical fiber; a second through hole connected to the light tube and used to output the uniform light to the light tube; The third through hole has an upper cover provided with the adapter plate for plugging the power meter.

3. The system according to claim 2, characterized in that The light tube comprises: a light tube entrance and a light tube body, and a filter is arranged at the light tube entrance.

4. The system according to claim 3, characterized in that The size of the surface light source is controlled by adjusting the depth of the light tube.

5. The system according to any one of claims 1 to 4, characterized in that: The system further comprises: An adjustable constant current source is connected to the light source and is used to provide a constant current to the light source.

6. The system according to any one of claims 1 to 4, characterized in that: The light source is an LED light source with a specific wavelength.

7. The system according to any one of claims 1 to 4, characterized in that: The optical fiber is a SMA optical fiber.

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