Raw material sampler for photoresist production

Abstract

The utility model discloses a raw material sampler for photoresist production, which comprises a sleeve and a sampling tube, a piston is arranged in the sleeve, the surface of the piston is connected with a piston rod, the top and the bottom of the sampling tube are respectively provided with a first thread, the sampling tube is in threaded connection with the internal thread at the bottom of the sleeve through the first thread at the top, and the sampling tube is connected with the piston rod. The sampling pipe is in threaded connection with a protection assembly through a first thread at the bottom, when the protection pipe is detached from the sampling pipe, a second thread on the surface of the top of the protection pipe is separated from the first thread in the sampling pipe when the protection pipe is screwed, after detachment, the sealing plate is separated from extrusion on the guide pipe, and the spring rebounds to drive the guide pipe to move upwards; and the connecting block moves along with the sampling head and drives the sampling head to move into the protective pipe, so that the sampling head can be protected by the protective pipe and is prevented from being collided, rubbed or subjected to other physical damage, and the problem of dust and other impurity pollution caused by exposure is also avoided.

Description

Technical Field

[0001] The utility model belongs to the technical field of photoresist sampling, and in particular relates to a raw material sampler for photoresist production. Background Art

[0002] Photoresist, also known as photoresist, refers to a thin film material that changes its solubility when exposed to ultraviolet light, electron beam, ion beam, X-ray, etc. It is a light-sensitive mixed liquid composed of three main components: photosensitive resin, sensitizer and solvent. During the filling process, photoresist needs to be inspected for finished products, then packaged, and then put into storage after the packaging inspection is qualified. Therefore, during the production process, it is often necessary to use a photoresist sampling device to sample the photoresist for inspection.

[0003] The existing photoresist sampling device includes a sampling tube and a piston rod. The sampling head at one end of the sampling tube is inserted into the photoresist to be sampled, and the piston rod is pulled to drive the piston in the sampling tube to move, so that a negative pressure state is formed in the sampling tube under the action of the piston, and the photoresist is drawn into the sampling tube, thereby completing the sampling of the photoresist. However, when the sampling tube is placed after sampling the photoresist through the sampling tube, since the sampling head at one end of the sampling tube is one of the key components of the sampler, when the sampler is placed, the sampling head will be exposed to the environment and may be contaminated by dust or other impurities, causing these contaminants to enter the sampling head, thereby affecting the purity of subsequent sampling. In addition, the sampling head is also easily damaged by collision, friction or other physical damage when exposed to the outside, which easily leads to the risk of damage to the sampler, thereby reducing the service life of the sampler. Utility Model Content

[0004] The utility model aims to provide a raw material sampler for photoresist production to solve the problems raised in the above-mentioned background technology.

[0005] To achieve the above object, the utility model provides the following technical solution: a raw material sampler for photoresist production, comprising:

[0006] A sleeve, wherein a piston is arranged in the sleeve, and a piston rod is connected to the surface of the piston;

[0007] A sampling tube, wherein the top and bottom of the sampling tube are both provided with a first thread, the sampling tube is threadedly connected to the internal thread at the bottom of the casing via the first thread at the top, and the sampling tube is threadedly connected to a protection component for protecting the sampling head via the first thread at the bottom, and the catheter of the protection component can push the sampling head out of the protection tube when the sampling head is in use, and can drive the sampling head to move into the protection tube to protect the sampling head through the spring rebound when the sampling head is not in use.

[0008] Preferably, the protection assembly includes a connecting block and a connecting tube, the connecting block is slidably connected in the protection tube, the top surface of the protection tube is provided with a second thread and the second thread is threadedly connected to the first thread at the bottom of the sampling tube, and the connecting tube is connected to the connecting block.

[0009] Preferably, the sampling head is connected to the connection block and the bottom of the sampling head movably penetrates the protective tube, and a sampling channel is formed after the connection tube, the connection block and the sampling head are connected.

[0010] Preferably, one end of the conduit is slidably connected in the protective tube, the spring is sleeved on the surface of the connecting tube, and the two ends of the spring are respectively connected to the connecting block and the conduit.

[0011] Preferably, a first cannula is provided on the surface of the catheter, a sealing plate is provided in the sampling tube, and a liquid storage tank is provided in the sampling tube and located on the top of the sealing plate.

[0012] Preferably, a second insert tube is provided in the middle of the sealing plate and the second insert tube is connected to the liquid storage tank, so that the photoresist sucked into the second insert tube can enter the liquid storage tank.

[0013] Compared with the prior art, the beneficial effects of the utility model are:

[0014] (1) When sampling, the piston is pushed to the lowest part of the sleeve by the piston rod, and the sampling head is inserted into the photoresist. The piston rod is pulled to drive the piston to move, so that a negative pressure state is formed in the sleeve, so that the photoresist is sucked into the sampling channel through the sampling head, and enters the second cannula from the first cannula inserted into the sampling channel, and enters the liquid storage tank from the second cannula under continuous pumping, thereby completing the sampling of the photoresist. At the same time, the device can be provided with multiple sampling tubes for use, and when the sampling tube sampling is completed, the first thread at the top of the sampling tube can be disengaged from the threaded connection with the internal thread in the sleeve by twisting, so that after completing one sampling, the sampling tube after sampling can be removed from the sleeve, and a new sampling tube can be installed for re-sampling, thereby improving the sampling inspection efficiency.

[0015] (2) When installing a new protective tube and sampling tube, the catheter on the top of the protective tube can be inserted into the sampling tube, and the second thread on the top surface of the protective tube can be screwed together with the first thread in the bottom of the sampling tube. When the second insert tube on the surface of the sealing plate in the sampling tube is inserted into the second insert tube, the protective tube can be screwed to make the first thread screwed together with the second thread. When the protective tube is continuously screwed, one end of the protective tube continues to move into the sampling tube, and the sealing plate squeezes the catheter to move toward the end close to the connecting block and pushes the connecting tube to move. When the connecting tube moves, the spring is compressed, so that the moving connecting tube pushes the connecting block to push the sampling head out of the protective tube, so that one end of the sampling head protrudes from the protective tube, and the first thread on the top surface of the sampling tube is screwed together with the internal thread inside the sleeve, thereby completing the replacement of a new set of sampling tubes and sampling heads, avoiding contamination of samples sampled subsequently.

[0016] (3) When the protective tube is removed from the sampling tube, the second thread on the top surface of the protective tube is disengaged from the threaded connection with the first thread in the sampling tube by screwing the protective tube, and the sealing plate is disengaged from the pressure on the catheter after removal, and the spring rebounds to drive the catheter to move upward, so that the connecting block moves with it and drives the sampling head to move into the protective tube, so that the sampling head can be protected by the protective tube to prevent the sampling head from being hit, rubbed or other physical damage, and also avoid the problem of being exposed to dust and other impurities causing contamination. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a structural schematic diagram of the utility model;

[0018] Figure 2 It is a cross-sectional view of the utility model;

[0019] Figure 3 It is a cross-sectional view of the sampling tube and the protection tube of the utility model after being detached from the threaded connection;

[0020] Figure 4 This is a cross-sectional view of the sampling head of the utility model moving out of the protective tube.

[0021] In the figure: 1. sleeve; 2. piston; 3. piston rod; 4. sampling tube; 5. first thread; 6. sampling head; 7. protection assembly; 8. catheter; 9. protection tube; 10. spring; 11. connecting block; 12. connecting tube; 13. second thread; 14. sampling channel; 16. first cannula; 17. sealing plate; 18. liquid storage tank; 19. second cannula. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0023] The utility model provides Figure 1-4 A raw material sampler for photoresist production is shown, comprising:

[0024] A sleeve 1, wherein a piston 2 is arranged inside the sleeve 1, and a piston rod 3 is connected to the surface of the piston 2;

[0025] A sampling tube 4, wherein the sampling tube 4 is provided with a first thread 5 at the top and the bottom, wherein the sampling tube 4 is threadedly connected to the internal thread at the bottom of the sleeve 1 through the first thread 5 at the top, wherein the sampling tube 4 is threadedly connected to a protection component 7 for protecting a sampling head 6 through the first thread 5 at the bottom, wherein a guide tube 8 of the protection component 7 can push the sampling head 6 out of the protection tube 9 when the sampling head 6 is in use, and can rebound through the spring 10 to drive the sampling head 6 to move into the protection tube 9 to protect the sampling head 6 when the sampling head 6 is not in use, wherein the sleeve 1 and the sampling tube 4 are both transparent tubes, which is convenient for observing the amount of photoresist sucked into the liquid storage tank 18 to avoid excessive suction causing the photoresist to overflow from the liquid storage tank 18.

[0026] The protection assembly 7 includes a connecting block 11 and a connecting pipe 12. The connecting block 11 is slidably connected in the protection tube 9. The top surface of the protection tube 9 is provided with a second thread 13, and the second thread 13 is threadedly connected to the first thread 5 at the bottom of the sampling tube 4. The connecting pipe 12 is connected to the connecting block 11 and is threadedly connected between the protection tube 9, the sampling tube 4, and the sleeve 1, which is convenient for subsequent disassembly.

[0027] The sampling head 6 is connected to the connecting block 11 and the bottom of the sampling head 6 movably penetrates the protective tube 9. After the connecting tube 12, the connecting block 11 and the sampling head 6 are connected, a sampling channel 14 is formed. The photoresist is sucked into the sampling channel 14 through the sampling head 6, and enters the second cannula 19 from the first cannula 16 inserted into the sampling channel 14. Under continuous pumping, it enters the liquid storage tank 18 from the second cannula 19 and is stored in the liquid storage tank 18.

[0028] One end of the catheter 8 is slidably connected to the protective tube 9, and the spring 10 is sleeved on the surface of the connecting tube 12. The two ends of the spring 10 are respectively connected to the connecting block 11 and the catheter 8. When the catheter 8 moves, the spring 10 can be compressed, and the rebound of the spring 10 can drive the catheter 8 to reset.

[0029] A first inserting tube 16 is disposed on the surface of the catheter 8 , a sealing plate 17 is disposed in the sampling tube 4 , and a liquid storage tank 18 is disposed in the sampling tube 4 and on the top of the sealing plate 17 .

[0030] A second cannula 19 is provided in the middle of the sealing plate 17 and is connected to the liquid storage tank 18 . The diameter of the second cannula 19 is smaller than that of the first cannula 16 , and the diameter of the first cannula 16 is smaller than that of the sampling channel 14 , so that the second cannula 19 can be inserted into the first cannula 16 , and the first cannula 16 can be inserted into the sampling channel 14 .

[0031] The raw material sampler for photoresist production, when sampling, pushes the piston 2 to the lowest part of the sleeve 1 through the piston rod 3, and inserts the sampling head 6 into the photoresist, and pulls the piston rod 3 so that the piston rod 3 drives the piston 2 to move, so that a negative pressure state is formed in the sleeve 1, so that the photoresist is sucked into the sampling channel 14 through the sampling head 6, and enters the second cannula 19 from the first cannula 16 inserted into the sampling channel 14, and enters the liquid storage tank 18 from the second cannula 19 under continuous pumping, so as to complete the sampling of the photoresist. At the same time, the device can be provided with multiple sampling tubes 4 for use, and when the sampling tube 4 is sampled, the first thread 5 at the top of the sampling tube 4 can be screwed off from the threaded connection with the internal thread in the sleeve 1, so that after completing one sampling, the sampling tube 4 after sampling can be removed from the sleeve 1, and a new sampling tube 4 can be installed to perform another sampling, thereby improving the sampling inspection efficiency.

[0032] In order to facilitate the cleaning of the residual photoresist inside the sampler and avoid contamination of the samples sampled subsequently, the sampling tube 4 and the protective tube 9 are separately arranged, which can facilitate the cleaning of the photoresist inside. Therefore, after the sampling tube 4 and the protective tube 9 are separated and cleaned, it is necessary to insert the guide tube 8 at the top of the protective tube 9 into the sampling tube 4, and screw the second thread 13 on the top surface of the protective tube 9 with the first thread 5 in the bottom of the sampling tube 4. When the second insert tube 19 on the surface of the sealing plate 17 in the sampling tube 4 is inserted into the second insert tube 19, the protective tube 9 can be screwed to make the first thread 5 screwed with the second thread 13. When the protective tube 9 is continuously screwed, one end of the protective tube 9 continuously moves into the sampling tube 4, and the sealing plate 17 squeezes the conduit 8 to move toward the end close to the connecting block 11 and pushes the connecting tube 12 to move. When the connecting tube 12 moves, the spring 10 is compressed, so that the moving connecting tube 12 pushes the connecting block 11 to push the sampling head 6 out of the protective tube 9, so that one end of the sampling head 6 protrudes from the protective tube 9, and the first thread 5 on the top surface of the sampling tube 4 is screwed with the internal thread inside the sleeve 1, thereby completing the replacement of a new set of sampling tubes 4 and sampling heads 6, avoiding contamination of subsequent samples.

[0033] When the protective tube 9 is removed from the sampling tube 4, the second thread 13 on the top surface of the protective tube 9 is disengaged from the threaded connection with the first thread 5 in the sampling tube 4 by screwing the protective tube 9, and the sealing plate 17 is disengaged from the squeezing of the conduit 8, and the spring 10 rebounds and drives the conduit 8 to move upward, so that the connecting block 11 moves with it, and drives the sampling head 6 to move into the protective tube 9, so that the sampling head 6 can be protected by the protective tube 9 to prevent the sampling head 6 from being hit, rubbed or other physical damage, and avoid the problem of being exposed to dust and other impurities.

[0034] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A raw material sampler for photoresist production, characterized in that: include: A sleeve (1), wherein a piston (2) is arranged inside the sleeve (1), and a piston rod (3) is connected to the surface of the piston (2); A sampling tube (4), wherein the top and bottom of the sampling tube (4) are both provided with a first thread (5), the sampling tube (4) is threadedly connected to the internal thread at the bottom of the casing (1) via the first thread (5) at the top, and the sampling tube (4) is threadedly connected to a protection component (7) for protecting a sampling head (6) via the first thread (5) at the bottom, and a guide tube (8) of the protection component (7) can push the sampling head (6) to move out of the protection tube (9) when the sampling head (6) is in use, and can drive the sampling head (6) to move into the protection tube (9) to protect the sampling head (6) when the sampling head (6) is not in use through the rebound of a spring (10).

2. A raw material sampler for photoresist production according to claim 1, characterized in that: The protection assembly (7) comprises a connection block (11) and a connection pipe (12); the connection block (11) is slidably connected in the protection pipe (9); a second thread (13) is provided on the top surface of the protection pipe (9) and the second thread (13) is threadedly connected to a first thread (5) at the bottom of the sampling pipe (4); and the connection pipe (12) is connected to the connection block (11).

3. A raw material sampler for photoresist production according to claim 2, characterized in that: The sampling head (6) is connected to the connection block (11) and the bottom of the sampling head (6) movably penetrates the protection tube (9). After the connection tube (12), the connection block (11) and the sampling head (6) are connected, a sampling channel (14) is formed.

4. A raw material sampler for photoresist production according to claim 2, characterized in that: One end of the conduit (8) is slidably connected to the inside of the protective tube (9), the spring (10) is sleeved on the surface of the connecting tube (12), and the two ends of the spring (10) are respectively connected to the connecting block (11) and the conduit (8).

5. A raw material sampler for photoresist production according to claim 1, characterized in that: A first cannula (16) is provided on the surface of the catheter (8), a sealing plate (17) is provided inside the sampling tube (4), and a liquid storage tank (18) is provided inside the sampling tube (4) and located on the top of the sealing plate (17).

6. A raw material sampler for photoresist production according to claim 5, characterized in that: A second insert pipe (19) is provided in the middle of the sealing plate (17), and the second insert pipe (19) is connected to the liquid storage tank (18).

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