Defect detecting and marking device for ceramic substrate

Abstract

The utility model discloses a defect detecting and marking device for a ceramic substrate, which comprises a rack assembly, the upper rack assembly is provided with two flower basket storing and taking assemblies, two feeding and discharging assemblies, two material taking assemblies, two conveying assemblies, an identity code marking assembly, a carrying assembly, an XY-axis direction adjusting transmission assembly, a camera detecting assembly and an NG marking assembly, the ceramic substrate is subjected to flaw detection and marking through the identity code marking assembly, the carrying assembly, the camera detection assembly and the NG marking assembly in sequence through continuous and regular transportation. According to the scheme, the independent clamping jaws are used for the surface flaw detection position of the ceramic substrate, clamping damage is reduced, multi-station synchronous operation of all assemblies can be achieved, the adsorption function additionally arranged on the placing table is beneficial to keeping of the transportation stability, and therefore the detection efficiency and the detection precision are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of detection devices, in particular to a defect detection and marking device for a ceramic substrate. Background Art

[0002] Ceramic substrate refers to a special process board in which copper foil is directly bonded to the surface (single or double sides) of alumina (Al2O3) or aluminum nitride (AlN) ceramic substrate at high temperature. The ultra-thin composite substrate has excellent electrical insulation performance, high thermal conductivity, excellent soft soldering and high adhesion strength, and can be etched with various patterns like PCB boards, and has a large current carrying capacity. Therefore, ceramic substrate has become the basic material for high-power power electronic circuit structure technology and interconnection technology.

[0003] At present, the existing defect detection devices for ceramic substrates have problems such as limited ceramic substrate handling conditions, poor stability in rapid placement and storage, insufficient positioning accuracy when detecting defects, and large detection errors. Utility Model Content

[0004] The utility model aims to overcome the shortcomings of the prior art and provide a defect detection and marking device for a ceramic substrate.

[0005] The purpose of the utility model is achieved through the following technical solutions:

[0006] The defect detection and marking device for ceramic substrates includes a frame assembly, wherein the upper frame assembly is provided with two basket storage and retrieval assemblies, two loading and unloading assemblies, two retrieval assemblies, two conveying assemblies, an identity code marking assembly, a handling assembly, an XY axis adjustment transmission assembly, a camera detection assembly and an NG marking assembly, and is characterized in that:

[0007] When viewed from a top view, taking the vertical center line of the rack assembly as a reference, the side located on the vertical center line is defined as the left side, and the other side located on the vertical center line is defined as the right side; taking the horizontal center line of the rack assembly as a reference, the side located on the horizontal center line is defined as the front side, and the other side located on the horizontal center line is defined as the rear side;

[0008] The first flower basket storage and retrieval assembly is arranged at the leftmost side of the frame assembly, a first loading and unloading assembly is arranged in front of the first flower basket storage and retrieval assembly, and a first retrieval assembly is arranged below the first loading and unloading assembly;

[0009] The identity code marking component is connected to the first material taking component through the first conveying component;

[0010] The XY axis direction adjustment transmission component is arranged at the center of the frame component, and one end of the XY axis direction adjustment transmission component is connected to the first conveying component for transmission, and the other end is connected to the second conveying component for transmission. The front side of the XY axis direction adjustment transmission component is provided with the conveying component; the rear side of the XY axis direction adjustment transmission component is provided with the camera detection component;

[0011] The NG marking component is adjacent to the camera detection component and is located on the right side of the camera detection component, and the NG marking component is connected to a second conveying component for transmission;

[0012] The second flower basket storage and retrieval assembly is arranged at the rightmost side of the frame assembly, and a second loading and unloading assembly is arranged at the front side, and the second retrieval assembly is arranged below the second loading and unloading assembly.

[0013] Furthermore, the above-mentioned defect detection and marking device for ceramic substrates, wherein: the first flower basket storage and retrieval assembly and the second flower basket storage and retrieval assembly are set to the same model parameters, the first flower basket storage and retrieval assembly includes a first linear module, the first linear module moves up and down along the Z axis relative to the pillar through the Z axis lifting motor, and the Z axis lifting motor coordinates on the pillar through a vertical drag chain for safety protection and guidance. The flower basket fixed bin is connected to the pillar for relative movement through the first linear module, and the flower basket fixed bin is connected to the rotary motor drive through an angle reducer, and a rotary clamping cylinder for positioning the flower basket is also provided on one side of the flower basket fixed bin. The flower baskets are provided in plurality, and each of the flower baskets is fixedly connected to the flower basket fixed bin by a clamp.

[0014] Furthermore, the above-mentioned defect detection and marking device for ceramic substrates, wherein: the first loading and unloading assembly and the second loading and unloading assembly are set to the same model parameters, the first loading and unloading assembly includes a second linear module and a first clamping jaw, the second linear module is fixed on the bracket, and one end of the second linear module is electrically connected to the first servo motor and cooperates with the first servo motor through a first horizontal drag chain. The first clamping jaw is connected to the second linear module through an L-shaped positioning plate, and a first lifting cylinder is provided between the first clamping jaw and the L-shaped positioning plate, and a first pressure display for monitoring the grasping pressure is fixed on the L-shaped positioning plate, and the left and right sides of the first clamping jaw are both driven and connected to the second clamping jaw cylinder.

[0015] Furthermore, the defect detection and marking device for ceramic substrates described above, wherein: the first material picking component and the second material picking component are set to the same model parameters, the first material picking component includes a material picking plate, a third linear module and a regular block, the material picking plate is movably connected to the support frame through the third linear module, and the third linear module is electrically connected to a second servo motor. The regular block is arranged on one side of the material picking plate through a first regular cylinder. A second horizontal drag chain is arranged between the material picking plate and the support frame, and cooperates with the second servo motor through the second horizontal drag chain. A pressure regulating valve for maintaining pressure stability is fixedly arranged on the outer side of the support frame.

[0016] Furthermore, the defect detection and marking device for ceramic substrates described above, wherein: the first conveying assembly and the second conveying assembly are set to the same model parameters, the first conveying assembly includes a conveyor belt, a first hand-cranked wheel and a mobile platform, the mobile platform is arranged on the main board through symmetrically arranged limit plates, and the main board is stably supported by symmetrically arranged support side plates. The inner side of each limit plate is installed and connected to the conveyor belt through an idler wheel, and the outer side of each limit plate is connected to a baffle, and the baffle is connected to a blocking cylinder for adjusting the blocking position and a stepping motor for driving the conveyor belt transmission operation. The first hand-cranked wheel is connected to the two limit plates from the side through an adjusting screw, and the adjusting screw is fixed on the corresponding limit plate through a positioning nut. The guide shaft, shaft seat and guide support correspond to each other and form a group, and the two groups are symmetrically arranged with the central axis of the main board as the reference, wherein the guide shaft passes through the two limit plates and is fixed on the corresponding limit plate through a positioning nut.

[0017] Furthermore, in the above-mentioned defect detection and marking device for ceramic substrates, the identity code marking component includes a laser and a recording camera, and the laser is fixedly mounted on the supporting column through a receiving plate. The recording camera is fixed on the receiving plate, and the lower end of the recording camera is connected to a laser marking head and a fill light fixture in sequence. A second hand-cranked wheel for adjusting the distance between the laser marking head, the fill light fixture and the recording camera is provided on the receiving plate.

[0018] Further, for the above-mentioned flaw detection and marking device for ceramic substrates, wherein: the handling component includes a fourth linear module and a fifth linear module. The top of the fourth linear module is electrically connected to a third servo motor. The front side of the fourth linear module is slidably connected to an L-shaped connecting plate through a first linear rail slider. The rear side of the fourth linear module is connected to the fifth linear module. The fifth linear module is fixedly arranged on the "冂"-shaped frame, and a first X-axis drag chain is arranged at the upper end of the fifth linear module, and a Z-axis drag chain is arranged at the side end of the fifth linear module. A plurality of second clamping jaws are arranged at the lower end of the L-shaped connecting plate. Each second clamping jaw is fixedly connected to the L-shaped connecting plate through a connecting rod. The left and right ends of each second clamping jaw are drivingly connected to a second clamping jaw cylinder, and a second pressure display is also arranged on each second clamping jaw.

[0019] Further, for the above-mentioned flaw detection and marking device for ceramic substrates, wherein: the XY-axis alignment and transmission component includes a placement table, an upper fixing plate, a middle fixing plate, and a lower fixing plate. A plurality of placement tables are provided. Each placement table is provided with adsorption columns and is arranged in a straight line on the upper fixing plate. A second rectifying cylinder and a third pressure display are connected to each placement table. A vacuum integrated valve is arranged on the upper fixing plate. The upper fixing plate is slidably connected above the middle fixing plate through a seventh linear module. The seventh linear module runs in coordination with the upper fixing plate through a second X-axis drag chain. The middle fixing plate is connected above the lower fixing plate through a sixth linear module. Symmetrically distributed second linear rail sliders are also arranged between the middle fixing plate and the lower fixing plate. One side of the second linear rail slider runs in coordination with the middle fixing plate through a Y-axis drag chain. The sixth linear module is drivingly connected to a fourth servo motor.

[0020] Further, for the above-mentioned flaw detection and marking device for ceramic substrates, wherein: the camera detection component includes a plurality of line scan cameras. Each line scan camera is positioned on a fixing frame through a connecting plate; at least one supplementary lighting fixture is adaptively installed on each line scan camera. The supplementary lighting fixture is a coaxial supplementary lighting fixture or a backside supplementary lighting fixture or a strip-shaped supplementary lighting fixture.

[0021] Further, for the above-mentioned flaw detection and marking device for ceramic substrates, wherein: the NG marking component includes an eighth linear module, a ninth linear module, and a marking piece. The eighth linear module is arranged at the rear side of the bracket through a mounting plate, and the eighth linear module is reciprocally driven by a fifth servo motor. One side of the bottom of the mounting plate is slidably connected to the bracket through a third linear rail slider for adjusting the orientation. The other side of the bottom of the mounting plate is movably connected to a ninth linear module and is mounted on the bracket through the ninth linear module. The ninth linear module is reciprocally driven by a sixth servo motor. The marking piece is fixedly arranged on the fifth servo motor through a second lifting cylinder.

[0022] Compared with the prior art, the present invention has significant advantages and beneficial effects, which are specifically embodied in the following aspects:

[0023] ① The utility model adopts an independently designed clamping claw structure, which makes it more firmly grasp the ceramic substrate and can effectively reduce the contact area with the surface of the ceramic substrate, greatly reducing the clamping damage to the ceramic substrate during the handling process;

[0024] ② The utility model is aimed at the surface defect detection of ceramic substrates, which can make the components move forward synchronously at multiple stations, greatly reducing the time wasted in the transportation of ceramic substrates and helping to improve the detection efficiency.

[0025] ③ The placement table for defect detection of the utility model is provided with an adsorption column. The added adsorption function enables the placement table to adsorb the ceramic substrate during the defect detection process, thereby ensuring the transportation stability and surface flatness of the ceramic substrate and improving the accuracy of surface defect detection of the ceramic substrate.

[0026] Other features and advantages of the utility model will be described in the following description, and partly become apparent from the description, or understood by implementing the specific implementation of the utility model. The purpose and other advantages of the utility model can be achieved and obtained by the structures specifically pointed out in the written description and the drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.

[0028] Figure 1 : The overall structural diagram of the utility model.

[0029] Figure 2 : A schematic structural diagram of the first flower basket material storage and retrieval component of the utility model.

[0030] Figure 3 : A schematic structural diagram of the first loading and unloading assembly of the utility model.

[0031] Figure 4 : A schematic structural diagram of the first material taking component of the utility model.

[0032] Figure 5 : A schematic structural diagram of the first conveying assembly of the utility model.

[0033] Figure 6: A structural diagram of the identity code marking component of the utility model.

[0034] Figure 7 : A schematic structural diagram of a handling assembly of the utility model.

[0035] Figure 8 : A schematic diagram of the structure of an XY axis direction adjustment transmission component of the present invention.

[0036] Fig. 9 : A schematic structural diagram of a camera detection assembly of the present utility model.

[0037] Fig.10 : A schematic structural diagram of the NG marking component of the present invention.

[0038] The meanings of the reference symbols in the figures are shown in the following table:

[0039]

[0040]

[0041] DETAILED DESCRIPTION

[0042] The technical scheme in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is only a part of the embodiment of the utility model, rather than all the embodiments. The components of the embodiment of the utility model generally described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiment of the utility model provided in the drawings is not intended to limit the scope of the utility model claimed for protection, but merely represents the selected embodiment of the utility model. Based on the embodiment of the utility model, all other embodiments obtained by those skilled in the art without making creative work belong to the scope of protection of the utility model.

[0043] It should be noted that similar numbers and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings. At the same time, in the description of the utility model, directional terms and order terms are only used to distinguish the description and cannot be understood as indicating or implying relative importance.

[0044] like Figure 1As shown, a defect detection and marking device for a ceramic substrate of the present embodiment includes a frame assembly 1, wherein the upper frame assembly 1 is provided with two basket material storage and retrieval assemblies, two loading and unloading assemblies, two material retrieval assemblies, two conveying assemblies, an identity code marking assembly 6, a handling assembly 7, an XY axis direction adjustment transmission assembly 8, a camera detection assembly 9 and an NG marking assembly 10. When viewed from a top view, taking the vertical center line of the frame assembly 1 as a reference, one side located at the vertical center line is defined as the left side, and the other side located at the vertical center line is defined as the right side; taking the horizontal center line of the frame assembly 1 as a reference, one side located at the horizontal center line is defined as the front side, and the other side located at the horizontal center line is defined as the rear side.

[0045] The first flower basket storage and retrieval assembly 2 is arranged at the leftmost side of the frame assembly 1, a first loading and unloading assembly 3 is arranged in front of the first flower basket storage and retrieval assembly 2, and a first retrieval assembly 4 is arranged below the first loading and unloading assembly 3.

[0046] The identity code marking component 6 is connected to the first material taking component 4 through the first conveying component 5 .

[0047] The XY axis direction adjustment transmission component 8 is arranged at the center of the frame component 1, and one end of the XY axis direction adjustment transmission component 8 is connected to the first conveying component 5 for transmission, and the other end is connected to the second conveying component 11 for transmission. The front side of the XY axis direction adjustment transmission component 8 is provided with the conveying component 7; the rear side of the XY axis direction adjustment transmission component 8 is provided with the camera detection component 9.

[0048] The NG marking component 10 is adjacent to the camera detection component 9 and is located on the right side of the camera detection component 9 , and the NG marking component 10 is connected to a second conveying component 11 for transmission.

[0049] The second flower basket storage and retrieval assembly 14 is arranged at the rightmost side of the frame assembly 1 , and a second loading and unloading assembly 12 is arranged at the front side, and the second retrieval assembly 13 is arranged below the second loading and unloading assembly 12 .

[0050] like Figure 2As shown, the first flower basket storage and retrieval assembly 2 and the second flower basket storage and retrieval assembly 14 are set to the same model parameters. The first flower basket storage and retrieval assembly 2 includes a first linear module 26, which moves up and down along the Z axis relative to the support 25 through the Z axis lifting motor 21, and the Z axis lifting motor 21 coordinates on the support 25 through a vertical drag chain 24 for safety protection and guidance. The flower basket fixed bin 27 is connected to the support 25 for relative movement through the first linear module 26, and the flower basket fixed bin 27 is connected to the rotating motor 23 through an angle reducer 22. A rotary clamping cylinder 28 for positioning the flower basket 210 is also provided on one side of the flower basket fixed bin 27. There are a plurality of flower baskets 210, and each of the flower baskets 210 is fixedly connected to the flower basket fixed bin 27 through a clamp 29.

[0051] The rotary clamping cylinder 28 and the clamp 29 provided above are used to fix the flower basket 210 , thereby improving the installation stability of the flower basket 210 .

[0052] like Figure 3 As shown, the first loading and unloading assembly 3 and the second loading and unloading assembly 12 are set to the same model parameters, the first loading and unloading assembly 3 includes a second linear module 31 and a first clamping jaw 36, the second linear module 31 is fixed on the bracket 32, and one end of the second linear module 31 is electrically connected to the first servo motor 39 and cooperates with the first servo motor 39 through a first horizontal drag chain 33. The first clamping jaw 36 is connected to the second linear module 31 through an L-shaped positioning plate 34, and a first lifting cylinder 35 is provided between the first clamping jaw 36 and the L-shaped positioning plate 34, and a first pressure display 38 for monitoring the grasping pressure is fixed on the L-shaped positioning plate 34, and the left and right sides of the first clamping jaw 36 are both driven and connected to the first clamping jaw cylinder 37.

[0053] The first clamping jaw cylinder 37 drives the first clamping jaw 36 to grasp and carry the ceramic substrate.

[0054] like Figure 4 As shown, the first material picking assembly 4 and the second material picking assembly 13 are set to the same model parameters. The first material picking assembly 4 includes a material picking plate 41, a third linear module 46 and a regular block 47. The material picking plate 41 is movably connected to the support frame 43 through the third linear module 46, and the third linear module 46 is electrically connected to the second servo motor 45. The regular block 47 is arranged on one side of the material picking plate 41 through a first regular cylinder 48. A second horizontal drag chain 42 is arranged between the material picking plate 41 and the support frame 43, and the second horizontal drag chain 42 cooperates with the second servo motor 45 to operate. A pressure regulating valve 44 is fixed on the outer side of the support frame 43 to keep the pressure stable.

[0055] The second servo motor 45 drives the third linear module 46 to realize the movement of the first material taking component 4 .

[0056] like Figure 5 As shown, the first conveying assembly 5 and the second conveying assembly 11 are set to the same model parameters. The first conveying assembly 5 includes a conveyor belt 51, a first hand-cranked wheel 57 and a mobile platform 515. The mobile platform 515 is arranged on the main board 512 through symmetrically arranged limit plates 514, and the main board 512 is stably supported by symmetrically arranged support side plates 511. The inner side of each limit plate 514 is installed and connected to the conveyor belt 51 through an idler wheel 52, and the outer side of each limit plate 514 is connected to a baffle 53, and the baffle 53 is connected to a blocking cylinder 54 for adjusting the blocking direction and a stepping motor 56 for driving the belt transmission operation. The first hand-cranked wheel 57 is connected to the two limit plates 514 from the side through an adjusting screw 58, and the adjusting screw 58 is fixed to the corresponding limit plate 514 through a positioning nut 510. The guide shaft 55 , the shaft seat 59 and the guide support 513 correspond to each other and form a group. The two groups are symmetrically arranged with the central axis of the main board 512 as the reference. The guide shaft 55 passes through the two limit plates 514 and is fixed on the corresponding limit plates 514 by the positioning nut 510 .

[0057] The above conveying function is achieved through the rotation of the belt 1 and the idler wheel 2.

[0058] like Figure 6 As shown, the identity code marking assembly 6 includes a laser 61 and a recording camera 66. The laser 61 is fixedly mounted on a supporting column 63 through a receiving plate 62. The recording camera 66 is fixed on the receiving plate 62, and the lower end of the recording camera 66 is sequentially connected to a laser marking head 64 and a fill light 65. The receiving plate 62 is provided with a second hand-cranked wheel 67 for adjusting the distance between the laser marking head 64, the fill light 65 and the recording camera 66.

[0059] like Figure 7As shown, the handling component 7 includes a fourth linear module 75 and a fifth linear module 712. The top of the fourth linear module 75 is electrically connected to a third servo motor 74. The front side of the fourth linear module 75 is slidably connected to an L-shaped connecting plate 77 through a first linear guide slider 76. The rear side of the fourth linear module 75 is connected to the fifth linear module 712. The fifth linear module 712 is fixed on the "冂"-shaped frame 71, and a first X-axis drag chain 72 is provided at the upper end of the fifth linear module 712, and a Z-axis drag chain 73 is provided at the side end of the fifth linear module 712. Several second grippers 711 are arranged at the lower end of the L-shaped connecting plate 77. Each of the second grippers 711 is fixedly connected to the L-shaped connecting plate 77 through a connecting rod 79. The left and right ends of each second gripper 711 are drivingly connected to a second gripper cylinder 710, and a second pressure display 78 is further provided on each second gripper 711.

[0060] As Figure 8 shown, the XY-axis alignment and transfer component 8 includes a placement table 81, an upper fixing plate 83, a middle fixing plate 85, and a lower fixing plate 89. Several placement tables 81 are provided. Each placement table 81 is provided with adsorption columns and is arranged in a straight line on the upper fixing plate 83. A second rectifying cylinder 82 and a third pressure display 813 are connected to each placement table 81. A vacuum integrated valve 84 is provided on the upper fixing plate 83. The upper fixing plate 83 is slidably connected above the middle fixing plate 85 through a seventh linear module 811. The seventh linear module 811 operates in coordination with the upper fixing plate 83 through a second X-axis drag chain 86. The middle fixing plate 85 is connected above the lower fixing plate 89 through a sixth linear module 87. Symmetrically distributed second linear guide sliders 810 are further provided between the middle fixing plate 85 and the lower fixing plate 89. One side of the second linear guide slider 810 operates in coordination with the middle fixing plate 85 through a Y-axis drag chain 812. The sixth linear module 87 is drivingly connected to a fourth servo motor 88. So as to freely adjust the transportation of the ceramic substrate in the X-axis or Y-axis direction.

[0061] As Fig. 9 shown, the camera detection component 9 includes several line scan cameras 91. Each line scan camera 91 is positioned on a fixed frame 92 through a connecting plate 95. At least one supplementary lighting fixture is adaptively installed on each line scan camera 91. The supplementary lighting fixture is a coaxial supplementary lighting fixture 93, a backside supplementary lighting fixture 94, or a strip-shaped supplementary lighting fixture 96. Select a suitable supplementary lighting fixture according to actual needs to improve the accuracy of information collection.

[0062] As Fig.10As shown, the NG marking assembly 10 includes an eighth linear module 103, a ninth linear module 107 and a marking member 109. The eighth linear module 103 is arranged on the rear side of the bracket 108 through the mounting plate 102, and the eighth linear module 103 is reciprocated by a fifth servo motor 105. One side of the bottom of the mounting plate 102 is slidably connected to the bracket 108 through a third linear rail slider 101 for adjusting the orientation, and the other side of the bottom of the mounting plate 102 is movably connected to a ninth linear module 107 and is mounted on the bracket 108 through the ninth linear module 107. The ninth linear module 107 is reciprocated by a sixth servo motor 106. The marking member 109 is fixed on the fifth servo motor 105 through the second lifting cylinder 104. The second lifting cylinder 104 realizes the adjustment of different marking positions for defective ceramic substrates.

[0063] In specific application, the basket 210 filled with ceramic substrates is manually placed on the first basket storage and retrieval component 2, and the first retrieval component 4 sequentially takes out the ceramic substrates and positions and tidies the ceramic substrates one by one through the tidiness block 47; the first retrieval component 4 transfers the tidied ceramic substrates to the first conveying component 5, and then controls the mobile platform 515 via the conveyor belt 51 to convey the ceramic substrates to the identity code marking component 6 for identity code marking; after the identity code is marked, the transport component 7 is used to transport the ceramic substrates to the placement table 81 of the XY axis adjustment transmission component 8, and the placement table 81 is positioned and tidied again by the second tidiness cylinder 82; after the second tidiness, the ceramic substrates after the identity code marking are sequentially transported to the bottom of the camera detection component 9, and the line scan camera 91 is moved left and right to detect surface defects on the ceramic substrates. After the detection is completed, the ceramic substrates are transported to the second conveying component 11, and then to the NG marking component 10, and the defective parts are marked. After the defect marking is completed, the second loading and unloading assembly 12 transports the ceramic substrate to the second taking assembly 13. After the ceramic substrate is positioned and arranged, it is sequentially placed in the second basket storage and taking assembly 14 for storage. When it is full of ceramic substrates, it can be taken out at any time.

[0064] In summary, the utility model adopts an independently designed clamping claw structure, which makes it more firmly grip the ceramic substrate, and can also effectively reduce the contact area with the surface of the ceramic substrate, greatly reducing the clamping damage to the ceramic substrate during transportation; for the surface defect detection of the ceramic substrate, it can make the components move forward synchronously at multiple stations, greatly reducing the time wasted in the transportation of the ceramic substrate, and helping to improve the detection efficiency. The placement table for defect detection is equipped with an adsorption column, and the added adsorption function enables the placement table to adsorb the ceramic substrate during the defect detection process, ensuring the transportation stability and surface flatness of the ceramic substrate, and improving the accuracy of the surface defect detection of the ceramic substrate.

[0065] The above description is only a preferred embodiment of the utility model and is not intended to limit the utility model. For those skilled in the art, the utility model may have various modifications and changes. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the utility model should be included in the protection scope of the utility model. It should be noted that similar numbers and letters represent similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings.

[0066] The above is only a specific implementation of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed by the present invention, which should be included in the protection scope of the present invention.

[0067] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the existence of other identical elements in the process, method, article or device including the elements.

Claims

1. A defect detection and marking device for a ceramic substrate, comprising a frame assembly (1), wherein the frame assembly (1) is provided with two basket material storage and retrieval assemblies, two loading and unloading assemblies, two material retrieval assemblies, two conveying assemblies, an identity code marking assembly (6), a handling assembly (7), an XY axis direction adjustment transmission assembly (8), a camera detection assembly (9) and an NG marking assembly (10), characterized in that: Taking the vertical center line of the frame assembly (1) as a reference, one side located on the vertical center line is defined as the left side, and the other side located on the vertical center line is defined as the right side; Taking the horizontal center line of the frame assembly (1) as a reference, one side located on the horizontal center line is defined as the front side, and the other side located on the horizontal center line is defined as the rear side; The first flower basket storage and retrieval assembly (2) is arranged at the leftmost side of the frame assembly (1); a first loading and unloading assembly (3) is arranged in front of the first flower basket storage and retrieval assembly (2); and a first retrieval assembly (4) is arranged below the first loading and unloading assembly (3); The identity code marking component (6) is connected to the first material taking component (4) through the first conveying component (5); The XY axis direction adjustment transmission component (8) is arranged at the center of the frame component (1), and one end of the XY axis direction adjustment transmission component (8) is connected to the first conveying component (5) for transmission, and the other end is connected to the second conveying component (11) for transmission; The transport component (7) is arranged on the front side of the XY axis adjustment transmission component (8); The camera detection component (9) is arranged on the rear side of the XY axis direction adjustment transmission component (8); The NG marking component (10) is adjacent to the camera detection component (9) and is located on the right side of the camera detection component (9), and the NG marking component (10) is connected to a second conveying component (11) for transmission; The second flower basket storage and retrieval assembly (14) is arranged at the rightmost side of the frame assembly (1), and a second loading and unloading assembly (12) is arranged at the front side, and a second retrieval assembly (13) is arranged below the second loading and unloading assembly (12).

2. The defect detection and marking device for ceramic substrate according to claim 1, characterized in that: The first flower basket material storage and retrieval component (2) and the second flower basket material storage and retrieval component (14) are set to have the same model parameters, the first flower basket material storage and retrieval component (2) comprises a first linear module (26), the first linear module (26) moves up and down along the Z axis relative to the support (25) via a Z axis lifting motor (21), and the Z axis lifting motor (21) coordinates operation on the support (25) via a vertical drag chain (24) for safety protection and guidance; The flower basket fixing bin (27) is connected to the support (25) in a relatively movable manner via a first linear module (26), and the flower basket fixing bin (27) is connected to the rotating motor (23) via an angle reducer (22). A rotating clamping cylinder (28) for positioning the flower basket (210) is also provided on one side of the flower basket fixing bin (27); A plurality of the flower baskets (210) are provided, and each of the flower baskets (210) is fixedly connected to the flower basket fixing bin (27) via a clamp (29).

3. The defect detection and marking device for ceramic substrate according to claim 1, characterized in that: The first loading and unloading assembly (3) and the second loading and unloading assembly (12) are set to have the same model parameters, the first loading and unloading assembly (3) comprises a second linear module (31) and a first clamp (36), the second linear module (31) is fixed on the bracket (32), and one end of the second linear module (31) is electrically connected to a first servo motor (39) and operates in coordination with the first servo motor (39) through a first horizontal drag chain (33); The first clamping jaw (36) is connected to the second linear module (31) via an L-shaped positioning plate (34), and a first lifting cylinder (35) is provided between the first clamping jaw (36) and the L-shaped positioning plate (34). A first pressure display (38) for monitoring the gripping pressure is fixedly provided on the L-shaped positioning plate (34), and first clamping jaw cylinders (37) are drive-connected to the left and right sides of the first clamping jaw (36).

4. The defect detection and marking device for ceramic substrate according to claim 1, characterized in that: The first material picking assembly (4) and the second material picking assembly (13) are set to have the same model parameters, the first material picking assembly (4) comprises a material picking plate (41), a third linear module (46) and a regular block (47), the material picking plate (41) is movably connected to the support frame (43) through the third linear module (46), and the third linear module (46) is electrically connected to a second servo motor (45); The regulating block (47) is arranged on one side of the material taking plate (41) through a first regulating cylinder (48); A second horizontal drag chain (42) is provided between the material taking plate (41) and the support frame (43), and the second horizontal drag chain (42) and the second servo motor (45) work in coordination; A pressure regulating valve (44) for maintaining pressure stability is fixedly arranged on the outer side of the support frame (43).

5. The defect detection and marking device for ceramic substrate according to claim 1, characterized in that: The first conveying assembly (5) and the second conveying assembly (11) are set to have the same model parameters. The first conveying assembly (5) comprises a conveying belt (51), a first hand-cranked wheel (57) and a movable platform (515). The movable platform (515) is arranged on the main board (512) through symmetrically arranged limit plates (514). The main board (512) is stably supported by symmetrically arranged support side plates (511). The inner side of each of the limit plates (514) is connected to the conveyor belt (51) via an idler wheel (52), and the outer side of each of the limit plates (514) is connected to a baffle plate (53), and the baffle plate (53) is connected to a blocking cylinder (54) for adjusting the blocking direction and a stepping motor (56) for driving the conveyor belt (51) to perform transmission operations; The first hand-cranked wheel (57) is connected to the two limit plates (514) from the side through an adjusting screw (58), and the adjusting screw (58) is fixed on the corresponding limit plates (514) through a positioning nut (510); The guide shafts (55), shaft seats (59) and guide supports (513) correspond to each other and form a group. The two groups are symmetrically arranged with the central axis of the main board (512) as the reference. Among them, the guide shafts (55) all penetrate through the two limit plates (514) and are fixed on the corresponding limit plates (514) through positioning nuts (510).

6. The defect detection and marking device for ceramic substrate according to claim 1, characterized in that: The identity code marking assembly (6) includes a laser (61) and a recording camera (66). The laser (61) is fixedly installed on the support column (63) through a receiving plate (62). The recording camera (66) is fixed on the receiving plate (62), and a laser marking head (64) and a supplementary lighting fixture (65) are sequentially connected to the lower end of the recording camera (66). A second handwheel (67) for adjusting the distance between the laser marking head (64), the supplementary lighting fixture (65) and the recording camera (66) is provided on the receiving plate (62).

7. The defect detection and marking device for ceramic substrate according to claim 1, characterized in that: The handling assembly (7) includes a fourth linear module (75) and a fifth linear module (712). The top end of the fourth linear module (75) is electrically connected to a third servo motor (74). The front side of the fourth linear module (75) is slidably connected to an L-shaped connecting plate (77) through a first linear guide slider (76). The rear side of the fourth linear module (75) is connected to the fifth linear module (712). The fifth linear module (712) is fixed on the "冂"-shaped frame (71). A first X-axis drag chain (72) is provided at the upper end of the fifth linear module (712), and a Z-axis drag chain (73) is provided at the side end of the fifth linear module (712). Several second jaws (711) are arranged at the lower end of the L-shaped connecting plate (77). Each of the second jaws (711) is fixedly connected to the L-shaped connecting plate (77) through a connecting rod (79). The left and right ends of each second jaw (711) are drivingly connected to a second jaw cylinder (710), and a second pressure display (78) is further provided on each second jaw (711).

8. The defect detection and marking device for ceramic substrate according to claim 1, characterized in that: The XY-axis alignment and transmission assembly (8) includes a placement table (81), an upper fixing plate (83), a middle fixing plate (85) and a lower fixing plate (89). Several placement tables (81) are provided. Adsorption columns are provided on each of the placement tables (81) and are arranged in a straight line on the upper fixing plate (83). A second rectifying cylinder (82) and a third pressure display (813) are connected to each placement table (81). A vacuum integrated valve (84) is provided on the upper fixing plate (83). The upper fixing plate (83) is slidably connected above the middle fixing plate (85) through a seventh linear module (811). The seventh linear module (811) and the upper fixing plate (83) operate in coordination through a second X-axis drag chain (86). The middle-layer fixed plate (85) is connected to the upper part of the lower-layer fixed plate (89) through a sixth linear module (87), and a symmetrically distributed second linear rail slider (810) is provided between the middle-layer fixed plate (85) and the lower-layer fixed plate (89), and one side of the second linear rail slider (810) cooperates with the middle-layer fixed plate (85) through a Y-axis drag chain (812); The sixth linear module (87) is drivingly connected to a fourth servo motor (88).

9. The defect detection and marking device for ceramic substrate according to claim 1, characterized in that: The camera detection assembly (9) comprises a plurality of line scan cameras (91), and each of the line scan cameras (91) is positioned on a fixing frame (92) via a connecting plate (95); At least one fill-light fixture is adapted to be mounted on each of the line scan cameras (91), and the fill-light fixture is a coaxial fill-light fixture (93), a back fill-light fixture (94), or a strip fill-light fixture (96).

10. The defect detection and marking device for ceramic substrate according to claim 1, characterized in that: The NG marking assembly (10) comprises an eighth linear module (103), a ninth linear module (107) and a marking member (109); the eighth linear module (103) is arranged on the rear side of the bracket (108) through a mounting plate (102), and the eighth linear module (103) is reciprocatingly driven by a fifth servo motor (105); One side of the bottom of the mounting plate (102) is slidably connected to the bracket (108) via a third linear rail slider (101) for adjusting the orientation, and the other side of the bottom of the mounting plate (102) is movably connected to a ninth linear module (107) and is mounted on the bracket (108) via the ninth linear module (107); The ninth linear module (107) is reciprocatingly driven by a sixth servo motor (106); The marking member (109) is fixed on the fifth servo motor (105) via a second lifting cylinder (104).

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