Heavy-load objective lens type five-dimensional lens bracket

Abstract

The utility model discloses a heavy-load objective lens type five-dimensional lens bracket, which mainly comprises a left-right deflection module, a Y-direction adjusting module, a Z-direction adjusting module, an X-direction adjusting module and a front-back deflection module, the left-right deflection module slides on the top of the front-back deflection module left and right, the Y-direction adjusting module is arranged on a seat plate in a sliding manner along the Y direction, and the Z-direction adjusting module is arranged on the seat plate in a sliding manner along the Z direction. The Z-direction adjusting module is arranged on the seat plate in a sliding mode in the Z direction, the X-direction adjusting module is arranged on the seat plate in a sliding mode in the X direction, and the front-back deflection module is arranged on the top of the T-shaped frame. According to the scheme, positioning adjustment is carried out through positions in five different directions, accurate fixation of the required position of the lens cone is achieved, installation and debugging of a large objective lens under the conditions of space installation and heavy load are achieved, and fixation of a light path heavy core component is achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a large-load objective lens type five-dimensional mirror frame. Background Art

[0002] Semiconductors refer to materials with electrical conductivity between conductors and insulators at room temperature. Semiconductors are used in integrated circuits, consumer electronics, communication systems, photovoltaic power generation, lighting, high-power power conversion and other fields. For example, diodes are devices made of semiconductors. Whether from the perspective of science and technology or economic development, the importance of semiconductors is enormous. Most electronic products, such as computers, mobile phones or digital recorders, have a very close relationship with semiconductors in their core units. Common semiconductor materials include silicon, germanium, gallium arsenide, etc. Silicon is the most influential one in the application of various semiconductor materials.

[0003] In semiconductor inspection and measurement, the illumination objective lens is the core component in the optical path. This component now needs to be adjusted in multiple dimensions during use and requires high stability. When the objective lens in the optical path exceeds 4kg, the current standard five-position mirror frame has a small load, and the standard large objective lens with a larger diameter cannot meet the space installation requirements and load requirements.

[0004] Therefore, we propose a five-position lens holder with large load capacity to solve the above problems. Utility Model Content

[0005] In view of the above-mentioned deficiencies existing in the prior art, the purpose of the utility model is to provide a large-load objective lens type five-dimensional mirror frame to solve the problem that the existing standard five-position mirror frame has a small load and cannot meet the space installation requirements for large objective lenses with larger diameters.

[0006] The technical solution adopted by the utility model to achieve the above-mentioned purpose is: a large-load objective lens type five-dimensional mirror frame, including a base plate, a T-frame and a large objective lens mounting plate, the T-frame is fixedly arranged on the base plate, a large objective lens mounting plate is fixedly arranged on the T-frame, the large-load objective lens is fixedly installed through the large objective lens mounting plate, and a support frame is arranged around the outside of the large objective lens mounting plate, which is characterized in that it also includes a left and right swing module, a Y-direction adjustment module, a Z-direction adjustment module, an X-direction adjustment module and a front and rear swing module, the left and right swing module slides left and right on the top of the front and rear swing module, the Y-direction adjustment module is slidably arranged on the base plate along the Y direction, the Z-direction adjustment module is slidably arranged on the base plate along the Z direction, the X-direction adjustment module is slidably arranged on the base plate along the X direction, and the front and rear swing module is arranged on the top of the T-frame.

[0007] In order to further improve the ease of use of the large-load objective lens five-dimensional mirror frame, the solution adopted by the utility model is: the Y-direction adjustment module, the Z-direction adjustment module and the X-direction adjustment module are all provided with micro-slide rails, and the micro-slide rails are arranged on each adjustment module through step bolts and springs, and the micro-slide rails are connected to a second fine-tuning screw assembly.

[0008] In order to further improve the ease of use of the large-load objective lens five-dimensional mirror frame, the solution adopted by the utility model is: the Y-direction adjustment module includes a positioning locking plate, a Y-direction adjustment plate and a Y-direction lower adjustment plate, a first fine-tuning screw assembly is connected between the Y-direction adjustment plate and the Y-direction lower adjustment plate, a positioning locking plate is provided at the bottom of the Y-direction lower adjustment plate, and rotating the first fine-tuning screw assembly drives the Y-direction adjustment plate to move in the Y direction along the micro slide rail.

[0009] In order to further improve the ease of use of large-load objective lens five-dimensional mirror frame, the solution adopted by the utility model is: the Z-direction adjustment module includes a positioning locking plate, a Z-direction front adjustment plate and a Z-direction rear adjustment plate, a third fine-tuning screw assembly is connected between the Z-direction front adjustment plate and the Z-direction rear adjustment plate, and a positioning locking plate is provided on the side of the Z-direction rear adjustment plate. Rotating the third fine-tuning screw assembly drives the Z-direction front adjustment plate to move in the Z direction along the micro slide rail.

[0010] In order to further improve the ease of use of a large-load objective lens five-dimensional mirror frame, the solution adopted by the utility model is: the X-direction adjustment module includes a positioning locking piece, an X-direction upper adjustment plate and an X-direction lower adjustment plate, a fourth fine-tuning screw assembly is connected between the X-direction adjustment plate and the X-direction lower adjustment plate, a positioning locking piece is provided on the side of the X-direction lower adjustment plate, and rotating the fourth fine-tuning screw assembly drives the X-direction adjustment plate to move in the Z direction along the micro slide rail.

[0011] In order to further improve the ease of use of the large-load objective lens five-dimensional mirror frame, the solution adopted by the utility model is: the left and right swing module includes a left and right swing front adjustment plate and a left and right swing rear adjustment plate, and the left and right swing front adjustment plate and the left and right swing rear adjustment plate are connected and fixed by an elastic connecting block.

[0012] In order to further improve the ease of use of a large-load objective lens five-dimensional mirror frame, the solution adopted by the utility model is: the front and rear swing module includes a front and rear swing adjustment plate and a rear and rear swing adjustment plate, and the front and rear swing adjustment plate and the rear and rear swing adjustment plate are connected and fixed by an elastic connecting block.

[0013] In order to further improve the usability of the large-load objective lens type five-dimensional mirror frame, the solution adopted by the utility model is that the left and right swing modules and the front and rear swing modules are both movably locked by positioning locking plates.

[0014] The beneficial effects of the utility model are as follows: this large-load objective lens five-dimensional mirror frame is positioned and adjusted through positions in five different directions, thereby achieving precise fixation of the required position of the lens barrel, solving the problems of installation and debugging of large objective lenses in space and under heavy load conditions, and solving the fixation of important core components of the optical path. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0016] Figure 2 It is a front structural schematic diagram of the utility model;

[0017] Figure 3 It is a schematic diagram of the top structure of the utility model.

[0018] In the figure: 1 left and right swing module, 2 Y direction adjustment module, 3 Z direction adjustment module, 4 X direction adjustment module, 5 seat plate, 6 T frame, 7 large objective lens mounting plate, 8 front and rear swing module, 9 support frame, 10 micro slide rail, 11 first fine-tuning screw assembly, 12 second fine-tuning screw assembly, 13 third fine-tuning screw assembly, 14 fourth fine-tuning screw assembly, 15 elastic connecting block. DETAILED DESCRIPTION

[0019] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0020] See also Figure 1-3 The utility model discloses a large-load objective lens type five-dimensional mirror frame, comprising a base plate 5, a T-frame 6 and a large objective lens mounting plate 7. The T-frame 6 is fixed on the base plate 5, and a large objective lens mounting plate 7 is fixed on the T-frame 6. The large-load objective lens is fixedly mounted through the large objective lens mounting plate 7, and a support frame 9 is arranged around the outside of the large objective lens mounting plate 7.

[0021] In the utility model, it also includes a left-right swing module 1, a Y-direction adjustment module 2, a Z-direction adjustment module 3, an X-direction adjustment module 4 and a front-back swing module 8. The left-right swing module 1 slides left-right on the top of the front-back swing module 8, the Y-direction adjustment module 2 is slidably arranged on the seat plate 5 along the Y direction, the Z-direction adjustment module 3 is slidably arranged on the seat plate 5 along the Z direction, the X-direction adjustment module 4 is slidably arranged on the seat plate 5 along the X direction, and the front-back swing module 8 is arranged on the top of the T-frame 6.

[0022] Furthermore, the Y-direction adjustment module 2 , the Z-direction adjustment module 3 and the X-direction adjustment module 4 are all provided with a micro slide rail 10 , the micro slide rail 10 is arranged on each adjustment module through a step bolt and a spring, and the micro slide rail 10 is connected to a second fine-tuning screw assembly 12 .

[0023] Furthermore, the Y-direction adjustment module 2 includes a positioning locking plate, an upper Y-direction adjustment plate and a lower Y-direction adjustment plate, a first fine-tuning screw assembly 11 is connected between the Y-direction adjustment plate and the lower Y-direction adjustment plate, a positioning locking plate is provided at the bottom of the lower Y-direction adjustment plate, and the first fine-tuning screw assembly 11 is rotated to drive the Y-direction adjustment plate to move in the Y direction along the micro-slide rail 10, relying on the elasticity of the spring to play a damping and resetting role in the Y direction.

[0024] Furthermore, the Z-direction adjustment module 3 includes a positioning locking plate, a Z-direction front adjustment plate and a Z-direction rear adjustment plate, a third fine-tuning screw assembly 13 is connected between the Z-direction front adjustment plate and the Z-direction rear adjustment plate, and a positioning locking plate is provided on the side of the Z-direction rear adjustment plate. Rotating the third fine-tuning screw assembly 13 drives the Z-direction front adjustment plate to move along the micro slide rail 10 in the Z direction, and relies on the elasticity of the spring to play a damping and resetting role in the Z direction.

[0025] Furthermore, the X-direction adjustment module 4 includes a positioning locking piece, an X-direction upper adjustment plate and an X-direction lower adjustment plate, a fourth fine-tuning screw assembly 14 is connected between the X-direction adjustment plate and the X-direction lower adjustment plate, a positioning locking piece is provided on the side of the X-direction lower adjustment plate, and the fourth fine-tuning screw assembly 14 is rotated to drive the X-direction adjustment plate to move in the Z direction along the micro slide 10, relying on the elasticity of the spring to play a damping and resetting role in the X direction.

[0026] Furthermore, the left-right swing module 1 includes a left-right swing front adjustment plate and a left-right swing rear adjustment plate, and the left-right swing front adjustment plate and the left-right swing rear adjustment plate are connected and fixed by an elastic connecting block 15 for left-right swing.

[0027] Furthermore, the front-to-back swing module 8 includes a front front swing adjustment plate and a rear front swing adjustment plate, and the front front swing adjustment plate and the rear front swing adjustment plate are connected and fixed by an elastic connecting block 15 for front-to-back swinging.

[0028] Furthermore, the left and right swing modules 1 and the front and rear swing modules 8 are movably locked by positioning locking plates, and by tightening the locking bolts, the corresponding left and right swing modules 1 or the front and rear swing modules 8 can be connected and fixed, thereby achieving a locking effect.

[0029] The utility model performs positioning adjustment through positions in five different directions, realizes accurate fixation of the required position of the lens barrel, solves the installation and debugging of large objective lenses in space installation and heavy load conditions, and solves the fixation of important core components of the optical path.

[0030] The standard parts used in the utility model can be purchased from the market, and special-shaped parts can be customized according to the description in the specification and the drawings. The specific connection methods of each part adopt the conventional means such as mature bolts, rivets, welding, etc. in the prior art. The machinery, parts and equipment all adopt the conventional models in the prior art, and the circuit connection adopts the conventional connection method in the prior art, which will not be described in detail here. The content not described in detail in this specification belongs to the prior art known to professional and technical personnel in this field.

[0031] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-restrictive from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the present invention. Any reference numeral in a claim should not be regarded as limiting the claim to which it relates.

[0032] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A large-load objective lens type five-dimensional mirror frame, comprising a base plate (5), a T-shaped frame (6) and a large objective lens mounting plate (7), wherein the T-shaped frame (6) is fixedly mounted on the base plate (5), and a large objective lens mounting plate (7) is fixedly mounted on the T-shaped frame (6), and a large-load objective lens is fixedly mounted via the large objective lens mounting plate (7), characterized in that: The invention also comprises a left-right deflection module (1), a Y-direction adjustment module (2), a Z-direction adjustment module (3), an X-direction adjustment module (4) and a front-back deflection module (8), wherein the left-right deflection module (1) slides left-right on the top of the front-back deflection module (8), the Y-direction adjustment module (2) is slidably arranged on the seat plate (5) along the Y direction, the Z-direction adjustment module (3) is slidably arranged on the seat plate (5) along the Z direction, the X-direction adjustment module (4) is slidably arranged on the seat plate (5) along the X direction, and the front-back deflection module (8) is arranged on the top of the T-shaped frame (6).

2. The large-load objective lens five-dimensional mirror frame according to claim 1, characterized in that: The Y-direction adjustment module (2), the Z-direction adjustment module (3) and the X-direction adjustment module (4) are all provided with micro slide rails (10).

3. The large-load objective lens five-dimensional mirror frame according to claim 2, characterized in that: The micro slide rail (10) is arranged on each adjustment module via a step bolt and a spring, and the micro slide rail (10) is connected to a second fine-tuning screw assembly (12).

4. The large-load objective lens five-dimensional mirror frame according to claim 1, characterized in that: The Y-direction adjustment module (2) comprises a positioning locking plate, a Y-direction upper adjustment plate and a Y-direction lower adjustment plate, a first fine-tuning screw assembly (11) is connected between the Y-direction adjustment plate and the Y-direction lower adjustment plate, a positioning locking plate is provided at the bottom of the Y-direction lower adjustment plate, and the first fine-tuning screw assembly (11) is rotated to drive the Y-direction adjustment plate to move in the Y direction along the micro slide rail (10).

5. The large-load objective lens five-dimensional mirror frame according to claim 1, characterized in that: The Z-direction adjustment module (3) comprises a positioning locking plate, a Z-direction front adjustment plate and a Z-direction rear adjustment plate, a third fine-tuning screw assembly (13) is connected between the Z-direction front adjustment plate and the Z-direction rear adjustment plate, a positioning locking plate is provided on the side of the Z-direction rear adjustment plate, and the rotation of the third fine-tuning screw assembly (13) drives the Z-direction front adjustment plate to move in the Z direction along the micro slide rail (10).

6. The large-load objective lens five-dimensional mirror frame according to claim 1, characterized in that: The X-direction adjustment module (4) comprises a positioning locking piece, an X-direction upper adjustment plate and an X-direction lower adjustment plate, a fourth fine-tuning screw assembly (14) is connected between the X-direction adjustment plate and the X-direction lower adjustment plate, a positioning locking piece is provided on the side of the X-direction lower adjustment plate, and the fourth fine-tuning screw assembly (14) is rotated to drive the X-direction adjustment plate to move in the Z direction along the micro slide rail (10).

7. The large-load objective lens five-dimensional mirror frame according to claim 1, characterized in that: The left-right swing module (1) comprises a left-right swing front adjustment plate and a left-right swing rear adjustment plate, and the left-right swing front adjustment plate and the left-right swing rear adjustment plate are connected and fixed in a left-right swing manner via an elastic connection block (15).

8. The large-load objective lens five-dimensional mirror frame according to claim 1, characterized in that: The front-to-back swing module (8) comprises a front front swing adjustment plate and a rear front swing adjustment plate, and the front front swing adjustment plate and the rear front swing adjustment plate are connected and fixed in a front-to-back swing manner via an elastic connection block (15).

9. The large-load objective lens five-dimensional mirror frame according to claim 1, characterized in that: The left-right swing module (1) and the front-back swing module (8) are both movably locked by a positioning locking piece.

10. The large-load objective lens five-dimensional mirror frame according to claim 1, characterized in that: A support frame (9) is provided around the outside of the large objective lens mounting plate (7).

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