Optical collimation device

Abstract

The utility model provides an optical collimation device comprising a receiving module used for receiving optical path information; the focusing module is used for focusing the light and reflecting the light into the receiving module; wherein the focusing module comprises an objective lens assembly, the objective lens assembly is provided with a reflecting surface for light rays, and the objective lens assembly is configured to be in a movable connection mode capable of rotating around an axis so as to change the path of the light rays reflected by the reflecting surface; the axis is perpendicular to the plane where the incident light and the reflected light are located. According to the optical collimation device, the focusing module in the existing optical collimation device is improved, and the light reflecting surface of the focusing module is configured to be a rotatable surface, so that accurate focusing is realized, the light is accurately reflected to the receiving module, and subsequent reflected light information analysis is facilitated; the requirements of semiconductor measuring equipment on light focusing precision and light path control precision can be well met, the accuracy of a test result is effectively improved, and great convenience is brought to analysis of semiconductor products, especially semiconductor film materials.

Description

Technical Field

[0001] The present application relates to the field of semiconductor manufacturing equipment, and in particular to an optical alignment device. Background Art

[0002] In the development and application of optical equipment, the precise coordination of focusing elements and receiving elements is the basis for achieving high-quality imaging and accurate data capture. Focusing elements, such as parabolic mirrors, focusing lenses, and spherical reflectors, play the role of converging light to a specific area in the optical system. The core of their design is to achieve effective collection and focusing of light. At the same time, receiving elements, such as spectrometers or CCD detectors, are responsible for receiving and processing the focused light and converting it into readable data or images. Since the receiving surface of the receiving element must be within the depth of focus to ensure that the received information is accurate, the coordination accuracy between the focusing element and the receiving element is extremely high.

[0003] In existing optical devices, how to accurately find the focus position has become a key technical issue. The accuracy of the focus position directly affects the imaging quality of the optical device and the accuracy of data capture. Therefore, when designing and manufacturing optical devices, technicians usually need to spend a lot of time and energy to debug and optimize the relative position between the focusing element and the receiving element to ensure that it can achieve the best performance in actual use.

[0004] However, due to the complexity and precision of optical systems, traditional debugging and optimization methods often have problems such as low efficiency and insufficient precision, which makes it difficult to meet the high-precision and high-efficiency requirements of modern optical equipment. The collimation light path of conventional optical equipment is generally adjusted manually, and the final collimation accuracy is closely related to the level of personnel, and the consistency of the equipment is difficult to guarantee. Therefore, exploring new focus positioning technologies and methods to improve the performance of optical equipment has become one of the important research directions in the current field of optical technology. Utility Model Content

[0005] In view of the above-mentioned defects and deficiencies existing in the optical devices in the prior art, the purpose of the present application is to provide an optical collimation device to solve the consistency problem of optical path adjustment and other related problems.

[0006] The present application provides an optical collimation device, comprising:

[0007] A receiving module, used to receive optical path information;

[0008] A focusing module, used for focusing light and reflecting the light into the receiving module; wherein the focusing module comprises an objective lens assembly, the objective lens assembly has a reflection surface for the light, and the objective lens assembly is configured in a movable connection mode that can rotate around an axis to change the path of the light reflected by the reflection surface;

[0009] The axis is perpendicular to the plane where the incident light and the reflected light are located.

[0010] In some embodiments, the focusing module further comprises:

[0011] A support member, wherein the support member has a U-shaped clamping plate for clamping the objective lens assembly, and two clamping plates arranged opposite to each other have a rotating pin structure so that the objective lens assembly can rotate around an axis;

[0012] An adjusting member is located below the objective lens assembly and abuts against the objective lens assembly; along the direction of the incident light, there is a certain distance between the adjusting member, the fulcrum of the objective lens assembly and the rotating axis of the objective lens assembly, so that when the adjusting member raises or lowers the height of the objective lens assembly, the objective lens assembly can rotate around the axis to change the reflection angle of the reflection surface.

[0013] In some embodiments, the objective lens assembly includes a cover shell and a focusing objective lens, the cover shell having a first channel running through along the direction of the incident light, and a second channel opened on the side wall of the cover shell for reflected light to emit; a focusing objective lens is arranged at the other end of the first channel opposite to the incident light, and a reflecting surface of the focusing objective lens is located at the junction of the first channel and the second channel to change the direction of the incident light so that it is reflected into the slit of the receiving module.

[0014] In some embodiments, a projection area of ​​the second channel on the reflective surface is greater than or equal to an area of ​​the reflective surface.

[0015] In some embodiments, the adjusting member is a retractable kit structure, including a fixed portion disposed on the supporting member, and a movable portion that can reciprocate relative to the fixed portion, and the movable portion abuts against the bottom of the objective lens assembly.

[0016] In some embodiments, the fixed portion and the movable portion of the adjusting member are threadedly connected.

[0017] In some embodiments, the fixing portion of the adjusting member has an inserting groove, and the supporting member has a protruding partition, and the protruding partition is engaged in the inserting groove so that the fixing portion is installed on the supporting member.

[0018] In some embodiments, an adjustment module is further included to adjust the position and angle of the receiving module, and the adjustment module includes:

[0019] A first direction adjustment mechanism and a second direction adjustment mechanism are used to adjust the position of the receiving module in the first direction and the second direction respectively;

[0020] A third direction adjustment mechanism, used to adjust the rotation angle of the receiving module along the third direction;

[0021] The first direction intersects the second direction, and the third direction is the normal direction of the plane where the first direction and the second direction are located.

[0022] In some embodiments, a mounting module is further included, wherein the mounting module has a first supporting portion for fixing the adjustment module and a second supporting portion for fixing the focusing module.

[0023] In some embodiments, an L-shaped bracket is further included for installing the adjustment module, and the adjustment module is indirectly disposed on the installation module through the L-shaped bracket.

[0024] Compared with the prior art, the technical solution provided by this application has the following beneficial effects:

[0025] In the technical solution of the present application, by improving the focusing module in the existing optical collimation device, the light reflection surface of the focusing module is configured as a rotatable surface to change the light path reflected by the reflection surface, thereby achieving precise focusing and accurately reflecting the light to the receiving module, which is convenient for subsequent analysis of the reflected light information and obtaining the physical parameters of the sample to be tested. The device can better meet the requirements of semiconductor measurement equipment for light focusing accuracy and light path control accuracy, effectively improve the accuracy of test results, and bring great convenience to the analysis of semiconductor products, especially semiconductor thin film materials. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a schematic diagram of the spectral reflection measurement principle in the prior art;

[0027] Figure 2 It is a schematic diagram of the principle of spectral ellipsometry measurement in the prior art;

[0028] Figure 3 A schematic diagram of the structure of the optical collimation device provided in this application;

[0029] Figure 4 A schematic structural diagram of the optical collimation device provided by the present application from another perspective;

[0030] Figure 5 A front view of the optical alignment tool provided for this application;

[0031] Figure 6 A schematic diagram of the structure of the focusing module provided in this application;

[0032] Figure 7 A schematic top view of the focusing module provided in this application;

[0033] Figure 8 A cross-sectional structural diagram of the focusing module provided in this application;

[0034] Fig. 9 A schematic diagram of the structure of the adjustment module provided in this application.

[0035] Description of reference numerals:

[0036] 1. Light source and components; 2. Spectroscope; 3. Objective lens; 4. Detector; 5. Sample to be tested; 6. Motion platform; 7. Polarizer component; 8. Polarizer component;

[0037] 10. Receiving module;

[0038] 20, focusing module; 210, supporting member; 220, fixing pin; 230, cover; 231, first channel; 232, second channel; 240, focusing objective lens; 241, reflecting surface; 250, adjusting member;

[0039] 30. Adjustment module; 310. First direction adjustment mechanism; 320. Second direction adjustment mechanism; 330. Third direction adjustment mechanism;

[0040] 40. Install the module. DETAILED DESCRIPTION

[0041] See also Figure 1 and Figure 2 In the architecture of semiconductor optical non-destructive measurement, there are generally two optical architectures: spectral reflectance measurement and spectral ellipsometry. Ellipsometry is a non-destructive technique used to characterize the optical properties of materials, especially semiconductor films. It obtains information by measuring the change in the polarization state of the reflected light of polarized light on the surface of the sample. When linearly polarized light is incident on the sample, the polarization state of the reflected light changes due to the optical properties of the sample, forming elliptically polarized light. This change can be described by the ellipsometric parameters Ψ (Psi) and Δ (Delta), which are related to the optical properties of the sample such as thickness, refractive index and extinction coefficient.

[0042] Spectral reflectometry is a technique used to study materials by analyzing the spectral properties of light reflected from a sample surface. This technique can be used to measure the thickness, refractive index, and absorption properties of thin films. In the semiconductor industry, reflectance spectroscopy can be used to study the optical and physical properties of thin films deposited on silicon wafers.

[0043] In both of the above measurement methods, the spectrometer obtains detailed information about thin films or other samples by accurately measuring the changes in the spectrum after the interaction between light and matter. In ellipsometry and spectral reflectometry systems, the attitude, position, and angle of the receiving light path of the spectrometer are crucial to the accuracy of system measurement and detection and the quality of the data.

[0044] In view of the above problems, the present application provides an optical collimation device, and the specific implementation of the technical solution is as follows. Those skilled in the art can easily understand other advantages and effects of the present application from the contents disclosed in this specification. The present application can also be implemented or applied through other different specific implementations, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present application.

[0045] See also Figure 3 to Figure 9 , this embodiment provides an optical collimation device, comprising:

[0046] A receiving module 10, for receiving optical path information;

[0047] The focusing module 20 is used to focus the light and reflect the light into the receiving module 10; wherein, the focusing module 20 includes an objective lens assembly, the objective lens assembly has a reflecting surface 241 for the light, and the objective lens assembly is configured as a movable connection that can rotate around an axis to change the path of the light reflected by the reflecting surface 241; the axis is perpendicular to the plane where the incident light and the reflected light are located.

[0048] See also Figure 3 to Figure 5 Specifically, the receiving module 10 is configured as a box structure, and the box has the necessary components for receiving and analyzing the optical path information, which will not be described in detail here. As an example, the receiving module 10 can be a spectrometer. There is a slit (not shown in the figure) at the bottom of the spectrometer for the focused light to pass through and enter the instrument accurately, so as to obtain effective spectral data.

[0049] Continue to see Figure 3 to Figure 5 In an optional embodiment, the receiving module 10 is disposed on the adjustment module 30 via an L-shaped adapter plate, so that the receiving module 10 can change its own position and angle by executing the action of the adjustment module 30, so that the light can be accurately incident on the inside of the module.

[0050] See also Figure 6 to Figure 8 Specifically, the focusing module 20 includes a supporting member 210 and an adjusting member 250, wherein:

[0051] The support member 210 has a U-shaped clamping plate for clamping the objective lens assembly, and a bottom mounting plate connected to the clamping plate for mounting the adjusting member 250. The two clamping plates arranged opposite to each other have a rotating pin structure, that is, a fixing pin 220 arranged on the objective lens assembly and a through hole penetrating the clamping plate. The objective lens assembly rotates in the through hole of the clamping plate through the fixing pin 220 to adjust the position parameters such as the angle and height of the reflecting surface 241 of the focusing objective lens 240.

[0052] The adjusting member 250 is located below the objective lens assembly and is against the objective lens assembly; along the direction of the incident light, there is a certain distance between the adjusting member 250 and the fulcrum of the objective lens assembly and the rotating axis of the objective lens assembly, so that when the adjusting member 250 raises or lowers the height of the objective lens assembly, the objective lens assembly can rotate around the axis to change the reflection angle of the reflection surface 241.

[0053] See also Figure 8 In some embodiments, the objective lens assembly includes a housing 230 and a focusing objective lens 240, wherein the housing 230 has a first channel 231 extending along the direction of the incident light, and a second channel 232 opened on the side wall of the housing for the reflected light to be emitted; the focusing objective lens 240 is arranged at the other end of the first channel 231 opposite to the incident light, and the reflecting surface 241 of the focusing objective lens 240 is located at the junction of the first channel 231 and the second channel 232 to change the direction of the incident light so that the incident light is reflected into the slit of the receiving module 10. In an optional embodiment, the projection area of ​​the second channel 232 on the reflecting surface 241 is greater than or equal to the area of ​​the reflecting surface 241, so that the light has a larger adjustment range of the reflection area.

[0054] See also Figure 6 to Figure 8 In some embodiments, the adjustment member 250 is a retractable kit structure, including a fixed portion disposed on the support member 210, and a movable portion that can reciprocate relative to the fixed portion, and the movable portion abuts against the bottom of the objective lens assembly, specifically passing through the cover 230 and abutting against the bottom of the focusing objective lens 240 to raise the height of the objective lens assembly close to one end of the focusing objective lens 240, thereby causing the focusing objective lens 240 to rotate around the axis to accurately adjust the reflection angle of the reflection surface 241.

[0055] Continue to see Figure 6 to Figure 8 In some embodiments, the fixed part and the movable part of the adjusting member 250 are threadedly connected. By rotating the movable part that abuts against the objective lens assembly, the telescopic length of the adjusting member 250 is changed to change the position and angle of the objective lens assembly.

[0056] Continue to see Figure 6 to Figure 8In some embodiments, the fixed portion of the adjusting member 250 has a plug-in slot, and the support member 210 has a mounting cavity, in which a raised partition is provided, and the raised partition is engaged in the plug-in slot of the adjusting member 250, so that the fixed portion is mounted on the support member 210. The plug-in method of the adjusting member 250 and the support member 210 is simple in structure and easy to operate, and is also convenient for the replacement and maintenance of parts. It can be understood that the connection method of the adjusting member 250 and the support member 210 is not limited to the above-mentioned plug-in method, and any connection structure that can achieve the same fixed connection effect is applicable to the present application.

[0057] See also Figure 3 to Figure 5 , Fig. 9 The optical collimation device further includes an adjustment module 30 for adjusting the position and angle of the receiving module 10. The adjustment module 30 includes:

[0058] The first direction adjustment mechanism 310 and the second direction adjustment mechanism 320 are used to adjust the position of the receiving module 10 in the first direction and the second direction respectively;

[0059] A third direction adjustment mechanism 330, used to adjust the rotation angle of the receiving module 10 along the third direction;

[0060] The first direction intersects the second direction, and the third direction is the normal direction of the plane where the first direction and the second direction are located. It can be understood that the first direction and the second direction can be perpendicular to each other, and the first direction can be the incident direction of the light, or a certain direction in the installation plane of the optical collimation device. Figure 3 to Figure 5 The position of the receiving module 10 in the vertical plane and the light receiving angle can be accurately adjusted through the first direction adjustment mechanism 310 , the second direction adjustment mechanism 320 and the third direction adjustment mechanism 330 .

[0061] In some embodiments, a mounting module 40 is further included, and the mounting module 40 has a first support portion, that is, a base, for fixing the adjustment module 30, and a second support portion for fixing the focusing module 20. Furthermore, the mounting module 40 also includes an L-shaped bracket for mounting the adjustment module 30, and the adjustment module 30 is indirectly disposed on the base of the mounting module 40 through the L-shaped bracket.

[0062] In summary, the optical collimation device provided by the present application improves the focusing module in the existing optical collimation device, configures the light reflection surface of the focusing module as a rotatable surface, so as to change the light path reflected by the reflection surface, thereby achieving precise focusing and accurately reflecting the light to the receiving module, which is convenient for subsequent analysis of reflected light information and obtaining physical parameters of the sample to be tested. The posture of the focusing objective lens 240 can be adjusted manually by adjusting the adjustment member 250 so that the parallel light segment of the light path can be incident along the center. Then, the adjustment mechanism of the adjustment module is driven by the host computer to collect energy curves at different positions, and then the maximum energy position is found through software analysis, and the position of each adjustment mechanism at this time is found. This device can better meet the requirements of semiconductor measurement equipment for light focusing accuracy and light path control accuracy, effectively improve the accuracy of test results, and bring great convenience to the analysis of semiconductor products, especially semiconductor thin film materials. The technical solution of the present application has a high industrial utilization value because it effectively overcomes various shortcomings in the prior art.

[0063] The above embodiments are merely illustrative of the principles and effects of the present application and are not intended to limit the present application. Anyone familiar with the technology may modify or change the above embodiments without violating the spirit and scope of the present application. Therefore, all equivalent modifications or changes made by a person of ordinary skill in the art without departing from the spirit and technical ideas disclosed in the present application shall still be covered by the claims of the present application.

Claims

1. An optical collimation device, characterized in that: include: A receiving module, used to receive optical path information; A focusing module, used for focusing light and reflecting the light into the receiving module; wherein the focusing module comprises an objective lens assembly, the objective lens assembly has a reflection surface for the light, and the objective lens assembly is configured in a movable connection mode that can rotate around an axis to change the path of the light reflected by the reflection surface; The axis is perpendicular to the plane where the incident light and the reflected light are located.

2. The optical collimation device according to claim 1, characterized in that: The focusing module also includes: A support member, wherein the support member has a U-shaped clamping plate for clamping the objective lens assembly, and two clamping plates arranged opposite to each other have a rotating pin structure so that the objective lens assembly can rotate around an axis; An adjusting member is located below the objective lens assembly and abuts against the objective lens assembly; along the direction of the incident light, there is a certain distance between the adjusting member, the fulcrum of the objective lens assembly and the rotating axis of the objective lens assembly, so that when the adjusting member raises or lowers the height of the objective lens assembly, the objective lens assembly can rotate around the axis to change the reflection angle of the reflection surface.

3. The optical collimation device according to claim 2, characterized in that: The objective lens assembly includes a cover shell and a focusing objective lens. The cover shell has a first channel that runs through the direction of the incident light, and a second channel that is opened on the side wall of the cover shell for the reflected light to emit. The focusing objective lens is arranged at the other end of the first channel opposite to the incident light, and the reflecting surface of the focusing objective lens is located at the junction of the first channel and the second channel to change the direction of the incident light so that it is reflected into the slit of the receiving module.

4. The optical collimation device according to claim 3, characterized in that: A projection area of ​​the second channel on the reflection surface is greater than or equal to an area of ​​the reflection surface.

5. The optical collimation device according to claim 2, characterized in that: The adjusting member is a retractable kit structure, comprising a fixed part arranged on the supporting member, and a movable part which can reciprocate relative to the fixed part, and the movable part abuts against the bottom of the objective lens assembly.

6. The optical collimation device according to claim 5, characterized in that: The fixed part and the movable part of the adjusting member are threadedly connected.

7. The optical collimation device according to claim 5, characterized in that: The fixing part of the adjusting member has an inserting groove, and the supporting member has a protruding partition plate, and the protruding partition plate is engaged in the inserting groove so that the fixing part is installed on the supporting member.

8. The optical collimation device according to claim 1, characterized in that: It also includes an adjustment module for adjusting the position and angle of the receiving module, and the adjustment module includes: A first direction adjustment mechanism and a second direction adjustment mechanism are used to adjust the position of the receiving module in the first direction and the second direction respectively; A third direction adjustment mechanism, used to adjust the rotation angle of the receiving module along the third direction; The first direction intersects the second direction, and the third direction is the normal direction of the plane where the first direction and the second direction are located.

9. The optical collimation device according to claim 8, characterized in that: It also includes an installation module, which has a first supporting part for fixing the adjustment module and a second supporting part for fixing the focusing module.

10. The optical collimation device according to claim 9, characterized in that: It also includes an L-shaped bracket for installing the adjustment module, and the adjustment module is indirectly arranged on the installation module through the L-shaped bracket.

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