Wafer processing flower basket convenient to clean

Abstract

The utility model discloses a wafer processing flower basket convenient to clean, which comprises a first toothed plate and a second toothed plate, one side of the first toothed plate is rotatably connected with a connecting plate, one side of the second toothed plate is fixedly connected with a rotating column, the outer surface of the rotating column is movably provided with a clamping plate, one end of the clamping plate is inserted with a compression bolt, and the other end of the clamping plate is fixedly connected with the rotating column. One end of the compression bolt is in threaded connection with one side of the second toothed plate, and the outer surface of the clamping plate is connected with the outer surface of the connecting plate in a clamped mode. The clamping plates are loosened by rotating the compression bolts, then the clamping plates are rotated to relieve limitation on the connecting plates, and then the connecting plates, the first toothed plates and the side plates are sequentially rotated, so that the flower basket is unfolded, tooth grooves in the flower basket are conveniently cleaned, the structure is simple, cleaning is convenient, and the cleaning efficiency of the flower basket is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of integrated circuits, in particular to a flower basket for wafer processing which is convenient to clean. Background Art

[0002] Wafer, also known as chip substrate, is the carrier for chip processing in semiconductor manufacturing. Its core material is silicon. It is mainly used in the fields of electronics, communications and medicine. During the wafer processing, it is usually loaded in a basket for transportation. The basket usually needs to be cleaned after a period of use to wash away dust or other chemical raw materials attached to its surface. This can not only prevent the subsequent loaded wafers from being contaminated, but also increase its service life.

[0003] In the prior art, for example, Chinese patent CN219457547U discloses a multi-angle plug-in teaching device for ideological and political education, wherein the flower basket compatible with multi-size wafer processing comprises a first bracket, a second bracket is installed in the first bracket, and the second bracket and the first bracket are detachably arranged. The first bracket comprises two first vertical plates, a first horizontal plate and a second horizontal plate are fixedly installed between the two first vertical plates, and a plurality of linearly distributed first positioning strips are fixedly installed on the sides of the two first vertical plates close to each other, and a positioning groove is provided on the top of the first vertical plate. The second bracket comprises two second vertical plates, a third horizontal plate and a fourth horizontal plate are fixedly installed between the two second vertical plates, and a plurality of linearly distributed second positioning strips are fixedly installed on the sides of the two second vertical plates close to each other.

[0004] Currently, most of the flower baskets used for wafer processing are integrally formed. In order to facilitate the fixation of the wafers, more baffles can be provided, which makes it particularly important to clean the baffle gaps during the cleaning process. Since the baffles are located inside the flower basket, it is more cumbersome for the staff to clean it, which takes more time and reduces the efficiency of the flower basket cleaning. Utility Model Content

[0005] The utility model aims to provide a flower basket for wafer processing which is easy to clean, so as to solve the problems raised in the above-mentioned background technology.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a flower basket for wafer processing that is easy to clean, comprising a first tooth plate and a second tooth plate, one side of the first tooth plate is rotatably connected to a connecting plate, one side of the second tooth plate is fixedly connected to a rotating column, a clamping plate is movably provided on the outer surface of the rotating column, one end of the clamping plate is inserted with a clamping bolt, one end of the clamping bolt is threadedly connected to one side of the second tooth plate, the outer surface of the clamping plate is clamped with the outer surface of the connecting plate, the other sides of the first tooth plate and the second tooth plate are rotatably connected to a side plate, one side of the side plate is tightly fitted with one side of the first tooth plate and the second tooth plate.

[0007] As a further preferred embodiment of the present technical solution, the connecting plate includes an adjustment plate No. 1 and an adjustment plate No. 2, the outer surface of the adjustment plate No. 2 is slidably connected to the inside of the adjustment plate No. 1, a plurality of threaded holes are penetrated through one side of the adjustment plate No. 1 and the adjustment plate No. 2 and located at the same position, any two threaded holes located at the same position are threadedly connected with fixing bolts, and the side plate structure is the same as the connecting plate structure.

[0008] As a further preferred embodiment of the present technical solution, positioning grooves are provided on the top and bottom surfaces of the No. 1 adjustment plate, and positioning rods are fixedly connected to the top and bottom ends of the No. 2 adjustment plate, and the outer surfaces of the two positioning rods are respectively slidably connected to the inner surfaces of the two positioning grooves.

[0009] As a further preferred embodiment of the present technical solution, the top ends of the first tooth plate and the second tooth plate are fixedly connected with lifting plates, and reinforcing ribs are fixedly connected between the bottom ends of the two lifting plates and the first tooth plate and the second tooth plate.

[0010] As a further preferred embodiment of the present technical solution, drainage holes are provided on one side of the first tooth plate and the second tooth plate.

[0011] The utility model provides a flower basket for wafer processing that is easy to clean and has the following beneficial effects:

[0012] (1) The utility model loosens the clamping plate by rotating the clamping bolt, then rotates the clamping plate to release the restriction on the connecting plate, and then rotates the connecting plate, the first tooth plate and the side plate in sequence to realize the unfolding of the flower basket, making it convenient to clean the tooth grooves inside the flower basket. The utility model has a simple structure, is easy to clean, and improves the cleaning efficiency of the flower basket.

[0013] (2) The utility model removes the fixing bolts from the threaded holes to release the restrictions on the No. 1 adjustment plate and the No. 2 adjustment plate, then pulls the first tooth plate and the second tooth plate to appropriate positions and fixes them again with the fixing bolts, thereby adjusting the size of the flower basket, allowing the flower basket to load wafers of different sizes, thereby improving the practicality of the flower basket. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0015] Figure 2 It is a schematic diagram of the overall structure of the utility model;

[0016] Figure 3 This is a schematic diagram of the structure of the flower basket after the size of the utility model is adjusted;

[0017] Figure 4 It is an exploded schematic diagram of the structure of the first adjustment plate and the second adjustment plate of the utility model.

[0018] In the figure: 1. first tooth plate; 2. second tooth plate; 3. connecting plate; 4. side plate; 5. rotating column; 6. clamping plate; 7. clamping bolt; 8. No. 1 adjusting plate; 9. No. 2 adjusting plate; 10. threaded hole; 11. fixing bolt; 12. lifting plate; 13. drainage hole; 14. positioning groove; 15. positioning rod; 16. reinforcing rib. DETAILED DESCRIPTION

[0019] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the accompanying drawings in the embodiments of the present invention.

[0020] The utility model provides a technical solution: Figure 1-4 As shown, in the present embodiment, a flower basket for wafer processing which is convenient for cleaning comprises a first tooth plate 1 and a second tooth plate 2, one side of the first tooth plate 1 is rotatably connected with a connecting plate 3, one side of the second tooth plate 2 is fixedly connected with a rotating column 5, a clamping plate 6 is movably provided on the outer surface of the rotating column 5, one end of the clamping plate 6 is inserted with a clamping bolt 7, one end of the clamping bolt 7 is threadedly connected to one side of the second tooth plate 2, the outer surface of the clamping plate 6 is clamped with the outer surface of the connecting plate 3, the other side of the first tooth plate 1 and the second tooth plate 2 is rotatably connected with a side plate 4, one side of the side plate 4 is tightly fitted with one side of the first tooth plate 1 and the second tooth plate 2, wherein, by providing the clamping plate 6, it can be fixed by clamping with the connecting plate 3, and by providing the clamping bolt 7, pressure can be applied to the clamping plate 6, so that the clamping between the connecting plate 3 and the clamping plate 6 is tighter.

[0021] like Figure 1 , Figure 3 and Figure 4As shown, the connecting plate 3 includes an adjusting plate No. 1 8 and an adjusting plate No. 2 9, the outer surface of the adjusting plate No. 2 9 is slidably connected to the inside of the adjusting plate No. 1 8, and a plurality of threaded holes 10 are provided on one side of the adjusting plate No. 1 8 and the adjusting plate No. 2 9 and are located at the same position, and any two threaded holes 10 located at the same position are internally threadedly connected with fixing bolts 11, and the structure of the side plate 4 is the same as that of the connecting plate 3, and by providing the threaded holes 10, the adjusting plate No. 1 8 and the adjusting plate No. 2 9 can be fixed by the fixing bolts 11, and by providing a plurality of threaded holes 10, the adjustment of different sizes of flower baskets can be realized.

[0022] like Figure 4 As shown, positioning grooves 14 are provided on the top and bottom surfaces of the No. 1 adjustment plate 8, and positioning rods 15 are fixedly connected to the top and bottom ends of the No. 2 adjustment plate 9, and the outer surfaces of the two positioning rods 15 are slidingly connected to the inner surfaces of the two positioning grooves 14 respectively. By setting the positioning grooves 14 and the positioning rods 15, the No. 2 adjustment plate 9 can be positioned to improve its stability during movement and prevent it from falling off.

[0023] like Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, the top ends of the first tooth plate 1 and the second tooth plate 2 are fixedly connected with a lifting plate 12, and the bottom ends of the two lifting plates 12 and the first tooth plate 1 and the second tooth plate 2 are fixedly connected with reinforcing ribs 16. By providing the lifting plates 12, it is convenient to take the flower basket, and by providing the reinforcing ribs 16, the stability of the structure between the lifting plates 12 and the first tooth plate 1 and the second tooth plate 2 can be enhanced.

[0024] like Figure 3 and Figure 4 As shown, drainage holes 13 are provided on one side of the first tooth plate 1 and the second tooth plate 2 to facilitate the outflow and inflow of liquid and facilitate the processing or cleaning of wafers.

[0025] The utility model provides a flower basket for wafer processing that is easy to clean. The specific working principle is as follows:

[0026] When the flower basket needs to be cleaned after working for a period of time, the staff turns the clamping bolt 7 to loosen the clamping plate 6, and then turns the clamping plate 6 to release the restriction on the connecting plate 3, and then turns the connecting plate 3, the first tooth plate 1 and the side plate 4 in turn to clean the flower basket. When the flower basket needs to be loaded with wafers of different sizes, the staff takes out the fixing bolt 11 from the threaded hole 10, releases the restriction on the No. 1 adjustment plate 8 and the No. 2 adjustment plate 9, and then pulls the first tooth plate 1 and the second tooth plate 2 to the appropriate position, and then fixes them again with the fixing bolt 11 to complete the adjustment of the flower basket size.

[0027] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A conveniently cleaned flower basket for wafer processing, comprising a first tooth plate (1) and a second tooth plate (2), characterized in that: One side of the first tooth plate (1) is rotatably connected to a connecting plate (3), one side of the second tooth plate (2) is fixedly connected to a rotating column (5), a clamping plate (6) is movably provided on the outer surface of the rotating column (5), one end of the clamping plate (6) is inserted with a clamping bolt (7), one end of the clamping bolt (7) is threadedly connected to one side of the second tooth plate (2), the outer surface of the clamping plate (6) is clamped with the outer surface of the connecting plate (3), the other side of the first tooth plate (1) and the second tooth plate (2) are rotatably connected to a side plate (4), one side of the side plate (4) is tightly fitted with one side of the first tooth plate (1) and the second tooth plate (2).

2. The easy-to-clean flower basket for wafer processing according to claim 1, characterized in that: The connecting plate (3) comprises a first adjusting plate (8) and a second adjusting plate (9), the outer surface of the second adjusting plate (9) being slidably connected to the inside of the first adjusting plate (8), a plurality of threaded holes (10) being provided through one side of the first adjusting plate (8) and the second adjusting plate (9) and located at the same position, any two threaded holes (10) located at the same position being internally threadedly connected with fixing bolts (11), and the structure of the side plate (4) being the same as that of the connecting plate (3).

3. The easy-to-clean flower basket for wafer processing according to claim 2, characterized in that: The top and bottom surfaces of the first adjustment plate (8) are both provided with positioning grooves (14), the top and bottom ends of the second adjustment plate (9) are both fixedly connected with positioning rods (15), and the outer surfaces of the two positioning rods (15) are respectively slidably connected to the inner surfaces of the two positioning grooves (14).

4. The easy-to-clean flower basket for wafer processing according to claim 3, characterized in that: The top ends of the first tooth plate (1) and the second tooth plate (2) are both fixedly connected with a lifting plate (12), and the bottom ends of the two lifting plates (12) and the first tooth plate (1) and the second tooth plate (2) are both fixedly connected with reinforcing ribs (16).

5. The easy-to-clean flower basket for wafer processing according to claim 4, characterized in that: A drainage through hole (13) is provided on one side of the first tooth plate (1) and the second tooth plate (2).

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