Wafer basket bracket, wafer drying equipment and wafer cleaning equipment
By designing a sheet basket bracket compatible with 6-inch and 8-inch sheet baskets, the limit structure is used to ensure the stable connection between the bracket and the sheet basket, the problem of using different brackets in the prior art is solved, and the efficiency and stability of cleaning or drying are improved.
Patent Information
- Application Number
- CN202420411097.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-04
- Publication Date
- 2025-03-28
- Estimated Expiration
- 2034-03-04
AI Technical Summary
When handling wafers of different sizes, existing basket brackets need to be replaced with the adapted brackets, resulting in unstable load bearing, affecting the cleaning or drying effect, and the replacement process is cumbersome and easy to contaminate the equipment.
A sheet basket bracket is designed, and by setting the first limit bottom plate, the limit side plate, the limit plate and the limit angle, it can be compatible with the 6-inch and 8-inch sheet baskets to ensure a stable connection between the bracket and the sheet basket.
This design solves the problem that different sizes of baskets need to be replaced with different sizes of brackets, improves the stability and efficiency of wafer cleaning or drying, and reduces the risk of contamination during replacement.
Smart Images
Figure CN222690654U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of wafer cleaning, in particular to a wafer basket bracket, wafer drying equipment and wafer cleaning equipment. Background Art
[0002] The wafer basket holder is a device used to carry the wafer basket during the wafer cleaning and drying process.
[0003] In the cleaning or drying operation of 6-inch or 8-inch wafers, batch cleaning is mostly used. A wafer basket is used to carry multiple wafers at a time and placed in a wafer basket holder in a cleaning tank or drying device for batch cleaning or drying operations. The use of a wafer basket to carry wafers and a cleaning tank in coordination can improve the cleaning or drying efficiency of the wafers and increase the production output of the wafers.
[0004] The existing wafer basket bracket needs to be replaced with a suitable wafer basket bracket when cleaning or drying wafers of different sizes. A wafer basket bracket that is too large or too small will cause the wafer basket supporting the wafers to be unstable in connection with the wafer basket, resulting in cleaning failure. However, the wafer basket bracket is troublesome to replace, and the user needs to manually disconnect the old wafer basket bracket and replace it with a wafer basket bracket of another size. During this operation, it is also easy to contaminate the equipment at the cleaning or drying position, affecting the quality of cleaning or drying. Utility Model Content
[0005] In order to solve the technical problem in the prior art that wafer baskets of different sizes need to be replaced with different wafer basket brackets, which affects the cleaning effect, the utility model proposes a wafer basket bracket, a wafer drying device and a wafer cleaning device.
[0006] The technical solution adopted by the utility model is:
[0007] The utility model provides a film basket bracket, the film basket bracket comprising:
[0008] Two first limit bottom plates, which are spaced apart and arranged in parallel, and the space between the two first limit bottom plates corresponds to the width of the bottom of the first size sheet basket, so as to limit the movement of the first size sheet basket to both sides;
[0009] A supporting base frame, the supporting base frame is arranged below the first limiting base plate and supports the bottom of the first-sized sheet basket;
[0010] Two limiting side plates, the two limiting side plates are vertically arranged at the two ends of the first limiting bottom plate, a limiting plate parallel to the limiting side plates is arranged between the two first limiting bottom plates, the limiting plate cooperates with one of the limiting side plates to limit the first size sheet basket from moving toward the limiting side plates, and the two limiting side plates limit the second size sheet basket from moving toward the limiting side plates;
[0011] A plurality of limiting angles are respectively arranged on the two first limiting bottom plates, and the limiting angles limit the second size sheet basket from moving to both sides.
[0012] Furthermore, the film basket bracket also includes:
[0013] A fixed bracket, wherein the fixed bracket is parallel to the first position-limiting bottom plate and is arranged between the two first position-limiting bottom plates;
[0014] The two ejection plates are vertically fixed to the fixed bracket on opposite sides of the fixed bracket to lift up the wafers in the wafer basket.
[0015] Furthermore, two limiting plates are provided, and the limiting plates are respectively fixed to the two ejection plates.
[0016] Furthermore, the height of the limiting plate is the same as the height of the limiting side plate.
[0017] Furthermore, the limiting angle includes:
[0018] A fixing portion, the fixing portion being fixed to the first limiting bottom plate;
[0019] The abutting portion is perpendicular to the fixing portion, and a notch is provided on the top of the abutting portion corresponding to the bottom of the second size sheet basket.
[0020] Furthermore, the height of the limiting plate is the same as the height of the limiting side plate.
[0021] Furthermore, limiting angles are respectively provided at both ends of the first limiting bottom plate and between the two limiting side plates.
[0022] Furthermore, the supporting chassis is a rectangular frame, and the side frames on opposite sides are fixed to the first limiting bottom plate, and the bottom of the first-sized sheet basket is supported on the side frames on opposite sides of the frame.
[0023] Furthermore, the first-size sheet basket is a 6-inch sheet basket, and the second-size sheet basket is an 8-inch sheet basket.
[0024] The utility model also provides a wafer drying device, comprising the wafer basket bracket.
[0025] The utility model also provides a wafer cleaning device, comprising the wafer basket bracket.
[0026] Compared with the prior art, the film basket bracket proposed by the utility model can accommodate two sizes of film baskets. The first limiting bottom plate is set to limit the movement of the first size film basket to the two sides, and the limiting plate cooperates with one of the limiting side plates to limit the movement of the first size film basket to the limiting side plate; the two limiting side plates limit the movement of the second size film basket to the limiting side plate, and the limiting angle limits the movement of the second size film basket to the two sides. This solves the problem that the prior art requires the replacement of different sizes of film baskets, which easily causes washing or drying failure. BRIEF DESCRIPTION OF THE DRAWINGS
[0027] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.
[0028] Figure 1 It is a three-dimensional structural schematic diagram of an embodiment of the utility model;
[0029] Figure 2 This is a schematic diagram of installing a second size sheet basket in an embodiment of the utility model;
[0030] Figure 3 This is a schematic diagram of installing a first-size sheet basket in an embodiment of the utility model;
[0031] Figure 4 This is a left view of a first-size sheet basket installed in an embodiment of the utility model;
[0032] Figure 5 A bottom view of an embodiment of the utility model;
[0033] Figure 6 It is a front view of an embodiment of the utility model;
[0034] Figure 7 A top view of an embodiment of the utility model;
[0035] 01, first size sheet basket; 02, second size sheet basket;
[0036] 2. The first limiting bottom plate;
[0037] 3. Limiting side panels;
[0038] 4. Support chassis;
[0039] 5. Restriction plate;
[0040] 6. Limit angle;
[0041] 8. Ejector plate;
[0042] 9. Fix the bracket. DETAILED DESCRIPTION
[0043] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.
[0044] The principle and structure of the present utility model are described in detail below with reference to the accompanying drawings and embodiments.
[0045] The wafer basket holder is a device used to carry the wafer basket during the wafer cleaning and drying process.
[0046] In the cleaning or drying operation of 6-inch or 8-inch wafers, batch cleaning is mostly used. A wafer basket is used to carry multiple wafers at a time and placed in a wafer basket holder in a cleaning tank or drying device for batch cleaning or drying operations. The use of a wafer basket to carry wafers and a cleaning tank in coordination can improve the cleaning or drying efficiency of the wafers and increase the production output of the wafers.
[0047] The existing wafer basket bracket needs to be replaced with a suitable wafer basket bracket when cleaning or drying wafers of different sizes. A wafer basket bracket that is too large or too small will cause the wafer basket supporting the wafers to be unstable in connection with the wafer basket, resulting in cleaning failure. However, the wafer basket bracket is troublesome to replace, and the user needs to manually disconnect the old wafer basket bracket and replace it with a wafer basket bracket of another size. During this operation, it is also easy to contaminate the equipment at the cleaning or drying position, affecting the quality of cleaning or drying.
[0048] like Figure 1-7 As shown, the utility model proposes a film basket bracket, in which a first-size film basket 01 or a second-size film basket 02 can be placed according to the use requirements. The film basket bracket includes two first limiting bottom plates 2, a supporting bottom frame 4, two limiting side plates 3, a limiting plate 5 and a limiting angle 6. The two first limiting bottom plates 2 are spaced apart and arranged in parallel, and the interval between the two first limiting bottom plates 2 corresponds to the width of the bottom of the first-size film basket 01. The bottom of the first-size film basket 01 is stuck in the interval between the two first limiting bottom plates 2, limiting the movement of the first-size film basket 01 to both sides;
[0049] The supporting base frame 4 is arranged below the first limiting base plate 2 to support the bottom of the first size sheet basket 01; the two limiting side plates 3 are vertically arranged at the two ends of the first limiting base plate 2, and a limiting plate 5 parallel to the limiting side plates 3 is provided between the two first limiting base plates 2, and the limiting plate 5 cooperates with one of the limiting side plates 3 to limit the movement of the first size sheet basket 01 toward the limiting side plates 3, and the two limiting side plates 3 limit the movement of the second size sheet basket 02 toward the limiting side plates 3; a plurality of limiting angles 6 are respectively arranged on the two first limiting base plates 2, and the limiting angles 6 limit the movement of the second size sheet basket 02 to both sides.
[0050] In a specific embodiment, the first limiting bottom plate 2 is a rectangular panel, and the two first limiting bottom plates 2 are spaced apart and arranged in parallel. The spacing between the two first limiting bottom plates 2 corresponds to the width of the bottom of the first-size film basket 01, so that the bottom of the first-size film basket 01 is stuck in the spacing between the two first limiting bottom plates 2, which is used to limit the movement of the first-size film basket 01 to both sides.
[0051] The supporting base frame 4 is a rectangular frame, and its two opposite side edges are respectively fixed to the bottom surfaces of the two first limiting bottom plates 2. The side frames of the supporting base frame 4 fixed to the first limiting bottom plates 2 exceed the inner edges of the two first limiting bottom plates 2. When the first size sheet basket 01 is placed, it is used to support the bottom of the first size sheet basket 01 to prevent the bottom of the first size sheet basket 01 from sliding downward.
[0052] The two limiting side plates 3 are rectangular plates, vertically arranged at the two ends of the first limiting bottom plates 2, and form a U-shaped frame with the two first limiting bottom plates 2. A limiting plate 5 is provided at the interval between the two first limiting bottom plates 2, and the limiting plate 5 is parallel to the limiting side plates 3. The first size sheet basket 01 is placed between the limiting plate 5 and one limiting side plate 3, and is limited to move in the direction of the limiting side plate 3 or the limiting plate 5 by the limiting plate 5 and the limiting side plate 3. The second size sheet basket 02 can be placed between the two limiting side plates 3, and is limited to move in the direction of the limiting side plates 3 by the two limiting side plates 3.
[0053] The bottom of the limiting angle 6 is fixed on the first limiting bottom plate 2 and is located between the two limiting side plates 3. The second size sheet basket 02 is limited to move to both sides by a plurality of limiting angles 6.
[0054] Specifically, four limiting angles 6 are provided, which are respectively arranged at two ends of each first limiting bottom plate 2 and located between the two first limiting bottom plates 2 .
[0055] In a further embodiment, the film basket support further includes a fixed support 9 and an ejection plate 8 .
[0056] The fixing bracket 9 is in the form of a rectangular frame, and its two ends are fixed to the two limiting side plates 3 . The fixing bracket 9 is arranged parallel to the first limiting bottom plate 2 and between the two first limiting bottom plates 2 .
[0057] The ejection plate 8 is a long rectangular panel that lifts up the wafers in the wafer basket to achieve better drying or cleaning effects. The two ejection plates 8 are vertically fixed on the upper frames on the opposite sides of the fixed bracket 9 along the length direction of the first supporting base plate, and a gap is left between the ejection plate and the first limiting base plate 2 for the installation of the first size wafer basket 01.
[0058] In a further embodiment, the height of the ejection plate 8 is the same as the height of the limiting plate 5 to prevent the limiting plate 5 from blocking the placement of wafers when the second-size wafer basket 02 is installed.
[0059] In a further embodiment, there are two limiting plates 5 , and the limiting plates 5 are respectively perpendicular to the supporting base frame 4 and the ejection plate 8 , and the side edges of the limiting plates 5 are fixed to the ejection plate 8 .
[0060] In a further embodiment, the limiting angle 6 includes: a fixing portion and an abutting portion. The fixing portion is fixed to the first limiting bottom plate 2; the abutting portion is perpendicular to the fixing portion, and the top of the abutting portion is provided with an inclined surface corresponding to the bottom of the second size sheet basket 02.
[0061] Specifically, the fixed part is a strip-shaped fixed plate, the fixed plate is fixed to the first limiting bottom plate 2, the abutting part is vertically connected to the fixed part, the top of the abutting part is provided with a notch corresponding to the bottom shape of the second size sheet basket 02, the shape of the inclined surface and the fixed foot is the same as the bottom shape of the second size sheet basket 02, and the four positioning angles are arranged on the first limiting bottom plate 2 at positions corresponding to the four corners of the bottom of the second size sheet basket 02. The limiting bottom angles limit the movement of the second size sheet basket 02 to both sides.
[0062] In a further embodiment, the supporting frame 4 is a rectangular frame, and the bottom of the first-size film basket 01 is supported on the supporting frame 4 to prevent the first-size film basket 01 from sliding downward.
[0063] In a further embodiment, the first size flake basket 01 is a 6-inch flake basket, and the second size flake basket 02 is an 8-inch flake basket.
[0064] The utility model also provides a wafer drying device, which uses the wafer basket bracket provided by the utility model. The wafer basket bracket is placed in a drying tank of the wafer drying device.
[0065] The utility model also provides a wafer cleaning device, which uses the wafer basket bracket provided by the utility model.
[0066] The wafer basket holder is placed in the drying tank of the wafer cleaning equipment.
[0067] Compared with the prior art, the film basket bracket proposed by the utility model can accommodate two sizes of film baskets. The first limiting bottom plate 2 is set to limit the first size of the film basket 01 to move to both sides, and the limiting plate 5 cooperates with one of the limiting side plates 3 to limit the first size of the film basket 01 to move toward the limiting side plate 3; the two limiting side plates 3 limit the second size of the film basket 02 to move toward the limiting side plate 3, and the limiting angle 6 limits the second size of the film basket 02 to move to both sides. The problem of the prior art that the film baskets of different sizes need to be replaced by the film basket brackets of different sizes, which easily causes the failure of cleaning or drying.
[0068] It should be noted that the terms used above are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the utility model. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, it indicates the presence of features, steps, operations, devices, components and / or combinations thereof.
[0069] In the description of the present utility model, it needs to be understood that the directions or positional relationships indicated by directional words such as "front, back, up, down, left, right", "lateral, vertical, perpendicular, horizontal" and "top, bottom" are usually based on the directions or positional relationships shown in the drawings, and are only for the convenience of describing the present utility model and simplifying the description. Unless otherwise specified, these directional words do not indicate or imply that the device or element referred to must have a specific direction or be constructed and operated in a specific direction, and therefore cannot be understood as limiting the scope of protection of the present utility model; the directional words "inside and outside" refer to the inside and outside relative to the contours of each component itself.
[0070] In addition, it should be noted that the use of terms such as "first" and "second" to limit components is only for the convenience of distinguishing the corresponding components. If not otherwise stated, the above terms have no special meaning and therefore cannot be understood as limiting the scope of protection of the utility model.
[0071] The above description is only the preferred embodiment of the utility model, and is not intended to limit the utility model. For those skilled in the art, the utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.
Claims
1. A sheet basket bracket, characterized in that: The film basket support comprises: Two first limit bottom plates, which are spaced apart and arranged in parallel, and the space between the two first limit bottom plates corresponds to the width of the bottom of the first size sheet basket, so as to limit the movement of the first size sheet basket to both sides; A supporting base frame, the supporting base frame is arranged below the first limiting base plate and supports the bottom of the first-sized sheet basket; Two limiting side plates, the two limiting side plates are vertically arranged at the two ends of the first limiting bottom plate, a limiting plate parallel to the limiting side plates is arranged between the two first limiting bottom plates, the limiting plate cooperates with one of the limiting side plates to limit the first size sheet basket from moving toward the limiting side plates, and the two limiting side plates limit the second size sheet basket from moving toward the limiting side plates; A plurality of limiting angles are respectively arranged on the two first limiting bottom plates, and the limiting angles limit the second size sheet basket from moving to both sides.
2. The sheet basket bracket according to claim 1, characterized in that: The film basket bracket also includes: A fixed bracket, wherein the fixed bracket is parallel to the first position-limiting bottom plate and is arranged between the two first position-limiting bottom plates; The two ejection plates are vertically fixed to the fixed bracket on opposite sides of the fixed bracket to lift up the wafers in the wafer basket.
3. The sheet basket bracket as claimed in claim 2, characterized in that: There are two limiting plates, and the limiting plates are respectively fixed to the two ejection plates.
4. The sheet basket bracket according to claim 3, characterized in that: The height of the limiting plate is the same as the height of the ejection plate.
5. The sheet basket bracket according to claim 1, characterized in that: The limiting angle includes: A fixing portion, wherein the fixing portion is fixed to the first limiting bottom plate; The abutting portion is perpendicular to the fixing portion, and a notch is provided on the top of the abutting portion corresponding to the bottom of the second size sheet basket.
6. The sheet basket bracket according to claim 5, characterized in that: The two ends of the first limiting bottom plate are respectively provided with limiting angles, and are between the two limiting side plates.
7. The sheet basket bracket according to claim 1, characterized in that: The supporting chassis is in the form of a rectangular frame, and the frames on two opposite sides are fixed to the first limiting bottom plate, and the bottom of the first-size sheet basket is supported on the frames on two opposite sides of the frame.
8. The sheet basket bracket according to claim 1, characterized in that: The first size sheet basket is a 6-inch sheet basket, and the second size sheet basket is an 8-inch sheet basket.
9. A wafer drying device, characterized in that: The invention comprises the sheet basket bracket as described in any one of claims 1-8.
10. A wafer cleaning device, characterized in that: Comprising the sheet basket bracket described in any one of claims 1 to 8.