A valve assembly tool

Abstract

The utility model relates to the field of vacuum ball valve assembly tooling for semiconductor equipment, and discloses a valve assembly tooling, which includes: a support frame, including a fixed base and a fixed plate, a fixed plate is respectively arranged on both sides of the fixed base, and the upper and lower ends of the two fixed plates are slidably arranged in the fixed base; a moving drive mechanism is arranged above the inside of the fixed base, and the two ends are respectively arranged on the fixed plate, which can drive the fixed plate to move relatively or reversely in the fixed base; a valve seat assembly mechanism is used to carry the joint, valve seat and sealing ring to be assembled, which is arranged on the side of the fixed plate and moves with the fixed plate to assemble the ball valve. The utility model can solve the problem that the valve seat sealing surface and the ball body are not coaxial enough during the assembly process, which leads to leakage of the valve.

Description

Technical Field

[0001] The utility model relates to the field of vacuum ball valve assembly tooling for semiconductor equipment, in particular to a valve assembly tooling. Background Art

[0002] The existing ball valve assembly method is to first install the valve stem on the valve body, then install the ball into the valve body, and then install the valve seat and joints on both sides, and fix them by vise or directly screwing the screws manually. This assembly method has the problem of uneven force on the valve seat, and it is easy to cause the coaxiality between the valve seat sealing surface and the ball to be insufficient, which in turn causes serious leakage and other problems. Summary of the invention

[0003] In view of the above problems, the purpose of the utility model is to provide a valve assembly tool, which can solve the problem of insufficient coaxiality between the valve seat sealing surface and the sphere during the assembly process, thereby causing valve leakage.

[0004] To achieve the above-mentioned purpose, the utility model adopts the following technical solutions: a valve assembly tool, which includes: a support frame, including a fixed base and a fixed plate, a fixed plate is respectively arranged on both sides of the fixed base, and the upper and lower ends of the two fixed plates are slidably arranged in the fixed base; a moving drive mechanism is arranged above the inside of the fixed base, and the two ends are respectively arranged on the fixed plates, which can drive the fixed plates to move relative or reversely in the fixed base; a valve seat assembly mechanism, which is used to carry the joint, valve seat and sealing ring to be assembled, is arranged on the side of the fixed plate, and moves with the fixed plate to assemble the ball valve.

[0005] Furthermore, the valve seat assembly mechanism is provided in two groups, which are symmetrically arranged on two fixed plates.

[0006] Further, each set of valve seat assembly mechanisms includes a handle, an umbrella-shaped support structure and a fixing nut;

[0007] The handle is inserted into the fixing plate, the first end of which is located outside the fixing plate to receive external driving force, and the second end is located inside the fixing plate, and the valve seat and the joint to be assembled are arranged on the second end;

[0008] The handle adopts a hollow structure, the cross section of which is composed of a funnel shape and a rectangle, and the funnel-shaped cross section is located at the second end;

[0009] The umbrella-shaped supporting structure is arranged in the hollow structure of the handle, and its umbrella-shaped open end is located at the funnel-shaped section, and a sealing ring to be assembled is arranged at the umbrella-shaped open end; the umbrella handle end is located at the rectangular section, and the end of the umbrella handle end is fixed in the second end of the handle by a fixing nut.

[0010] Furthermore, a mounting plate integrally formed with the handle is provided inside the second end of the handle, and the handle end of the umbrella-shaped supporting structure passes through the mounting plate and is connected to a fixing nut.

[0011] Further, the umbrella-shaped support structure includes a support rod, a first lead screw, a first nut, a collar, a second lead screw and a disc; wherein the support rods are at least three;

[0012] The first lead screw is a hollow structure, the first end of the first lead screw is circumferentially hinged to the head end of each support rod, and the second end of the first lead screw is externally threadedly connected to the fixing nut;

[0013] The second lead screw is inserted into the hollow structure of the first lead screw, the first end of the second lead screw is connected to the center of the disk through a bearing, and the inner circumference of the second end of the second lead screw is threadedly connected and fixed to the first nut, so that the outer circumference of the first nut is fixed to the inner circumference of the second lead screw;

[0014] At least three rings are arranged at intervals on the outer circumference of the disc, and a support rod is mounted inside each ring and moves along the ring, so that the left and right movement of the disc drives the support rod to close or open;

[0015] The end of each support rod is located in the sealing ring to be assembled, so as to expand the sealing ring to form an interference fit state.

[0016] Furthermore, guide rails are provided on the top inner side surface and the bottom inner side surface of the fixed base, and the upper and lower ends of the fixed plates on both sides are slidably matched with the guide rails.

[0017] Furthermore, a mounting hole is provided on the fixing plate on each side, and a handle in the valve seat assembly mechanism is fixed in the mounting hole.

[0018] Further, the mobile drive mechanism includes a gear and two racks;

[0019] The first ends of the two racks are fixedly arranged on the fixed plates respectively, and the two racks are arranged relatively staggered, and a gear is arranged between the second ends of the two racks; the synchronous movement of the fixed plates on both sides is achieved through the cooperation of the gear and the two racks.

[0020] Furthermore, a limiting mechanism of the valve housing is arranged on the inner side of the fixing plate, and the limiting mechanism is located above the valve seat assembly mechanism.

[0021] Furthermore, the limiting mechanism adopts a ratchet bar, and the ratchet bar is provided with a switch.

[0022] The utility model adopts the above technical solution, which has the following advantages:

[0023] Compared with the existing assembly method, the utility model solves the problem of poor sealing performance between the valve seat and the ball due to uneven force on the valve seat. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 This is a schematic diagram of the valve assembly tooling structure in an embodiment of the utility model;

[0025] Figure 2 It is a partial three-dimensional diagram of the valve assembly tooling in the embodiment of the utility model;

[0026] Figure 3 It is a cross-sectional view of the valve seat assembly mechanism in the embodiment of the utility model;

[0027] The accompanying drawings are marked as follows:

[0028] 1-fixed base, 2-fixed plate, 3-connector, 4-valve seat, 5-handle, 6-rack, 7-gear, 8-protective shell, 9-fixed nut, 10-sealing ball, 11-sealing ring, 21-support rod, 22-first screw, 23-first nut, 31-ring, 32-disc, 33-second screw, 40-valve housing, 41-through hole, 201-mounting hole, 202-limiting mechanism, 51-mounting plate. DETAILED DESCRIPTION

[0029] In order to make the purpose, technical solution and advantages of the embodiment of the utility model clearer, the technical solution of the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings of the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments. Based on the described embodiment of the utility model, all other embodiments obtained by ordinary technicians in this field belong to the scope of protection of the utility model.

[0030] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, it indicates the presence of features, steps, operations, devices, components and / or combinations thereof.

[0031] In the assembly process of the existing valve, the valve may leak due to the insufficient coaxiality between the valve seat sealing surface and the sphere. Therefore, the utility model provides a valve assembly tool, which uses the first screw 22 and the disc 32 to make the support rod 21, the sealing ring 11 and the valve seat 4 interference fit, and support the sealing ring 11 and the valve seat 4; and through the mobile drive mechanism set on the upper part of the fixed base 1, the joints 3, the valve seat 4 and the sealing ring 11 to be assembled on both sides are moved to the middle and close together, and are fixed and locked by bolts, so that the valve seat is evenly stressed, effectively improving the success rate of one-time assembly.

[0032] Example: Figure 1 , Figure 2 As shown, this embodiment provides a valve assembly tool. In this embodiment, the tool includes:

[0033] The support frame comprises a fixed base 1 and a fixed plate 2. A fixed plate 2 is disposed on both sides of the fixed base 1, and upper and lower ends of the two fixed plates 2 are slidably disposed in the fixed base 1.

[0034] The mobile driving mechanism is arranged above the interior of the fixed base 1, and the two ends are respectively arranged on the fixed plate 2, and can drive the fixed plate 2 to move relative or reversely in the fixed base 1;

[0035] The valve seat assembly mechanism is used to carry the joint 3, valve seat 4 and sealing ring 11 to be assembled, and is arranged on the side of the fixed plate 2 and moves with the fixed plate 2 to assemble the ball valve.

[0036] When in use, the valve seat 4, joint 3 and sealing ring 11 to be assembled are set on the valve seat assembly mechanism, and the fixed plate 2 on one side is pushed inward by external force. At the same time, the fixed plate 2 on the other side is driven by the mobile driving mechanism and moves inward synchronously with the fixed plate 2 on one side, thereby moving the valve seats 4, joints 3 and sealing ring 11 on both sides toward the middle and close to each other, placing the sealing ball 10 between the valve seats 4 and the sealing ring 11 on both sides, and tightening them to complete the ball valve assembly.

[0037] In the above embodiment, the fixed base 1 is used to support the entire tooling, and the inner side surfaces of the top and bottom are provided with guide rails, and the upper and lower ends of the fixed plates 2 on both sides cooperate with the guide rails to achieve sliding connection. Among them, the fixed plates 2 on each side are provided with mounting holes 201 for installing the valve seat assembly mechanism; the handle 5 is fixed in the mounting hole 201.

[0038] In an optional embodiment, if Figure 1 , Figure 2 As shown, the mobile driving mechanism includes a gear 7 and two racks 6. The first ends of the two racks 6 are fixedly arranged on the fixed plate 2, and the two racks 6 are arranged staggered relative to each other, and a gear 7 is arranged between the second ends of the two racks 6; the synchronous movement of the fixed plates 2 on both sides is achieved through the cooperation of the gear 7 and the two racks 6. In order to overcome the problem of the cantilever beam structure, the rack 6 can move along the first guide rail, and the first guide rail is fixed to the fixed base 1.

[0039] In this embodiment, a protective shell 8 of the rack 6 is provided on the upper part of the fixed base 1 , the gear 7 is bearing-connected to the protective shell 8 via a rotating shaft, and the protective shell 8 is fixed on the inner side of the top of the fixed base 1 .

[0040] In an optional embodiment, the valve seat assembly mechanism is provided in two groups, which are symmetrically arranged on two fixed plates 2, and the structures and principles of the two groups of valve seat assembly mechanisms are the same. Figure 1 , Figure 3 As shown, each set of valve seat assembly mechanisms includes a handle 5 , an umbrella-shaped supporting structure and a fixing nut 9 .

[0041] The handle 5 is fixed in the mounting hole 201 on the fixing plate 2, and its first end is located outside the fixing plate 2 to receive external driving force; the second end is located inside the fixing plate 2, and the valve seat 4 and the connector 3 to be assembled are arranged on the second end of the handle 5. The handle 5 adopts a hollow structure, and the cross section of the hollow structure is composed of a funnel shape and a rectangle, and the funnel-shaped cross section is located at the second end.

[0042] The umbrella-shaped supporting structure is arranged in the hollow structure of the handle 5, and its umbrella-shaped open end is located at the funnel-shaped cross-section, and a sealing ring 11 to be assembled is arranged at the umbrella-shaped open end; the umbrella handle end is located at the rectangular cross-section, and the end of the umbrella handle end is fixed in the second end of the handle 5 by a fixing nut 9.

[0043] A mounting plate 51 formed integrally with the handle 5 is disposed inside the second end of the handle 5 , and the handle end of the umbrella-shaped supporting structure passes through the mounting plate 51 and is fixedly connected to the fixing nut 9 .

[0044] Optionally, the first end of the handle 5 can be connected to a driving motor, or an external force can be manually applied to the handle 5, so that the handle 5 drives the fixed plate 2 fixed thereto to move.

[0045] In this embodiment, the umbrella-shaped support structure includes a support rod 21, a first lead screw 22, a first nut 23, a collar 31, a second lead screw 33 and a disc 32; wherein, at least three support rods 21 are provided.

[0046] The first lead screw 22 is a hollow structure, the first end of the first lead screw 22 is circumferentially hinged to the first end of each support rod 21, and the second end of the first lead screw 22 is threadedly connected to the fixing nut 9 after passing through the mounting plate;

[0047] The second lead screw 33 is inserted into the hollow structure of the first lead screw 22, the first end of the second lead screw 33 is connected to the center of the disc 32 through a bearing, and the inner circumference of the second end of the second lead screw 33 is threadedly connected and fixed to the first nut 23, so that the outer circumference of the first nut 23 is fixed to the inner circumference of the second lead screw 33;

[0048] At least three collars 31 are arranged at intervals on the outer circumference of the disc 32, and each collar 31 is fitted with a support rod 21 that moves along the collar, so that the left and right movement of the disc 32 drives the support rod 21 to close or open;

[0049] The second end of each support rod 21 is located in the sealing ring 11 to be assembled, so as to expand the sealing ring 11 to form an interference fit state.

[0050] When in use, the second end of each support rod 21 is inserted into the sealing ring 11, and the second lead screw 33 drives the disc 32 to move to the right, so that the disc 32 drives each support rod 21 to open, and then the sealing ring 11 is stretched to form an interference fit state and moves with the fixed plate 2, and the sealing ring 11 is assembled to the sealing ball 10, and the contraction state of the umbrella principle is used to form a gap fit, and the second lead screw 33 drives the disc 32 to move to the left, so that each support rod 21 is closed and retracted, and then the support rod 21 is separated from the sealing ring 11 without driving the sealing ring 11 to move.

[0051] In an optional embodiment, the valve assembly tool further includes a limiting mechanism for the valve housing 40, which is arranged on the inner side of the fixed plate 2 and above the valve seat assembly mechanism. When the valve seat assembly mechanisms on the two fixed plates 2 move to the assembly position, the limiting mechanism is activated to limit the position of the valve housing 40 in the valve seat assembly mechanisms on both sides to avoid the misalignment of the two valve housings 40 causing the valve seat sealing surface and the sphere to be not on the same axis.

[0052] Optionally, the limiting mechanism in this embodiment adopts a ratchet bar, and a switch is provided on the ratchet bar to ensure that when the switch is closed, only the fixed plates 2 on both sides are allowed to move toward the center of the fixed base 1, and cannot move in the direction away from the center of the fixed base 1; when the switch is turned on, the fixed plates 2 on both sides can move toward the center of the fixed base 1, and can also move in the direction away from the center of the fixed base 1. When in use, the switch is closed, and when the fixed plate 2 moves to the center of the fixed base 1 to a specified position, the ratchet bar helps the valve seat 4, the sealing ring 11 and the sealing ball 10 to maintain a fitting state, and the valve housing 40 of the two valve seats 4 is fixed by bolts. After fixing, turn on the switch of the ratchet bar, and the fixed plate 2 and the umbrella-shaped structure can be smoothly removed, and another ball valve can be installed.

[0053] In the above embodiments, the valve housing 40 of the valve seat 4 is provided with through holes 41 , so that bolts can pass through the through holes 41 to fix and install the valve housings 40 on both sides.

[0054] In summary, when the utility model is used, an external force is applied to the handle 5 to drive the gear 7 to rotate. The gear 7 drives the two racks 6 to move, and then the two racks 6 drive the two fixed plates 2 to move synchronously inward along the guide rails on the fixed base 1. The two fixed plates 2 respectively drive the joints 3, valve seats 4 and sealing rings 11 thereon to move. When they move to the sealing ball 10, the sealing ring 11 is assembled to the sealing ball 10 by the umbrella-shaped support structure according to the umbrella principle. Finally, the joint 3, valve seat 4 and sealing ring 11 all stay on the sealing ball 10. Then the limiting mechanism is started to limit and fix the position of the valve housing 40 on the valve seats 4 on both sides, and the two valve housings 40 are fixed by bolts through the through holes 41 to complete the assembly.

[0055] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the utility model.

Claims

1. A valve assembly tool, characterized in that: include: The support frame comprises a fixed base (1) and a fixed plate (2), wherein a fixed plate (2) is disposed on both sides of the fixed base (1), and upper and lower ends of the two fixed plates (2) are slidably disposed in the fixed base (1); A moving drive mechanism is arranged above the interior of the fixed base (1), with two ends respectively arranged on the fixed plate (2), and can drive the fixed plate (2) to move relative or reversely within the fixed base (1); The valve seat assembly mechanism is used to carry the joint (3), valve seat (4) and sealing ring (11) to be assembled, and is arranged on the side of the fixed plate (2) and moves with the fixed plate (2) to assemble the ball valve.

2. The valve assembly tool as claimed in claim 1, characterized in that: The valve seat assembly mechanism is arranged in two groups, which are symmetrically arranged on two fixed plates (2).

3. The valve assembly tool as claimed in claim 2, characterized in that: Each set of valve seat assembly mechanisms comprises a handle (5), an umbrella-shaped support structure and a fixing nut (9); The handle (5) is inserted into the fixing plate (2), with a first end of the handle being located outside the fixing plate (2) for receiving an external driving force, and a second end being located inside the fixing plate (2), with a valve seat (4) and a joint (3) to be assembled being arranged on the second end; The handle (5) adopts a hollow structure, the cross section of which is composed of a funnel shape and a rectangle, and the funnel-shaped cross section is located at the second end; The umbrella-shaped support structure is arranged in the hollow structure of the handle (5), the umbrella-shaped open end is located at the funnel-shaped cross section, and a sealing ring (11) to be assembled is arranged at the umbrella-shaped open end; the umbrella handle end is located at the rectangular cross section, and the end of the umbrella handle end is fixed in the second end of the handle (5) by a fixing nut (9).

4. The valve assembly tool as claimed in claim 3, characterized in that: A mounting plate (51) formed integrally with the handle (5) is arranged inside the second end of the handle (5); the handle end of the umbrella-shaped support structure passes through the mounting plate (51) and is connected to the fixing nut (9).

5. The valve assembly tool as claimed in claim 3, characterized in that: The umbrella-shaped support structure comprises a support rod (21), a first lead screw (22), a first nut (23), a collar (31), a second lead screw (33) and a disc (32); wherein the support rods (21) are at least three; The first lead screw (22) is a hollow structure, the first end of the first lead screw (22) is circumferentially hinged to the head end of each support rod (21), and the second end of the first lead screw (22) is externally threadedly connected to the fixing nut (9); The second lead screw (33) is inserted into the hollow structure of the first lead screw (22), the first end of the second lead screw (33) is connected to the center position of the disk (32) through a bearing, and the inner circumference of the second end of the second lead screw (33) is threadedly connected and fixed to the first nut (23), so that the outer circumference of the first nut (23) is fixed to the inner circumference of the second lead screw (33); At least three collars (31) are arranged at intervals on the outer circumference of the disc (32), and a support rod (21) is mounted inside each collar (31) and moves along the collar, so that the left and right movement of the disc (32) drives the support rod (21) to close or open. The end of each support rod (21) is located inside the sealing ring (11) to be assembled, so as to expand the sealing ring (11) to form an interference fit state.

6. The valve assembly tool as claimed in claim 1, characterized in that: The top inner side surface and the bottom inner side surface of the fixed base (1) are both provided with guide rails, and the upper and lower ends of the fixed plates (2) on both sides are slidably matched with the guide rails.

7. The valve assembly tool as claimed in claim 1, characterized in that: A mounting hole (201) is provided on the fixing plate (2) on each side, and a handle (5) in the valve seat assembly mechanism is fixed in the mounting hole (201).

8. The valve assembly tool as claimed in claim 1, characterized in that: The mobile driving mechanism comprises a gear (7) and two racks (6); The first ends of the two racks (6) are respectively fixedly arranged on the fixed plate (2), and the two racks (6) are arranged in a staggered manner relative to each other, and a gear (7) is arranged between the second ends of the two racks (6); the synchronous movement of the fixed plates (2) on both sides is achieved through the cooperation of the gear (7) and the two racks (6).

9. The valve assembly tool as claimed in claim 1, characterized in that: A limiting mechanism (202) of the valve housing (40) is arranged on the inner side of the fixing plate (2), and the limiting mechanism (202) is located above the valve seat assembly mechanism.

10. The valve assembly tool as claimed in claim 9, characterized in that: The limiting mechanism (202) adopts a ratchet bar, and the ratchet bar is provided with a switch.

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