Anti-oxidation lead bonding machine

Abstract

The utility model relates to an anti-oxidation lead bonding machine, which belongs to the technical field of semiconductor processing and comprises a machine body, a feeding assembly, a preheating assembly, a cooling assembly, a protective gas conveying assembly, and a feeding position, a welding position and a discharging position which are sequentially arranged on the same straight line from left to right, the feeding assembly comprises a feeding rail and a clamping conveying piece which is matched with the feeding rail to convey the lead frame to the welding position from the feeding position and then to the discharging position. The preheating assembly comprises a preheating plate arranged on the feeding track, and the preheating plate can preheat the feeding position and / or the lead frame moved from the feeding position to the welding position; the cooling assembly comprises a cooling plate arranged on the feeding track, and the cooling plate can preheat the welding position and / or the lead frame displaced from the welding position to the discharging position; the protective gas conveying assembly comprises a first gas output plate arranged above the preheating assembly and the cooling assembly, and the top of the first gas output plate is provided with a first gas source connecting piece communicated with a gas source.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processing, and more specifically to an anti-oxidation wire bonding machine. Background Art

[0002] Wire bonding is a key packaging step that uses thin metal wires (usually gold, copper or aluminum) to connect the pads on the chip to the corresponding pins of the lead frame to achieve electrical connection. Wire bonding machines are mechatronics devices widely used in the field of microelectronic packaging, mainly used to achieve electrical connection between wafers or between wafers and electrodes. The electrical connection processes of common electronic components such as LED light-emitting diodes and chip ICs are all completed by wire bonding machines.

[0003] Most of the copper pins of conventional lead frames need to be silver-plated to prevent the copper pins from being unable to be welded after being heated and oxidized. Technical personnel in this field can eliminate the silver plating on the copper pins by adding a nitrogen blowing device at the welding point. However, during wire bonding, due to the high temperature of the soldering point, the temperature rises sharply during welding, which often leads to problems such as insufficient bonding strength and lead adhesion between the leads and the soldering point. The existing technology will preheat the leads before welding and deheat the leads after welding to ensure the stability of the bonding between the leads and the soldering points. However, the existing wire bonding machines are only equipped with a protective gas blowing device for the welding area, and are not equipped with a protective gas for the leads during preheating and deheating. As a result, the copper pins will still oxidize during preheating and deheating, affecting the bonding effect. Utility Model Content

[0004] The technical problem to be solved by the present invention is that, during wire bonding, due to the high temperature of the soldering point, the temperature rises rapidly during welding, which often leads to problems such as insufficient bonding strength and lead adhesion between the lead and the soldering point. The prior art will preheat the lead before welding and deheat the lead after welding to ensure the stability of the bond between the lead and the soldering point. However, the existing wire bonding machine is only provided with a protective gas blown out for the welding area, and is not provided with a protective gas for the preheating and deheating of the lead, so that the copper pin will still oxidize during preheating and deheating, affecting the bonding effect. In view of the above-mentioned defects of the prior art, an anti-oxidation wire bonding machine is provided.

[0005] The technical solution adopted by the utility model to solve its technical problems is:

[0006] Construct an oxidation-proof wire bonding machine, comprising:

[0007] The machine body includes a feeding position, a welding position and a discharging position which are arranged in sequence on the same straight line from left to right;

[0008] A feeding assembly, comprising a feeding track and a clamping conveyor that cooperates with the feeding track to transport the lead frame from a feeding position to a welding position and then to a discharging position;

[0009] A preheating assembly, comprising a preheating plate disposed on the feeding track, wherein the preheating plate can preheat the feeding position and / or the lead frame displaced from the feeding position to the welding position;

[0010] A cooling component, comprising a cooling plate arranged on the feeding track, wherein the cooling plate can cool the welding position and / or the lead frame displaced from the welding position to the discharge position;

[0011] The protective gas delivery component comprises a first gas output plate arranged above the preheating component and the deheating component, and a first gas source connector connected to a gas source is arranged on the top of the first gas output plate.

[0012] Optionally, the first gas output plate includes an upper plate and a lower plate that are detachably connected, the bottom of the upper plate is provided with a hole groove structure connected to the first gas source connecting piece, and the lower plate is evenly provided with a plurality of gas outlet holes running through the top and bottom thereof, and the protective gas in the first gas source connecting piece flows from the hole groove structure to the gas outlet holes and then flows out.

[0013] Optionally, it includes a welding assembly, wherein the welding assembly includes a welding plate arranged in the feeding track and an ultrasonic welding machine arranged on the machine body, the welding plate is located at the welding position, the welding head of the ultrasonic welding machine is located above the welding plate, and the machine body is also provided with a heating plate, which is arranged below the welding plate, and the heating plate is used to heat the lead frame transmitted to the welding plate so that the welding mechanism can perform welding.

[0014] Optionally, a second gas output plate is disposed above the welding plate, a second gas source connector is disposed on the top of the second gas output plate, and a first gap is left between the second gas output plate and the welding plate for the lead frame to pass through.

[0015] Optionally, a first extension plate is provided on a side of the lower plate close to the second gas output plate, a second extension plate is provided on a side of the second gas output plate close to the lower plate, and the first extension plate is provided above or below the second extension plate.

[0016] Optionally, the feeding track includes a first slide rail and a second slide rail arranged relatively to each other, a first slide groove is arranged on the first slide rail, a second slide groove is arranged on the second slide rail, the first slide groove and the second slide groove are located on the same horizontal line, a third extension plate is arranged on the top of the upper plate, an assembly through hole is arranged on the third extension plate passing through the top and bottom thereof, and a first threaded hole corresponding to the assembly through hole is arranged on the top of the first slide rail and / or the second slide rail.

[0017] Optionally, the clamping and conveying member includes a left clamp and a right clamp, the left clamp includes a left movable arm and a left clamp arranged at the end of the left movable arm, the right clamp includes a right movable arm and a right clamp arranged at the end of the right movable arm, the left clamp and the right clamp can clamp the lead frame, and the left movable arm and the right movable arm can respectively drive the left clamp and the right clamp to perform linear displacement.

[0018] Optionally, a second gap is provided between a first gas output plate above the preheating plate and the preheating plate, and a third gap is provided between a first gas output plate on the deheating plate and the deheating plate, the second gap, the first gap and the third gap are connected in sequence, and the protective gas output by the first gas output plate and the second gas output plate can flow in the first gap, the second gap and the third gap.

[0019] Optionally, a first fixed seat and a second fixed seat are provided on the machine body, and the first fixed seat and the second fixed seat are respectively arranged between the feeding position and the welding position and between the welding position and the discharging position, and the first fixed seat and the second fixed seat are respectively provided with a first clamp and a second clamp, and the first clamp and the second clamp are both located above the feeding track, and the first clamp and the second clamp are respectively clamped and fixed on both sides of the second gas output plate.

[0020] Optionally, the upper plate is provided with a connecting through hole running through the top and bottom thereof, and the lower plate is provided with a second threaded hole adapted to the connecting through hole, and the upper plate and the lower plate can be detachably connected by passing a stud through the connecting through hole and threadably engaging with the second threaded hole.

[0021] The beneficial effects of the utility model are:

[0022] 1. The utility model provides a first gas output plate above the preheating component and the cooling component, and the first gas source connector can transport the protective gas to the first gas output plate, and the first gas output plate sprays the protective gas to the preheating plate and the cooling plate, so that when the preheating plate and the cooling plate preheat and cool the lead frame, the protective gas can protect the pins of the lead frame to prevent the pins from being oxidized, so that even if the pins of the lead frame are not silver-plated, the pins of the lead frame can be prevented from being oxidized when the lead frame is preheated and cool.

[0023] 2. The protective gas sprayed by the first gas output plate and the second gas output plate can flow beside the feeding track, which can prevent the lead frame from being oxidized during preheating, welding, and cooling. It can also prevent the lead frame from being oxidized when the feed position is moved to the welding position and when the welding position is moved to the discharge position. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the utility model will be further described below in conjunction with the accompanying drawings and embodiments. The drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work:

[0025] Figure 1 It is an overall axonometric schematic diagram of the utility model.

[0026] Figure 2 It is an explosion schematic diagram of the protective gas delivery component in the utility model.

[0027] Figure 3 It is another exploded schematic diagram of the protective gas delivery component in the utility model.

[0028] Figure 4 It is another axonometric schematic diagram of the entirety of the utility model.

[0029] Figure 5 It is an axonometric schematic diagram of part of the structure of the utility model.

[0030] Figure 6 This utility model Figure 5 Schematic diagram of the explosion.

[0031] The accompanying drawings are marked as follows:

[0032] 1. Machine body; 101. Feeding position; 102. Welding position; 103. Discharging position;

[0033] 201.1, first slide rail; 201.11, first slide slot; 201.2, second slide rail; 201.21, second slide slot; 202, clamping conveyor; 202.1, left clamping member; 202.11, left movable arm; 202.12, left clamping head; 202.2, right clamping member; 202.21, right movable arm; 202.22, right clamping head;

[0034] 301, preheating plate;

[0035] 401, cooling board;

[0036] 5. Protective gas delivery assembly; 501. First gas output plate; 501.1. Upper plate; 501.2. Lower plate; 501.3. Hole and groove structure; 501.4. Gas outlet hole; 501.5. Connecting through hole; 501.6. Second threaded hole; 501.7. First extension plate; 501.8. Second extension plate; 501.9. Third extension plate; 502. First gas source connector; 503. Second gas output plate; 504. Second gas source connector;

[0037] 601, heating plate; 602, welding plate;

[0038] 701, first gap; 702, second gap; 703, third gap;

[0039] 801, first fixing seat; 801.1, first clamp; 802, second fixing seat; 802.1, second clamp. DETAILED DESCRIPTION

[0040] In order to make the purpose, technical solution and advantages of the utility model clearer, the technical solution of the utility model will be clearly and completely described below in conjunction with the drawings in the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0041] In the description of the embodiments of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present application can be understood according to specific circumstances.

[0042] In the embodiments of the present application, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0043] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the embodiments of the present application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0044] The utility model is implemented as follows Figure 1-Figure 6As shown in, it relates to an anti-oxidation wire bonding machine, including a body 1, a feeding assembly, a preheating assembly, a deheating assembly, a protective gas delivery assembly 5, a feeding position 101, a welding position 102 and a discharging position 103 arranged in sequence in the same straight line from left to right; wherein the feeding assembly includes a feeding track and a clamping conveying member 202 that cooperates with the feeding track to transport the lead frame from the feeding position to the welding position and then to the discharging position; the preheating assembly includes a preheating plate 301 arranged on the feeding track, and the preheating plate 301 can deheat the feeding position and / or the lead frame moved from the feeding position to the welding position; the de ... The cooling plate 401 on the material track can preheat the welding position and / or the lead frame displaced from the welding position to the material discharge position; the protective gas delivery component 5 includes a first gas output plate 501 arranged above the preheating component and the cooling component, and the top of the first gas output plate 501 is provided with a first gas source connector 502 connected to the gas source. Furthermore, the utility model provides a first gas output plate 501 above the preheating component and the cooling component, and the first gas source connector 502 can transport the protective gas to the first gas output plate 501, and the first gas output plate 501 outputs the protective gas to the preheating plate 3 01 and the cooling plate 401, so that when the preheating plate 301 and the cooling plate 401 act on the lead frame, the protective gas can protect the pins of the lead frame to prevent the pins from being oxidized, so that even if the pins of the lead frame are not silver-plated, the pins of the lead frame can be prevented from being oxidized when the lead frame is preheated and cooled; further, the principle of the utility model is: the lead frame is placed on the feeding track on the feeding position, the clamping conveyor 202 clamps the lead frame to drive the lead frame to move to the top of the preheating plate 301, and the lead frame is preheated by the preheating plate 301. At this time, the protective gas output by the first gas output plate 501 will act on On the lead frame, prevent the pins of the lead frame from being oxidized during preheating. After the lead frame is preheated, the clamping conveyor 202 continues to clamp the lead frame to drive the lead frame to move to the welding position. When welding the lead frame, the protective gas output by the second gas output plate 503 will act on the lead frame to prevent the pins of the lead frame from being oxidized during welding. After the lead frame is welded, the clamping conveyor 202 clamps and drives the lead frame to move to the top of the cooling plate 401, and the cooling plate 401 acts on the lead frame. The protective gas output by the first gas output plate 501 will act on the lead frame to prevent the pins of the lead frame from being oxidized during cooling.

[0045] See also Figure 2 , Figure 3 as well as Figure 5The first gas output plate 501 includes a detachably connected upper plate 501.1 and a lower plate 501.2. The bottom of the upper plate 501.1 is provided with a hole structure 501.3 connected to the first gas source connecting piece 502. The lower plate 501.2 is evenly provided with a plurality of gas outlet holes 501.4 running through the top and bottom thereof. The protective gas in the first gas source connecting piece 502 flows from the hole structure 501.3 to the gas outlet holes 501.4 and then flows out. Furthermore, the upper plate 501.1 is provided with a connecting through hole 501.5 running through the top and bottom thereof. The lower plate 501.2 is provided with a second threaded hole 501.6 adapted to the connecting through hole 501.5, and the upper plate 501.1 and the lower plate 501.2 can be detachably connected by passing a stud through the connecting through hole 501.5 and then threadedly engaging with the second threaded hole 501.6. It can be understood that when the upper plate 501.1 or the lower plate 501.2 fails in the output line, the stud can be screwed out of the second threaded hole 501.6 to release the connection between the upper plate 501.1 and the lower plate 501.2, so as to facilitate the replacement or maintenance of the upper plate 501.1 and the lower plate 501.2;

[0046] In this embodiment, a welding assembly is included, wherein the welding assembly is provided on a welding plate 602 in a feeding track and an ultrasonic welding machine (not shown in the figure) is provided on a machine body 1, wherein the welding plate is located at a welding position, and a welding head of the ultrasonic welding machine (not shown in the figure) is located above the welding plate. The machine body 1 is also provided with a heating plate 601, wherein the heating plate 601 is provided below the welding plate, and the heating plate 601 is used to heat a lead frame transmitted to the welding plate 602 so as to facilitate welding by the welding mechanism.

[0047] See also Figure 1-Figure 6A second gas output plate 503 is arranged above the welding plate, and a second gas source connector 504 is arranged on the top of the second gas output plate 503. A first gap 701 for the lead frame to pass through is reserved between the second gas output plate 503 and the welding plate 602. Furthermore, a second gap 702 is arranged between the first gas output plate 501 arranged above the preheating plate 301 and the preheating plate 301, and a third gap 703 is arranged between the first gas output plate 501 arranged on the cooling plate 401 and the cooling plate 401. The second gap 702, the first gap 701 and the third gap The first gas output plate 501 and the second gas output plate 503 are connected in sequence, and the protective gas output by the first gas output plate 501 and the second gas output plate 503 can flow in the first gap 701, the second gap 702 and the third gap 703. It can be understood that the protective gas output by the first gas output plate 501 and the second gas output plate 503 can flow in the first gap 701, the second gap 702 and the third gap 703, which can prevent the lead frame from being oxidized during preheating, welding and cooling, and can also prevent the lead frame from being oxidized when the feed position 101 is moved to the welding position 102 and when the welding position 102 is moved to the discharge position 103.

[0048] Furthermore, a first extension plate 501.7 is provided on one side of the lower plate 501.2 close to the second gas output plate 503, and a second extension plate 501.8 is provided on one side of the second gas output plate 503 close to the lower plate 501.2. The first extension plate 501.7 is arranged above or below the second extension plate 501.8. It can be understood that the first extension plate 501.7 and the second extension plate 501.8 can make the lower plate 501.2 and the second gas output plate 503 overlap, so that the protective gas output by the first gas output plate 501 can flow to the welding part to protect the pins in welding. It can be understood that the protective gas can be nitrogen.

[0049] In this embodiment, the feeding track includes a first slide rail 201.1 and a second slide rail 201.2 arranged relatively to each other, the first slide rail 201.1 is provided with a first slide groove 201.11, the second slide rail 201.2 is provided with a second slide groove 201.21, the first slide groove 201.11 and the second slide groove 201.21 are located on the same horizontal line, the top of the upper plate 501.1 is provided with a third extension plate 501.9, the third extension plate 501.9 is provided with an assembly through hole running through the top and bottom thereof, the first slide rail 201.1 and / or the second slide A first threaded hole corresponding to the assembly through hole is provided at the top of the rail 201.2. It can be understood that when the lead frame is placed on the feeding track, the two sides of the lead frame are respectively located on the first slide groove 201.11 of the first slide rail 201.1 and the second slide groove 201.21 of the second slide rail 201.2. The first slide groove 201.11 and the second slide groove 201.21 can limit the lead frame to only perform linear displacement along the length direction of the feeding track. After the clamping output member clamps the lead frame, it can drive the lead frame to perform linear displacement on the first slide groove 201.11 and the second slide groove 201.21.

[0050] In this embodiment, the clamping conveyor 202 includes a left clamp 202.1 and a right clamp 202.2. The left clamp 202.1 includes a left movable arm 202.11 and a left clamp 202.12 disposed at the end of the left movable arm 202.11. The right clamp 202.2 includes a right movable arm 202.21 and a right clamp 202.22 disposed at the end of the right movable arm 202.21. The right clamp 202.22 can clamp the lead frame, and the left movable arm 202.11 and the right movable arm 202.21 can respectively drive the left clamp 202.12 and the right clamp 202.22 to perform linear displacement. Furthermore, the left movable arm 202.11 and the right movable arm 202.21 can drive the left movable arm 202.11 and the right movable arm 202.21 to perform linear displacement through a lead screw or an electric slide rail as a driving source.

[0051] In this embodiment, a first fixed seat 801 and a second fixed seat 802 are provided on the body 1, and the first fixed seat 801 and the second fixed seat 802 are respectively arranged between the feeding position and the welding position and between the welding position and the discharging position, and a first clamp 801.1 and a second clamp 802.1 are respectively provided on the first fixed seat 801 and the second fixed seat 802, and the first clamp 801.1 and the second clamp 802.1 are both located above the feeding track, and the first clamp 801.1 and the second clamp 802.1 are respectively clamped and fixed on both sides of the second gas output plate 503.

[0052] It should be understood that those skilled in the art can make improvements or changes based on the above description, and all these improvements and changes should fall within the scope of protection of the claims attached to the utility model.

Claims

1. An anti-oxidation wire bonding machine, characterized in that: include: The machine body (1) comprises a feeding position (101), a welding position (102) and a discharging position (103) which are arranged in sequence on the same straight line from left to right; A feeding assembly, comprising a feeding track and a clamping conveying member (202) that cooperates with the feeding track to transport the lead frame from a feeding position to a welding position and then to a discharging position; A preheating assembly, comprising a preheating plate (301) arranged on the feeding track, wherein the preheating plate (301) can preheat the feeding position (101) and / or the lead frame displaced from the feeding position (101) to the welding position (102); A cooling component, comprising a cooling plate (401) arranged on the feeding track, wherein the cooling plate (401) can cool the welding position (102) and / or the lead frame displaced from the welding position (102) to the discharge position (103); The protective gas delivery assembly (5) comprises a first gas output plate (501) arranged above the preheating assembly and the deheating assembly, and a first gas source connector (502) connected to a gas source is arranged on the top of the first gas output plate (501).

2. The anti-oxidation wire bonding machine according to claim 1, characterized in that: The first gas output plate (501) comprises an upper plate (501.1) and a lower plate (501.2) which are detachably connected, the bottom of the upper plate (501.1) is provided with a hole groove structure (501.3) which is connected to the first gas source connecting piece (502), and the lower plate (501.2) is evenly provided with a plurality of gas outlet holes (501.4) which penetrate the top and bottom thereof, and the protective gas in the first gas source connecting piece (502) flows from the hole groove structure (501.3) to the gas outlet holes (501.4) and then flows out.

3. The anti-oxidation wire bonding machine according to claim 2, characterized in that: The invention comprises a welding assembly, wherein the welding assembly comprises a welding plate (602) arranged in a feeding track and an ultrasonic welding machine arranged on a machine body (1), wherein the welding plate (602) is located at a welding position, and a welding head of the ultrasonic welding machine is located above the welding plate (602). The machine body (1) is also provided with a heating plate (601), wherein the heating plate (601) is arranged below the welding plate (602), and the heating plate (601) is used to heat a lead frame transmitted to the welding plate so that the welding mechanism can perform welding.

4. The anti-oxidation wire bonding machine according to claim 3, characterized in that: A second gas output plate (503) is arranged above the welding plate (602), a second gas source connection piece (504) is arranged on the top of the second gas output plate (503), and a first gap (701) is left between the second gas output plate (503) and the welding plate (602) for the lead frame to pass through.

5. The anti-oxidation wire bonding machine according to claim 4, characterized in that: A first extension plate (501.7) is arranged on one side of the lower plate (501.2) close to the second gas output plate (503), and a second extension plate (501.8) is arranged on one side of the second gas output plate (503) close to the lower plate (501.2), and the first extension plate (501.7) is arranged above or below the second extension plate (501.8).

6. The anti-oxidation wire bonding machine according to claim 2, characterized in that: The feeding track comprises a first slide rail (201.1) and a second slide rail (201.2) arranged relatively to each other, the first slide rail (201.1) is provided with a first slide groove (201.11), the second slide rail (201.2) is provided with a second slide groove (201.21), the first slide groove (201.11) and the second slide groove (201.21) are located on the same horizontal line, a third extension plate (501.9) is provided on the top of the upper plate (501.1), the third extension plate (501.9) is provided with an assembly through hole running through the top and bottom thereof, and a first threaded hole corresponding to the assembly through hole is provided on the top of the first slide rail (201.1) and / or the second slide rail (201.2).

7. The anti-oxidation wire bonding machine according to claim 1, characterized in that: The clamping and conveying member (202) comprises a left clamping member (202.1) and a right clamping member (202.2); the left clamping member (202.1) comprises a left movable arm (202.11) and a left clamping head (202.12) arranged at the end of the left movable arm (202.11); the right clamping member (202.2) comprises a right movable arm (202.21) and a right clamping head (202.22) arranged at the end of the right movable arm (202.21); the left clamping head (202.12) and the right clamping head (202.22) can clamp a lead frame; the left movable arm (202.11) and the right movable arm (202.21) can respectively drive the left clamping head (202.12) and the right clamping head (202.22) to perform linear displacement.

8. The anti-oxidation wire bonding machine according to claim 5, characterized in that: A second gap (702) is provided between a first gas output plate (501) arranged above the preheating plate (301) and the preheating plate (301), and a third gap (703) is provided between a first gas output plate (501) arranged on the deheating plate (401) and the deheating plate (401), the second gap (702), the first gap (701) and the third gap (703) are connected in sequence, and the protective gas output by the first gas output plate (501) and the second gas output plate (503) can flow in the first gap (701), the second gap (702) and the third gap (703).

9. The anti-oxidation wire bonding machine according to claim 5, characterized in that: The machine body (1) is provided with a first fixing seat (801) and a second fixing seat (802); the first fixing seat (801) and the second fixing seat (802) are respectively arranged between the feeding position (101) and the welding position (102) and between the welding position (102) and the discharging position (103); the first fixing seat (801) and the second fixing seat (802) are respectively provided with a first clamp (801.1) and a second clamp (802.1); the first clamp (801.1) and the second clamp (802.1) are both located above the feeding track, and the first clamp (801.1) and the second clamp (802.1) are respectively clamped and fixed on two sides of the second gas output plate (503).

10. The anti-oxidation wire bonding machine according to claim 2, characterized in that: The upper plate (501.1) is provided with a connecting through hole (501.5) penetrating the top and bottom thereof, and the lower plate (501.2) is provided with a second threaded hole (501.6) adapted to the connecting through hole (501.5), and a stud can be passed through the connecting through hole (501.5) and then threadedly engaged with the second threaded hole (501.6) to detachably connect the upper plate (501.1) and the lower plate (501.2).

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