A diffuser PN surface determination instrument

Abstract

The utility model relates to the technical field of diffusers, and in particular to a diffuser PN surface determination instrument. It includes a magnetic field generating module, a current supply module, a Hall voltage measuring module, a sample placement platform module and a data processing and display module. The magnetic field generating module is a hollow structure and generates a magnetic field perpendicular to the sample placement platform. The sample placement platform module is placed in the hollow structure of the magnetic field generating module. The Hall voltage measuring module, the current supply module and the magnetic field generating module are connected to the data processing and display module. Compared with the traditional detection method, the PN surface of the diffuser can be accurately determined, the accuracy is improved, and misjudgment is avoided. At the same time, a non-destructive determination method is adopted to avoid damage to the diffuser. The PN surface conditions of different positions of the same diffuser can also be detected, and the determination results can be displayed efficiently and quickly.

Description

Technical Field

[0001] The utility model relates to the technical field of diffusion sheets, in particular to a diffusion sheet PN surface determination instrument. Background Art

[0002] Semiconductor diffusers are mainly used in semiconductor manufacturing processes. They have specific material composition and structure, and play a key role in the semiconductor doping process. Through diffusers, the concentration and distribution of impurity atoms entering semiconductor materials can be accurately controlled, which helps to form important structures such as PN junctions in semiconductor devices, thereby determining the performance and function of the device. It is essential for realizing specific electrical properties of semiconductor devices, such as conductivity and resistivity. First of all, the properties of PN surfaces are different, which is essential for understanding and studying the characteristics of semiconductors. Knowing whether it is a P-side or an N-side can help us deeply analyze the key characteristics of semiconductors, such as the conductive mechanism and band structure. In the manufacturing and assembly process of semiconductor devices, accurately distinguishing the PN surface is the basis for ensuring the correct operation of the device. If the installation or connection is wrong, it may cause the device to fail or the performance to deteriorate. In semiconductor-related scientific research and experiments, clarifying the PN surface can help researchers better design experimental plans. In some specific application scenarios, such as specific circuit design or system integration, the correct determination of the PN surface has a direct impact on the stability and reliability of the entire system. The traditional detection method is observation, which distinguishes the P-side and N-side stripes or the concave and convex directions of the diffuser. This method has low judgment efficiency and may cause a certain degree of misjudgment. The second is the chemical method, which takes out part of the diffuser and places it in a mixed acid test solution. The PN surface is judged according to the different corrosion rates of the PN surface of the diffuser. The judgment efficiency is low and it is destructive. Utility Model Content

[0003] In order to solve the problem of efficiently and losslessly determining the PN surface of a diffusion sheet, the utility model provides a diffusion sheet PN surface determination instrument.

[0004] In the first aspect, the utility model provides a diffuser PN surface determination instrument, including a magnetic field generating module, a current supply module, a Hall voltage measurement module, a sample placement platform module and a data processing and display module. The magnetic field generating module is a hollow structure and generates a magnetic field perpendicular to the sample placement platform. The sample placement platform module is placed in the hollow structure of the magnetic field generating module. The Hall voltage measurement module, the current supply module and the magnetic field generating module are connected to the data processing and display module.

[0005] Furthermore, the current supply module includes a power conversion unit, a current detection element, a first rotating buckle, a second rotating buckle, a first steel needle and a second steel needle, the placement platform includes a detection platform and a base, the first steel needle is connected to the first rotating buckle, the second steel needle is connected to the second rotating buckle, and the first rotating buckle and the second rotating buckle are slidably installed on the detection platform.

[0006] Furthermore, the first rotating buckle and the second rotating buckle are configured as telescopic structures.

[0007] Furthermore, the base is configured as a lifting structure.

[0008] Furthermore, the magnetic field generating device includes a magnetic field generating coil, a magnetic field control power supply and a magnetic field strength display, the magnetic field generating coil is configured as a single-axis Helmholtz coil structure, the magnetic field generating coil is provided with two magnetic field generating coils, and the plane of the magnetic field generating coil is parallel to the plane of the detection platform.

[0009] Furthermore, the magnetic field generating coil is configured as a liftable structure.

[0010] Furthermore, the Hall voltage measurement module includes a measurement probe and a Hall voltage measurement circuit, the detection end of the measurement probe is provided with two contacts, and the measurement probe is electrically connected to the Hall voltage measurement circuit.

[0011] Furthermore, the measuring probe is mounted on the first rotating buckle and the second rotating buckle, and the measuring probe is arranged between the connecting line of the first probe and the second probe.

[0012] Furthermore, the Hall voltage measurement circuit includes a regulator, a Hall sensor, a gain amplifier, a Schmitt trigger and an output interface, the measuring probe is connected to the Hall sensor through the regulator, the first output pin of the Hall sensor is connected to the first input pin of the gain amplifier and the first input pin of the Schmitt trigger, the second output pin of the Hall sensor is connected to the second input pin of the gain amplifier, the third output pin of the Hall sensor is connected to the third input pin of the gain amplifier, the fourth output pin of the gain amplifier is connected to the second input pin of the Schmitt trigger, the third output pin of the Schmitt trigger is connected to the data processing and display module, and the fourth output pin of the Hall sensor, the fifth output pin of the gain amplifier and the fourth output pin of the Schmitt trigger are grounded.

[0013] Furthermore, the data processing and display module includes a signal amplifier, a filter, a logic circuit and a digital-to-analog conversion circuit, and the signal amplifier is connected to the filter, the logic circuit and the digital-to-analog conversion circuit in sequence.

[0014] In summary, the utility model has the following beneficial technical effects:

[0015] 1. Compared with the traditional detection method, the PN surface determination instrument of the diffuser proposed by the utility model can accurately determine the PN surface of the diffuser, improve the accuracy, avoid misjudgment, and adopt a non-destructive determination method to avoid damage to the diffuser.

[0016] 2. The utility model proposes a diffuser PN surface determination instrument, which can also detect the PN surface conditions of different positions of the same diffuser, which is efficient and fast. The operator can adjust the current and magnetic field strength to improve the accuracy of the detection. At the same time, the display unit can accurately display the current current strength, magnetic field strength and the determination result. The operator can intuitively see the determination result without having to make a determination based on the detection data. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a structural block diagram of a diffuser PN surface determination instrument according to an embodiment of the utility model;

[0018] Figure 2 This is a structural schematic diagram of a diffuser PN surface determination instrument according to an embodiment of the utility model;

[0019] Figure 3 This is a top view of the detection platform of an embodiment of the utility model;

[0020] Figure 4 This is a Hall voltage measurement circuit diagram of an embodiment of the utility model.

[0021] Among them, 1. magnetic field generating coil; 2. detection platform; 3. base; 4. first rotating buckle; 5. second rotating buckle; 6. measuring probe; 7. data processing and display module; 8. first steel needle; 9. second steel needle; 10. regulator; 11. Hall sensor; 12. gain amplifier; 13. Schmitt trigger. DETAILED DESCRIPTION

[0022] The utility model is further described in detail below in conjunction with the accompanying drawings.

[0023] Example 1

[0024] Reference Figure 1 and Figure 2 A diffusion sheet PN surface determination instrument of this embodiment includes a magnetic field generating module, a current supply module, a Hall voltage measuring module, a sample placement platform module and a data processing and display module 7. The magnetic field generating module is a hollow structure and generates a magnetic field perpendicular to the sample placement platform. The sample placement platform module is placed in the hollow structure of the magnetic field generating module. The Hall voltage measuring module, the current supply module and the magnetic field generating module are connected to the data processing and display module 7.

[0025] Reference Figure 3 The current supply module includes a power conversion unit, a current detection element, a first rotating buckle 4, a second rotating buckle 5, a first steel needle 8, and a second steel needle 9. The placement platform includes a detection platform 2 and a base 3. The first steel needle 8 is connected to the first rotating buckle 4, and the second steel needle 9 is connected to the second rotating buckle 5. The first rotating buckle 4 and the second rotating buckle 5 are slidably installed on the detection platform 2. The first rotating buckle 4 and the second rotating buckle 5 are set as a telescopic structure. The base 3 is set as a lifting structure.

[0026] The magnetic field generating device includes a magnetic field generating coil 1, a magnetic field regulating power supply and a magnetic field strength display. The magnetic field generating coil 1 is set as a one-axis Helmholtz coil structure. The magnetic field generating coil 1 is provided with two magnetic field generating coils 1. The plane of the magnetic field generating coil 1 is parallel to the plane of the detection platform 2. The magnetic field generating coil 1 is set as a liftable structure.

[0027] The Hall voltage measurement module includes a measurement probe 6 and a Hall voltage measurement circuit. The detection end of the measurement probe 6 is provided with two contacts, and the measurement probe 6 is electrically connected to the Hall voltage measurement circuit.

[0028] Reference Figure 3 The measuring probe 6 is mounted on the first rotating buckle 4 and the second rotating buckle 5 , and the measuring probe 6 is arranged between the connecting line of the first probe and the second probe.

[0029] Place the diffuser and the sample on the detection platform 2, turn on the magnetic field generating device and the current supply module, apply a magnetic field on both sides of the diffuser, and energize the area to be measured so that the diffuser is in a magnetic field and current environment. The Hall voltage generated is measured by the Hall voltage measurement module, and the data processing and display unit determines the PN surface of the diffuser according to the positive and negative of the Hall voltage, and displays the result intuitively.

[0030] Reference Figure 4The Hall voltage measurement circuit includes a regulator 10, a Hall sensor 11, a gain amplifier 12, a Schmitt trigger 13 and an output interface. The measuring probe 6 is connected to the Hall sensor 11 through the regulator 10. The first output pin of the Hall sensor 11 is connected to the first input pin of the gain amplifier 12 and the first input pin of the Schmitt trigger 13. The second output pin of the Hall sensor 11 is connected to the second input pin of the gain amplifier 12. The third output pin of the Hall sensor 11 is connected to the third input pin of the gain amplifier 12. The fourth output pin of the gain amplifier 12 is connected to the second input pin of the Schmitt trigger 13. The third output pin of the Schmitt trigger 13 is connected to the data processing and display module 7. The fourth output pin of the Hall sensor 11, the fifth output pin of the gain amplifier 12 and the fourth output pin of the Schmitt trigger 13 are grounded.

[0031] The Hall sensor 11, the gain amplifier 12 and the Schmitt trigger 13 form a circuit for detecting the PN surface. The Hall sensor 11 is used to detect voltage changes. When the voltage near the PN surface changes, the Hall sensor 11 will generate a corresponding voltage signal. The function of the gain amplifier 12 is to amplify the weak voltage signal generated by the Hall sensor 11 to a suitable amplitude for subsequent processing. By adjusting the gain of the gain amplifier 12, the signal strength and sensitivity can be improved. The Schmitt trigger 13 shapes and filters the amplified voltage signal, converting the irregular voltage signal into a square wave signal with a clear threshold. When the input signal exceeds the set threshold, the Schmitt trigger 13 outputs a high level, and when the input signal is lower than the threshold, it outputs a low level. Through such a circuit combination, the voltage change detected by the Hall sensor 11 is converted into a digital signal that is easy to process and analyze after gain amplification and processing by the Schmitt trigger 13.

[0032] The data processing and display module 7 comprises a signal amplifier, a filter, a logic circuit and a digital-to-analog conversion circuit, and the signal amplifier is connected to the filter, the logic circuit and the digital-to-analog conversion circuit in sequence.

[0033] In the instrument designed by using the Hall effect to determine the PN face of the diffuser, the data processing part receives the voltage signal from the Hall sensor 11, amplifies and filters the signal, and improves the quality and accuracy of the signal. The PN face of the diffuser is determined by the logic circuit, and the display unit intuitively presents the result of the data processing. This embodiment uses a digital display screen to clearly display the judgment result of whether it is the P face or the N face. At the same time, the display screen displays the current intensity, Hall voltage value and magnetic field intensity related parameters, so that the operator can have a more comprehensive understanding of the measurement situation.

[0034] The above are all preferred embodiments of the present utility model, and are not intended to limit the protection scope of the present utility model. Therefore, any equivalent changes made based on the structure, shape, and principle of the present utility model should be included in the protection scope of the present utility model.

Claims

1. A diffuser PN surface determination instrument, characterized in that: It includes a magnetic field generating module, a current supply module, a Hall voltage measuring module, a sample placement platform module and a data processing and display module. The magnetic field generating module is a hollow structure and generates a magnetic field perpendicular to the sample placement platform. The sample placement platform module is placed in the hollow structure of the magnetic field generating module. The Hall voltage measuring module, the current supply module and the magnetic field generating module are connected to the data processing and display module.

2. A diffuser PN surface determination instrument according to claim 1, characterized in that: The current supply module includes a power conversion unit, a current detection element, a first rotating buckle, a second rotating buckle, a first steel needle and a second steel needle. The placement platform includes a detection platform and a base. The first steel needle is connected to the first rotating buckle, and the second steel needle is connected to the second rotating buckle. The first rotating buckle and the second rotating buckle are slidably installed on the detection platform.

3. A diffuser PN surface determination instrument according to claim 2, characterized in that: The first rotating buckle and the second rotating buckle are configured as telescopic structures.

4. A diffuser PN surface determination instrument according to claim 2, characterized in that: The base is configured as a lifting structure.

5. A diffuser PN surface determination instrument according to claim 1, characterized in that: The magnetic field generating module includes a magnetic field generating coil, a magnetic field regulating power supply and a magnetic field strength display. The magnetic field generating coil is configured as a single-axis Helmholtz coil structure. The magnetic field generating coil is provided with two magnetic field generating coils. The plane of the magnetic field generating coil is parallel to the plane of the detection platform.

6. A diffuser PN surface determination instrument according to claim 5, characterized in that: The magnetic field generating coil is configured as a liftable structure.

7. A diffuser PN surface determination instrument according to claim 2, characterized in that: The Hall voltage measurement module comprises a measurement probe and a Hall voltage measurement circuit. The detection end of the measurement probe is provided with two contacts, and the measurement probe is electrically connected to the Hall voltage measurement circuit.

8. A diffuser PN surface determination instrument according to claim 7, characterized in that: The measuring probe is mounted on the first rotating buckle and the second rotating buckle, and the measuring probe is arranged between the connecting line of the first probe and the second probe.

9. A diffuser PN surface determination instrument according to claim 7, characterized in that: The Hall voltage measurement circuit includes a regulator, a Hall sensor, a gain amplifier, a Schmitt trigger and an output interface. The measuring probe is connected to the Hall sensor through the regulator. The first output pin of the Hall sensor is connected to the first input pin of the gain amplifier and the first input pin of the Schmitt trigger. The second output pin of the Hall sensor is connected to the second input pin of the gain amplifier. The third output pin of the Hall sensor is connected to the third input pin of the gain amplifier. The fourth output pin of the gain amplifier is connected to the second input pin of the Schmitt trigger. The third output pin of the Schmitt trigger is connected to a data processing and display module. The fourth output pin of the Hall sensor, the fifth output pin of the gain amplifier and the fourth output pin of the Schmitt trigger are grounded.

10. The diffuser PN surface determination instrument according to claim 1, characterized in that: The data processing and display module comprises a signal amplifier, a filter, a logic circuit and a digital-to-analog conversion circuit, and the signal amplifier is connected to the filter, the logic circuit and the digital-to-analog conversion circuit in sequence.

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