Fluid control system and cleaning machine
By designing a reasonable fluid control system layout in semiconductor equipment cleaning machines, the problem of unreasonable layout of liquid supply devices and filter devices in the prior art is solved, and more effective space utilization and simple maintenance processes are achieved, reducing maintenance costs and downtime.
Patent Information
- Application Number
- CN202421426630.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-21
- Publication Date
- 2025-04-01
- Estimated Expiration
- 2034-06-21
AI Technical Summary
The layout of the liquid supply devices and filter devices of existing semiconductor equipment cleaning machines is unreasonable, resulting in messy distribution of components and excessive space, increasing maintenance costs and downtime, and limiting technical upgrades and functional expansion.
A fluid control system is designed, in which the fluid power device, filter device, temperature control device and valve are installed in a specific position of the fixed seat, and the space is effectively utilized through the bracket.
Through reasonable layout planning, the problem of complex space occupancy of components is solved, maintenance and repair work is simplified, maintenance costs and downtime are reduced, and technology upgrades and functional expansion are promoted.
Smart Images
Figure CN222705463U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the field of semiconductor equipment cleaning, and in particular to a fluid control system and a cleaning machine. Background Art
[0002] Wet cleaning is an essential process in semiconductor processing, which not only involves the cleaning of wafers, but also involves the cleaning of the semiconductor equipment itself that performs the cleaning task.
[0003] At present, cleaning machines are generally used to clean semiconductor equipment. However, the layout planning of the liquid supply device and the filter device inside the cleaning machine is unreasonable, the components are distributed in a disorderly manner, and they occupy too much internal space. The complex layout of components makes daily maintenance and necessary assembly, disassembly and repair work cumbersome, increasing maintenance costs and downtime. In addition, the chaotic layout limits the possibility of technical upgrades and functional expansion of the liquid supply device and the filter device, affecting the long-term development and technical updates of the cleaning machine.
[0004] Therefore, how to provide a fluid control system with a reasonable layout planning is a technical problem that technical personnel in this field need to solve urgently. Utility Model Content
[0005] The present application provides a fluid control system and a cleaning machine, wherein the layout planning of the fluid control system is reasonable and can utilize space more effectively.
[0006] To achieve the above objectives, the present application provides a fluid control system in a first aspect, comprising:
[0007] Fluid power devices, filtration devices, temperature control devices and several valves;
[0008] The fixing seat comprises a top plate, a bottom plate and a side plate; a receiving space is defined between the top plate, the bottom plate and the side plate; an outer wall of the receiving space extends in a direction away from the receiving space to form a bracket;
[0009] At least one of the fluid power device, the filter device, the temperature control device and the valve is arranged in the accommodating space, and at least one of the fluid power device, the filter device, the temperature control device and the valve is arranged in the bracket.
[0010] Preferably, the fluid power device is arranged in the accommodation space;
[0011] Some side panels are provided with openings matching the size of the fluid power device, configured as installation inlets and outlets of the fluid power device.
[0012] Optionally, the temperature control device is arranged on the outer wall of the accommodating space in a direction close to the fluid power device, and is connected to a pipeline of the fluid power device.
[0013] Preferably, the temperature control device is located above the fluid power device and is arranged on the top plate of the fixing seat.
[0014] Preferably, the bracket comprises a first bracket;
[0015] The first bracket extends from the outer wall of the side plate in a direction away from the accommodating space.
[0016] Preferably, there is a preset distance between the first bracket and the bottom plate.
[0017] Specifically, the filtering device is arranged on the first bracket and connected to the pipeline of the fluid power device.
[0018] Preferably, the bracket further comprises a second bracket;
[0019] The second bracket extends from the outer wall of the top plate or the outer wall of the side plate in a direction away from the accommodating space.
[0020] Specifically, the valve is at least partially disposed on a pipeline connecting the fluid power device to the outside, on a pipeline connecting the filter device to the outside, and on a pipeline connecting the fluid power device to the temperature control device.
[0021] A second aspect of the present application provides a cleaning machine, comprising: the fluid control system provided in the first aspect.
[0022] In conjunction with the specific embodiments of this application, the following technical features are disclosed:
[0023] In the technical solution of the present application, a fluid control system and a cleaning machine are provided, wherein the fluid control system includes: a fluid power device, a filter device, a temperature control device and a plurality of valves; a fixed seat having a top plate, a bottom plate and a side plate; a storage space is defined between the top plate, the bottom plate and the side plate; the outer wall of the storage space extends in a direction away from the storage space to form a bracket; at least one of the fluid power device, the filter device, the temperature control device and the valve is arranged in the storage space, and at least one of the fluid power device, the filter device, the temperature control device and the valve is arranged in the bracket. By installing the fluid power device, the filter device, the temperature control device and the plurality of valves at a specific position of the fixed seat, the space is effectively utilized, and the problem of the original complicated arrangement of components occupying too much space is solved. Compared with the prior art, the present system can make more effective use of space, and through reasonable layout planning, daily maintenance and necessary disassembly and repair work become simpler and faster, thereby reducing maintenance costs and downtime.
[0024] Preferably, the design of the opening of the side wall facilitates quick installation and removal of the fluid power device. BRIEF DESCRIPTION OF THE DRAWINGS
[0025] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.
[0026] Figure 1 It is one of the schematic diagrams of the fluid control system provided in the embodiment of the present application;
[0027] Figure 2 This is the second schematic diagram of the fluid control system provided in the embodiment of the present application;
[0028] Figure 3 This is the third schematic diagram of the fluid control system provided in the embodiment of the present application;
[0029] Figure 4 This is the fourth schematic diagram of the fluid control system provided in the embodiment of the present application.
[0030] Figure numerals: 10, fluid power device; 20, filtering device; 30, temperature control device; 40, valve; 41, first part; 42, second part; 43, third part; 50, fixing seat; 51, top plate; 52, bottom plate; 53, side plate; 60, bracket; 61, first bracket; 62, second bracket. DETAILED DESCRIPTION
[0031] Some embodiments of the present application are described below with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are only used to explain the technical principles of the present application and are not intended to limit the protection scope of the present application.
[0032] As described in the background technology, at present, semiconductor devices are generally cleaned by a cleaning machine. However, the layout planning of the liquid supply device and the filter device inside the cleaning machine is unreasonable, the components are distributed in a disorderly manner, and too much internal space is occupied. The complex layout of components makes daily maintenance and necessary assembly, disassembly and repair work cumbersome, increasing maintenance costs and downtime. In addition, the chaotic layout limits the possibility of technical upgrades and functional expansions of the liquid supply device and the filter device, affecting the long-term development and technical updates of the cleaning machine.
[0033] To solve the above problems, the core of this application is to provide a fluid control system to more effectively utilize space through reasonable layout planning.
[0034] Example 1
[0035] Embodiment 1 of the present application provides a fluid control system, such as Figures 1 to 4As shown, it includes: a fluid power device 10, a filtering device 20, a temperature control device 30 and a plurality of valves 40; a fixed seat 50, having a top plate 51, a bottom plate 52 and a side plate 53; a receiving space is defined between the top plate 51, the bottom plate 52 and the side plate 53; the outer wall of the receiving space extends in a direction away from the receiving space to form a bracket 60; at least one of the fluid power device 10, the filtering device 20, the temperature control device 30 and the valve 40 is arranged in the receiving space, and at least one of the fluid power device 10, the filtering device 20, the temperature control device 30 and the valve 40 is arranged in the bracket 60.
[0036] Among them, by installing the fluid power device 10, the filter device 20, the temperature control device 30 and the plurality of valves 40 at specific positions of the fixing seat 50, the space is effectively utilized, and the problem of the original complicated arrangement of components occupying too much space is solved. Compared with the prior art, the present system can more effectively utilize the space, and through reasonable layout planning, daily maintenance and necessary disassembly and repair work become simpler and faster, thereby reducing maintenance costs and downtime.
[0037] Example 2
[0038] Based on Example 1, Example 2 of the present application provides installation locations for a fluid power device, a filtering device, and a temperature control device to rationally plan the layout and effectively utilize space.
[0039] In a preferred embodiment of the present application, Figures 1 to 4 The fluid power device 10 is arranged in the accommodation space; a portion of the side panels 53 is provided with an opening matching the size of the fluid power device 10 , configured as an installation inlet and outlet of the fluid power device 10 .
[0040] Among them, the layout of the fluid power device 10 is close to the installation inlet and outlet, which makes it easier for the staff to access the device, thereby simplifying daily maintenance and necessary disassembly and repair work. In addition, the size of the installation inlet and outlet matches that of the fluid power device 10, and can be compatible with a variety of different sizes and types of fluid power devices 10, thereby improving the adaptability of the system.
[0041] In an optional embodiment of the present application, Figures 1 to 4 As shown, the temperature control device 30 is arranged on the outer wall of the accommodation space in a direction close to the fluid power device 10 and is connected to the pipeline of the fluid power device 10 .
[0042] Among them, the temperature control device 30 can be set at any position around the fixed seat 50 close to the fluid power device 10 to ensure that the fluid power device 10 can transport the fluid to the temperature control device 30 through the shortest path, reducing the energy consumption of the fluid during the transportation process and improving the efficiency of fluid processing.
[0043] In a preferred embodiment of the present application, the temperature control device 30 is located above the fluid power device 10 and is provided on the top plate 51 of the fixing seat 50 .
[0044] Among them, because of the opening of the side plate 53, if the temperature control device 30 is set beside the side plate, since the temperature control device 30 is larger than the fluid power device 10, it may block the opening, thereby making it inconvenient to disassemble and assemble the fluid power device 10. Therefore, the temperature control device 30 is set on the top plate 51 to effectively utilize the space. At the same time, the temperature control device 30 and the fluid power device 10 are set up and down, and the two can be directly connected through the upper and lower pipes, which saves pipes and makes the layout planning of the pipes more reasonable.
[0045] In a preferred embodiment of the present application, the bracket 60 includes a first bracket 61 ; the first bracket 61 extends from the outer wall of the side plate 53 in a direction away from the accommodating space.
[0046] The first bracket 61 may be a transverse bracket, which is arranged parallel to the bottom plate 52 , and the related device may be installed on the first bracket 61 .
[0047] In a preferred embodiment of the present application, the filter device 20 is disposed on the first bracket 61 and is connected to the fluid power device 10 via a pipeline.
[0048] The filter device 20 is installed on the upper side of the first bracket 61 , which effectively utilizes the upper space of the fixing seat 50 .
[0049] In a preferred embodiment of the present application, there is a preset distance between the first bracket 61 and the bottom plate 52 .
[0050] Such a design can form a space between the first bracket 61 and the bottom plate 52, and the space can be used to install relevant devices or lay out pipelines.
[0051] In a preferred embodiment of the present application, the filter device 20 includes a first end and a second end opposite to each other, and a liquid inlet disposed near the first end; the first end of the filter device 20 is disposed on the first bracket 61 .
[0052] Among them, the common filtering devices are all installed in a forward direction, that is, the second end is installed on the structure so that the liquid inlet faces upward. In the present application, the liquid inlet is arranged downward, that is, the entire filtering device 20 is arranged upside down along the height direction of its body, so that gravity is used to assist the flow of fluid, improve the filtering efficiency, and more effectively discharge the filtered fluid to the designated area.
[0053] In summary, the temperature control device 30 is arranged on the top plate 51 of the fixing seat 50, located on the upper side of the fluid power device 10 and beside the filter device 20, and the space is effectively utilized through reasonable layout planning. Furthermore, the layout of the fluid power device 10, the filter device 20 and the temperature control device 30 is reasonable, and the pipelines connecting the three are more streamlined, avoiding the problems of leakage, blockage or other failures caused by the original complicated pipelines.
[0054] In an optional embodiment of the present application, Figures 1 to 4 As shown, the bracket 60 further includes a second bracket 62 ; the second bracket 62 extends from the outer wall of the top plate 51 or the outer wall of the side plate 53 in a direction away from the accommodating space.
[0055] Among them, since the main devices have been laid out, in order to avoid complicated pipeline layout, the pipelines connecting the devices can be planned and arranged on the second bracket 62. At the same time, the second bracket 62 can also be used to install new components when the system is upgraded and expanded in function in the future without affecting the transportation and filtration of the fluid.
[0056] In a specific embodiment of the present application, Figure 2 As shown, the second bracket 62 includes a first plate, a second plate and a third plate (not shown in the figure); wherein the first plate is formed by extending upward from the top plate 51 in a direction perpendicular to the top plate 51, the second plate is formed by extending from the end of the first plate in a direction away from the first plate, and the third plate is extended from the end of the second plate in a direction away from the second plate to the first bracket 61, and is connected to the first bracket 61.
[0057] Example 3
[0058] Example 3 of the present application provides the entire process of fluid extraction and filtration based on Example 2.
[0059] In a specific embodiment of the present application, Figures 1 to 4 As shown, the fluid control system also includes: a tank body (not shown in the figure), configured to store fluid, which includes a first tank body and a second tank body; the first tank body is arranged on a side close to the fixed seat 50, and is connected to the pipeline of the fluid power device 10; the second tank body is connected to the pipeline of the filter device 20; the fluid in the first tank body is extracted to the filter device 20 through the fluid power device 10, and is discharged to the second tank body after filtering.
[0060] The first tank body can be understood as an outer tank, in which the fluid is used for circulation, and the second tank body can be understood as an inner tank, in which the fluid is used for a specific process.
[0061] In some embodiments of the present application, the first tank body stores the original fluid, that is, the unfiltered fluid, in the initial state. The original fluid is extracted by the fluid power device 10 and enters the filtering device 20 for filtering operation to obtain the filtered fluid, which is stored in the second tank body.
[0062] In an optional embodiment of the present application, the second tank body is also connected to the pipeline of the first tank body; when the fluid stored in the second tank body exceeds a preset threshold, part of the fluid in the second tank body overflows into the first tank body through the pipeline.
[0063] Among them, the fluid capacity in the trough body remains unchanged under normal circumstances. Since both the first trough body and the second trough body have capacity limitations, the fluid in the first trough body is extracted for filtering operation and then enters the second trough body. As the amount of fluid in the first trough body continues to decrease, the amount of fluid in the second trough body will continue to increase. However, there is a flow limit in the second trough body. When the amount of fluid in the second trough body exceeds a preset threshold, the fluid therein will overflow and flow into the first trough body through the pipeline, and mix with the fluid in the first trough body to perform extraction and filtering operations again.
[0064] In an optional embodiment of the present application, the fluid control system further includes: a concentration meter, which is arranged between the second tank body and the first tank body.
[0065] The concentration meter can record the concentration of the fluid in the second tank body when it overflows into the first tank body, and the data provided by the concentration meter can be used to analyze the timing of the overflow of the second tank body into the first tank body.
[0066] In an optional embodiment of the present application, Figures 1 to 4 As shown, the second tank body is also connected to the fluid power device 10; when the fluids in the first tank body and the second tank body do not meet the preset state, the fluids in the first tank body and the second tank body are extracted to the filtering device 20 through the fluid power device 10, and are discharged to the designated channel after filtering.
[0067] The fluid in the tank body has become ineffective after multiple cycles of extraction and filtration, and the fluid activity has decreased, which cannot meet the process requirements, so the fluid needs to be discharged. All the fluids in the first tank body and the second tank body will be extracted and filtered and then discharged to the designated pipeline channel for subsequent operations.
[0068] Example 4
[0069] Embodiment 4 of the present application provides an installation position of a valve based on Embodiment 3 to achieve flow regulation of the fluid.
[0070] In a preferred embodiment of the present application, Figures 1 to 4As shown, the valve 40 is at least partially disposed on a pipeline connecting the fluid power device 10 to the outside, on a pipeline connecting the filter device 20 to the outside, and on a pipeline connecting the fluid power device 10 to the temperature control device 30 .
[0071] The valve is configured to adjust the flow rate of the fluid in different pipelines.
[0072] In a specific embodiment of the present application, Figures 1 to 4 As shown, the valve consists of three parts; the first part 41 is arranged between the fluid power device 10 and the first trough body, and is configured to control the flow rate of the fluid at the inlet; the second part 42 is arranged between the fluid power device 10 and the temperature control device 30, and is configured to control the flow rate of the fluid output from the fluid power device 10 to the temperature control device 30; the third part 43 is arranged between the filter device 20 and the designated channel, and is configured to control the flow rate of the fluid at the outlet.
[0073] Among them, the use of valves enables the system to more accurately control the flow rate and direction of the fluid to improve the controllability of the process. The setting of the first part 41 is convenient for the staff to control the amount of fluid entering the system, so as to adjust the flow rate and flow of the fluid according to actual needs; the setting of the second part 42 is convenient for controlling the flow of the fluid before the temperature is adjusted to optimize the heat exchange efficiency; the setting of the third part 43 can control the flow rate of the filtered fluid to meet the needs of different scenarios.
[0074] Example 5
[0075] Example 5 of the present application provides specific equipment used for the device and valve based on Examples 1 to 4.
[0076] In an optional embodiment of the present application, the fluid power device adopts a bellows pump.
[0077] Among them, the bellows pump provides a pollution-free, low-noise fluid delivery method, ensuring the purity of the fluid during the delivery process and avoiding cross contamination.
[0078] In an optional embodiment of the present application, the filtering device adopts a membrane filter with a filtering accuracy of 0.2μ.
[0079] Among them, the high-precision filter membrane can remove extremely small particles and impurities to ensure the cleanliness of the fluid.
[0080] In an optional embodiment of the present application, the temperature control device adopts a constant temperature machine or a heating machine.
[0081] Among them, the thermostat can accurately control the temperature of the fluid and keep it constant; the heater can increase the temperature of the fluid and is suitable for process flows that require heating; the use of a thermostat or heater enables the system to adjust the temperature of the fluid according to process requirements, thereby improving the flexibility of the system.
[0082] In an optional embodiment of the present application, the valve is a pneumatic valve.
[0083] Among them, compared with valves with complex structures, pneumatic valves have simple structures, fewer components and higher reliability.
[0084] In an optional embodiment of the present application, the fluid control system also includes: a pipe clamp flow meter, which is arranged on the pipeline connecting the fluid power device and the temperature control device, the pipeline connecting the temperature control device and the filtering device, the pipeline connecting the first tank body and the fluid power device, and the pipeline connecting the filtering device and the designated channel.
[0085] Among them, the pipe clamp flowmeter can be clamped on the outside of the pipeline without any processing or modification of the pipeline, and is used to measure the flow rate of the fluid at any position in the pipeline.
[0086] Example 6
[0087] Embodiment 6 of the present application provides a cleaning machine based on Embodiments 1 to 5.
[0088] A cleaning machine comprises: the above-mentioned fluid control system.
[0089] In some embodiments of the present application, a special fixing seat is provided inside the cleaning machine for stably installing the components of the fluid control system; the air bag pump is located in the accommodating space, arranged on the side close to the opening, and is responsible for conveying the cleaning liquid; the membrane filter is invertedly arranged on the bracket extending from the fixing seat, and is responsible for filtering the cleaning liquid; the heater is arranged on the top plate of the fixing frame, and is responsible for adjusting the temperature of the cleaning liquid; the pneumatic valve is arranged at the air bag pump and the cleaning liquid inlet, between the air bag pump and the heater, and at the membrane filter and the cleaning liquid outlet, and is responsible for adjusting the flow rate of the cleaning liquid. Among them, part of the working process of the cleaning machine is as follows: the air bag pump extracts the cleaning liquid from the tank body, the heater heats the cleaning liquid, the filter device filters the cleaning liquid, and the filtered cleaning liquid is recovered and discharged into the designated area for reuse.
[0090] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.
[0091] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of this application, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.
[0092] Although the embodiments of the present application have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be understood as limitations on the present application. Ordinary technicians in this field can change, modify, replace and modify the above embodiments within the scope of the present application.
Claims
1. A fluid control system, characterized in that: include: Fluid power devices, filtration devices, temperature control devices and several valves; The fixing seat comprises a top plate, a bottom plate and side plates; a receiving space is defined between the top plate, the bottom plate and the side plates; The outer wall of the accommodating space extends in a direction away from the accommodating space to form a bracket; At least one of the fluid power device, the filtering device, the temperature control device and the valve is arranged in the accommodating space, and at least one of the fluid power device, the filtering device, the temperature control device and the valve is arranged in the bracket.
2. The fluid control system according to claim 1, characterized in that: The fluid power device is arranged in the accommodation space; Some of the side panels are provided with openings matching the size of the fluid power device, and are configured as installation inlets and outlets of the fluid power device.
3. The fluid control system according to claim 2, characterized in that: The temperature control device is arranged on the outer wall of the accommodating space in a direction close to the fluid power device and is connected to a pipeline of the fluid power device.
4. The fluid control system according to claim 3, characterized in that: The temperature control device is located above the fluid power device and is arranged on the top plate of the fixing seat.
5. The fluid control system according to claim 4, characterized in that: The support comprises a first support; The first bracket extends from the outer wall of the side plate in a direction away from the accommodating space.
6. The fluid control system according to claim 5, characterized in that: There is a preset distance between the first bracket and the bottom plate.
7. The fluid control system according to claim 5 or 6, characterized in that: The filtering device is arranged on the first bracket and connected to the pipeline of the fluid power device.
8. The fluid control system according to claim 5, characterized in that: The bracket also includes a second bracket; The second bracket extends from an outer wall of the top plate or an outer wall of the side plate in a direction away from the accommodating space.
9. The fluid control system according to claim 1, characterized in that: The valve is at least partially disposed on a pipeline connecting the fluid power device to the outside, on a pipeline connecting the filter device to the outside, and on a pipeline connecting the fluid power device to the temperature control device.
10. A cleaning machine, characterized in that: include: A fluid control system as claimed in any one of claims 1 to 9.