Extremely narrow carrying trolley

Abstract

The utility model discloses an extremely narrow carrying trolley, and relates to the technical field of wafer box carrying devices. The bearing table is arranged on the walking base and is used for bearing a wafer box; the multi-axis mechanical arm is mounted on the walking base through a mounting seat, and a clamping jaw used for carrying the wafer box is arranged on the multi-axis mechanical arm; wherein the mounting seat comprises a cabinet body used for loading a control unit for controlling the operation of the multi-axis mechanical arm, the cabinet body comprises a main body part arranged on the upper surface of the walking base and two auxiliary body parts located on the two sides of the main body part, the main body part is arranged in the width direction of the walking base, and the auxiliary body parts are arranged in the length direction of the walking base; and the inner cavity of the main body part is communicated with the inner cavity of the auxiliary body part, so that the length of the cabinet body in the width direction of the walking base is reduced, and the carrying trolley can be narrower.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer box transport devices, in particular to an extremely narrow transport trolley. Background Art

[0002] In the semiconductor manufacturing process, the transportation of wafer boxes is a necessary link to achieve continuous production between each process. At present, the automatic transportation of wafer boxes is mainly achieved by transporting carts, which can quickly and accurately transport wafer boxes, shorten the waiting time between each process, and improve the overall efficiency of the production line.

[0003] The existing transport cart is generally composed of a self-propelled walking base, a special carrier platform for carrying wafer boxes installed on the walking base, and a mechanical arm for transporting the wafer boxes. The mechanical arm is installed on the walking base through a mounting seat, wherein the cabinet of the mounting seat is long along the width direction of the walking base, resulting in a large overall width of the transport cart, which is not conducive to the operation of the transport cart in extremely narrow areas. Utility Model Content

[0004] The utility model aims to provide an extremely narrow transport trolley, so as to solve the problem that the transport trolley in the prior art has a large overall width and is not conducive to operation in extremely narrow areas.

[0005] The purpose of the utility model can be achieved through the following technical solutions:

[0006] The utility model provides an extremely narrow transport trolley, comprising:

[0007] Walking base;

[0008] A carrying platform, arranged on the walking base, for carrying a wafer box;

[0009] A multi-axis robot arm is mounted on the walking base through a mounting seat, and the multi-axis robot arm is provided with a clamping claw for carrying a wafer box;

[0010] Wherein, the mounting base includes a cabinet for loading a control unit for controlling the operation of the multi-axis robotic arm, the cabinet includes a main body arranged on the upper surface of the walking base and two auxiliary bodies located on both sides of the main body, the main body is arranged along the width direction of the walking base, the auxiliary body is arranged along the length direction of the walking base, and the internal cavity of the main body is connected to the internal cavity of the auxiliary body.

[0011] In one embodiment of the utility model: the auxiliary body portion extends along the edge of the upper surface of the walking base.

[0012] In one embodiment of the utility model: the main body is located in the middle of the upper surface of the walking base, and the two auxiliary bodies are respectively connected to the two ends of the main body.

[0013] In one embodiment of the utility model: a cabinet opening extending to the outer side surface of the auxiliary body portion is opened on the end surface of the main body portion, and the cabinet body also includes a cabinet door adapted to the cabinet opening.

[0014] In one embodiment of the utility model: one end of the cabinet door is hinged to the main body, and the other end is connected to the auxiliary body via a locking member.

[0015] In one embodiment of the utility model: a control panel is installed on the cabinet door.

[0016] In one embodiment of the utility model: a cooling fan is installed on the cabinet door.

[0017] In one embodiment of the utility model: four bearing platforms are provided, and the four bearing platforms are arranged in pairs on both sides of the main body, and the two bearing platforms on the same side are distributed up and down.

[0018] In one embodiment of the utility model: one of the two bearing platforms located on the same side is installed on the upper surface of the walking base, and the other is installed on the upper surface of the auxiliary body on the same side.

[0019] In one embodiment of the utility model: a first horizontal radar and a second horizontal radar located at different heights are installed on the periphery of the walking base.

[0020] Beneficial effects:

[0021] 1. In the present application, the cabinet body is divided into a main body and an auxiliary body, so that the main body is arranged along the width direction of the walking base, and the auxiliary body is provided with two and is located on both sides of the main body and is arranged along the length direction of the walking base. Under the condition of ensuring that the overall space in the cabinet body remains unchanged, the length of the cabinet body in the width direction of the walking base is reduced, and the overall width of the transport trolley is avoided to be large due to the excessive length of the cabinet body in the width direction of the walking base, so that the transport trolley can be made narrower.

[0022] 2. In the present application, a first horizontal radar and a second horizontal radar located at different heights are installed on the periphery of the walking base, so that the walking base can avoid obstacles at different heights, thereby improving the obstacle avoidance capability of the walking base. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] The utility model is further described below in conjunction with the accompanying drawings.

[0024] Figure 1 It is a schematic diagram of the overall structure of the extremely narrow transport trolley of the utility model;

[0025] Figure 2 It is a schematic diagram of the overall structure of the extremely narrow transport trolley of the utility model from another perspective.

[0026] Description of reference numerals:

[0027] 1. Walking base; 2. Carrying platform; 3. Multi-axis robotic arm; 4. Cabinet; 41. Main body; 42. Sub-body; 43. Cabinet door; 5. Gripper; 6. Control panel; 7. Cooling fan; 8. First horizontal radar; 9. Second horizontal radar; 10. Vertical radar; 11. Turn signal; 12. Charging port; 100. Wafer box. DETAILED DESCRIPTION

[0028] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0029] It should be noted that the words "first", "second" and similar terms used in the present invention do not indicate any order, quantity or importance, but are only used to distinguish different components. The descriptions of the present invention regarding directions such as "left", "right", "left side", "right side", "upper", "lower", "top", and "bottom" are all defined based on the relationship between the orientations or positions shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the structure must be constructed and operated in a specific orientation. Therefore, they cannot be understood as limitations on the present invention. In the description of the present invention, the meaning of "multiple" is more than two, unless otherwise clearly and specifically defined.

[0030] In the description of the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0031] See also Figure 1 and Figure 2 As shown, the utility model is an extremely narrow transport trolley, comprising a walking base 1, a carrying platform 2 and a multi-axis robot 3. The walking base 1 has a self-propelled function and can move automatically according to a set path. The carrying platform 2 is arranged on the walking base 1 and is used to carry a wafer box 100. The multi-axis robot 3 is installed on the walking base 1 through a mounting seat, and a clamp 5 is provided on the multi-axis robot 3, and the multi-axis robot 3 can automatically carry the wafer box 100 through the clamp 5.

[0032] Specifically, the mounting base includes a cabinet 4 for loading a control unit for controlling the operation of the multi-axis robot 3, and the cabinet 4 includes a main body 41 disposed on the upper surface of the walking base 1 and two auxiliary bodies 42 located on both sides of the main body 41. The walking base 1, the main body 41 and the auxiliary bodies 42 are all generally in the shape of a rectangular parallelepiped, the main body 41 is disposed along the width direction of the walking base 1, the auxiliary body 42 is disposed along the length direction of the walking base 1, the internal cavity of the main body 41 is connected to the internal cavity of the auxiliary body 42, and the multi-axis robot 3 is mounted on the top of the main body 41. In this embodiment, by providing two auxiliary bodies 42, the length of the cabinet 4 along the width direction of the walking base 1 is reduced while ensuring that the total cavity volume of the cabinet 4 remains unchanged, which greatly reduces the length of the cabinet 4 along the width direction of the walking base 1, so that the overall width of the ultra-narrow transport trolley can be made narrower.

[0033] Furthermore, the auxiliary body 42 extends along the edge of the upper surface of the walking base 1, and the outer side of the auxiliary body 42 is substantially flush with the outer side of the walking base 1 on the same side, so that sufficient space can be reserved on the upper surface of the walking base 1 to install the support platform 2. Preferably, both ends of the main body 41 extend to the two side edges in the width direction of the walking base 1, and the ends of the two auxiliary bodies 42 away from the main body 41 extend to the two side edges in the length direction of the walking base 1.

[0034] In this embodiment, the main body 41 is located in the middle of the upper surface of the walking base 1, and the two auxiliary bodies 42 are respectively connected to the two ends of the main body 41, so that the end surface of the main body 41 is flush with the outer side surface of the auxiliary body 42 on the same side. In this embodiment, by connecting the two auxiliary bodies 42 to the two ends of the main body 41, the stability of the installation of the cabinet 4 and the walking stability of the walking base 1 are ensured, and the uneven force on both sides of the walking base 1 is avoided, which may cause the walking base 1 to easily tip over when walking.

[0035] The end face of the main body 41 is provided with a cabinet opening extending to the outer side face of the auxiliary body 42. The cabinet body 4 also includes a cabinet door 43 adapted to the cabinet opening. By opening the cabinet door 43, the control unit installed in the main body 41 and the auxiliary body 42 can be inspected and repaired. Specifically, one end of the cabinet door 43 is hinged to the main body 41 through a rotating shaft, and the other end is locked with the auxiliary body 42 through a locking member. Preferably, the locking member adopts a door lock to facilitate the opening and closing of the cabinet door 43. Furthermore, the cabinet door 43 and the cabinet body 4 are embedded in a matching manner to ensure the overall aesthetics of the extremely narrow transport trolley. A door handle is provided on the cabinet door 43 to facilitate opening the cabinet door 43.

[0036] Both ends of the main body 41 are provided with cabinet openings and cabinet doors 43 adapted to the cabinet openings, so as to facilitate the assembly of the control unit into the cabinet body 4. A control panel 6 is installed on one of the cabinet doors 43, and the control panel 6 can be a touch control panel 6. The operator can directly operate on the touch control panel 6 to let the ultra-narrow transport vehicle perform the corresponding task. A cooling fan 7 is also installed on the cabinet door 43, and the cooling fan 7 is used to dissipate the heat of the control unit loaded in the cabinet body 4 to prevent the control unit from overheating.

[0037] In this embodiment, four load platforms 2 are provided, and the four load platforms 2 are arranged in pairs on both sides of the main body 41, and the two load platforms 2 on the same side are distributed up and down, so that only one load platform 2 is provided along the width direction of the walking base 1 to ensure that the width of the extremely narrow transport trolley can be minimized.

[0038] Further, one of the two bearing platforms 2 located on the same side is installed on the upper surface of the walking base 1, and the other is installed on the upper surface of the auxiliary body portion on the same side, which facilitates the installation of the bearing platform 2. Preferably, the bearing platform 2 installed on the upper surface of the walking base 1 is located on the side of the auxiliary body portion 42 on the same side, and the sum of the lengths of the bearing platform 2 and the auxiliary body portion 42 along the width direction of the walking base 1 is equal to the length of the main body portion 41 along the width direction of the walking base 1, and the length of the auxiliary body portion 42 along the length direction of the walking base 1 is equal to the length of the bearing platform 2 along the length direction of the walking base 1.

[0039] In this embodiment, the walking base 1 is an AGV trolley with a self-propelling function. Specifically, two sets of universal wheels are provided at the bottom of the walking base 1, each set of universal wheels includes two Mecanum wheels arranged in parallel, and the walking base 1 can walk in any direction. The walking base 1 is installed with a horizontal radar and a vertical radar 10 for monitoring the surrounding walking environment, wherein the horizontal radar includes a first horizontal radar 8 and a second horizontal radar 9 installed on the side of the walking base 1 and located at different heights, and the first horizontal radar 8 and the second horizontal radar 9 can sense obstacles at different heights around the walking base 1 to improve the obstacle avoidance ability of the walking base 1. Specifically, there are two first horizontal radars 8, and the two first horizontal radars 8 are respectively installed at a diagonal position on the top of the walking base 1; there are two second horizontal radars 9, and the two second horizontal radars 9 are relatively installed on the front and back of the walking base 1 and close to the bottom of the walking base 1. The first horizontal radar 8 and the second horizontal radar 9 respectively detect obstacles at different heights of the front and rear surrounding horizontal planes of the walking base 1 at 360 degrees. Two vertical radars are provided, which are respectively installed on the two end surfaces of the main body 41 and located above the cabinet door 43, and are used to detect obstacles in the vertical plane of 360 degrees in front, back, top and bottom of the walking base 1. Two turn signals 11 are also provided on the front and back of the walking base 1, respectively, to remind the staff to avoid in time before the walking base 1 turns. Furthermore, there is a battery (not shown) inside the walking base 1, and a charging port 12 for the battery is provided on the front of the walking base 1.

[0040] The above is a detailed description of an embodiment of the utility model, but the content is only a preferred embodiment of the utility model and cannot be considered to limit the scope of implementation of the utility model. All equivalent changes and improvements made within the scope of application of the utility model should still fall within the scope of the patent coverage of the utility model.

Claims

1. An extremely narrow transport trolley, characterized in that: include: Walking base; A carrying platform, arranged on the walking base, for carrying a wafer box; A multi-axis robot arm is mounted on the walking base through a mounting seat, and the multi-axis robot arm is provided with a clamping claw for carrying a wafer box; Wherein, the mounting base includes a cabinet for loading a control unit for controlling the operation of the multi-axis robotic arm, the cabinet includes a main body arranged on the upper surface of the walking base and two auxiliary bodies located on both sides of the main body, the main body is arranged along the width direction of the walking base, the auxiliary body is arranged along the length direction of the walking base, and the internal cavity of the main body is connected to the internal cavity of the auxiliary body.

2. The extremely narrow transport vehicle according to claim 1, characterized in that: The auxiliary body portion extends along the edge of the upper surface of the walking base.

3. The extremely narrow transport vehicle according to claim 1, characterized in that: The main body is located in the middle of the upper surface of the walking base, and the two auxiliary bodies are respectively connected to the two ends of the main body.

4. The extremely narrow transport vehicle according to claim 3, characterized in that: A cabinet opening extending to the outer side surface of the auxiliary body portion is formed on the end surface of the main body portion, and the cabinet body further comprises a cabinet door adapted to the cabinet opening.

5. The extremely narrow transport vehicle according to claim 4, characterized in that: One end of the cabinet door is hinged to the main body, and the other end is connected to the auxiliary body via a locking member.

6. The extremely narrow transport vehicle according to claim 4, characterized in that: A control panel is installed on the cabinet door.

7. The extremely narrow transport vehicle according to claim 4, characterized in that: A heat dissipation fan is installed on the cabinet door.

8. The extremely narrow transport vehicle according to claim 1, characterized in that: There are four bearing platforms, and the four bearing platforms are arranged in pairs on both sides of the main body, and the two bearing platforms on the same side are distributed up and down.

9. The extremely narrow transport vehicle according to claim 8, characterized in that: One of the two bearing platforms located on the same side is installed on the upper surface of the walking base, and the other is installed on the upper surface of the auxiliary body part on the same side.

10. An extremely narrow transport vehicle according to any one of claims 1 to 9, characterized in that: A first horizontal radar and a second horizontal radar located at different heights are installed around the walking base.

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