A low energy injector with pre-analysis structure

Abstract

The utility model belongs to the field of accelerators, and discloses a low-energy injector with a pre-analysis structure, comprising: a casing, the inner cavity of the casing is divided into two chambers arranged front and back, namely a first chamber and a second chamber, a first through hole for ions to pass through is arranged between the first chamber and the second chamber; an ion source; an accelerating tube; a single lens assembly, a second through hole for ions to pass through is arranged on the single lens assembly; a pre-analysis iron, a third through hole for ions to pass through is arranged on the pre-analysis iron; ions generated by the ion source enter the pre-analysis iron through the single lens assembly for screening, and the target ions obtained after the pre-analysis iron screening enter the accelerating tube. The utility model sequentially arranges the ion source, the single lens assembly, the pre-analysis iron and the accelerating tube, first uses the single lens assembly to focus the ion beam, and then uses the pre-analysis iron to screen out the target ions, so as to meet the requirements of small size and high analysis capability.

Description

Technical Field

[0001] The utility model relates to the field of accelerators, in particular to a low-energy injector with a pre-analysis structure. Background Art

[0002] In many beam lines that need to change the energy of ions, an accelerator tube is required. The accelerator tube uses static electricity to accelerate and decelerate ions. It has the advantages of simplicity, low cost, and high current. It is very common in accelerators with single-charge ion energy less than 500KeV. However, the accelerator tube has the risk of easy sparking, and the beam current intensity that can be accelerated cannot be too large, which is in the mA level. If the ions passing through the accelerator tube are analyzed first and the ions that do not need to be accelerated / decelerated are removed, the overall accelerator current intensity can be effectively increased and it is not easy to spark, so many accelerator tubes have pre-analysis modules in front of them.

[0003] Currently, there are two typical injectors as follows: one is the 400KV accelerator of China Jinping Underground Laboratory, the arrangement order of its various components is ion source, solenoid, beam measuring device, 30° analytical iron, solenoid, beam measuring device and accelerating tube. This accelerator meets the pure ion requirements of the accelerating tube, but its length is relatively long, about 2m, which is suitable for scientific research equipment with weak size requirements; the other is the medium beam ion implanter VI I Sta810 / 900 model of Applied Materials, Inc. of the United States, the arrangement order of its various components is ion source, 25° analytical iron, accelerating tube. This accelerator is very short, about 0.5m in total, which meets the space size requirements, but its separation ability is relatively weak, and a few stray ions still enter the accelerating tube, causing a large load. Utility Model Content

[0004] In order to overcome at least one defect of the above-mentioned prior art, the utility model provides a low-energy injector with a pre-analysis structure, an ion source, a single lens assembly, a pre-analysis iron and an acceleration tube arranged in sequence, the single lens assembly is first used to focus the ion beam, and then the pre-analysis iron is used to screen out the target ions, so as to meet the requirements of small size and high analysis capability.

[0005] The technical solution adopted by the utility model to solve the problem is:

[0006] A low energy injector with a pre-analysis structure, comprising:

[0007] A housing, wherein the inner cavity of the housing is divided into two chambers arranged front and back, namely a first chamber and a second chamber, a first through hole for ions to pass through is arranged between the first chamber and the second chamber, and the first chamber and the second chamber are connected to each other through the first through hole;

[0008] An ion source, the ion source being disposed at an entrance position of the first chamber;

[0009] An accelerating tube, which is arranged at the exit of the second chamber;

[0010] A single lens assembly, the single lens assembly is arranged between the ion source and the accelerating tube, and the single lens assembly is arranged in the second chamber, and a second through hole for ions to pass through is arranged on the single lens assembly;

[0011] A pre-analysis iron, which is arranged between the single lens assembly and the accelerating tube, and is arranged in the second chamber, and is provided with a third through hole for ions to pass through;

[0012] The ions generated by the ion source enter the pre-analysis iron through a single lens assembly for screening, and the target ions obtained after the pre-analysis iron screening enter the acceleration tube.

[0013] In a preferred embodiment, the deflection angle of the pre-analyzed iron is in the range of 10°-60°.

[0014] In a preferred embodiment, both the first chamber and the second chamber are vacuum chambers.

[0015] In a preferred embodiment, the low-energy injector with a pre-analysis structure further includes a shutoff valve, which is disposed at the position of the first through hole and is used to open and close the first through hole.

[0016] In a preferred embodiment, the low-energy implanter with a pre-analysis structure further comprises an introduction system, the introduction system comprising a plasma electrode, a suppression electrode and a ground electrode, the plasma electrode is electrically connected to an ion source, the plasma electrode and the ion source are both connected to a positive voltage, the suppression electrode is connected to a negative voltage, and the ground electrode is at ground potential;

[0017] The suppression electrode and the ground electrode are both provided with fourth through holes for ions to pass through.

[0018] In a preferred embodiment, the suppression electrode and the ground electrode are disposed in the first chamber, and the suppression electrode and the ground electrode are disposed between the ion source and the isolation valve.

[0019] In a preferred embodiment, the plasma electrode, the suppression electrode and the ground electrode are all made of graphite.

[0020] In a preferred embodiment, the single lens assembly includes three electrostatic lenses, which are respectively a first electrostatic lens, a second electrostatic lens and a third electrostatic lens, wherein the first electrostatic lens and the third electrostatic lens are both at ground potential, and the second electrostatic lens is connected to a positive voltage;

[0021] The first electrostatic lens, the second electrostatic lens and the third electrostatic lens are all provided with a second through hole.

[0022] In a preferred embodiment, the low energy implanter with a pre-analysis structure further comprises a beam clamping plate, which is arranged between the pre-analysis iron and the accelerating tube, and a fifth through hole for the target ions to pass through is arranged on the beam clamping plate.

[0023] In a preferred embodiment, the clamping plate is made of graphite.

[0024] In summary, the utility model has the following technical effects: the utility model sequentially arranges the ion source, the single lens assembly, the pre-analysis iron and the acceleration tube, first uses the single lens assembly to focus the ion beam, and then uses the pre-analysis iron to screen out the target ions, meeting the requirements of small size and high analysis capability. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a schematic diagram of the structure of an embodiment of the utility model;

[0026] Figure 2 This is a schematic diagram of the beam spot effect when the embodiment of the utility model is not provided with a single lens assembly;

[0027] Figure 3 The figure is a schematic diagram of the beam spot effect of a single lens assembly provided in an embodiment of the utility model.

[0028] The meanings of the reference numerals are as follows:

[0029] 10. Housing, 101. First chamber, 102. Second chamber, 20. First through hole, 30. Ion source, 40. Accelerator tube, 50. Single lens assembly, 501. First electrostatic lens, 502. Second electrostatic lens, 503. Third electrostatic lens, 60. Second through hole, 70. Pre-analysis iron, 80. Third through hole, 90. Shutoff valve, 100. Introduction system, 1001. Suppression electrode, 1002. Grounding electrode, 110. Fourth through hole, 120. Clamp plate, 130. Fifth through hole, 140. Ion flange, 150. Insulating cylinder. DETAILED DESCRIPTION

[0030] For better understanding and implementation, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention.

[0031] In the description of the present invention, it should be noted that the terms "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" etc. indicating directions or positional relationships are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on the present invention.

[0032] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art of the present invention. The terms used herein in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention.

[0033] See also Figure 1-Figure 3 A low-energy implanter with a pre-analysis structure comprises: a housing 10, wherein the inner cavity of the housing 10 is divided into two chambers arranged front and back, namely a first chamber 101 and a second chamber 102, wherein a first through hole 20 for ions to pass through is arranged between the first chamber 101 and the second chamber 102, and the first chamber 101 and the second chamber 102 are connected to each other through the first through hole 20; an ion source 30, wherein the ion source 30 is arranged at the entrance position of the first chamber 101; an accelerating tube 40, wherein the accelerating tube 40 is arranged at the exit position of the second chamber 102; a single lens assembly 50, wherein the single lens assembly 50 is arranged at the exit position of the second chamber 102; and a plurality of lens assemblies 50 are provided. 0 is arranged between the ion source 30 and the accelerating tube 40, and the single lens assembly 50 is arranged in the second chamber 102, and the single lens assembly 50 is provided with a second through hole 60 for ions to pass through; pre-analysis iron 70, the pre-analysis iron 70 is arranged between the single lens assembly 50 and the accelerating tube 40, and the pre-analysis iron 70 is arranged in the second chamber 102, and the pre-analysis iron 70 is provided with a third through hole 80 for ions to pass through; the ions generated by the ion source 30 enter the pre-analysis iron 70 through the single lens assembly 50 for screening, and the target ions obtained after screening by the pre-analysis iron 70 enter the accelerating tube 40.

[0034] The utility model sequentially arranges an ion source 30, a single lens assembly 50, a pre-analysis iron 70 and an accelerating tube 40. The single lens assembly 50 is first used to focus the ion beam, and then the pre-analysis iron 70 is used to screen out target ions, thereby meeting the requirements of a small size and high analysis capability of a low-energy injector.

[0035] It should be noted that the above-mentioned “low energy” refers to the energy range of charged particles being lower than 100 KeV.

[0036] The utility model is particularly suitable for ion implantation machines and has a compact size. The overall size of the utility model is about 600 mm, which is compact.

[0037] Specifically, the ion source 30 adopts a Berners ion source with a hot cathode, which can generate various ions required for ion implantation.

[0038] In the embodiment of the present invention, the deflection angle of the pre-analyzed iron 70 ranges from 10° to 60°.

[0039] Preferably, the deflection angle of the pre-analysis iron 70 is 30°. The specific deflection angle of the pre-analysis iron 70 is determined according to actual conditions and is not limited thereto.

[0040] Specifically, the pre-analysis iron 70 realizes the analysis function, separates ions of different mass-to-charge ratios, and thus screens target ions to enter the acceleration tube 40, reducing the load of the acceleration tube 40; the pre-analysis iron 70 is a secondary iron structure, which generates a magnetic field perpendicular to the paper surface.

[0041] It should be noted that the pre-analysis iron 70 is an electromagnet capable of generating a magnetic field. The pre-analysis iron 70 can separate particles of different energies or masses in the beam. How the pre-analysis iron 70 screens out target ions is an existing technology and will not be described in detail here.

[0042] In the embodiment of the present invention, both the first chamber 101 and the second chamber 102 are vacuum chambers.

[0043] In the embodiment of the utility model, the low-energy injector with the pre-analysis structure further includes a shut-off valve 90 . The shut-off valve 90 is disposed at the position of the first through hole 20 . The shut-off valve 90 is used to open and close the first through hole 20 .

[0044] Specifically, the isolation valve 90 adopts a vacuum isolation valve, and the isolation valve 90 is used to seal the first chamber 101 and the second chamber 102. When the ion source 30 is replaced, the isolation valve 90 is closed so that the second chamber 102 remains in a vacuum state, which can protect the implanter, and only the first chamber 101 needs to be returned to a vacuum state, thereby greatly reducing the time for the accelerator with a pre-analysis structure to resume normal use.

[0045] In an embodiment of the utility model, the low-energy injector with a pre-analysis structure also includes an introduction system 100, which includes a plasma electrode, a suppression electrode 1001 and a ground electrode 1002. The plasma electrode is electrically connected to the ion source 30, and the plasma electrode and the ion source 30 are both connected to a positive voltage. The suppression electrode 1001 is connected to a negative voltage, and the ground electrode 1002 is at ground potential. The suppression electrode 1001 and the ground electrode 1002 are both provided with a fourth through hole 110 for ions to pass through.

[0046] Specifically, the plasma electrodes are not shown in the drawings.

[0047] In the embodiment of the present invention, the suppression electrode 1001 and the ground electrode 1002 are disposed in the first chamber 101 , and the suppression electrode 1001 and the ground electrode 1002 are disposed between the ion source 30 and the isolation valve 90 .

[0048] Specifically, the specific positions of the suppression electrode 1001 and the ground electrode 1002 can be adjusted by motors, so as to be suitable for different application scenarios.

[0049] Specifically, the introduction system 100 can achieve functions such as normal extraction of the ion beam, matching of current intensity, and adjustment of the ion beam inclination angle through position adjustment.

[0050] In the embodiment of the present invention, the plasma electrode, the suppression electrode 1001 and the ground electrode 1002 are all made of graphite.

[0051] In an embodiment of the utility model, the single lens assembly 50 includes three electrostatic lenses, which are a first electrostatic lens 501, a second electrostatic lens 502 and a third electrostatic lens 503, wherein the first electrostatic lens 501 and the third electrostatic lens 503 are both at ground potential, and the second electrostatic lens 502 is connected to a positive voltage; the first electrostatic lens 501, the second electrostatic lens 502 and the third electrostatic lens 503 are all provided with a second through hole 60.

[0052] Specifically, the first electrostatic lens 501, the second electrostatic lens 502 and the third electrostatic lens 503 are all single lenses with small size and simple principle; the first electrostatic lens 501 and the third electrostatic lens 503 are both at ground potential, and the second electrostatic lens 502 is connected to a positive voltage to focus the ion beam.

[0053] It should be noted that a single lens is an electrostatic device used to focus a charged particle beam. It can be used in cathode ray tubes, ion beam and electron beam experiments, and ion propulsion systems. The focusing ability of a single lens depends on the initial particle energy, the voltage of each electrode, and the initial particle beam collimation (the initial radius and lateral velocity of the charged particles). How a single lens focuses an ion beam is also an existing technology and will not be elaborated here.

[0054] In the embodiment of the utility model, the low energy implanter with pre-analysis structure further comprises a beam clamping plate 120, which is arranged between the pre-analysis iron 70 and the accelerating tube 40, and a fifth through hole 130 for target ions to pass through is arranged on the beam clamping plate 120.

[0055] In the embodiment of the present invention, the clamping plate 120 is made of graphite.

[0056] Specifically, the beam-binding plate 120 is responsible for intercepting and removing stray ions, so that the accelerating tube 40 is responsible for receiving target ions and realizing the energy conversion function.

[0057] It should be noted that the accelerating tube 40 is a hollow tube, that is, the ions generated by the ion source 30 enter the accelerating tube 40 through the fourth through hole 110, the first through hole 20, the second through hole 60, the third through hole 80 and the fifth through hole 130 in sequence. The specific setting heights and setting angles of the first chamber 101, the second chamber 102, the ion source 30, the introduction system 100, the isolation valve 90, the single lens assembly 50, the pre-analysis iron 70, the beam plate 120, the accelerating tube 40, the first through hole 20, the second through hole 60, the third through hole 80, the fourth through hole 110 and the fifth through hole 130 shall be based on the output of the target ions.

[0058] Specifically, the ion source 30 is fixedly supported by the ion flange 140 , the ion source 30 extends into the first chamber 101 and is suspended in the air, and the ion flange 140 is insulated and connected to the housing 10 via the insulating tube 150 .

[0059] Continue reading Figure 2-Figure 3 , after adding the lens assembly, compared with the Applied Materials VI I sta810 / 900 model, the accelerator with pre-analysis structure can distinguish between two different ion beams, see Figure 3 The first ion beam indicated by the dotted line and the second ion beam indicated by the solid line are separated from each other, and the target ion beam is the first ion beam or the second ion beam, so that the target ion beam is focused, the beam spot size is reduced at the position of the beam clamping plate 120, and the resolution is improved from the previous resolution of about 2 to about 4.

[0060] Assisted by Ibs imu software calculation, taking Ar+ with a mass-to-charge ratio of 39, Cl+ with a mass-to-charge ratio of 35, Al+ with a mass-to-charge ratio of 27, and B+ with a mass-to-charge ratio of 10 as examples, after adding the single lens assembly 50, ion beams with different mass-to-charge ratios can be separated from each other to obtain a target ion beam, and the beam spot size of the obtained target ion beam is significantly reduced, thereby improving the resolution.

[0061] The technical means disclosed in the solution of the utility model are not limited to the technical means disclosed in the above-mentioned implementation mode, but also include technical solutions composed of any combination of the above technical features. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principle of the utility model, and these improvements and modifications are also regarded as the protection scope of the utility model.

Claims

1. A low energy injector with a pre-analysis structure, characterized in that: include: A housing, wherein an inner cavity of the housing is divided into two chambers arranged front and back, namely a first chamber and a second chamber, a first through hole for ions to pass through is arranged between the first chamber and the second chamber, and the first chamber and the second chamber are connected to each other through the first through hole; an ion source, the ion source being disposed at an entrance position of the first chamber; an accelerating tube, the accelerating tube being arranged at an exit position of the second chamber; A single lens assembly, wherein the single lens assembly is disposed between the ion source and the accelerating tube, and the single lens assembly is disposed in the second chamber, and a second through hole for ions to pass through is disposed on the single lens assembly; Pre-analysis iron, the pre-analysis iron is arranged between the single lens assembly and the accelerating tube, and the pre-analysis iron is arranged in the second chamber, and the pre-analysis iron is provided with a third through hole for ions to pass through; The ions generated by the ion source enter the pre-analysis iron through the single lens assembly for screening, and the target ions obtained after the pre-analysis iron screening enter the acceleration tube.

2. The low energy injector with pre-analysis structure according to claim 1, characterized in that: The deflection angle of the pre-analyzed iron ranges from 10° to 60°.

3. The low energy injector with pre-analysis structure according to claim 1, characterized in that: The first chamber and the second chamber are both vacuum chambers.

4. The low energy injector with pre-analysis structure according to claim 1, characterized in that: It also includes a shutoff valve, which is arranged at the position of the first through hole and is used to open and close the first through hole.

5. The low energy injector with pre-analysis structure according to claim 4, characterized in that: It also includes an introduction system, which includes a plasma electrode, a suppression electrode and a ground electrode, wherein the plasma electrode is electrically connected to the ion source, the plasma electrode and the ion source are both connected to a positive voltage, the suppression electrode is connected to a negative voltage, and the ground electrode is at ground potential; The suppression electrode and the ground electrode are both provided with fourth through holes for ions to pass through.

6. The low energy injector with pre-analysis structure according to claim 5, characterized in that: The suppression electrode and the ground electrode are disposed in the first chamber, and the suppression electrode and the ground electrode are disposed between the ion source and the isolation valve.

7. The low energy injector with pre-analysis structure according to claim 6, characterized in that: The plasma electrode, the suppression electrode and the ground electrode are all made of graphite.

8. The low energy injector with pre-analysis structure according to claim 1, characterized in that: The single lens assembly comprises three electrostatic lenses, which are respectively a first electrostatic lens, a second electrostatic lens and a third electrostatic lens, wherein the first electrostatic lens and the third electrostatic lens are both at ground potential, and the second electrostatic lens is connected to a positive voltage; The first electrostatic lens, the second electrostatic lens and the third electrostatic lens are all provided with the second through hole.

9. The low energy injector with pre-analysis structure according to claim 1, characterized in that: It also includes a beam clamping plate, which is arranged between the pre-analysis iron and the accelerating tube, and the beam clamping plate is provided with a fifth through hole for target ions to pass through.

10. The low energy injector with pre-analysis structure according to claim 9, characterized in that: The clamping plate is made of graphite.

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