Exhaust emission filtration equipment, boron diffusion equipment and exhaust emission filtration system

Abstract

The embodiments of the present application provide an exhaust gas emission filtering device, a boron diffusion device and an exhaust gas emission filtering system. The exhaust gas emission filtering device includes a bottle body, an exhaust pipe and a wave suppression plate. The bottle body contains a filter liquid; the exhaust pipe is inserted in the bottle body and partially immersed in the filter liquid; the wave suppression plate is provided with a plurality of through holes and immersed in the filter liquid. In the technical scheme of the embodiments of the present application, the exhaust gas generates bubbles in the filter liquid and floats upward. During the floating process, a large amount of exhaust gas will pass through the wave suppression plate and be cut into a plurality of smaller exhaust gases by the plurality of through holes on the wave suppression plate to form a plurality of bubbles of a preset size range, thereby improving the uniformity of the bubbles generated by the exhaust gas passing through the wave suppression plate, reducing the generation of large bubbles in the filter liquid, and alleviating the problem that the actual liquid level is misjudged by the liquid level detection device due to the shaking of the bottle body, and the actual liquid level height in the bottle body is insufficient to reduce the exhaust gas filtration effect, resulting in exhaust gas emissions not meeting the standards.

Description

Technical Field

[0001] The present application belongs to the field of photovoltaic cell technology, and in particular relates to exhaust gas emission filtering equipment, boron diffusion equipment and exhaust gas emission filtering system. Background Art

[0002] In the production of photovoltaic cells, a boron diffusion process is involved, which will produce tail gas. In order to discharge the tail gas safely, liquid filtration can be used to treat the tail gas. The liquid filtration method is to discharge the tail gas into the filter liquid so that the tail gas is dissolved in the filter liquid. The process of filtering the tail gas by the filter liquid will cause the liquid level to rise or fall. It is necessary to detect the liquid level through a liquid level detection device and add / discharge the liquid accordingly.

[0003] However, after the exhaust gas is discharged into the filtered liquid, the bubbles generated are uneven and large bubbles are easily generated, causing the bottle containing the filtered liquid to shake, and then the liquid level detection device misjudges the actual liquid level, resulting in incorrect addition / discharge of liquid, increasing the frequency of addition / discharge of liquid, and affecting the overall stability of the diffusion system. Utility Model Content

[0004] The embodiments of the present application provide an exhaust gas emission filtering device, a boron diffusion device and an exhaust gas emission filtering system to solve or alleviate one or more technical problems in the prior art.

[0005] As one aspect of an embodiment of the present application, an embodiment of the present application provides an exhaust emission filtering device, comprising:

[0006] A bottle body, the bottle body having an exhaust gas inlet and an exhaust gas outlet, and the bottle body is used to contain a filtered liquid;

[0007] An exhaust pipe is inserted at least partially into the bottle body through the exhaust gas inlet, the exhaust pipe comprises an exhaust end, and the exhaust end is immersed in the filtered liquid;

[0008] A wave suppression plate, fixed to the inner wall of the bottle body and immersed in the filtered liquid, wherein the wave suppression plate is provided with a plurality of through holes;

[0009] The exhaust gas discharged from the exhaust end passes through the wave suppression plate to form a plurality of bubbles within a preset size range.

[0010] Optionally, the plurality of through holes on the wave suppression plate are evenly distributed.

[0011] Optionally, the wave suppression plate is arranged horizontally.

[0012] Optionally, the area of ​​any through hole on the wave suppression plate is 1.732 mm 2 ~4.9mm 2 .

[0013] Optionally, the opening rate of the wave suppression plate is 70% to 90%.

[0014] Optionally, the ratio of the area of ​​the wave suppression plate to the cross-sectional area of ​​the cavity of the bottle body is 1:1 to 1:10.

[0015] Optionally, the wave suppression plate is further provided with a plurality of wave suppression plates, one wave suppression plate is provided corresponding to one through hole, and the wave suppression plate is fixed to the edge of the through hole and bent toward one side.

[0016] Optionally, the wave suppression plates corresponding to each through hole have the same size.

[0017] Optionally, the through hole is in a triangular shape, the shape of the wave suppression plate matches the shape of the through hole, one side of the triangular wave suppression plate shares a side of the triangular through hole, and the angle between the wave suppression plate and the wave suppression plate is 30° to 60°.

[0018] Optionally, the through hole is in an elliptical shape, and the wave suppression plate is an arc-shaped plate, the arc-shaped plate and the wave suppression plate form a notch with a concave arc-shaped or convex arc-shaped edge, and the notch is connected to the through hole.

[0019] Optionally, the wave suppression sheet is obtained by die-casting or cutting the wave suppression plate.

[0020] Optionally, there are multiple wave-suppression plates, and the multiple wave-suppression plates have different heights in the bottle body.

[0021] Optionally, projections of the plurality of wave suppression panels in the height direction do not completely overlap.

[0022] Optionally, a plurality of wave suppression plates are evenly arranged around the inner wall of the bottle body.

[0023] Optionally, the wave suppression plate extends toward the center of the bottle body, and projections of the extended ends of at least two wave suppression plates in the height direction partially overlap.

[0024] Optionally, the plurality of wave suppression panels include:

[0025] A first wave suppression plate is located below the exhaust end of the exhaust pipe, and a vertical interval between the first wave suppression plate and the port of the exhaust end is 3 cm to 7 cm;

[0026] The second wave suppression plate is located above the exhaust end, and the vertical interval between the second wave suppression plate and the preset liquid level position of the filtered liquid is 3 cm to 7 cm.

[0027] Optionally, the exhaust emission filtering device also includes a fixed socket, which includes two opposite sides, one side of which is fixed to the inner wall of the bottle body, and the other side is provided with a slot matching the end of the wave suppression plate, and the slot is used to be clamped with the wave suppression plate.

[0028] As another aspect of the embodiment of the present application, the embodiment of the present application further provides a boron diffusion device, including:

[0029] A boron diffusion furnace, wherein the exhaust port of the boron diffusion furnace is connected to the exhaust gas emission filtering device as described in any one of the above items.

[0030] As another aspect of the embodiments of the present application, the embodiments of the present application further provide an exhaust gas emission filtering system, comprising the exhaust gas emission filtering device as described in any one of the above items; or

[0031] Boron diffusion equipment as described above.

[0032] The exhaust emission filtering device of the embodiment of the present application is provided with a wave suppression plate in the bottle body, wherein the exhaust generates bubbles in the filtered liquid and floats upward, and during the floating process, a large amount of exhaust gas will pass through multiple through holes of the wave suppression plate, and be cut into multiple smaller exhaust gases by the multiple through holes, thereby improving the uniformity of bubbles generated by the exhaust gas passing through the wave suppression plate, reducing the generation of large bubbles in the filtered liquid, and alleviating the situation where the liquid level detection device misjudges the actual liquid level due to uneven bubbles and easy generation of large bubbles, causing the bottle body to shake, thereby alleviating the problem that the actual liquid level height in the bottle body is insufficient to reduce the exhaust gas filtering effect, resulting in the exhaust gas emission not meeting the standard. It also reduces the mis-addition / mis-discharge of liquid, and improves the overall stability of the diffusion system.

[0033] The above summary is for illustrative purposes only and is not intended to be limiting in any way. In addition to the illustrative aspects, embodiments and features described above, further aspects, embodiments and features of the present application will be readily apparent by reference to the accompanying drawings and the following detailed description. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] In the accompanying drawings, unless otherwise specified, the same reference numerals throughout the multiple drawings represent the same or similar parts or elements. These drawings are not necessarily drawn to scale. It should be understood that these drawings only depict some embodiments disclosed in the present application and should not be regarded as limiting the scope of the present application.

[0035] Figure 1 A schematic diagram of the structure of the exhaust emission filtering device provided in the embodiment of the present application;

[0036] Figure 2 A schematic diagram of the structure of a first wave suppression plate provided in an embodiment of the present application;

[0037] Figure 3 Another structural schematic diagram of the first wave suppression plate provided in an embodiment of the present application;

[0038] Figure 4 Another structural schematic diagram of the first wave suppression plate provided in an embodiment of the present application;

[0039] Figure 5 A schematic diagram of the structure of a second wave suppression plate provided in an embodiment of the present application;

[0040] Figure 6 Another structural schematic diagram of the second wave suppression plate provided in the embodiment of the present application;

[0041] Figure 7 Another structural schematic diagram of the second wave suppression plate provided in the embodiment of the present application;

[0042] Figure 8 A schematic diagram of the structure of a third wave suppression plate provided in an embodiment of the present application;

[0043] Fig. 9 Another structural schematic diagram of the third wave suppression plate provided in the embodiment of the present application;

[0044] Fig.10 Another structural schematic diagram of the third wave suppression plate provided in the embodiment of the present application;

[0045] Fig.11 A schematic diagram of the structure of multiple wave suppression plates provided in an embodiment of the present application;

[0046] Fig.12 Another structural schematic diagram of multiple wave suppression plates provided in an embodiment of the present application;

[0047] Fig.13 A schematic diagram of the structure of a fixed socket provided in an embodiment of the present application;

[0048] Fig.14 Another structural schematic diagram of a fixed socket provided in an embodiment of the present application;

[0049] Fig.15 A schematic diagram of an exhaust emission filtration system provided in an embodiment of the present application.

[0050] Description of reference numerals:

[0051] Bottle body 10; exhaust pipe 20; wave suppression plate 30; through hole 31; wave suppression sheet 32; fixed socket 40; slot 41; guide rail 42; diffusion furnace 100; condensation assembly 200; control valve 400; vacuum pump 500; main exhaust assembly 600. DETAILED DESCRIPTION

[0052] Embodiments of the present application are described in detail below, and examples of the embodiments are shown in the accompanying drawings. In the accompanying drawings, for clarity, the sizes of layers, regions, elements and their relative sizes may be exaggerated. The same or similar reference numerals throughout represent the same or similar elements or elements with the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and cannot be understood as limiting the present application.

[0053] It should be understood that when an element or layer is referred to as "on ...", "adjacent to ...", "connected to" or "coupled to" other elements or layers, it can be directly on, adjacent to, connected to or coupled to other elements or layers, or there can be intervening elements or layers. On the contrary, when an element is referred to as "directly on ...", "directly adjacent to ...", "directly connected to" or "directly coupled to" other elements or layers, there is no intervening element or layer. It should be understood that although the terms first, second, third, etc. can be used to describe various elements, components, regions, layers and / or parts, these elements, components, regions, layers and / or parts should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer or part from another element, component, region, layer or part. Therefore, without departing from the teachings of the present disclosure, the first element, component, region, layer or part discussed below can be represented as the second element, component, region, layer or part. And when the second element, component, region, layer or part is discussed, it does not mean that the present disclosure necessarily has the first element, component, region, layer or part.

[0054] In this application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0055] It should be noted that the terms "first", "second", etc. in the specification and claims of the present application and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the terms used in this way can be interchangeable where appropriate, so that the embodiments of the present application described herein can be implemented in an order other than those illustrated or described herein, for example. In addition, the terms "including" and "having" and any of their variations are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units that are clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0056] See also Figures 1 to 12 The embodiment of the present application provides an exhaust gas emission filtering device, which includes a bottle body 10, an exhaust pipe 20, and a wave suppression plate 30. The following is a detailed description:

[0057] The bottle body 10 has an exhaust gas inlet and an exhaust gas outlet, and the bottle body 10 is used to contain a filter liquid. The exhaust gas contacts the filter liquid during the process of floating in the filter liquid, so that harmful components in the exhaust gas are dissolved in the filter liquid. Specifically, the filter liquid can be water. In other embodiments, the composition of the filter liquid can be adjusted according to different exhaust gas components, so that the filter liquid can efficiently filter the exhaust gas.

[0058] The exhaust pipe 20 is at least partially inserted into the bottle body 10 through the exhaust gas inlet. The exhaust pipe 20 includes an exhaust end, which is immersed in the filtering liquid.

[0059] The wave suppression plate 30 is fixed to the inner wall of the bottle body 10 and immersed in the filtered liquid. The wave suppression plate 30 is provided with a plurality of through holes 31. The exhaust gas discharged from the exhaust end passes through the wave suppression plate 30 to form a plurality of bubbles of a preset size range.

[0060] The tail gas generated by the equipment (such as the boron diffusion equipment) will be discharged into the bottle body 10 through the exhaust pipe 20. The tail gas will generate bubbles in the filtered liquid and float upward. In the process of floating, a large amount of tail gas will pass through the multiple through holes 31 on the wave suppression plate 30, and the multiple through holes 31 will be cut into multiple smaller tail gases, thereby improving the uniformity of the bubbles generated by the tail gas passing through the wave suppression plate 30, reducing the generation of large bubbles in the filtered liquid, and alleviating the situation where the bottle body 10 shakes due to uneven bubbles and easy generation of large bubbles, which affects the misjudgment of the actual liquid level by the liquid level detection device, thereby alleviating the problem that the actual liquid level height in the bottle body 10 is insufficient to reduce the exhaust gas filtration effect and cause the exhaust gas emission to fail to meet the standard. It also reduces the mis-addition / mis-discharge of liquid and improves the overall stability of the diffusion system.

[0061] In this embodiment, the multiple through holes 31 are evenly distributed, so that the intervals between the multiple small exhaust gases passing through the wave suppression plate 30 can be relatively uniform, thereby reducing the situation where the multiple small exhaust gases are recombined into large bubbles during the floating process.

[0062] In other embodiments, the plurality of through holes 31 may be relatively concentrated in a region of the wave suppression plate 30 close to the exhaust end to facilitate the passage of exhaust gas.

[0063] Preferably, the wave suppression plate 30 is arranged horizontally, so that the exhaust gas can be evenly contacted with the surface of the wave suppression plate 30, and the exhaust gas can be evenly divided by the through holes 31 on the wave suppression plate 30. In other embodiments, the wave suppression plate 30 can also be arranged obliquely. Specifically, the angle between the wave suppression plate 30 and the horizontal plane can be 15° to 75°.

[0064] In this embodiment, the area of ​​any through hole 31 can be 1.732 mm 2 ~4.9mm 2 The area of ​​the through hole 31 can limit the size of individual bubbles formed by the exhaust gas passing through the through hole 31, thereby reducing the generation of large bubbles. In other embodiments, the area of ​​the through hole 31 can also be in other ranges, which can be selected according to the exhaust gas emission speed or the distance that the exhaust gas floats to the liquid surface in the filtered liquid.

[0065] The porosity of the wave suppression plate 30 can be 70% to 90%. The porosity is the ratio of the area of ​​all through holes 31 on the wave suppression plate 30 to the total area of ​​the wave suppression plate 30. In this embodiment, the porosity of the wave suppression plate 30 is 70% to 90%, which can prevent the exhaust gas from passing through the through holes 31 too quickly, affecting the segmentation effect of the exhaust gas, and avoid the situation where there are not enough through holes 31 for the exhaust gas to pass through, and the exhaust gas is easily accumulated under the wave suppression plate 30, thereby generating greater liquid level fluctuations. In other embodiments, the porosity of the wave suppression plate 30 can also be in other ranges to adjust the speed of the exhaust gas passing through the wave suppression plate 30 as required.

[0066] In this embodiment, the ratio of the area of ​​the wave suppression plate 30 to the cross-sectional area of ​​the cavity of the bottle body 10 is 1:1 to 1:10. When the ratio of the area of ​​the wave suppression plate 30 to the cross-sectional area of ​​the cavity of the bottle body 10 is small (such as 5:1), the wave suppression plate 30 occupies less space in the bottle body 10, which is convenient for installing and setting the wave suppression plate 30 in the bottle body 10. When the ratio of the area of ​​the wave suppression plate 30 to the cross-sectional area of ​​the cavity of the bottle body 10 is large (such as 2:1), the cross-sectional area of ​​the bottle body 10 covered by the wave suppression plate 30 can be made larger, so that the exhaust gas can pass through the wave suppression plate 30 more easily to be divided into multiple smaller exhaust gases.

[0067] In one embodiment, a plurality of wave suppression sheets 32 are further provided on the wave suppression plate 30, and one wave suppression sheet 32 ​​is provided corresponding to one through hole 31, and the wave suppression sheet 32 ​​is fixed to the edge of the through hole 31 and bends toward one side. The wave suppression sheet 32 ​​can increase the resistance of the exhaust gas when passing through the through hole 31, thereby slowing down the formation or diffusion speed of bubbles, so that the bubbles can be more evenly distributed in the filtered liquid.

[0068] In some embodiments, the zigzag directions of the wave suppression plates 32 corresponding to the through holes 31 may be different. Specifically, the direction of the wave suppression plates 32 may be adjusted according to specific needs to adjust the resistance distribution at the through holes 31 and optimize the filtering effect or the stability of the exhaust emission.

[0069] Furthermore, the size of the wave suppression plate 32 corresponding to each through hole 31 is the same. The wave suppression plates 32 of the same size can make the bubble formation process at each through hole 31 be similarly affected, so that the bubbles generated after passing through the wave suppression plate 30 are more uniform.

[0070] Specifically, see Figure 2 Figure 4 The shape of the through hole 31 can be a triangle, the shape of the wave suppression plate 32 matches the shape of the through hole 31, one side of the triangular wave suppression plate 32 is co-edge with one side of the triangular through hole 31, and the angle between the wave suppression plate 32 and the wave suppression plate 30 is 30° to 60°. Setting the angle between the wave suppression plate 32 and the wave suppression plate 30 in this range can make it easier for the wave suppression plate 32 to cut the exhaust gas.

[0071] Preferably, the wave suppression plate 32 is bent toward the side close to the bottom of the bottle, and the tip of the triangular wave suppression plate 32 can puncture the large bubbles generated by the tail gas and break them into multiple small bubbles, thereby reducing the generation of large bubbles in the filtered liquid.

[0072] In another embodiment, see Figures 8 to 10 The shape of the through hole 31 can also be an ellipse, and the wave suppression plate 32 is an arc-shaped plate. The arc-shaped plate and the wave suppression plate 30 form a groove with a concave arc or a convex arc edge, and the groove is connected to the through hole 31.

[0073] The arc-shaped sheet can increase the resistance of the exhaust gas when passing through the through hole 31, thereby slowing down the formation or diffusion speed of the bubbles of the exhaust gas, so that the bubbles can be more evenly distributed in the filtering liquid, thereby improving the filtering effect of the exhaust gas.

[0074] Furthermore, the concave arc-shaped or convex arc-shaped notches can guide bubbles to form around the through hole 31 and control the floating direction of the bubbles, thereby making the generated bubbles more evenly distributed.

[0075] In one embodiment, the wave suppression sheet 32 ​​can be obtained by die casting or cutting the wave suppression plate 30 .

[0076] Specifically, taking the triangular wave suppression sheet 32 ​​as an example, when preparing the wave suppression sheet 30, a V-shaped cutout can be cut on the wave suppression sheet 30, and then the triangular wave suppression sheet 32 ​​can be bent / folded along the cutout to one side at a specific angle (e.g., 30° to 60°). The wave suppression sheet 32 ​​and the wave suppression sheet 30 are integrally formed, which reduces the risk of looseness or damage that may exist at the connection between the wave suppression sheet 32 ​​and the wave suppression sheet 30.

[0077] Taking the wave suppression plate 32 as an arc-shaped plate as an example, when preparing the wave suppression plate 30, an elliptical protrusion can be first die-casted on one side of the wave suppression plate 30, and then a part of the elliptical protrusion is cut off to form a groove with a concave arc or convex arc edge.

[0078] In order to further control the uniformity of bubbles generated by the tail gas in the filtered liquid, in an optional embodiment, there are multiple wave suppression plates 30 , and the multiple wave suppression plates 30 have different heights in the bottle body 10 .

[0079] Specifically, a plurality of wave suppression plates 30 may be disposed above the exhaust port of the exhaust end at intervals. When the exhaust gas passes through the plurality of wave suppression plates 30 in sequence, the exhaust gas may be divided multiple times, thereby reducing the probability of generating uneven bubbles.

[0080] In one embodiment, the projections of the plurality of wave suppression plates 30 in the height direction do not completely overlap. When the area of ​​the wave suppression plate 30 is smaller than the cross-sectional area of ​​the cavity of the bottle body 10, the plurality of wave suppression plates 30 may be arranged around the inner wall of the bottle body 10 to increase the probability of the wave suppression plates 30 dividing the exhaust gas. Preferably, as Fig.11 and Fig.12 As shown, a plurality of wave suppression plates 30 are evenly arranged around the inner wall of the bottle body 10. The angle between the plurality of wave suppression plates 30 can be determined according to the number of wave suppression plates 30. For example, when there are three wave suppression plates 30, the angle between the center lines of adjacent wave suppression plates 30 is 120°; when there are four wave suppression plates 30, the angle between the center lines of adjacent wave suppression plates 30 is 90°.

[0081] In some embodiments, the wave suppression plate 30 may extend toward the center of the bottle body 10, and the projections of the extended ends of at least two wave suppression plates 30 in the height direction may overlap. Such an arrangement may further increase the probability of the wave suppression plate 30 dividing the exhaust gas when the area of ​​the wave suppression plate 30 is relatively small and it is convenient to install it in the bottle body 10.

[0082] In some embodiments, when the ratio of the area of ​​the wave suppression plate 30 to the cross-sectional area of ​​the cavity of the bottle body 10 is 1:1, the projections of the plurality of wave suppression plates 30 in the height direction may also completely overlap to perform complete multi-stage filtration of the exhaust gas.

[0083] In some embodiments, the plurality of wave suppression plates 30 may include a first wave suppression plate 30 and a second wave suppression plate 30, wherein the first wave suppression plate 30 is located below the exhaust end of the exhaust pipe 20, and the vertical interval between the first wave suppression plate 30 and the port of the exhaust end is 3 cm to 7 cm. The second wave suppression plate 30 is located above the exhaust end, and the vertical interval between the second wave suppression plate 30 and the preset liquid level position of the filtered liquid is 3 cm to 7 cm.

[0084] Under the influence of inertia, the exhaust gas will move downward a certain distance after entering the filtered liquid through the exhaust port at the exhaust end. Therefore, a wave suppression plate 30 may also be provided below the exhaust port. After the exhaust gas passes through the wave suppression plate 30 below the exhaust port, the exhaust gas is divided into multiple airflows by the wave suppression plate 30. Under the influence of buoyancy, the exhaust gas begins to float again after passing through the wave suppression plate 30 below the exhaust port, and is divided again by the wave suppression plate 30. That is, the wave suppression plate 30 below the exhaust port can divide the exhaust gas twice, which better controls the size of bubbles generated in the filtered liquid.

[0085] In other embodiments, the plurality of wave suppression plates 30 may further include a third wave suppression plate 30, and the third wave suppression plate 30 is located between the first wave suppression plate 30 and the second wave suppression plate 30. The plurality of wave suppression plates 30 may also be other numbers, and the number of wave suppression plates 30 may be selected according to a preset size range of the bubbles.

[0086] See also Fig.13 and Fig.14 In this embodiment, the exhaust emission filtering device also includes a fixed socket 40, which includes two opposite sides, one side of which is fixed to the inner wall of the bottle body 10, and the other side is provided with a slot 41 that matches the end of the wave suppression plate 30, and the slot 41 is used to be clamped with the wave suppression plate 30.

[0087] Specifically, the cross section of the slot 41 may be a rectangle, and the width of the rectangle is slightly smaller than the thickness of the wave suppression plate 30 , so that after the wave suppression plate 30 is inserted into the slot 41 , the wave suppression plate 30 and the slot 41 are interference-fitted so that the two are locked.

[0088] In some embodiments, a guide strip (not shown) may be provided on the edge of the wave suppression plate 30, and a corresponding guide rail 42 may be provided on the inner wall of the slot 41 of the fixed socket 40, so that the wave suppression plate 30 may be inserted into the slot 41 along the guide rail 42. The guide rail 42 may facilitate the alignment of the wave suppression plate 30 and the socket, and may also make the connection between the wave suppression plate 30 and the fixed socket 40 more stable.

[0089] The embodiment of the present application also provides a boron diffusion device, which may include a boron diffusion furnace and any of the above-mentioned tail gas emission filtering devices. The boron diffusion furnace can be used in the preparation process of photovoltaic cells, for example, to dope boron onto the surface of a silicon wafer, and to diffuse boron into the inside of the silicon wafer through high temperature treatment to form a P-type silicon region. The boron diffusion furnace will generate corresponding tail gas during operation, and the tail gas needs to be filtered before it can be discharged.

[0090] The exhaust port of the boron diffusion furnace can be connected to the tail gas emission filtering device in any of the above embodiments, so that the tail gas generated by the diffusion furnace is filtered by the tail gas emission filtering device before being discharged.

[0091] An embodiment of the present application also provides an exhaust gas emission filtration system, comprising the exhaust gas emission filtration device in any of the above embodiments or the above boron diffusion device.

[0092] Specifically, see Fig.15 The filtering system may include a boron diffusion furnace 100, a condensation assembly 200, a control valve 400, a vacuum pump 500, and a main emission assembly 600. The boron diffusion furnace 100, the condensation assembly 200, one or more of the tail gas emission filtering devices 300 in the above embodiments, the control valve 400, the vacuum pump 500, and the main emission assembly 600 may be connected in series in this order.

[0093] The boron diffusion furnace 100 is used to perform a diffusion process on the battery cell. The corresponding exhaust gas generated in this process is cooled by the condensation component 200, and then enters the exhaust gas emission filtration device 300 in one or more of the above embodiments for exhaust gas filtration. The control valve 400 can be opened or closed according to the process requirements to maintain the air pressure in the pipeline. The vacuum pump 500 can be vacuumed according to the process requirements, for example, the pressure in the pipeline is pumped from 100000Pa to 10000Pa. The vacuum pump 500 can also be used to guide the flow direction of the exhaust gas so that the exhaust gas is finally discharged through the main exhaust component 600. The main exhaust component 600 can be a plurality of large exhaust pipes so that the filtered exhaust gas is discharged to the outdoors or the exhaust system.

[0094] It should be noted that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application. The orientation words "inside" and "outside" refer to the inside and outside relative to the outline of each component itself. For example, if the device in the accompanying drawings is inverted, the device described as "above other devices or structures" or "above other devices or structures" will be positioned as "below other devices or structures" or "below other devices or structures". Therefore, the exemplary term "above..." can include both "above..." and "below..." orientations. The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatial relative descriptions used here are interpreted accordingly.

[0095] It should also be noted that "one embodiment", "another embodiment", "embodiment", etc. mentioned in this application refer to the specific features, structures or characteristics described in conjunction with the embodiment included in at least one embodiment generally described in this application. The same expression appearing in multiple places in the specification does not necessarily refer to the same embodiment. Further, when describing a specific feature, structure or characteristic in conjunction with any embodiment, it is claimed that the realization of such feature, structure or characteristic in conjunction with other embodiments also falls within the scope of this application.

[0096] In the above embodiments, the description of each embodiment has its own emphasis. For parts that are not described in detail in a certain embodiment, reference can be made to the relevant descriptions of other embodiments.

[0097] It should also be noted that the above are only preferred embodiments of the present application, and the patent protection scope of the present application is not limited thereto. Any equivalent structure or equivalent process transformation made using the contents of the present application specification and drawings, or directly or indirectly used in other related technical fields, are also included in the patent protection scope of the present application.

Claims

1. An exhaust gas filtering device, characterized in that: include: A bottle body, the bottle body having an exhaust gas inlet and an exhaust gas outlet, and the bottle body is used to contain a filtered liquid; An exhaust pipe is inserted at least partially into the bottle body through the exhaust gas inlet, the exhaust pipe comprises an exhaust end, and the exhaust end is immersed in the filtered liquid; A wave suppression plate, fixed to the inner wall of the bottle body and immersed in the filtered liquid, wherein the wave suppression plate is provided with a plurality of through holes; The exhaust gas discharged from the exhaust end passes through the wave suppression plate to form a plurality of bubbles within a preset size range.

2. The exhaust gas filtering device according to claim 1, characterized in that: The wave suppression plate has at least one of the following characteristics: The plurality of through holes on the wave suppression plate are evenly distributed; The wave suppression plate is arranged horizontally; The area of ​​any through hole on the wave suppression plate is 1.732 mm 2 ~4.9mm 2 ; The opening rate of the wave suppression plate is 70% to 90%; The ratio of the area of ​​the wave suppression plate to the cross-sectional area of ​​the cavity of the bottle body is 1:1 to 1:

10.

3. The exhaust gas filtering device according to claim 1, characterized in that: The wave suppression plate is also provided with a plurality of wave suppression plates, one wave suppression plate is provided corresponding to one through hole, and the wave suppression plate is fixed to the edge of the through hole and bent toward one side.

4. The exhaust gas filtering device according to claim 3, characterized in that: The sizes of the wave suppression plates corresponding to each through hole are the same.

5. The exhaust gas filtering device according to claim 3, characterized in that: The through hole is in a triangular shape, the shape of the wave suppression plate matches the shape of the through hole, one side of the triangular wave suppression plate shares a side with one side of the triangular through hole, and the angle between the wave suppression plate and the wave suppression plate is 30° to 60°.

6. The exhaust gas emission filtering device according to claim 3, characterized in that: The through hole is in the shape of an ellipse, and the wave suppression sheet is an arc-shaped sheet. The arc-shaped sheet and the wave suppression plate form a notch with a concave arc-shaped or convex arc-shaped edge, and the notch is connected to the through hole.

7. The exhaust gas filtering device according to claim 3, characterized in that: The wave suppression sheet is obtained by die-casting or cutting the wave suppression plate.

8. The exhaust gas filtering device according to claim 1, characterized in that: There are a plurality of wave suppression plates, and the plurality of wave suppression plates have different heights in the bottle body.

9. The exhaust gas filtering device according to claim 8, characterized in that: The projections of multiple wave-suppression panels in the height direction do not completely overlap.

10. The exhaust gas filtering device according to claim 8, characterized in that: A plurality of wave suppression plates are evenly arranged around the inner wall of the bottle body.

11. The exhaust gas filtering device according to claim 8, characterized in that: The wave suppression plate extends toward the center of the bottle body, and projections of the extending ends of at least two wave suppression plates in the height direction partially overlap.

12. The exhaust gas filtering device according to claim 8, characterized in that: Multiple wave suppression panels include: A first wave suppression plate is located below the exhaust end of the exhaust pipe, and a vertical interval between the first wave suppression plate and the port of the exhaust end is 3 cm to 7 cm; The second wave suppression plate is located above the exhaust end, and the vertical interval between the second wave suppression plate and the preset liquid level position of the filtered liquid is 3 cm to 7 cm.

13. The exhaust gas filtering device according to any one of claims 1 to 12, characterized in that: The exhaust gas emission filtering device also includes a fixed socket, which includes two opposite sides, one side of which is fixed to the inner wall of the bottle body, and the other side is provided with a slot matching the end of the wave suppression plate, and the slot is used to be clamped with the wave suppression plate.

14. A boron diffusion device, characterized in that: include: Boron diffusion furnace; The exhaust gas filtering device according to any one of claims 1 to 13; Wherein, the exhaust port of the boron diffusion furnace is connected to the tail gas emission filtering equipment.

15. An exhaust emission filtration system, characterized in that: comprising the exhaust gas filtering device according to any one of claims 1 to 13; or The boron diffusion apparatus of claim 14.

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