Polishing turntable and polishing turntable cooling system

Abstract

The present application discloses a polishing turntable and a polishing turntable cooling system, the polishing turntable comprising: a polishing disc, a first cooling channel is provided on the polishing disc, the first cooling channel is for cooling medium to flow through, so that the cooling medium cools the polishing disc; a driving member, the driving member is used to drive the polishing disc to rotate, a second cooling channel is provided on the driving member, the second cooling channel is for cooling medium to flow through, so that the cooling medium cools the driving member; the first cooling channel and the second cooling channel are connected in parallel, or the first cooling channel and the second cooling channel are connected in series and parallel. The present application not only cools the polishing disc and the driving member through the parallel or series-parallel first cooling channel and the second cooling channel, which is beneficial to reduce the influence of the heat generated by the polishing disc and the driving member on the polishing quality, but also helps to realize the reasonable distribution of the cooling medium in the first cooling channel and the second cooling channel, which is beneficial to more efficiently and reasonably cool the polishing disc and the driving member.

Description

Technical Field

[0001] The present application relates to the technical field of chemical mechanical polishing, and in particular to a polishing turntable and a polishing turntable cooling system. Background Art

[0002] Chemical Mechanical Polishing (CMP) is an important step in the wafer manufacturing process. During polishing, the polishing head presses the wafer against the polishing pad, and the relative movement between the wafer and the polishing pad in the polishing liquid, that is, under the joint action of chemistry and mechanics, can achieve global flattening of the wafer.

[0003] However, during the polishing process, both the polishing disk and the polishing disk drive motor will generate heat, and since this heat will affect the chemical reaction of the polishing liquid to a certain extent, this heat will affect the polishing quality. In addition, the temperature increase of the polishing disk drive motor may cause damage to the motor and affect the stability of the motor drive, thus affecting the stability of the polishing process, and thus also affecting the polishing quality. Utility Model Content

[0004] In view of the above-mentioned deficiencies in the related art, the present application provides a polishing turntable and a polishing turntable cooling system to solve the problem in the related art that the heat generated by the polishing disk and the polishing disk drive motor affects the polishing quality.

[0005] In order to solve the above technical problems, in a first aspect, the present application provides a polishing turntable, which comprises:

[0006] A polishing disc, wherein a first cooling channel is provided on the polishing disc, and a cooling medium flows through the first cooling channel so that the cooling medium cools the polishing disc;

[0007] A driving member, the driving member is used to drive the polishing disc to rotate, the driving member is provided with a second cooling channel, the second cooling channel is for the cooling medium to flow through, so that the cooling medium cools the driving member;

[0008] The first cooling channel and the second cooling channel are connected in parallel, or the first cooling channel and the second cooling channel are connected in series and in parallel.

[0009] In a second aspect, the present application also provides a polishing turntable cooling system, the polishing turntable cooling system comprising:

[0010] A cooling device, the cooling device is used to cool a cooling medium, the cooling device having a total outlet for the cooling medium to flow out of the cooling device and a total inlet for the cooling medium to flow into the cooling device;

[0011] For the polishing turntable described in the first aspect, the first cooling channel and the second cooling channel are connected in parallel between the total outlet and the total inlet, or the first cooling channel and the second cooling channel are connected in series and in parallel between the total outlet and the total inlet.

[0012] In a possible implementation of the second aspect, the first cooling channel and the second cooling channel are connected in parallel between the main outlet and the main inlet;

[0013] The polishing turntable cooling system further comprises a polishing disc temperature detection member and a driving member temperature detection member, wherein the polishing disc temperature detection member is used to detect the temperature of the polishing disc, and the driving member temperature detection member is used to detect the temperature of the driving member;

[0014] The polishing turntable cooling system also includes a first branch and a second branch connected in parallel between the main outlet and the main inlet, the first cooling channel is connected in series to the first branch, and the second cooling channel is connected in series to the second branch; the polishing turntable cooling system also includes a first flow regulating component and a second flow regulating component, the first flow regulating component is connected in series to the first branch, the first flow regulating component is used to regulate the flow of the cooling medium in the first cooling channel, the second flow regulating component is connected in series to the second branch, and the second flow regulating component is used to regulate the flow of the cooling medium in the second cooling channel.

[0015] In a possible implementation of the second aspect, the polishing turntable cooling system further includes a controller, which is electrically connected to the polishing disk temperature detection component and the driving component temperature detection component, so that the controller receives polishing disk temperature information detected by the polishing disk temperature detection component and driving component temperature information detected by the driving component temperature detection component;

[0016] The controller is also electrically connected to the first flow regulating component and the second flow regulating component. The controller is used to control the first flow regulating component to regulate the flow of the cooling medium in the first cooling channel according to the polishing plate temperature information. The controller is also used to control the second flow regulating component to regulate the flow of the cooling medium in the second cooling channel according to the driving component temperature information.

[0017] In a possible implementation of the second aspect, the polishing turntable cooling system further includes a first inlet temperature detection component and a first outlet temperature detection component, the first inlet temperature detection component is connected in series to the first branch and is located between the first cooling channel and the main outlet, the first inlet temperature detection component is used to detect the temperature of the cooling medium flowing into the first cooling channel, the first outlet temperature detection component is connected in series to the first branch and is located between the first cooling channel and the main inlet, the first outlet temperature detection component is used to detect the temperature of the cooling medium flowing out of the first cooling channel; and / or,

[0018] The polishing turntable cooling system also includes a second inlet temperature detection component and a second outlet temperature detection component. The second inlet temperature detection component is connected in series to the second branch and is located between the second cooling channel and the main outlet. The second inlet temperature detection component is used to detect the temperature of the cooling medium flowing into the second cooling channel. The second outlet temperature detection component is connected in series to the second branch and is located between the second cooling channel and the main inlet. The second outlet temperature detection component is used to detect the temperature of the cooling medium flowing out of the second cooling channel.

[0019] In a possible implementation of the second aspect, the first cooling channel and the second cooling channel are connected in series and in parallel between the main outlet and the main inlet;

[0020] One of the first cooling channel and the second cooling channel is the first one, and the other is the second one, a first connecting trunk is connected in series between the first one and the main outlet, a second connecting trunk is connected in series between the second one and the main inlet, and a first connecting branch is connected in series between the first cooling channel and the second cooling channel;

[0021] The polishing turntable cooling system also includes a second connecting branch and a third connecting branch, wherein one end of the second connecting branch is connected to the first connecting trunk and the other end is connected to the second connecting trunk, and one end of the third connecting branch is connected to the first connecting branch and the other end is connected to the second connecting trunk.

[0022] In a possible implementation of the second aspect, a first on-off valve is connected in series to the second connecting branch, and a second on-off valve is connected in series to the third connecting branch;

[0023] The third connecting branch is connected to the first connecting branch at the first connecting position, the third connecting branch is connected to the second connecting main road at the second connecting position, the second connecting branch is connected to the second connecting main road at the third connecting position, and the third connecting position is arranged on the side of the second connecting position close to the second one; a third on-off valve is connected in series on the first connecting branch, and the third on-off valve is located between the first connecting position and the second one, and a fourth on-off valve is connected in series on the second connecting main road, and the fourth on-off valve is located between the second connecting position and the third connecting position.

[0024] In a possible implementation of the second aspect, the polishing turntable cooling system further includes a polishing disc temperature detection member and a driving member temperature detection member, wherein the polishing disc temperature detection member is used to detect the temperature of the polishing disc, and the driving member temperature detection member is used to detect the temperature of the driving member;

[0025] The second connecting branch is connected to the first connecting main line at a fourth connecting position. The polishing turntable cooling system also includes a total flow regulating component, which is connected in series to the first connecting main line and is located between the total outlet and the fourth connecting position. The total flow regulating component is used to adjust the flow of the cooling medium in the first connecting main line.

[0026] In a possible implementation of the second aspect, the polishing turntable cooling system further includes a controller, the controller being electrically connected to the polishing disk temperature detection component and the driving component temperature detection component, so that the controller receives temperature information detected by the polishing disk temperature detection component and the driving component temperature detection component;

[0027] The controller is electrically connected to the total flow regulating component, and is used to control the total flow regulating component to regulate the flow of the cooling medium in the first connecting trunk according to the temperature information detected by the polishing plate temperature detecting component and the driving component temperature detecting component.

[0028] In a possible implementation of the second aspect, a first temperature detection component located between the total outlet and the fourth connection position is connected in series on the first connecting main line, a second temperature detection component located between the first connection position and the first is connected in series on the first connecting branch line, and a third temperature detection component located between the second connection position and the total inlet is connected in series on the second connecting main line, and the first temperature detection component, the second temperature detection component and the third temperature detection component are all used to detect the temperature of the cooling medium.

[0029] Compared with the related art, this application has at least the following beneficial effects:

[0030] In the present application, since the polishing disc is provided with a first cooling channel through which the cooling medium flows so that the cooling medium cools the polishing disc, and the driving member is provided with a second cooling channel through which the cooling medium flows so that the cooling medium cools the driving member, and since the first cooling channel and the second cooling channel are connected in parallel, or the first cooling channel and the second cooling channel are connected in series and parallel, when the first cooling channel and the second cooling channel are connected in parallel, the cooling medium can flow through the first cooling channel and the second cooling channel respectively, and then cool the polishing disc and the driving member respectively, which is beneficial to reduce the influence of the cooling of the polishing disc and the driving member on each other, and then help to ensure the cooling effect of the polishing disc and the driving member; or, when the first cooling channel and the second cooling channel are connected in series and parallel, the cooling medium can not only flow through the first cooling channel and the second cooling channel respectively, but also flow through the first cooling channel and the second cooling channel in sequence, and then not only cool the polishing disc and the driving member respectively, but also cool the polishing disc and the driving member in sequence, so that the combination of the two cooling paths in parallel and in series is beneficial to accelerate the cooling efficiency of the polishing disc and the driving member.

[0031] According to the above, the present application can cool the polishing disc and the driving member respectively through the first cooling channel and the second cooling channel connected in parallel or in series. On the one hand, this is conducive to reducing the influence of the heat generated by the polishing disc and the driving member on the chemical reaction of the polishing liquid, which is conducive to ensuring the polishing quality; on the other hand, to a certain extent, the timely heat dissipation of the driving member is conducive to avoiding damage to the driving member and ensuring the stability of the driving of the driving member, which is conducive to ensuring the stability of the polishing process and thus also conducive to ensuring the polishing quality; more importantly, through the first cooling channel and the second cooling channel connected in parallel or in series, it is conducive to achieving a reasonable distribution of the cooling medium in the first cooling channel and the second cooling channel, which is conducive to more efficient and reasonable cooling of the polishing disc and the driving member. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0033] Figure 1 A cross-sectional view of a polishing turntable provided in an embodiment of the present application;

[0034] Figure 2 A cross-sectional view of a partial structure of a polishing turntable provided in an embodiment of the present application;

[0035] Figure 3 for Figure 1 The enlarged view of point A in the middle;

[0036] Figure 4 One of the schematic diagrams of the polishing turntable cooling system provided in the embodiment of the present application;

[0037] Figure 5 The second schematic diagram of the polishing turntable cooling system provided in the embodiment of the present application;

[0038] Figure 6 for Figure 5 Schematic diagram of the polishing disk cooling channel and the second cooling channel in the polishing turntable cooling system.

[0039] Description of reference numerals:

[0040] 1-Turntable seat;

[0041] 2-polishing plate; 21-first cooling channel;

[0042] 3-driving member; 31-second cooling channel; 32-stator; 33-rotor;

[0043] 4-rotating assembly; 41-inflow transmission channel; 411-mandrel inflow channel section; 4111-first inflow channel section; 4112-second inflow channel section; 412-third inflow channel section; 42-outflow transmission channel; 421-mandrel outflow channel section; 4211-first outflow channel section; 4212-second outflow channel section; 422-third outflow channel section; 43-support member; 431-support ring; 432-fixed disk; 433-connecting structure; 44-mandrel; 441-first shaft section; 442-second shaft section;

[0044] 5-first end seal; 6-first middle seal; 7-second middle seal; 8-second end seal; 9-cooling device; 10-polishing disc temperature detection member; 20-driving member temperature detection member; 30-first branch; 40-second branch; 50-first flow adjustment member; 60-second flow adjustment member; 70-controller; 80-first inlet temperature detection member; 90-first outlet temperature detection member; 100-second inlet temperature detection member; 110-second outlet temperature detection member; 120-first connecting trunk; 130-second connecting trunk; 140-first connecting branch; 150-second connecting branch; 160-third connecting branch; 170-first on-off valve; 180-second on-off valve; 190-third on-off valve; 200-fourth on-off valve; 210-total flow adjustment member; 220-first temperature detection member; 230-second temperature detection member; 240-third temperature detection member;

[0045] 250 - rotary joint; 2501 - fourth inflow channel section; 2502 - fourth outflow channel section; 2503 - first inlet; 2504 - first outlet. DETAILED DESCRIPTION

[0046] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0047] In the present application, the terms "upper", "lower", "left", "right", "front", "back", "top", "bottom", "inner", "outer", "vertical", "horizontal", "lateral", "longitudinal" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings. These terms are mainly used to better describe the present application and its embodiments, and are not used to limit the indicated devices, elements or components to have a specific orientation, or to be constructed and operated in a specific orientation.

[0048] In addition, some of the above terms may be used to express other meanings in addition to indicating orientation or positional relationship. For example, the term "on" may also be used to express a certain dependency or connection relationship in some cases. For those of ordinary skill in the art, the specific meanings of these terms in this application can be understood according to specific circumstances.

[0049] In addition, the terms "installed", "set", "provided with", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral structure; it can be a mechanical connection, or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be an internal connection between two devices, elements, or components. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0050] In addition, the terms "first", "second", etc. are mainly used to distinguish different devices, elements or components (the specific types and structures may be the same or different), and are not used to indicate or imply the relative importance and quantity of the indicated devices, elements or components. Unless otherwise specified, "plurality" means two or more.

[0051] As described in the background technology of this application, in the related technology, chemical mechanical polishing (CMP) is an important link in the wafer manufacturing process. During polishing, the polishing head presses the wafer against the polishing pad, and the relative movement between the wafer and the polishing pad in the polishing liquid, that is, under the joint action of chemistry and mechanics, can achieve global flattening of the wafer.

[0052] However, during the polishing process, both the polishing disk and the polishing disk drive motor will generate heat, and since this heat will affect the chemical reaction of the polishing liquid to a certain extent, this heat will affect the polishing quality. In addition, the temperature increase of the polishing disk drive motor may cause damage to the motor and affect the stability of the motor drive, thus affecting the stability of the polishing process, and thus also affecting the polishing quality.

[0053] Embodiment 1

[0054] In view of the above-mentioned problems, the present application provides a polishing turntable to solve the problem in the related art that the heat generated by the polishing disc and the polishing disc driving motor affects the polishing quality.

[0055] The technical solution of the present application will be further described below in conjunction with specific embodiments and drawings:

[0056] like Figure 1 As shown, the polishing turntable includes a polishing disc 2 and a driving member 3. The polishing disc 2 is rotatably arranged on the turntable seat 1. Figure 4 and Figure 6 As shown, the polishing disc 2 is provided with a first cooling channel 21, through which a cooling medium flows, so that the cooling medium cools the polishing disc 2. The driving member 3 is used to drive the polishing disc 2 to rotate, and the driving member 3 is provided with a second cooling channel 31, through which a cooling medium flows, so that the cooling medium cools the driving member 3. The first cooling channel 21 and the second cooling channel 31 are connected in parallel, or the first cooling channel 21 and the second cooling channel 31 are connected in series and in parallel.

[0057] In the present application, since the polishing disk 2 is provided with a first cooling channel 21 through which a cooling medium flows so as to cool the polishing disk 2, and the driving member 3 is provided with a second cooling channel 31 through which a cooling medium flows so as to cool the driving member 3, and since the first cooling channel 21 and the second cooling channel 31 are connected in parallel, or the first cooling channel 21 and the second cooling channel 31 are connected in series and parallel. Therefore, when the first cooling channel 21 and the second cooling channel 31 are connected in parallel, the cooling medium can flow through the first cooling channel 21 and the second cooling channel 31 respectively, and then cool the polishing disk 2 and the driving member 3 respectively, which is beneficial to reduce the influence of mutual cooling between the polishing disk 2 and the driving member 3, and then help to ensure the cooling effect of the polishing disk 2 and the driving member 3; or, when the first cooling channel 21 and the second cooling channel 31 are connected in series and parallel, the cooling medium can not only flow through the first cooling channel 21 and the second cooling channel 31 respectively, but also flow through the first cooling channel 21 and the second cooling channel 31 sequentially, and then cool not only the polishing disk 2 and the driving member 3 respectively, but also cool the polishing disk 2 and the driving member 3 sequentially, so that the combination of parallel and series cooling paths is beneficial to speed up the cooling efficiency of the polishing disk 2 and the driving member 3.

[0058] According to the above, the present application can cool the polishing disc 2 and the driving member 3 respectively through the first cooling channel 21 and the second cooling channel 31 connected in parallel or in series. On the one hand, this is conducive to reducing the influence of the heat generated by the polishing disc 2 and the driving member 3 on the chemical reaction of the polishing liquid, which is conducive to ensuring the polishing quality; on the other hand, to a certain extent, the timely heat dissipation of the driving member 3 is conducive to avoiding damage to the driving member 3 and ensuring the driving stability of the driving member 3, which is conducive to ensuring the stability of the polishing process and thus is conducive to ensuring the polishing quality; more importantly, through the first cooling channel 21 and the second cooling channel 31 connected in parallel or in series, it is conducive to achieving a reasonable distribution of the cooling medium in the first cooling channel 21 and the second cooling channel 31, which is conducive to more efficient and reasonable cooling of the polishing disc 2 and the driving member 3.

[0059] Regarding the setting of the first cooling channel 21 on the polishing disk 2, in the embodiment of the present application, the first cooling channel 21 can be arranged inside the polishing disk 2, and can also be composed of a cooling channel arranged outside the polishing disk 2. The setting method of the first cooling channel 21 on the polishing disk 2 is relatively flexible, and the embodiment of the present application does not make specific limitations on this.

[0060] Regarding the arrangement of the second cooling channel 31 on the driving member 3, in the embodiment of the present application, the second cooling channel 31 may be internally arranged in the driving member 3, or may be composed of a cooling channel arranged outside the driving member 3. The arrangement of the second cooling channel 31 on the driving member 3 is relatively flexible, and the embodiment of the present application does not make any specific limitation on this.

[0061] Regarding the cooling medium, in the embodiments of the present application, the cooling medium may be a cooling liquid or a cooling gas. The type of cooling medium is relatively flexible and is not specifically limited in the embodiments of the present application.

[0062] Furthermore, if Figure 1 As shown, the polishing turntable also includes a turntable seat 1 and a rotating component 4. The rotating component 4 is rotatably disposed on the turntable seat 1, and the polishing disc 2 is disposed on the rotating component 4. The polishing disc 2 is indirectly rotatably disposed on the turntable seat 1 through the rotating component 4. The driving member 3 is used to indirectly drive the polishing disc 2 to rotate by driving the rotating component 4 to rotate.

[0063] like Figure 1 , Figure 2 , Figure 4 and Figure 6 As shown, the rotating component 4 is provided with an inlet transmission channel 41 and an outlet transmission channel 42 which are connected to the first cooling channel 21. The inlet transmission channel 41 is used to input cooling medium into the first cooling channel 21, and the outlet transmission channel 42 is used to output the cooling medium after cooling the polishing disk 2.

[0064] The inflow transmission channel 41, the first cooling channel 21 and the outflow transmission channel 42 are connected in series to form a polishing plate cooling channel section; the polishing plate cooling channel section and the second cooling channel 31 are connected in parallel, or the polishing plate cooling channel section and the second cooling channel 31 are connected in series and parallel.

[0065] With such arrangement, on the one hand, the rotating assembly 4 not only facilitates the rotatable arrangement of the polishing disc 2 on the turntable seat 1, but also helps to avoid direct rotational friction between the polishing disc 2 and the turntable seat 1 because the polishing disc 2 does not need to be directly rotatably arranged on the turntable seat 1, thereby helping to reduce the wear of the polishing disc 2 and help to extend the service life of the polishing disc 2. On the other hand, when the inflow transmission channel 41 and the outflow transmission channel 42 are respectively connected to the external pipeline, the inflow transmission channel 41 and the outflow transmission channel 42 in the rotating assembly 4 not only facilitate the connection between the first cooling channel 21 and the external pipeline, but also helps to avoid the influence of the external pipeline on the rotation of the polishing disc 2 because the polishing disc 2 does not need to be directly connected to the external pipeline, and the rotating assembly 4 can rotate synchronously with the polishing disc 2.

[0066] For the inflow transmission channel 41 and the outflow transmission channel 42, further, as Figure 2 As shown, the inflow transmission channel 41 and the outflow transmission channel 42 are both disposed inside the rotating assembly 4 , and both the inflow transmission channel 41 and the outflow transmission channel 42 are straight channels.

[0067] On the one hand, both the inflow transmission channel 41 and the outflow transmission channel 42 are arranged inside the rotating component 4, which can reduce the impact of external factors on the inflow transmission channel 41 and the outflow transmission channel 42, thereby ensuring the normal cooling of the polishing disk 2; on the other hand, both the inflow transmission channel 41 and the outflow transmission channel 42 are set as straight channels, which not only simplifies the structure of the inflow transmission channel 41 and the outflow transmission channel 42, but also facilitates the processing of the inflow transmission channel 41 and the outflow transmission channel 42. Moreover, compared with the channel with several 90° changes in direction, there is no need to process the channel with several 90° changes in direction by opening holes on the side, so there will be no problem of blockage and leakage of the side openings.

[0068] In other embodiments, the inflow transmission channel 41 and the outflow transmission channel 42 may also be arranged outside the rotating assembly 4. In this arrangement, it is not necessary to process the inflow transmission channel 41 and the outflow transmission channel 42 in the rotating assembly 4, which facilitates the processing and manufacturing of the rotating assembly 4 and also facilitates the arrangement of the inflow transmission channel 41 and the outflow transmission channel 42 on the rotating assembly 4.

[0069] For the rotating assembly 4, further, as Figure 1 As shown, the rotating assembly 4 includes a support member 43 and a core shaft 44, the polishing disk 2 is arranged on the support member 43, the support member 43 is rotatably arranged on the turntable seat 1, the core shaft 44 is connected to the support member 43 and the polishing disk 2, and the driving member 3 is used to drive at least one of the support member 43 and the core shaft 44 to rotate, so as to drive the polishing disk 2 to rotate.

[0070] like Figure 2 As shown, the inflow transmission channel 41 includes a core shaft inflow channel section 411 disposed inside the core shaft 44 , and the outflow transmission channel 42 includes a core shaft outflow channel section 421 disposed inside the core shaft 44 .

[0071] Such arrangement not only facilitates the rotatable arrangement of the rotating assembly 4 on the turntable seat 1 through the support member 43 , but also facilitates the arrangement of the inflow transmission channel 41 and the outflow transmission channel 42 on the rotating assembly 4 through the core shaft 44 .

[0072] In a preferred embodiment, the driving member 3 is a motor, and as Figure 1 As shown, the driving member 3 includes a stator 32 and a rotor 33, wherein the stator 32 is arranged on the turntable seat 1, and the rotor 33 is arranged on the support member 43, so that the driving member 3 can drive the spindle 44 and the polishing plate 2 to rotate by driving the support member 43 to rotate. Such an arrangement can not only make the driving member 3 have a relatively simple structure, but also make the driving member 3 stable and reliable.

[0073] In other embodiments, the driving member 3 may also be a pneumatic cylinder or a hydraulic cylinder. The type of the driving member 3 can be flexibly selected. Specifically, it can be selected according to actual usage requirements. The embodiments of the present application will not elaborate on this in detail.

[0074] In other embodiments, the rotating assembly 4 only includes a support member 43, the polishing disc 2 is disposed on the support member 43, the support member 43 is rotatably disposed on the turntable seat 1, and the inflow transmission channel 41 and the outflow transmission channel 42 are also disposed on the support member 43. Such a configuration can simplify the structural composition of the rotating assembly 4, thereby facilitating the manufacture of the rotating assembly and reducing the manufacturing cost.

[0075] Furthermore, if Figure 1 As shown, a first end seal 5 is provided between the core shaft 44 and the polishing disk 2 for sealingly connecting the two, and a first avoidance structure is provided on the first end seal 5, and the first avoidance structure is used to avoid the connection between the core shaft inflow channel section 411 and the core shaft outflow channel section 421 and the first cooling channel 21.

[0076] Such arrangement can not only prevent the cooling medium from leaking from the connection position between the core shaft 44 and the polishing disk 2 through the first end seal 5, but also ensure the connection between the core shaft inflow channel section 411 and the core shaft outflow channel section 421 and the first cooling channel 21 through the first avoidance structure on the first end seal 5.

[0077] For the support member 43, further, as Figure 1 As shown, the support member 43 includes a support ring 431, a fixed disk 432 and a connecting structure 433. The polishing disk 2, the support ring 431, the fixed disk 432 and the core shaft 44 are coaxially arranged. The polishing disk 2 is arranged on one side of the support ring 431. The fixed disk 432 is spaced apart in the axial direction of the core shaft 44 on the side of the support ring 431 away from the polishing disk 2. The connecting structure 433 is connected between the support ring 431 and the fixed disk 432 in the circumferential direction. The core shaft 44 is connected to the fixed disk 432.

[0078] Such arrangement, on the one hand, is conducive to reducing the weight of the support member 43 to a certain extent, is conducive to realizing the lightweight design of the support member 43, and is conducive to realizing the lightweight design of the rotating assembly 4; on the other hand, while realizing the lightweight of the support member 43, the support ring 431, the connecting structure 433 and the fixing plate 432 are sequentially arranged and connected along the axial direction of the core shaft 44, which is also conducive to ensuring the overall strength of the support member 43, and is conducive to ensuring the stability of the rotation of the support member 43. In addition, one end of the core shaft 44 is conveniently connected to the polishing plate 2 by passing through the inner ring of the support ring 431.

[0079] Regarding the connection structure 433, in the embodiment of the present application, the connection structure 433 can be a plurality of connection ribs arranged at intervals along the circumference of the support ring 431 and the fixed disk 432, or it can be a connection plate connected between the circumference of the support ring 431 and the fixed disk 432. The type of the connection structure 433 is relatively flexible, and the embodiment of the present application does not make specific limitations on this.

[0080] In other embodiments, the support member 43 only includes a support ring 431, and the core shaft 44 is fixed to the inner ring of the support ring 431. Such a configuration can not only realize a lightweight design of the support member 43, but also simplify the structure of the support member 43, which is conducive to facilitating the processing of the support member 43.

[0081] Furthermore, if Figure 1 As shown, the core shaft 44 includes a first shaft segment 441 and a second shaft segment 442 which are arranged on both sides of the fixed disk 432 in its axial direction. The axial ends of the first shaft segment 441 are respectively connected to the fixed disk 432 and the polishing disk 2, and one axial end of the second shaft segment 442 is connected to the fixed disk 432.

[0082] like Figure 2 As shown, the mandrel inflow channel section 411 includes a first inflow channel section 4111 disposed in the first shaft section 441, and a second inflow channel section 4112 disposed in the second shaft section 442, and the mandrel outflow channel section 421 includes a first outflow channel section 4211 disposed in the first shaft section 441, and a second outflow channel section 4212 disposed in the second shaft section 442. The inflow transmission channel 41 also includes a third inflow channel section 412 disposed in the fixed disk 432, and the outflow transmission channel 42 also includes a third outflow channel section 422 disposed in the fixed disk 432.

[0083] The second inflow channel section 4112, the third inflow channel section 412, the first inflow channel section 4111 and the first cooling channel 21 are connected in sequence to allow the cooling medium to flow into the polishing disk 2. The first cooling channel 21, the first outflow channel section 4211, the third outflow channel section 422 and the second outflow channel section 4212 are connected in sequence to allow the cooling medium to flow out after cooling the polishing disk 2.

[0084] With such arrangement, on the one hand, there is no need to provide a hole on the fixed disk 432 for the core shaft 44 to pass through, which is conducive to simplifying the structure of the fixed disk 432 and facilitating the processing of the fixed disk 432; on the other hand, through the contact between the axial end faces of the first shaft segment 441 and the second shaft segment 442 and the fixed disk 432, the connection contact area between the first shaft segment 441 and the second shaft segment 442 and the fixed disk 432 can be increased, which is conducive to enhancing the reliability of the connection between the first shaft segment 441 and the second shaft segment 442 and the fixed disk 432.

[0085] In addition, by arranging the third inflow channel section 412 and the third outflow channel section 422 on the fixed disk 432, it is convenient for the second inflow channel section 4112 and the first inflow channel section 4111 to be connected through the third inflow channel section 412, and it is also convenient for the first outflow channel section 4211 and the second outflow channel section 4212 to be connected through the third outflow channel section 422.

[0086] Furthermore, if Figure 3 As shown, a first middle seal 6 is provided between the first shaft section 441 and the fixed disk 432 to seal the two, and a second avoidance structure is provided on the first middle seal 6, and the second avoidance structure is used to avoid the communication between the first inflow channel section 4111 and the third inflow channel section 412, and the communication between the first outflow channel section 4211 and the third outflow channel section 422. And / or, as Figure 3 As shown, a second middle seal 7 is arranged between the second shaft section 442 and the fixed disk 432 for sealingly connecting the two, and a third avoidance structure is arranged on the second middle seal 7, and the third avoidance structure is used to avoid the connection between the second inflow channel section 4112 and the third inflow channel section 412, and the connection between the second outflow channel section 4212 and the third outflow channel section 422.

[0087] In this configuration, not only can the first middle seal 6 be used to prevent the cooling medium from leaking from the connection position between the first shaft segment 441 and the fixed disk 432, but also the second avoidance structure on the first middle seal 6 can ensure the communication between the first inflow channel segment 4111 and the third inflow channel segment 412, and the communication between the first outflow channel segment 4211 and the third outflow channel segment 422. And / or, not only can the second middle seal 7 be used to prevent the cooling medium from leaking from the connection position between the second shaft segment 442 and the fixed disk 432, but also the third avoidance structure on the second middle seal 7 can ensure the communication between the second inflow channel segment 4112 and the third inflow channel segment 412, and the communication between the second outflow channel segment 4212 and the third outflow channel segment 422.

[0088] like Figure 1 As shown, the polishing turntable also includes a rotary joint 250 connected to the other axial end of the second shaft segment 442, as shown in FIG. Figure 2 , Figure 4 and Figure 6 As shown, a fourth inflow channel section 2501 and a fourth outflow channel section 2502 are provided in the rotary joint 250 . The fourth inflow channel section 2501 is communicated with the second inflow channel section 4112 , and the fourth outflow channel section 2502 is communicated with the second outflow channel section 4212 .

[0089] like Figure 2As shown, the rotary joint 250 is also provided with a first inlet 2503 connected to the fourth inlet channel section 2501 and a first outlet 2504 connected to the fourth outflow channel section 2502. The first inlet 2503 is for the cooling medium to flow into the fourth inflow channel section 2501 and into the transmission channel 41, and the first outlet 2504 is for the cooling medium after cooling the polishing disk 2 to flow out of the outflow transmission channel 42 and the fourth outflow channel section 2502.

[0090] In this arrangement, since the first inlet 2503 and the first outlet 2504 can be used to connect to an external pipeline, the rotary joint 250 and the first inlet 2503 and the first outlet 2504 facilitate the connection of the inflow transmission channel 41 and the outflow transmission channel 42 to the external pipeline.

[0091] The fourth inflow channel section 2501, the above-mentioned polishing plate cooling channel section and the fourth outflow channel section 2502 are connected in series to form a total polishing plate cooling channel; the total polishing plate cooling channel and the second cooling channel 31 are connected in parallel, or the total polishing plate cooling channel and the second cooling channel 31 are connected in series and parallel.

[0092] As for the structure of the rotary joint 250 , since the rotary joint 250 is a prior art, the embodiment of the present application will not elaborate on it in detail.

[0093] Furthermore, if Figure 3 As shown, a second end seal 8 is provided between the rotary joint 250 and the second shaft segment 442 for sealingly connecting the two, and a fourth avoidance structure is provided on the second end seal 8, and the fourth avoidance structure is used to avoid the connection between the fourth inflow channel segment 2501 and the second inflow channel segment 4112, and the connection between the fourth outflow channel segment 2502 and the second outflow channel segment 4212.

[0094] Such arrangement can not only prevent the cooling medium from leaking from the connection position between the rotary joint 250 and the second shaft segment 442 through the second end seal 8, but also ensure the communication between the fourth inlet channel segment 2501 and the second inlet channel segment 4112, and the communication between the fourth outflow channel segment 2502 and the second outflow channel segment 4212 through the fourth avoidance structure on the second end seal 8.

[0095] In the embodiment of the present application, the first end seal 5, the first middle seal 6, the second middle seal 7 and the second end seal 8 can all be any one of a rubber seal, a polyurethane seal and a polytetrafluoroethylene seal, and the embodiment of the present application does not make any specific limitation on this.

[0096] In the embodiment of the present application, the first avoidance structure, the second avoidance structure, the third avoidance structure and the fourth avoidance structure can all be avoidance holes or mesh structures, and the embodiment of the present application does not make any specific limitation on this.

[0097] Embodiment 2

[0098] The present application also provides a polishing turntable cooling system, such as Figure 4 and Figure 5 As shown, the polishing turntable cooling system includes a cooling device 9 and a polishing turntable, wherein the cooling device 9 is used to cool the cooling medium, and the cooling device 9 has a total outlet (not shown in the figure) for the cooling medium to flow out of itself and a total inlet (not shown in the figure) for the cooling medium to flow into itself.

[0099] The polishing turntable has the same structure as any of the polishing turntables in the above embodiments, and can bring the same or similar beneficial effects. For details, please refer to the description in the above embodiments, which will not be repeated in this embodiment. The first cooling channel 21 and the second cooling channel 31 are connected in parallel between the above total outlet and the above total inlet, or the first cooling channel 21 and the second cooling channel 31 are connected in series and in parallel between the above total outlet and the above total inlet.

[0100] In the present application, the polishing disc 2 and the driving member 3 can be cooled respectively by connecting the first cooling channel 21 and the second cooling channel 31 in parallel or in series. On the one hand, this is conducive to reducing the influence of the heat generated by the polishing disc 2 and the driving member 3 on the chemical reaction of the polishing liquid, thereby helping to ensure the polishing quality; on the other hand, to a certain extent, the timely heat dissipation of the driving member 3 is conducive to avoiding damage to the driving member 3 and ensuring the driving stability of the driving member 3, thereby helping to ensure the stability of the polishing process and thus also helping to ensure the polishing quality; more importantly, by connecting the first cooling channel 21 and the second cooling channel 31 in parallel or in series, it is conducive to achieving a reasonable distribution of the cooling medium in the first cooling channel 21 and the second cooling channel 31, thereby helping to cool the polishing disc 2 and the driving member 3 more efficiently and reasonably.

[0101] In addition, by cooling the cooling medium through the cooling device 9, the cooling medium does not need to be replaced, and the cooling medium can be recycled, which is beneficial to reducing costs.

[0102] like Figure 4 and Figure 6 As shown, since the fourth inflow channel section 2501, the inflow transmission channel 41, the first cooling channel 21, the outflow transmission channel 42 and the fourth outflow channel section 2502 are connected in series to form a total polishing disk cooling channel, and since the total polishing disk cooling channel and the second cooling channel 31 are connected in parallel, or the total polishing disk cooling channel and the second cooling channel 31 are connected in series and in parallel. Therefore, the total polishing disk cooling channel and the second cooling channel 31 are connected in parallel between the above-mentioned total outlet and the above-mentioned total inlet, or the total polishing disk cooling channel and the second cooling channel 31 are connected in series and in parallel between the above-mentioned total outlet and the above-mentioned total inlet. In addition, Figure 5Only the first cooling channel 21 is shown, and the inflow transmission channel 41 and the outflow transmission channel 42 are not shown. Figure 5 The polishing turntable cooling system includes a polishing plate cooling channel and a second cooling channel 31. Figure 6 shown.

[0103] Regarding the connection mode between the first cooling channel 21 and the second cooling channel 31 between the above-mentioned total outlet and the above-mentioned total inlet, in one embodiment, as Figure 4 As shown, the first cooling channel 21 and the second cooling channel 31 are connected in parallel between the above-mentioned total outlet and the above-mentioned total inlet.

[0104] like Figure 4 As shown, the polishing turntable cooling system also includes a polishing disc temperature detection component 10 and a driving component temperature detection component 20 . The polishing disc temperature detection component 10 is used to detect the temperature of the polishing disc 2 , and the driving component temperature detection component 20 is used to detect the temperature of the driving component 3 .

[0105] like Figure 4 As shown, the polishing turntable cooling system also includes a first branch 30 and a second branch 40 connected in parallel between the above-mentioned total outlet and the above-mentioned total inlet, the first cooling channel 21 is connected in series to the first branch 30, and the second cooling channel 31 is connected in series to the second branch 40. The polishing turntable cooling system also includes a first flow regulating member 50 and a second flow regulating member 60, the first flow regulating member 50 is connected in series to the first branch 30, and the first flow regulating member 50 is used to regulate the flow of the cooling medium in the first cooling channel 21, and the second flow regulating member 60 is connected in series to the second branch 40, and the second flow regulating member 60 is used to regulate the flow of the cooling medium in the second cooling channel 31.

[0106] In this arrangement, according to the temperatures of the polishing disk 2 and the driving member 3 respectively detected by the polishing disk temperature detection member 10 and the driving member temperature detection member 20, the flow rate of the cooling medium in the first cooling channel 21 and the flow rate of the cooling medium in the second cooling channel 31 can be respectively adjusted by the first flow adjustment member 50 and the second flow adjustment member 60, and the cooling efficiency can be adjusted by adjusting the cooling medium flow rate, which is beneficial to avoid the temperature of the polishing disk 2 and the temperature of the driving member 3 being too high or too low, that is, it is beneficial to maintain the temperature of the polishing disk 2 and the temperature of the driving member 3 within an appropriate range.

[0107] More importantly, by respectively adjusting the flow rate of the cooling medium in the first cooling channel 21 and the flow rate of the cooling medium in the second cooling channel 31 through the first flow regulating member 50 and the second flow regulating member 60, the cooling of the polishing disk 2 and the driving member 3 can be independently controlled, thereby achieving more precise temperature control of the polishing disk 2 and the driving member 3.

[0108] Furthermore, if Figure 4As shown, the polishing turntable cooling system also includes a controller 70, which is electrically connected to the polishing disk temperature detection component 10 and the driving component temperature detection component 20, so that the controller 70 receives the polishing disk temperature information detected by the polishing disk temperature detection component 10 and the driving component temperature information detected by the driving component temperature detection component 20.

[0109] The controller 70 is also electrically connected to the first flow regulating component 50 and the second flow regulating component 60. The controller 70 is used to control the first flow regulating component 50 to adjust the flow of the cooling medium in the first cooling channel 21 according to the temperature information of the polishing plate. The controller 70 is also used to control the second flow regulating component 60 to adjust the flow of the cooling medium in the second cooling channel 31 according to the temperature information of the driving component.

[0110] Such a setting, compared with manually observing the temperature information and controlling the corresponding flow regulating components to adjust the flow of the cooling medium, controlling the corresponding flow regulating components to adjust the flow of the cooling medium according to the corresponding temperature information by the controller 70 is beneficial to improving the accuracy of flow regulation, and further helps to improve the accuracy of temperature control of the polishing disk 2 and the driving component 3.

[0111] Furthermore, if Figure 4 As shown, the polishing turntable cooling system also includes a first inlet temperature detection component 80 and a first outlet temperature detection component 90. The first inlet temperature detection component 80 is connected in series to the first branch 30 and is located between the first cooling channel 21 and the above-mentioned total outlet. The first inlet temperature detection component 80 is used to detect the temperature of the cooling medium flowing into the first cooling channel 21. The first outlet temperature detection component 90 is connected in series to the first branch 30 and is located between the first cooling channel 21 and the above-mentioned total inlet. The first outlet temperature detection component 90 is used to detect the temperature of the cooling medium flowing out of the first cooling channel 21. And / or, the polishing turntable cooling system also includes a second inlet temperature detection component 100 and a second outlet temperature detection component 110, the second inlet temperature detection component 100 is connected in series to the second branch 40 and is located between the second cooling channel 31 and the above-mentioned total outlet, the second inlet temperature detection component 100 is used to detect the temperature of the cooling medium flowing into the second cooling channel 31, the second outlet temperature detection component 110 is connected in series to the second branch 40 and is located between the second cooling channel 31 and the above-mentioned total inlet, and the second outlet temperature detection component 110 is used to detect the temperature of the cooling medium flowing out of the second cooling channel 31.

[0112] By detecting the temperature of the cooling medium flowing into the corresponding cooling channel and the temperature of the cooling medium flowing out of the corresponding cooling channel, the change in the temperature of the cooling medium before and after cooling can be timely understood, and then the cooling effect of the cooling medium on the polishing disk 2 and the driving member 3 can be timely understood, which is helpful to judge whether a certain flow rate of cooling medium can effectively reduce the temperature of the polishing disk 2 and the driving member 3.

[0113] Regarding the connection mode between the first cooling channel 21 and the second cooling channel 31 between the above-mentioned total outlet and the above-mentioned total inlet, in another embodiment, as Figure 5 As shown, the first cooling channel 21 and the second cooling channel 31 are connected in series and in parallel between the above-mentioned total outlet and the above-mentioned total inlet.

[0114] Specifically, one of the first cooling channel 21 and the second cooling channel 31 is the first one, and the other is the second one. Figure 5 As shown, a first connecting trunk 120 is connected in series between the first and the above-mentioned total outlet, a second connecting trunk 130 is connected in series between the second and the above-mentioned total inlet, and a first connecting branch 140 is connected in series between the first cooling channel 21 and the second cooling channel 31.

[0115] like Figure 5 As shown, the polishing turntable cooling system also includes a second connecting branch 150 and a third connecting branch 160. One end of the second connecting branch 150 is connected to the first connecting main channel 120, and the other end is connected to the second connecting main channel 130. One end of the third connecting branch 160 is connected to the first connecting branch 140, and the other end is connected to the second connecting main channel 130.

[0116] With such arrangement, through each connecting trunk and each connecting branch, the series-parallel circuit structure between the first cooling channel 21 and the second cooling channel 31 is relatively simple, which is conducive to facilitating the series-parallel connection of the first cooling channel 21 and the second cooling channel 31 between the above-mentioned total outlet and the above-mentioned total inlet.

[0117] For the first and the second, in a preferred embodiment, the first is the first cooling channel 21, and the second is the second cooling channel 31. With such an arrangement, when the first cooling channel 21 and the second cooling channel 31 are connected in series, the cooling effect of the polishing disc 2 can be ensured firstly through the first cooling channel 21, thereby ensuring the polishing quality.

[0118] In other embodiments, the first may also be the second cooling channel 31, and the second may also be the first cooling channel 21. With such an arrangement, when the first cooling channel 21 and the second cooling channel 31 are connected in series, the cooling effect of the driving member 3 can be ensured first through the second cooling channel 31, thereby ensuring the stable driving of the driving member 3 first.

[0119] Furthermore, if Figure 5 As shown, a first on-off valve 170 is connected in series to the second communication branch 150 , and a second on-off valve 180 is connected in series to the third communication branch 160 .

[0120] like Figure 5As shown, the third connecting branch 160 is connected to the first connecting branch 140 at the first connecting position, the third connecting branch 160 is connected to the second connecting trunk 130 at the second connecting position, the second connecting branch 150 is connected to the second connecting trunk 130 at the third connecting position, and the third connecting position is arranged on the side of the second connecting position close to the second one. The first connecting branch 140 is connected in series with a third on-off valve 190, and the third on-off valve 190 is located between the first connecting position and the second one, and the second connecting trunk 130 is connected in series with a fourth on-off valve 200, and the fourth on-off valve 200 is located between the second connecting position and the third connecting position.

[0121] In this way, three different cooling circuits can be formed through different on-off combinations of the first on-off valve 170, the second on-off valve 180, the third on-off valve 190 and the fourth on-off valve 200 to meet different polishing mode requirements. The three cooling circuits are as follows:

[0122] Parallel cooling circuit: Figure 5 As shown, the first on-off valve 170, the second on-off valve 180 and the third on-off valve 190 are all opened, and the fourth on-off valve 200 is closed. The cooling medium flows through the total outlet of the cooling device 9 to the first connecting trunk 120 and then is divided into two branches. One branch flows through the second connecting branch 150, the second cooling channel 31 and the first connecting branch 140 and then flows to the third connecting branch 160. The other branch flows through the first connecting trunk 120, the first cooling channel 21 and the first connecting branch 140 and then flows to the third connecting branch 160. That is, the two branches converge in the third connecting branch 160. After converging, they flow through the third connecting branch 160 and the second connecting trunk 130 and then flow back to the cooling device 9 through the total inlet of the cooling device 9. The cooling device 9 is used to cool the cooling medium after cooling the polishing disk 2 and the driving member 3.

[0123] The cooling circuit has a maximum total flow rate, so the cooling circuit is suitable for a polishing mode in which the polishing disk 2 has a large load and the driving member 3 uses a large power. At the same time, the cooling circuit cools the polishing disk 2 and the driving member 3 independently, thereby ensuring the cooling effect of the polishing disk 2 and the driving member 3 at the same time.

[0124] Separate cooling circuit: Figure 5 As shown, the first on-off valve 170, the third on-off valve 190 and the fourth on-off valve 200 are all closed, and the second on-off valve 180 is opened. After the cooling medium flows out through the total outlet of the cooling device 9, it flows through the first connecting main channel 120, the first cooling channel 21, the first connecting branch channel 140, the third connecting branch channel 160 and the second connecting main channel 130 in sequence, and then flows back to the cooling device 9 through the total inlet of the cooling device 9. The cooling device 9 is used to cool the cooling medium after cooling the polishing disk 2 and the driving member 3.

[0125] The cooling circuit has a minimum total flow rate and only cools the polishing disk 2. Therefore, the cooling circuit is suitable for a polishing mode in which the polishing disk 2 has a small load and the driving component 3 uses a small power. The driving component 3 can meet the requirements through air cooling, and when using the cooling circuit, the cooling device 9 has a small output power, thereby reducing the operating cost of the cooling circuit.

[0126] Series cooling circuit: Figure 5 As shown, the first on-off valve 170 and the second on-off valve 180 are closed, and the third on-off valve 190 and the fourth on-off valve 200 are opened. After the cooling medium flows out through the total outlet of the cooling device 9, it flows through the first connecting main path 120, the first cooling channel 21, the first connecting branch path 140, the second cooling channel 31 and the second connecting main path 130 in sequence, and then flows back to the cooling device 9 through the total inlet of the cooling device 9. The cooling device 9 is used to cool the cooling medium after cooling the polishing disk 2 and the driving member 3.

[0127] Compared with the above two cooling circuits, this cooling circuit has a centralized total flow rate, so the cooling effect is centralized, and this cooling circuit is suitable for the polishing mode in which the load of the polishing disk 2 is centralized and the power of the driving member 3 is centralized. At the same time, since the first cooling channel 21 and the second cooling channel 31 share the same cooling circuit, the cost is relatively low.

[0128] Furthermore, if Figure 5 As shown, the polishing turntable cooling system also includes a polishing plate temperature detection component 10 and a drive component temperature detection component 20 ( Figure 5 and Figure 6 (not shown), the polishing plate temperature detection member 10 is used to detect the temperature of the polishing plate 2, and the driving member temperature detection member 20 is used to detect the temperature of the driving member 3.

[0129] The second connecting branch 150 is connected to the first connecting main channel 120 at a fourth connecting position. The polishing turntable cooling system also includes a total flow regulating component 210, which is connected in series to the first connecting main channel 120 and is located between the above-mentioned total outlet and the fourth connecting position. The total flow regulating component 210 is used to adjust the flow of the cooling medium in the first connecting main channel 120.

[0130] With such an arrangement, when using the above-mentioned parallel cooling circuit and series cooling circuit, according to the temperatures respectively detected by the polishing disk temperature detection component 10 and the driving component temperature detection component 20, the total flow rate of the cooling medium in the first connecting trunk 120 can be adjusted by the total flow rate adjustment component 210 to adjust the total flow rate of the cooling medium flowing to the first cooling channel 21 and the second cooling channel 31, and the cooling efficiency of the polishing disk 2 and the driving component 3 can be adjusted by adjusting the total flow rate of the cooling medium, which is beneficial to avoid the temperature of the polishing disk 2 and the temperature of the driving component 3 being too high or too low, that is, it is beneficial to maintain the temperature of the polishing disk 2 and the temperature of the driving component 3 within an appropriate range.

[0131] When using the above-mentioned separate cooling circuit, according to the temperature detected by the polishing disk temperature detection component 10, the flow rate of the cooling medium in the first connecting trunk 120 can be adjusted by the total flow adjustment component 210 to adjust the flow rate of the cooling medium flowing to the first cooling channel 21. In this case, since the cooling medium only flows through the first cooling channel 21, the cooling efficiency of the polishing disk 2 can be accurately adjusted by adjusting the cooling medium flow rate, which is more conducive to maintaining the temperature of the polishing disk 2 within an appropriate range.

[0132] Furthermore, if Figure 5 As shown, the polishing turntable cooling system also includes a controller 70, which is electrically connected to the polishing plate temperature detection component 10 and the driving component temperature detection component 20, so that the controller 70 receives temperature information detected by the polishing plate temperature detection component 10 and the driving component temperature detection component 20.

[0133] The controller 70 is electrically connected to the total flow regulator 210 , and is used to control the total flow regulator 210 to regulate the flow of the cooling medium in the first connecting trunk 120 according to the temperature information detected by the polishing plate temperature detector 10 and the driving element temperature detector 20 .

[0134] Such a setting, compared with manually observing the temperature information and controlling the total flow regulating component 210 to adjust the flow of the cooling medium, controlling the total flow regulating component 210 to adjust the flow of the cooling medium according to the corresponding temperature information by the controller 70 is beneficial to improving the accuracy of the flow regulation, and further helps to improve the accuracy of the temperature control of the polishing disk 2 and the driving component 3.

[0135] like Figure 5As shown, the first connecting trunk 120 is connected in series with a first temperature detecting component 220 located between the above-mentioned total outlet and the above-mentioned fourth connection position, the first connecting branch 140 is connected in series with a second temperature detecting component 230 located between the above-mentioned first connection position and the above-mentioned first one, and the second connecting trunk 130 is connected in series with a third temperature detecting component 240 located between the above-mentioned second connection position and the above-mentioned total inlet. The first temperature detecting component 220, the second temperature detecting component 230 and the third temperature detecting component 240 are all used to detect the temperature of the cooling medium.

[0136] With such arrangement, when the above-mentioned series cooling circuit is used, the first temperature detection member 220 can detect the temperature of the cooling medium before flowing into the first cooling channel 21, the second temperature detection member 230 can detect the temperature of the cooling medium after flowing out of the first cooling channel 21 and the temperature of the cooling medium before flowing into the second cooling channel 31, and the third temperature detection member 240 can detect the temperature of the cooling medium after flowing out of the second cooling channel 31. When the above-mentioned parallel cooling circuit is used, the first temperature detection member 220 can detect the temperature of the cooling medium before flowing into the first cooling channel 21 and the second cooling channel 31, the second temperature detection member 230 and the third temperature detection member 240 can detect the temperature of the cooling medium after flowing out of the first cooling channel 21, and the third temperature detection member 240 can also detect the temperature of the cooling medium after flowing out of the second cooling channel 31. When the above-mentioned single cooling circuit is used, the first temperature detection member 220 can detect the temperature of the cooling medium before flowing into the first cooling channel 21, and the second temperature detection member 230 and the third temperature detection member 240 can detect the temperature of the cooling medium after flowing out of the first cooling channel 21.

[0137] According to the above, by detecting the temperature of the cooling medium flowing into the corresponding cooling channel and the temperature of the cooling medium flowing out of the corresponding cooling channel, the change in the temperature of the cooling medium before and after cooling can be timely understood, and then the cooling effect of the cooling medium on the polishing disk 2 and the driving member 3 can be timely understood, which is helpful to judge whether a certain flow rate of cooling medium can effectively reduce the temperature of the polishing disk 2 and the driving member 3.

[0138] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit it. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A polishing turntable, characterized in that: include: A polishing disc, wherein a first cooling channel is provided on the polishing disc, and a cooling medium flows through the first cooling channel so that the cooling medium cools the polishing disc; A driving member, the driving member is used to drive the polishing disc to rotate, the driving member is provided with a second cooling channel, the second cooling channel is for the cooling medium to flow through, so that the cooling medium cools the driving member; The first cooling channel and the second cooling channel are connected in parallel, or the first cooling channel and the second cooling channel are connected in series and in parallel.

2. A polishing turntable cooling system, characterized in that: include: A cooling device, the cooling device is used to cool a cooling medium, the cooling device having a total outlet for the cooling medium to flow out of the cooling device and a total inlet for the cooling medium to flow into the cooling device; In the polishing turntable described in claim 1, the first cooling channel and the second cooling channel are connected in parallel between the total outlet and the total inlet, or the first cooling channel and the second cooling channel are connected in series and in parallel between the total outlet and the total inlet.

3. The polishing turntable cooling system according to claim 2, characterized in that: The first cooling channel and the second cooling channel are connected in parallel between the main outlet and the main inlet; The polishing turntable cooling system further comprises a polishing disc temperature detection member and a driving member temperature detection member, wherein the polishing disc temperature detection member is used to detect the temperature of the polishing disc, and the driving member temperature detection member is used to detect the temperature of the driving member; The polishing turntable cooling system also includes a first branch and a second branch connected in parallel between the main outlet and the main inlet, the first cooling channel is connected in series to the first branch, and the second cooling channel is connected in series to the second branch; the polishing turntable cooling system also includes a first flow regulating component and a second flow regulating component, the first flow regulating component is connected in series to the first branch, the first flow regulating component is used to regulate the flow of the cooling medium in the first cooling channel, the second flow regulating component is connected in series to the second branch, and the second flow regulating component is used to regulate the flow of the cooling medium in the second cooling channel.

4. The polishing turntable cooling system according to claim 3, characterized in that: The polishing turntable cooling system further includes a controller, which is electrically connected to the polishing disc temperature detection element and the driving element temperature detection element, so that the controller receives polishing disc temperature information detected by the polishing disc temperature detection element and driving element temperature information detected by the driving element temperature detection element; The controller is also electrically connected to the first flow regulating component and the second flow regulating component. The controller is used to control the first flow regulating component to regulate the flow of the cooling medium in the first cooling channel according to the polishing plate temperature information. The controller is also used to control the second flow regulating component to regulate the flow of the cooling medium in the second cooling channel according to the driving component temperature information.

5. The polishing turntable cooling system according to claim 3 or 4, characterized in that: The polishing turntable cooling system also includes a first inlet temperature detection component and a first outlet temperature detection component, the first inlet temperature detection component is connected in series to the first branch and is located between the first cooling channel and the main outlet, the first inlet temperature detection component is used to detect the temperature of the cooling medium flowing into the first cooling channel, the first outlet temperature detection component is connected in series to the first branch and is located between the first cooling channel and the main inlet, the first outlet temperature detection component is used to detect the temperature of the cooling medium flowing out of the first cooling channel; and / or, The polishing turntable cooling system also includes a second inlet temperature detection component and a second outlet temperature detection component. The second inlet temperature detection component is connected in series to the second branch and is located between the second cooling channel and the main outlet. The second inlet temperature detection component is used to detect the temperature of the cooling medium flowing into the second cooling channel. The second outlet temperature detection component is connected in series to the second branch and is located between the second cooling channel and the main inlet. The second outlet temperature detection component is used to detect the temperature of the cooling medium flowing out of the second cooling channel.

6. The polishing turntable cooling system according to claim 2, characterized in that: The first cooling channel and the second cooling channel are connected in series and in parallel between the main outlet and the main inlet; One of the first cooling channel and the second cooling channel is the first one, and the other is the second one, a first connecting trunk is connected in series between the first one and the main outlet, a second connecting trunk is connected in series between the second one and the main inlet, and a first connecting branch is connected in series between the first cooling channel and the second cooling channel; The polishing turntable cooling system also includes a second connecting branch and a third connecting branch, wherein one end of the second connecting branch is connected to the first connecting trunk and the other end is connected to the second connecting trunk, and one end of the third connecting branch is connected to the first connecting branch and the other end is connected to the second connecting trunk.

7. The polishing turntable cooling system according to claim 6, characterized in that: The second connecting branch is connected in series with a first on-off valve, and the third connecting branch is connected in series with a second on-off valve; The third connecting branch is connected to the first connecting branch at the first connecting position, the third connecting branch is connected to the second connecting main road at the second connecting position, the second connecting branch is connected to the second connecting main road at the third connecting position, and the third connecting position is arranged on the side of the second connecting position close to the second one; a third on-off valve is connected in series on the first connecting branch, and the third on-off valve is located between the first connecting position and the second one, and a fourth on-off valve is connected in series on the second connecting main road, and the fourth on-off valve is located between the second connecting position and the third connecting position.

8. The polishing turntable cooling system according to claim 7, characterized in that: The polishing turntable cooling system further comprises a polishing disc temperature detection member and a driving member temperature detection member, wherein the polishing disc temperature detection member is used to detect the temperature of the polishing disc, and the driving member temperature detection member is used to detect the temperature of the driving member; The second connecting branch is connected to the first connecting main line at a fourth connecting position. The polishing turntable cooling system also includes a total flow regulating component, which is connected in series to the first connecting main line and is located between the total outlet and the fourth connecting position. The total flow regulating component is used to adjust the flow of the cooling medium in the first connecting main line.

9. The polishing turntable cooling system according to claim 8, characterized in that: The polishing turntable cooling system further includes a controller, which is electrically connected to the polishing disc temperature detection component and the driving component temperature detection component, so that the controller receives temperature information detected by the polishing disc temperature detection component and the driving component temperature detection component; The controller is electrically connected to the total flow regulating component, and is used to control the total flow regulating component to regulate the flow of the cooling medium in the first connecting trunk according to the temperature information detected by the polishing plate temperature detecting component and the driving component temperature detecting component.

10. The polishing turntable cooling system according to claim 8 or 9, characterized in that: A first temperature detecting member located between the main outlet and the fourth connection position is connected in series on the first connecting main line, a second temperature detecting member located between the first connection position and the first is connected in series on the first connecting branch line, and a third temperature detecting member located between the second connection position and the main inlet is connected in series on the second connecting main line. The first temperature detecting member, the second temperature detecting member and the third temperature detecting member are all used to detect the temperature of the cooling medium.

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