A structure for keeping an intake pipe in a vertical state

Abstract

The utility model provides a structure for maintaining an air intake pipe in a vertical state, including multiple air intake pipe bases and multiple supporting devices, wherein the multiple supporting devices are arranged on at least part of the air intake pipe bases, the supporting devices are arranged along a first direction, and the first direction is arranged to intersect with the axis of the air intake pipe base, and the supporting devices are in contact with adjacent air intake pipe bases, so that any air intake pipe base is supported by the supporting devices in the first direction. The beneficial effect of the utility model is that the supporting device provides a supporting force to the air intake pipe base in a direction intersecting with the axis of the air intake pipe base, supports the air intake pipe base, avoids the air intake pipes from tipping over or leaning against each other when vibration is generated during the use of the equipment, and avoids the air intake pipes from breaking due to the force generated by tipping over or leaning against each other.

Description

Technical Field

[0001] The utility model belongs to the technical field of silicon wafer production, in particular to a structure for keeping an air intake pipe in a vertical state. Background Art

[0002] The quartz air inlet pipe of Hitachi furnace needs to be kept vertical during use without interfering with each other. Currently, it is only fixed upward by the top screw at the bottom, and there is no fixed support on the left and right sides. As a result, the quartz air inlet pipe will tilt and lean against each other during use. At this time, mutual force will occur, causing the quartz air inlet pipe to break. After the breakage, the product will be abnormal and the equipment needs to be cooled down for maintenance, which is time-consuming. Summary of the invention

[0003] In view of the above problems, the utility model provides a structure for maintaining the vertical state of the air intake pipe to solve the above or other former problems existing in the prior art.

[0004] In order to solve the above technical problems, the technical solution adopted by the utility model is: a structure for maintaining the vertical state of the intake pipe, including multiple intake pipe bases and multiple supporting devices, multiple supporting devices are arranged on at least part of the intake pipe bases, the supporting devices are arranged along a first direction, and the first direction is arranged to intersect with the axis of the intake pipe base, the supporting devices are in contact with adjacent intake pipe bases, so that any intake pipe base is supported by the supporting device in the first direction.

[0005] Furthermore, the number of the supporting device on the air intake pipe base provided with the supporting device is at least one.

[0006] Furthermore, the air intake pipe bases provided with the supporting device and the air intake pipe bases not provided with the supporting device are alternately arranged in sequence.

[0007] Furthermore, when any air intake pipe base is provided with a supporting device, along the arrangement direction of the plurality of air intake pipe bases, the supporting devices on the respective air intake pipe bases are located on the same side of the respective air intake pipe bases.

[0008] Furthermore, the supporting device is arranged perpendicularly to the axis of the air intake pipe on the air intake pipe base.

[0009] Furthermore, the supporting device includes a connecting member and a supporting member arranged at one end of the connecting member, and the other end of the connecting member is connected to the air inlet pipe base.

[0010] Furthermore, the connecting piece is threadedly connected to the air intake pipe base.

[0011] Furthermore, a mounting hole is provided on the side wall of the air intake pipe base, the connecting piece is connected to the mounting hole, and the depth of the mounting hole is less than the thickness of the side wall of the air intake pipe base.

[0012] Furthermore, the depth of the mounting hole is 1 / 2-3 / 4 of the thickness of the side wall of the air intake pipe base.

[0013] Furthermore, the material of the supporting device is the same as the material of the air intake pipe base.

[0014] Due to the adoption of the above-mentioned technical scheme, the structure for maintaining the vertical state of the air intake pipe has a supporting device, which is arranged on the outer side wall of the air intake pipe base, and the supporting device is arranged to intersect with the axis of the air intake pipe base, and the supporting device contacts the side wall of the air intake pipe base, and the supporting device provides supporting force to the air intake pipe base in the direction intersecting with the axis of the air intake pipe base, so as to support the air intake pipe base to avoid the air intake pipes from tipping over and leaning against each other when vibration occurs during the use of the equipment, and to avoid the air intake pipes from breaking due to the force generated by tipping over and leaning against each other; the material of the supporting device is the same as that of the air intake pipe base, and no new material will be introduced, and the quality of products such as silicon wafers will not be affected; the material of the supporting device is high-temperature resistant material, which can adapt to the high temperature in the equipment furnace and will not be deformed; the supporting device is connected to the air intake pipe base by threads, and the connection is firm to avoid accidents caused by falling off and no other operation is required during use, the structure is simple, and it is easy to manufacture and install. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is a schematic diagram of a structure for maintaining the vertical state of the air intake pipe according to an embodiment of the utility model;

[0016] Figure 2 yes Figure 1 A magnified view of part A;

[0017] Figure 3 This is another structural schematic diagram of a structure for maintaining an intake pipe in a vertical state according to an embodiment of the utility model.

[0018] In the figure:

[0019] 1. Intake pipe base 2. Support device 3. Intake pipe

[0020] 20. Connecting piece 21. Supporting piece DETAILED DESCRIPTION

[0021] The utility model is further described below in conjunction with the accompanying drawings and specific embodiments.

[0022] Figure 1A structural schematic diagram of an embodiment of the utility model is shown. This embodiment relates to a structure for maintaining an air intake pipe in a vertical state, which is applied to a Hitachi furnace and is installed on an air intake pipe base. A force perpendicular to the axis of the air intake pipe is applied to the adjacent air intake pipe bases, and the air intake pipe bases are supported in this direction to prevent the air intake pipe bases from tilting when the equipment vibrates slightly during use, thereby causing adjacent air intake pipes to lean against each other, thereby preventing the air intake pipes from breaking due to the force, avoiding product abnormalities, and avoiding equipment failures.

[0023] A structure to keep the intake pipe in a vertical state, such as Figure 1-3 As shown, it includes multiple air inlet pipe bases 1 and multiple supporting devices 2. The setting of the air inlet pipe base 1 facilitates the installation of the air inlet pipe 3. An air inlet pipe 3 is installed on each air inlet pipe base 1, and the air inlet pipe 3 is in a vertical state after installation. The gas enters the air inlet pipe 3 through the air inlet pipe base 1 to transport the gas; multiple supporting devices 2 are arranged on at least part of the air inlet pipe base 1, and the supporting devices 2 are arranged along a first direction, and the first direction is arranged to intersect with the axis arranged on the air inlet pipe base 1. The supporting devices 2 are in contact with the adjacent air inlet pipe base 1 so that any air inlet pipe base 1 is supported by the supporting device 2 in the first direction. The setting of the supporting device 2 is used to support the air inlet pipe base 1 in contact with the supporting device 2 or the air inlet pipe base 1 itself installed with the supporting device 2, so as to avoid the air inlet pipe base 1 from tilting when the equipment vibrates during use, causing the air inlet pipes 3 to rely on each other and be damaged.

[0024] There are multiple intake pipe bases 1, and all of them are connected and communicated with the intake manifold to realize gas transportation. Multiple intake pipe bases 1 can be arranged in sequence in a straight line, or in a curve, or multiple intake pipe bases 1 are arranged in sequence in a circle, or multiple intake pipe bases 1 are arranged in sequence in a polygon, or in other settings, which can be selected according to actual needs, and no specific requirements are made here. When multiple intake pipe bases 1 are arranged, there is a certain gap between adjacent intake pipe bases 1, and the support device 2 installed on the intake pipe base 1 is located in the gap, and the support device 2 contacts the outer side wall of the adjacent intake pipe base 1, providing support force in the first direction to the intake pipe base 1 installed with the support device 2 and the intake pipe base 1 in contact with the support device 2, so as to support them.

[0025] Multiple supporting devices 2 are arranged on at least part of the air intake pipe base 1, that is, on the multiple air intake pipe bases 1, each air intake pipe base 1 may be provided with a supporting device 2, or, a part of the air intake pipe bases 1 may be provided with a supporting device 2, and a part of the air intake pipe bases 1 may not be provided with a supporting device 2. The arrangement method of the multiple supporting devices 2 is selected according to the number of supporting devices 2 arranged on the air intake pipe base 1, and no specific requirements are made here.

[0026] When a supporting device 2 is provided on the air intake pipe base 1, the number of supporting devices 2 on the air intake pipe base 1 provided with the supporting device 2 is at least one. One supporting device 2 can be provided on the air intake pipe base 1, or two supporting devices 2 can be provided on the air intake pipe base 1, or multiple supporting devices 2 can be provided on the air intake pipe base 1. The selection is made based on the actual arrangement and setting method of the multiple air intake pipe bases 1, and no specific requirements are made here.

[0027] Specifically, the arrangement of the multiple air intake pipe bases 1 and the multiple supporting devices 2 may be:

[0028] When a support device 2 is provided on each air intake pipe base 1, in this case, a support device 2 is provided on each air intake pipe base 1. When any air intake pipe base 1 is provided with a support device 2, along the setting direction of the plurality of air intake pipe bases 1, the support devices 2 on each air intake pipe base 1 are located on the same side of each air intake pipe base 1, that is, a support device 2 is installed on the same side of each air intake pipe base 1, and the other side of any air intake pipe base 1 opposite to the side provided with the support device 2 contacts the support device 2 on the adjacent air intake pipe base 1, and the support device 2 supports the air intake pipe base 1 in contact therewith. At the same time, in this case, the plurality of air intake pipe bases 1 are arranged in a circular or polygonal shape, and the first and last air intake pipe bases 1 are adjacent, so that each air intake pipe base 1 contacts the support device 2 on the adjacent air intake pipe base 1 and is supported by the support device 2 on the adjacent air intake pipe base 1.

[0029] Alternatively, when the supporting device 2 is provided on some of the air intake pipe bases 1, the number of supporting devices 2 provided on each air intake pipe base 1 and the arrangement method when the number of supporting devices 2 is multiple are selected according to the arrangement method of the multiple air intake pipe bases 1. Specifically, when the multiple air intake pipe bases 1 are arranged in a circular or polygonal shape, the first and last two air intake pipe bases 1 are adjacent, and the number of supporting devices 2 on the air intake pipe base 1 provided with the supporting device 2 is two, and when the two supporting devices 2 are arranged, they are located on opposite sides of the air intake pipe base 1, and contact the adjacent air intake pipe bases 1 on both sides of the air intake pipe base 1 to provide support. When multiple air intake pipe bases 1 are set, the air intake pipe bases 1 provided with the supporting device 2 and the air intake pipe bases 1 not provided with the supporting device 2 are alternately set in sequence, that is, an air intake pipe base 1 provided with the supporting device 2, an air intake pipe base 1 provided with the supporting device 2, an air intake pipe base 1 provided with the supporting device 2, an air intake pipe base 1 provided with the supporting device 2, and an air intake pipe base 1 provided with the supporting device 2, and ..., each air intake pipe base 1 not provided with the supporting device 2 is respectively in contact with the supporting devices 2 on the adjacent air intake pipe bases 1 on both sides for support.

[0030] When a plurality of air intake pipe bases 1 are arranged in a straight line or a curve and a supporting device 2 is arranged on each air intake pipe base 1, in this case, Figure 3 As shown, one of the air intake pipe bases 1 at one end is not provided with a supporting device 2, and the other air intake pipe bases 1 are all provided with a supporting device 2, and the supporting devices 2 on the multiple air intake pipe bases 1 provided with supporting devices 2 are all located on the same side, facing the side of the air intake pipe base 1 not provided with supporting devices 2, and each supporting device 2 is in contact with the adjacent air intake pipe base 1 for support. Or, as Figure 1As shown, the two air intake pipe bases 1 at both ends are each provided with a supporting device 2, and the supporting device 2 is arranged on a side of the air intake pipe base 1 facing the adjacent air intake pipe base 1, so that the supporting device 2 can contact the adjacent air intake pipe base 1 for support. Among the multiple intake pipe bases 1 in the middle part, a part of the intake pipe bases 1 is provided with two supporting devices 2, and the two supporting devices 2 are arranged on two oppositely arranged side surfaces of the intake pipe base 1, and respectively contact with the adjacent intake pipe bases 1 on both sides of the intake pipe base 1 for support, and the other part of the intake pipe bases 1 are not provided with supporting devices 2, and the intake pipe bases 1 provided with supporting devices 2 and the intake pipe bases 1 not provided with supporting devices 2 are alternately arranged in sequence, and an intake pipe base 1 without supporting devices 2 is arranged between two adjacent intake pipe bases 1 provided with two supporting devices 2, and an intake pipe base 1 without supporting devices 2 is arranged between an intake pipe base 1 provided with two supporting devices 2 and an intake pipe base 1 provided with one supporting device 2, and the opposite sides of the intake pipe base 1 without supporting devices 2 are respectively in contact with a supporting device 2, and the supporting devices 2 support the intake pipe base 1.

[0031] In some feasible embodiments, preferably, when the number of supporting devices 2 on an intake pipe base 1 is two or more, the multiple supporting devices 2 are arranged opposite to each other in pairs, so that the supporting devices 2 can support multiple intake pipe bases 1 adjacent to the intake pipe base 1, so that the intake pipe base 1 is subjected to uniform and symmetrical force, thereby avoiding the intake pipe 3 from tilting due to uneven force when it is vibrated.

[0032] The above-mentioned supporting device 2 is arranged along a first direction, which is intersecting with the axis of the air intake pipe base 1, and the supporting device 2 is in contact with the adjacent air intake pipe base 1 to support the adjacent air intake pipe base 1, that is, the supporting device 2 provides the air intake pipe base 1 with a supporting force or a component of the supporting force along a direction intersecting with the axial direction of the air intake pipe base 1, so that the relatively arranged surfaces of the two adjacent air intake pipe bases 1 are provided with supporting devices 2 or in contact with the supporting devices 2, and a force is applied to the air intake pipe from both sides of the air intake pipe base 1 to support the air intake pipe base 1, thereby preventing the air intake pipe base 1 from tilting when slight vibration occurs during the operation of the equipment, thereby preventing the air intake pipe 3 from tilting and leaning against each other, causing the air intake pipe to be stressed and broken.

[0033] In some feasible embodiments, preferably, the supporting device 2 is arranged perpendicular to the axis of the air intake pipe base 1. When the air intake pipe 3 is in a vertical state, the supporting device 2 applies a force to the air intake pipe base 1 in the horizontal direction to support the air intake pipe base 1 in the horizontal direction to avoid the air intake pipe base 1 from tilting when vibration occurs during the use of the equipment, causing the air intake pipes 3 to rely on each other.

[0034] On each air intake pipe base 1, along the axial direction, on the same side, one supporting device 2 may be provided, or multiple supporting devices 2 may be provided. The multiple supporting devices 2 are provided in sequence along the axial direction and are selected according to actual needs.

[0035] like Figure 2 As shown, the supporting device 2 comprises a connecting member 20 and a supporting member 21 provided at one end of the connecting member 20, the other end of the connecting member 20 is connected to the air intake pipe base 1, the connecting member 20 is provided so that the supporting device 2 is installed on the outer wall of the air intake pipe base 1, and the supporting member 21 is provided to contact the side of the air intake pipe base 1 to support the air intake pipe base 1 in contact therewith. The connecting member 20 is a columnar structure with a certain length, and the length is selected and set according to actual needs.

[0036] The connector 20 is fixedly connected to the air intake pipe base 1. The fixed connection method can be threaded connection, plug-in connection, riveting, or other fixed connection methods. It is selected according to actual needs and no specific requirements are made here. In some feasible embodiments, preferably, the connector 20 is threadedly connected to the air intake pipe base 1, a hole is punched at a corresponding position on the air intake pipe base 1, and a tap is used to make a threaded hole. The connector 20 can be a stud, or one end of the connector 20 connected to the air intake pipe base 1 is provided with a thread to achieve a threaded connection between the connector 20 and the air intake pipe base 1.

[0037] The support member 21 is a block or plate structure, and has a certain area, so that the support member 21 is in surface contact with the intake pipe base 1, avoiding damage to the side wall of the intake pipe base 1. The support member 21 has a certain thickness, which is selected according to actual needs.

[0038] In view of the distance between adjacent intake pipe bases 1, the length of the connector 20 and the thickness of the support member 21 need to be selected according to the wall thickness of the intake pipe base 1 and the distance between adjacent intake pipe bases 1, so as to avoid damage to the intake pipe base 1 due to the sum of the length of the connector 20 and the thickness of the support member 21 being too large. The sum of the length of the connector 20 and the thickness of the support member 21 is greater than the distance between two adjacent intake pipe bases 1, and the sum of the length of the connector 20 and the thickness of the support member 21 is less than the distance between two adjacent intake pipe bases 1 and the sum of the wall thickness of the intake pipe base 1, so that the connector 20 can be installed on the intake pipe base 1, and the support member 21 is in contact with the adjacent intake pipe base 1. At the same time, the connector 20 will not penetrate the wall thickness of the intake pipe base 1 and will not interfere with the installation of the intake pipe.

[0039] Since the air inlet pipe is installed in the equipment, in order to avoid the introduction of new impurities during the use of silicon wafers and other products and affecting their quality, the material of the support device 2 is the same as that of the air inlet pipe base 1. At the same time, since the air inlet pipe base 1 and the air inlet pipe are installed in the furnace body of the equipment, the temperature in the furnace body is high temperature, which is 650°C. Therefore, the material of the support device 2 is high temperature resistant material to avoid deformation and have a long service life.

[0040] The side wall of the air intake pipe base 1 is provided with a mounting hole, and the connector 20 is connected to the mounting hole. When the connector 20 is installed on the air intake pipe base 1, a hole needs to be punched on the air intake pipe base 1 to form a mounting hole. The connector 20 is connected to the air intake pipe base 1 through the mounting hole. The mounting hole is a threaded hole. In order to avoid interference between the connector 20 and the air intake pipe installed on the air intake pipe base 1 when the connector 20 is installed on the air intake pipe base 1, the depth of the mounting hole is limited. The depth of the mounting hole is less than the thickness of the side wall of the air intake pipe base 1, that is, the mounting hole does not penetrate the side wall of the air intake pipe base 1, so that the connector 20 will not contact the air intake pipe 3 installed on the air intake pipe base 1. In some feasible embodiments, the depth of the mounting hole is 1 / 2-3 / 4 of the thickness of the side wall of the air intake pipe base 1. Preferably, the depth of the mounting hole is 2 / 3 of the thickness of the side wall of the air intake pipe base 1.

[0041] The inner wall of the mounting hole is not fully covered with internal threads. Along the axial direction of the mounting hole, the internal threads cover 2 / 3 of the depth of the mounting hole. When the connecting piece 20 is installed in the mounting hole, the connecting piece 20 is screwed in through the thread, and the remaining part is screwed in forcefully using the connecting piece 20 to fasten the support device 2 to the side wall of the intake pipe base 1 without loosening.

[0042] In some feasible embodiments, preferably, the supporting device 2 is a top screw.

[0043] When the structure for maintaining the air inlet pipe in a vertical state is in use, holes are punched and threads are threaded on the side walls of the air inlet pipe base 1 according to the number of air inlet pipe bases 1 in the furnace body of the equipment and the distance between adjacent air inlet pipe bases 1, and according to the length dimension of the connecting piece 20 of the supporting device 2 and the thickness dimension of the supporting piece 21, to prepare a mounting hole with a thread, and the depth of the mounting hole is controlled so that the length of the supporting device 2 installed on the mounting hole exposed on the outer side wall of the air inlet pipe base 1 is adapted to the distance between two adjacent air inlet pipe bases 1, so that the supporting piece 21 is in contact with the outer side walls of adjacent air inlet pipe bases 1 to support the air inlet pipe base 1.

[0044] Due to the adoption of the above-mentioned technical scheme, the structure for maintaining the vertical state of the air intake pipe has a supporting device, which is arranged on the outer side wall of the air intake pipe base, and the supporting device is arranged to intersect with the axis of the air intake pipe base, and the supporting device contacts the side wall of the air intake pipe base, and the supporting device provides supporting force to the air intake pipe base in the direction intersecting with the axis of the air intake pipe base, so as to support the air intake pipe base to avoid the air intake pipes from tipping over and leaning against each other when vibration occurs during the use of the equipment, and to avoid the air intake pipes from breaking due to the force generated by tipping over and leaning against each other; the material of the supporting device is the same as that of the air intake pipe base, and no new material will be introduced, and the quality of products such as silicon wafers will not be affected; the material of the supporting device is high-temperature resistant material, which can adapt to the high temperature in the equipment furnace and will not be deformed; the supporting device is connected to the air intake pipe base by threads, and the connection is firm to avoid accidents caused by falling off and no other operation is required during use, the structure is simple, and it is easy to manufacture and install.

[0045] The above is a detailed description of the embodiments of the utility model, but the contents are only preferred embodiments of the utility model and cannot be considered to limit the scope of implementation of the utility model. All equivalent changes and improvements made within the scope of application of the utility model should still fall within the scope of the patent coverage of the utility model.

Claims

1. A structure for keeping an air intake pipe in a vertical state, characterized in that: It includes multiple air intake pipe bases and multiple supporting devices, wherein the multiple supporting devices are arranged on at least part of the air intake pipe bases, the supporting devices are arranged along a first direction, and the first direction is arranged to intersect with the axis of the air intake pipe base, and the supporting devices are in contact with adjacent air intake pipe bases so that any air intake pipe base is supported by the supporting device in the first direction.

2. The structure for maintaining the vertical state of the air intake pipe according to claim 1, characterized in that: The number of the supporting device on the air intake pipe base provided with the supporting device is at least one.

3. The structure for maintaining the vertical state of the air intake pipe according to claim 2, characterized in that: The air intake pipe base provided with the supporting device and the air intake pipe base not provided with the supporting device are arranged alternately in sequence.

4. The structure for maintaining the vertical state of the air intake pipe according to claim 1, characterized in that: When any of the air intake pipe bases is provided with the supporting device, along the arrangement direction of the plurality of air intake pipe bases, the supporting devices on the respective air intake pipe bases are located on the same side of the respective air intake pipe bases.

5. The structure for maintaining the vertical state of the air intake pipe according to any one of claims 1 to 4, characterized in that: The supporting device is arranged perpendicularly to the axis of the air intake pipe on the air intake pipe base.

6. The structure for maintaining the air intake pipe in a vertical state according to claim 5, characterized in that: The supporting device comprises a connecting member and a supporting member arranged at one end of the connecting member, and the other end of the connecting member is connected to the air inlet pipe base.

7. The structure for maintaining the vertical state of the air intake pipe according to claim 6, characterized in that: The connecting piece is threadedly connected to the air intake pipe base.

8. The structure for maintaining the air intake pipe in a vertical state according to claim 6 or 7, characterized in that: A mounting hole is provided on the side wall of the air intake pipe base, the connecting piece is connected to the mounting hole, and the depth of the mounting hole is less than the thickness of the side wall of the air intake pipe base.

9. The structure for maintaining the air intake pipe in a vertical state according to claim 8, characterized in that: The depth of the mounting hole is 1 / 2-3 / 4 of the thickness of the side wall of the air intake pipe base.

10. The structure for maintaining the air intake pipe in a vertical state according to any one of claims 1-3 and 5-6, characterized in that: The material of the supporting device is the same as that of the air intake pipe base.

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