Developer material table capable of automatically positioning and discharging

Abstract

The utility model discloses a developer material table capable of automatically positioning and discharging, which relates to the technical field of semiconductor processing equipment and comprises a fixed cover, a fixed seat is fixedly arranged at the bottom end in the fixed cover and is of a conical structure, and a discharging seat is fixedly arranged at the top end of the fixed seat and is of a conical structure. Four positioning columns are fixedly arranged on the upper surface of the discharging base, and two guide blocks are fixedly arranged between every two adjacent positioning columns. According to the utility model, the fixed cover is arranged, the fixed seat is arranged in the fixed cover, the material placing seat is arranged at the top end of the fixed seat, and the upper surface of the material placing seat is provided with the plurality of positioning columns which are matched with the guide block and the plurality of positioning columns, so that the positioning of the side wall of the semiconductor chip can be realized, and the rapid positioning and placing of the semiconductor chip can be realized; and the guide block can quickly position the balance of the semiconductor chip through the inclined guide surface on the inner side of the guide block, so that the placement efficiency of the semiconductor chip is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processing equipment, in particular to a material table of a developing machine with automatic positioning and material discharge. Background Art

[0002] A semiconductor device that can achieve a certain function by etching and wiring on a semiconductor sheet is called a semiconductor chip. In order to coat the photoresist on the semiconductor chip, a coating and developing equipment is required.

[0003] For example, a developing device with publication number CN209962094U includes: a rotatable carrier for carrying wafers, a heating wire arranged below the rotatable carrier, an exhaust pipe connected to the bottom of the rotatable carrier, a temperature detector arranged above the rotatable carrier, and a controller connecting the heating wire and the temperature detector; the rotatable carrier drives the wafer to rotate so that the developer used for the developing process coats the entire wafer and reacts; the exhaust pipe is used to extract the gas generated during the developing process; the temperature detector is used to detect the surface temperature value of the wafer during the developing process; the controller is used to provide a reference temperature value, and control the heating wire to perform temperature compensation on the wafer according to the difference between the detected surface temperature value of the wafer and the reference temperature value. The developing device provided by the embodiment of the utility model can improve the uniformity of the line width of the photoresist layer.

[0004] The above technical solution has some problems in practical application. This technical solution requires manual precise alignment when placing the semiconductor chip, and it is difficult to achieve the positioning of the semiconductor chip after placement, which is not conducive to improving the processing efficiency of the semiconductor chip.

[0005] Therefore, it is necessary to invent a material table of a developing machine with automatic positioning and material discharge to solve the above problems. Utility Model Content

[0006] The utility model aims to provide a material table of a developing machine with automatic positioning and material discharge, so as to solve the problems raised in the above-mentioned background technology.

[0007] To achieve the above-mentioned purpose, the utility model provides the following technical scheme: a material table of a developer for automatically positioning and discharging materials, comprising a fixed cover, a fixed seat is fixedly arranged at the bottom inner end of the fixed cover, and the fixed seat is arranged to be a conical structure, a discharging seat is fixedly arranged at the top of the fixed seat, four positioning columns are fixedly arranged on the upper surface of the discharging seat, two guide blocks are fixedly arranged between two adjacent positioning columns, and a guide surface of an inclined structure is arranged on one side of the guide block, an air guide hole is penetrated through the middle part of the discharging seat, a fixed block is fixedly arranged at the bottom end of the fixed seat, and the fixed block is arranged at the middle part of the bottom end of the fixed cover, an air guide pipe is penetrated through the middle part of the fixed block, and the top end of the air guide pipe is plugged into the inside of the air guide hole, a support seat is fixedly arranged at the bottom end of the fixed block, an air guide cavity is opened in the middle part of the support seat, and the bottom end of the air guide pipe extends to the inside of the air guide cavity.

[0008] Preferably, a connecting groove is provided through the middle of the inner wall of the air guide cavity, an air pump is fixedly provided on the outer side of the support seat, and the input end of the air pump is fixedly connected to the notch of the connecting groove.

[0009] Preferably, a sealing seat is provided at the bottom end of the air guide cavity, and the sealing seat is fixed to the bottom end of the support seat by bolts.

[0010] Preferably, a sealing ring is provided between the top end of the sealing seat and the bottom end of the air guide cavity.

[0011] Preferably, the plurality of positioning posts and the plurality of guide blocks are distributed in a ring array.

[0012] Preferably, legs are fixedly provided at both ends of the lower surface of the fixed cover, and mounting holes are provided at the bottom ends of the legs.

[0013] Technical effects and advantages of the utility model:

[0014] 1. The utility model is provided with a fixed cover, a fixed seat is provided inside the fixed cover, a material discharge seat is provided at the top of the fixed seat, and a plurality of positioning columns and guide blocks are provided on the upper surface of the material discharge seat. The plurality of positioning columns cooperate to realize the positioning of the side wall of the semiconductor chip, so as to realize the rapid positioning and placement of the semiconductor chip, and the guide block can realize the rapid positioning of the balance of the semiconductor chip through the inner inclined guide surface thereof, so as to improve the placement efficiency of the semiconductor chip;

[0015] 2. The utility model opens an air guide hole in the middle of the material discharging seat, an air guide tube is arranged at the bottom of the air guide hole, and an air guide cavity is arranged at the bottom of the air guide tube. The air guide cavity is connected to an air pump through a connecting groove. The air pump can extract air above the material discharging seat through the connecting groove, the air guide cavity, the air guide tube and the air guide hole, so that a negative pressure area is formed on the upper surface of the material discharging seat, so as to realize the suction and fixation of the semiconductor chip, so as to facilitate the development operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the overall structure of the utility model.

[0017] Figure 2 It is a schematic diagram of the structure of the material discharge seat of the utility model.

[0018] Figure 3 For the utility model Figure 2 A schematic diagram of the enlarged structure in the middle.

[0019] Figure 4 It is a schematic cross-sectional view of the overall structure of the utility model.

[0020] In the figure: 1. fixed cover; 2. fixed seat; 3. discharge seat; 4. positioning column; 5. guide block; 6. guide surface; 7. air guide hole; 8. fixed block; 9. air guide pipe; 10. support seat; 11. air guide cavity; 12. connecting groove; 13. vacuum pump; 14. sealing seat; 15. sealing ring; 16. support leg. DETAILED DESCRIPTION

[0021] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0022] The utility model provides Figure 1-4 The material table of a developer with automatic positioning and discharging shown in the figure comprises a fixed cover 1, a fixed seat 2 is fixedly arranged at the inner bottom end of the fixed cover 1, and the fixed seat 2 is arranged in a conical structure, and the setting of the conical structure facilitates the fixed seat 2 to guide the excess developer during the developer spraying process, a discharging seat 3 is fixedly arranged at the top of the fixed seat 2, and four positioning columns 4 are fixedly arranged on the upper surface of the discharging seat 3, two guide blocks 5 are fixedly arranged between two adjacent positioning columns 4, and a guide surface 6 of an inclined structure is arranged on one side of the guide block 5, and the plurality of positioning columns 4 and the plurality of guide blocks 5 are distributed in a ring array, and the outer side wall of the semiconductor chip is guided by the four positioning columns 4 to realize the positioning of the semiconductor chip, and the semiconductor chip is guided by the inclined guide surface 6 on the inner side of the guide block 5 during the lowering process, so that the balance of the semiconductor chip 6 is adjusted;

[0023] Specifically, an air guide hole 7 is provided through the middle of the discharge seat 3, a fixed block 8 is fixedly provided at the bottom end of the fixed seat 2, and the fixed block 8 is arranged at the middle of the bottom end of the fixed cover 1, an air guide pipe 9 is provided through the middle of the fixed block 8, and the top end of the air guide pipe 9 is inserted and arranged inside the air guide hole 7, a support seat 10 is fixedly provided at the bottom end of the fixed block 8, an air guide cavity 11 is opened in the middle of the support seat 10, and the bottom end of the air guide pipe 9 extends to the inside of the air guide cavity 11;

[0024] More specifically, a connecting groove 12 is provided through the middle of the inner wall of the air guide cavity 11, an air pump 13 is fixedly provided on the outer side of the support seat 10, and the input end of the air pump 13 is fixedly connected to the notch of the connecting groove 12. The air pump 13 extracts air from the upper surface of the material discharge seat 3 through the connecting groove 12, the air guide cavity 11, the air guide pipe 9 and the air guide hole 7, so that a negative pressure area is formed between the upper surface of the material discharge seat 3 and the semiconductor chip, thereby realizing the suction and positioning of the semiconductor chip;

[0025] In addition, a sealing seat 14 is provided at the bottom end of the air guide cavity 11, and the sealing seat 14 is fixed to the bottom end of the support seat 10 by bolts, and a sealing ring 15 is provided between the top end of the sealing seat 14 and the bottom end of the air guide cavity 11, and the sealing ring 15 can improve the sealing performance between the sealing seat 14 and the air guide cavity 11. By removing the sealing seat 14, the inside of the air guide cavity 11 can be cleaned, so as to facilitate the maintenance of the equipment;

[0026] Moreover, legs 16 are fixedly provided at both ends of the lower surface of the fixed cover 1, and mounting holes are provided at the bottom ends of the legs 16, so that the legs 16 can support and fix the device.

[0027] Working principle of this utility model:

[0028] When the device is in use, the semiconductor chip to be processed can be placed above the discharge seat 3, and the outer wall of the semiconductor chip is guided by the four positioning columns 4 to achieve the positioning of the semiconductor chip. The semiconductor chip is guided by the inclined guide surface 6 on the inner side of the guide block 5 during the lowering process, so that the balance of the semiconductor chip 6 is adjusted, thereby ensuring that the semiconductor chip 6 is placed horizontally above the discharge seat 3. At the same time, the air pump 13 extracts air from the upper surface of the discharge seat 3 through the connecting groove 12, the air guide cavity 11, the air guide pipe 9 and the air guide hole 7, so that a negative pressure area is formed between the upper surface of the discharge seat 3 and the semiconductor chip, thereby achieving the suction and positioning of the semiconductor chip, so as to facilitate subsequent operations.

[0029] Finally, it should be noted that the above is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the aforementioned embodiments, it is still possible for those skilled in the art to modify the technical solutions described in the aforementioned embodiments, or to make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present utility model shall be included in the protection scope of the present utility model.

Claims

1. A material table of a developing machine with automatic positioning and material discharge, comprising a fixed cover (1), characterized in that: A fixing seat (2) is fixedly arranged at the bottom end of the fixing cover (1), and the fixing seat (2) is arranged in a conical structure. A material discharge seat (3) is fixedly arranged at the top end of the fixing seat (2). Four positioning columns (4) are fixedly arranged on the upper surface of the material discharge seat (3). Two guide blocks (5) are fixedly arranged between two adjacent positioning columns (4), and a guide surface (6) with an inclined structure is arranged on one side of the guide block (5). An air guide hole (7) is arranged through the middle of the material discharge seat (3). A fixing block (8) is fixedly arranged at the bottom end of the fixing seat (2), and the fixing block (8) is arranged at the middle part of the bottom end of the fixing cover (1); an air guide tube (9) is arranged through the middle part of the fixing block (8), and the top end of the air guide tube (9) is inserted and arranged inside the air guide hole (7); a support seat (10) is fixedly arranged at the bottom end of the fixing block (8), and an air guide cavity (11) is opened in the middle part of the support seat (10), and the bottom end of the air guide tube (9) extends to the inside of the air guide cavity (11).

2. The material table of a developing machine with automatic positioning and material discharge according to claim 1, characterized in that: A connecting groove (12) is provided through the middle of the inner wall of the air guide cavity (11), an air pump (13) is fixedly provided on the outer side of the support seat (10), and an input end of the air pump (13) is fixedly connected to the notch of the connecting groove (12).

3. The material table of a developing machine with automatic positioning and material discharge according to claim 2, characterized in that: A sealing seat (14) is provided at the bottom end of the air guide cavity (11), and the sealing seat (14) is fixed to the bottom end of the support seat (10) by means of bolts.

4. The material table of a developer with automatic positioning and material discharge according to claim 3, characterized in that: A sealing ring (15) is provided between the top end of the sealing seat (14) and the bottom end of the air guide cavity (11).

5. The material table of a developer with automatic positioning and material discharge according to claim 4, characterized in that: The plurality of positioning posts (4) and the plurality of guide blocks (5) are distributed in a ring array.

6. The material table of a developer with automatic positioning and material discharge according to claim 5, characterized in that: Support legs (16) are fixedly provided at both ends of the lower surface of the fixed cover (1), and mounting holes are provided at the bottom ends of the support legs (16).

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