Lens adjusting device

Abstract

The utility model discloses a lens adjusting device, and belongs to the field of lasers. The lens adjusting device comprises a lens adjusting device main body, and a horizontal adjusting baffle plate, a vertical adjusting baffle plate, an adjusting column and an adjusting screw which are arranged on the lens adjusting device main body; the lens adjusting device main body is provided with a mounting screw hole and is hermetically mounted at the tail part of the laser resonant cavity; the tail ends of studs of the horizontal adjusting screw and the vertical adjusting screw are both connected to the adjusting column, and the adjusting column is extruded or stretched in different directions to deform the adjusting column; the horizontal adjusting screw and the vertical adjusting screw are respectively vertical to the centers of the horizontal adjusting baffle plate and the vertical adjusting baffle plate; the horizontal adjusting baffle and the vertical adjusting baffle limit the horizontal adjusting screw and the vertical adjusting screw; spectacle frame connecting screw holes are fixed at the bottoms of the adjusting columns, and the lens frames are fixedly connected with the adjusting columns through the spectacle frame connecting screw holes; the adjusting column drives the angle of the lens on the resonant cavity lens frame to change. The angle of the resonant cavity lens can be accurately adjusted in a sealed environment.

Description

Technical Field

[0001] The utility model belongs to the field of closed resonant cavity lasers, and more specifically, relates to a lens adjusting device. Background Art

[0002] In recent years, my country has frequently encountered "bottleneck" problems in the field of lasers. Relevant technologies in the field of high-power lasers represented by lithography machines are in urgent need of breakthroughs. At present, mainstream lithography machines use extreme ultraviolet EUV light sources. There are many ways to produce this light source. The mainstream method is to use high-frequency, high-peak power and high-beam quality carbon dioxide lasers to bombard metal Sn droplets. Using RF slab carbon dioxide lasers as the driving light source for EUV is one of the feasible solutions. Compared with other carbon dioxide lasers, RF slab carbon dioxide lasers have higher photoelectric conversion efficiency and higher peak power.

[0003] Carbon dioxide gas, the working substance, needs to be sealed in the resonant cavity. When adjusting the angle of the resonant cavity lens, the adjustment device cannot be directly inserted into the resonant cavity for adjustment. At present, there are many structures of adjustment devices for optical lenses, but basically they can only be used for adjustment in an open environment. They are not well suited for the closed structure of the RF slab carbon dioxide laser resonant cavity. At the same time, the resonant cavity lens is very sensitive to the position of the optical surface. Even a very small angle mismatch will cause a large change in the mode and power of the laser output, which requires the sensitivity of the lens adjustment to be as high as possible. In order to meet engineering needs, a lens adjustment structure that meets both of the above requirements must be designed. Utility Model Content

[0004] In view of the defects of the related art, the purpose of the present utility model is to provide a lens adjustment device, which aims to solve the problem that the angle of the resonant cavity lens cannot be adjusted when the resonant cavity is working in a closed state.

[0005] To achieve the above-mentioned purpose, the utility model provides a lens adjustment device, comprising: a lens adjustment device body and a horizontal adjustment baffle, a vertical adjustment baffle, an adjustment column and an adjustment screw arranged thereon;

[0006] The lens adjustment device body is provided with a mounting screw hole for sealingly mounting to the tail of the laser resonance cavity;

[0007] The adjusting screws include a horizontal adjusting screw and a vertical adjusting screw, the ends of the studs of the two adjusting screws are connected to the adjusting column, and the two adjusting screws are used to squeeze or stretch the adjusting column in different directions to deform it;

[0008] The horizontal adjustment screw and the vertical adjustment screw are respectively perpendicular to the center of the horizontal adjustment baffle and the vertical adjustment baffle; the horizontal adjustment baffle and the vertical adjustment baffle are used to limit the horizontal adjustment screw and the vertical adjustment screw;

[0009] The adjustment column is located in the middle position of the main body of the lens adjustment device, and the bottom of the adjustment column is fixed to the frame connecting screw hole. The lens frame in the resonance cavity is fixedly connected to the adjustment column through the frame connecting screw hole; the deformation of the adjustment column is used to drive the angle of the lens on the resonance cavity lens frame to change.

[0010] Optionally, the lens adjustment device body is provided with an adjustment through hole at the adjustment screw, and the adjustment through hole is used for inserting an adjustment device to adjust the adjustment screw.

[0011] Optionally, the nut of the adjusting screw is fixed in a slit formed between the nut and the main body of the lens adjusting device through the horizontal adjustment baffle and the vertical adjustment baffle.

[0012] Optionally, the lens adjustment device body and the adjustment column are an integral metal part.

[0013] Optionally, the adjusting column is made of aluminum alloy or brass.

[0014] Optionally, a circle of sealed grooves is provided on the side where the lens adjustment device body and the resonance cavity are sealed, for placing a sealing ring to seal the resonance cavity.

[0015] Optionally, two air vents are provided on the main body of the lens adjustment device, one air vent is provided on the side of the main body of the lens adjustment device, and the other air vent is provided on the back of the main body of the lens adjustment device; the air vent is used to fill the laser with sealing gas.

[0016] Optionally, the horizontal adjustment baffle is fixed to the adjustment device body by two fixing screws; the vertical adjustment baffle is fixed to the adjustment device body by two vertical fixing screws.

[0017] Compared with the prior art, the above technical solutions conceived by the present invention can achieve the following beneficial effects:

[0018] 1. The embodiment of the utility model provides a lens adjustment device, wherein the adjustment column is located on the outer surface of the lens adjustment device body, and a screw is placed in the mounting screw hole of the lens adjustment device body to connect with the resonant cavity to ensure the airtightness of the sealed cavity. By rotating the adjustment screw, the adjustment column is deformed, thereby changing the lens angle in the resonant cavity to meet the requirement of adjusting the lens angle in an airtight environment. It is mainly used for adjusting the front and rear lenses in the closed unstable waveguide cavity of the radio frequency slab carbon dioxide laser, and has the advantages of simple adjustment and no damage to the sealed environment.

[0019] 2. An embodiment of the utility model provides a lens adjustment device, in which two adjustment screws are designed in the horizontal and vertical directions of the adjustment column. Rotating the adjustment screws will apply a squeezing or stretching force to the adjustment column, squeezing and stretching in four directions, so that the adjustment column undergoes a slight deformation in the corresponding direction, meeting the requirements of adjustment sensitivity. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 An overall view of a lens adjustment device provided by the utility model;

[0021] Figure 2 A top view of a lens adjustment device provided by the utility model;

[0022] Figure 3 yes Figure 2 Cross-section view in the AA direction;

[0023] Figure 4 3 are three views of the horizontal adjustment baffle; (a) is a front view, (b) is a side view, and (c) is a top view;

[0024] Figure 5 A structural diagram of an adjusting screw in a lens adjusting device provided by the utility model;

[0025] Figure 6 This is a back view of a lens adjustment device provided by the utility model.

[0026] In the attached drawings: 1-lens adjustment device body, 1A-first mounting screw hole, 1B-second mounting screw hole, 1C-third mounting screw hole, 1D-fourth mounting screw hole, 1E-fifth mounting screw hole, 1F-sixth mounting screw hole, 1G-seventh mounting screw hole, 1H-eighth mounting screw hole, 2-horizontal adjustment baffle, 2A-first horizontal adjustment baffle fixing through hole, 2B-second horizontal adjustment baffle fixing through hole, 3-vertical adjustment baffle, 3A-first vertical adjustment baffle fixing through hole, 3B-second vertical adjustment baffle fixing through hole, 4-adjustment column , 4A-flat adjustment screw, 4B-vertical adjustment screw, 5-vent, 6A-first horizontal adjustment baffle fixing screw hole, 6B-second horizontal adjustment baffle fixing screw hole, 7A-first vertical adjustment baffle fixing screw hole, 7B-second vertical adjustment baffle fixing screw hole, 8A-horizontal adjustment screw hole, 9-adjustment through hole, 10A-first mirror frame connecting screw hole, 10B-second mirror frame connecting screw hole, 10C-third mirror frame connecting screw hole, 10D-fourth mirror frame connecting screw hole, 11-adjustment baffle through hole, 12-nut, 13-sealing groove. DETAILED DESCRIPTION

[0027] In order to make the purpose, technical solution and advantages of the utility model more clear, the utility model is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the utility model and are not used to limit the utility model. In addition, the technical features involved in each embodiment of the utility model described below can be combined with each other as long as they do not conflict with each other.

[0028] The contents involved in the above embodiment are described below in conjunction with a preferred embodiment.

[0029] like Figure 1-5 As shown, a lens adjustment device comprises: a lens adjustment device body 1 and a horizontal adjustment baffle 2, a vertical adjustment baffle 3, an adjustment column 4 and an adjustment screw arranged thereon;

[0030] The lens adjustment device body 1 is provided with a plurality of mounting screw holes for sealingly mounting to the tail of the laser resonant cavity;

[0031] The adjusting screws include a horizontal adjusting screw 4A and a vertical adjusting screw 4B, the ends of the studs of the two adjusting screws are connected to the adjusting column 4, and the two adjusting screws are used to squeeze or stretch the adjusting column 4 in different directions to deform it;

[0032] The horizontal adjustment screw 4A and the vertical adjustment screw 4B are respectively perpendicular to the center of the horizontal adjustment baffle 2 and the vertical adjustment baffle 3; the horizontal adjustment baffle 2 and the vertical adjustment baffle 3 are used to limit the horizontal adjustment screw 4A and the vertical adjustment screw 4B;

[0033] The adjustment column 4 is located in the middle position of the lens adjustment device body 1, and a plurality of frame connecting screw holes are fixed at the bottom of the adjustment column 4. The lens frame in the resonance cavity is fixedly connected to the adjustment column 4 through the plurality of frame connecting screw holes; the deformation of the adjustment column 4 is used to drive the angle of the lens (not shown) on the resonance cavity lens frame to change.

[0034] In this embodiment, it is mainly used for adjusting the front and rear lenses in the closed unstable waveguide cavity of the radio frequency slab carbon dioxide laser.

[0035] The lens adjustment device body 1 is provided with a plurality of mounting screw holes, such as Figure 1As shown, there are 8 mounting screw holes, corresponding to the first mounting screw hole 1A, the second mounting screw hole 1B, the third mounting screw hole 1C, the fourth mounting screw hole 1D, the fifth mounting screw hole 1E, the sixth mounting screw hole 1F, the seventh mounting screw hole 1G, and the eighth mounting screw hole 1H in the figure; the 8 mounting screw holes surround the upper surface of the lens adjustment device body 1 and penetrate the lens adjustment device body 1, and there are 8 corresponding mounting screw holes on the lower surface. The tail of the laser resonant cavity is sealed and installed with the lens adjustment device body 1 through multiple mounting screw holes, so that the interior of the resonant cavity meets the airtight environment. A lens frame is arranged inside the laser resonant cavity, and a lens is arranged on the lens frame. A plurality of lens frame connecting screw holes are arranged on the lens frame in the resonant cavity, and a lens frame connecting screw hole is arranged correspondingly at the bottom of the adjustment column 4, as shown Figure 3 and Figure 6 As shown, the lower surface of the lens adjustment device body 1 is provided with four frame connection screw holes, corresponding to Figure 6 The first frame connection screw hole 10A, the second frame connection screw hole 10B, the third frame connection screw hole 10C and the fourth frame connection screw hole 10D are used to tightly connect the lens frame to the adjustment column 4. The lens adjustment device body 1 and the adjustment column 4 are an integrated metal part, ensuring that the lens can be adjusted externally when the lens adjustment device body is tightly connected to the resonant cavity. Further, in this embodiment, the adjustment column 4 can be made of a metal material with lower hardness. For example, the adjustment column 4 is made of aluminum alloy or brass, and specifically, 5000 series aluminum alloy, 6000 series aluminum alloy or brass is used.

[0036] like Figure 1 , 2 As shown in Figure 4, the adjusting screws include a horizontal adjusting screw 4A and a vertical adjusting screw 4B. Both adjusting screws are fixedly connected to the adjusting column 4 and are used to squeeze or stretch the adjusting column 4 in different directions to cause a slight deformation. Specifically, tightening the adjusting screw will cause the screw to squeeze the adjusting column 4, and loosening the adjusting screw will cause the screw to stretch the adjusting column. By squeezing and stretching in four directions, the adjusting column is deformed in corresponding directions. Therefore, the lens frame can be slightly adjusted in four different directions by adjusting the screws, thereby changing the lens angle in the resonant cavity and meeting the requirement of adjusting the lens angle in an airtight environment.

[0037] like Figure 1 and 2As shown, a horizontal adjustment baffle 2 and a vertical adjustment baffle 3 are provided on the main body 1 of the lens adjustment device. The horizontal adjustment baffle 2 is a baffle provided in the vertical direction, and the vertical adjustment baffle 3 is a baffle provided in the horizontal direction. The horizontal adjustment screw 4A and the vertical adjustment screw 4B are respectively perpendicular to the center of the horizontal adjustment baffle 2 and the vertical adjustment baffle 3. The horizontal adjustment baffle 2 and the vertical adjustment baffle 3 are respectively used for limiting, and the horizontal adjustment screw 4A and the vertical adjustment screw 4B are fixed in the slit formed by the horizontal adjustment baffle 2 and the vertical adjustment baffle 3 and the main body 1 of the lens adjustment device.

[0038] Optionally, the lens adjustment device body 1 is provided with an adjustment through hole 9 at the adjustment screw, and the adjustment through hole 9 is used for inserting an adjustment device to adjust the adjustment screw.

[0039] like Figure 3 As described, an adjustment through hole 9 is provided on the side of the lens adjustment device body 1 and at a position corresponding to the adjustment screw, one side of the adjustment through hole 9 is blocked by the horizontal adjustment baffle 2 or the vertical adjustment baffle 3, and an adjustment baffle through hole 11 is also provided on the horizontal adjustment baffle 2 and the vertical adjustment baffle 3, one side of the adjustment baffle through hole 11 is connected to the adjustment through hole 9, and one side is an adjustment screw nut 12 on the horizontal adjustment screw 4A or the vertical adjustment screw 4B; an adjustment instrument is inserted into the adjustment through hole 9, and the adjustment instrument adjusts the nut 12 on the horizontal adjustment screw 4A or the vertical adjustment screw 4B, because the horizontal adjustment screw 4A or the vertical adjustment screw 4B is limited by the horizontal adjustment baffle 2 and the vertical adjustment baffle 3, the rotation of the horizontal adjustment screw 4A or the vertical adjustment screw 4B will exert a tensile or extrusive force on the adjustment column 4, causing the adjustment column 4 to deform, thereby driving the angle of the lens on the resonant cavity lens frame to change.

[0040] Further, such as Figure 3 As shown, corresponding adjustment screw holes are provided on the adjustment column 4, and the end of the horizontal adjustment screw 4A is connected to the horizontal adjustment screw hole 8A on the adjustment column 4. Similarly, the end of the vertical adjustment screw 4B is connected to the vertical adjustment screw hole (not shown) on the adjustment column 4.

[0041] Optionally, the nut of the adjusting screw is fixed in a slit formed by the horizontal adjustment baffle 2 , the vertical adjustment baffle 3 and the lens adjustment device body 1 .

[0042] like Figure 2 , 3 As shown in Figures 4 and 5, there is a certain distance between the horizontal adjustment baffle 2 and the vertical adjustment baffle 3 and the adjustment column 4, and there is a slit between them and the lens adjustment device body 1. The horizontal adjustment screw 4A penetrates the part of the lens adjustment device body 1 between the horizontal adjustment baffle 2 and the adjustment column 4, and the nut 12 of the horizontal adjustment screw 4A is fixed in the slit formed by the horizontal adjustment screw 4A and the lens adjustment device body 1; the same applies to the vertical adjustment screw 4B.

[0043] Optionally, a circle of sealed grooves 13 is provided on the side of the lens adjustment device body 1 that is sealed with the resonance cavity, for placing a sealing ring to seal the resonance cavity.

[0044] like Figure 6 As shown, a circle of sealed grooves 13 is provided near the edge of the side where the lens adjustment device body 1 is sealed with the resonance cavity, which is beneficial to ensure the sealing.

[0045] Optionally, two vents 5 are provided on the lens adjustment device body 1, one vent 5 is provided on the side of the lens adjustment device body 1, and the other vent 5 is provided on the back of the lens adjustment device body 1; the vent 5 is used to fill the resonant cavity with sealing gas.

[0046] like Figure 1 and Figure 6 As shown, two vent holes 5 form a connected air filling channel in the lens adjustment device body 1, one vent hole is connected to the outside, and the other vent hole is connected to the resonant cavity sealed and connected to the lens adjustment device body 1. When in use, the vent hole 5 is connected to a gas cylinder or an air pressure detection device, and is closed if no connection is required, thereby ensuring an airtight environment of the resonant cavity and the lens adjustment device body 1.

[0047] Optionally, the horizontal adjustment baffle 2 is fixed to the adjustment device body 1 by two fixing screws; the vertical adjustment baffle 3 is fixed to the adjustment device body 1 by two vertical fixing screws.

[0048] like Figure 1 and Figure 2 As shown, the horizontal adjustment baffle 2 is provided with a first horizontal adjustment baffle fixing through hole 2A and a second horizontal adjustment baffle fixing through hole 2B, and the two fixing through holes penetrate the horizontal adjustment baffle 2. The back side of the lens adjustment device body 1 is correspondingly provided with a first horizontal adjustment baffle fixing screw hole 6A and a second horizontal adjustment baffle fixing screw hole 6B, which are connected to the lens adjustment device body 1 by two fixing screws passing through the fixing through holes, so that the horizontal adjustment baffle 2 is fixedly connected to the lens adjustment device body 1; similarly, the vertical adjustment baffle 3 is provided with a first vertical adjustment baffle fixing through hole 3A and a second vertical adjustment baffle fixing through hole 3B, and the two fixing through holes penetrate the vertical adjustment baffle 3. The back side of the lens adjustment device body 1 is correspondingly provided with a first vertical adjustment baffle fixing screw hole 7A and a second vertical adjustment baffle fixing screw hole 7B, which are connected to the lens adjustment device body 1 by two fixing screws passing through the fixing through holes.

[0049] In the embodiment of the utility model, a lens adjustment device body is connected to the tail of the resonant cavity through a seal, wherein an adjustment column is provided, the bottom of the adjustment column is fixedly connected to the lens frame, and a horizontal adjustment screw and a vertical adjustment screw are provided on the adjustment column. By tightening the adjustment screw, the screw rod will have an extrusion effect on the adjustment column, and by loosening the adjustment screw, the screw rod will have a stretching effect on the adjustment column. By extrusion and stretching in four directions, the adjustment column is deformed in the corresponding directions, thereby driving the angle of the lens to change. The technical problem that the angle of the resonant cavity lens cannot be adjusted when the resonant cavity is working in a closed state is solved, and the beneficial effects of simple adjustment and high adjustment accuracy are achieved without destroying the sealed environment of the resonant cavity.

[0050] It will be easily understood by those skilled in the art that the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention shall be included in the protection scope of the present invention.

Claims

1. A lens adjustment device, characterized in that: include: A lens adjustment device body and a horizontal adjustment baffle, a vertical adjustment baffle, an adjustment column and an adjustment screw arranged thereon; The lens adjustment device body is provided with a mounting screw hole for sealingly mounting to the tail of the laser resonance cavity; The adjusting screws include a horizontal adjusting screw and a vertical adjusting screw, the ends of the studs of the two adjusting screws are connected to the adjusting column, and the two adjusting screws are used to squeeze or stretch the adjusting column in different directions to deform it; The horizontal adjustment screw and the vertical adjustment screw are respectively perpendicular to the center of the horizontal adjustment baffle and the vertical adjustment baffle; the horizontal adjustment baffle and the vertical adjustment baffle are used to limit the horizontal adjustment screw and the vertical adjustment screw; The adjustment column is located in the middle position of the main body of the lens adjustment device, and the bottom of the adjustment column is fixed to the frame connecting screw hole. The lens frame in the resonance cavity is fixedly connected to the adjustment column through the frame connecting screw hole; the deformation of the adjustment column is used to drive the angle of the lens on the lens frame in the resonance cavity to change.

2. The lens adjustment device according to claim 1, characterized in that: The lens adjustment device body is provided with an adjustment through hole at the adjustment screw, and the adjustment through hole is used for inserting an adjustment device to adjust the adjustment screw.

3. The lens adjustment device according to claim 1, characterized in that: The nut of the adjusting screw is fixed in a slit formed by the horizontal adjusting baffle, the vertical adjusting baffle and the main body of the lens adjusting device.

4. The lens adjustment device according to claim 1, characterized in that: The lens adjustment device body and the adjustment column are an integrated metal part.

5. The lens adjustment device according to claim 1, characterized in that: The adjusting column is made of aluminum alloy or brass.

6. The lens adjustment device according to claim 1, characterized in that: A circle of sealed groove is arranged on the side where the lens adjustment device body and the resonance cavity are sealed, and is used to place a sealing ring to seal the resonance cavity.

7. The lens adjustment device according to claim 1, characterized in that: Two vents are arranged on the main body of the lens adjustment device, one vent is arranged on the side of the main body of the lens adjustment device, and the other vent is arranged on the back of the main body of the lens adjustment device; the vent is used to fill the resonant cavity with sealing gas.

8. The lens adjustment device according to claim 1, characterized in that: The horizontal adjustment baffle is fixed to the adjustment device body by two fixing screws; the vertical adjustment baffle is fixed to the adjustment device body by two vertical fixing screws.

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