Wafer grinding machine table with alarm function and wafer grinding machine

Abstract

The present application provides a wafer grinding machine and a wafer grinding machine with an alarm function, wherein the wafer grinding machine includes a machine body, a weighing device and an alarm. The weighing device is installed on the side of the machine body, and a bearing position for hanging a wafer fixture is provided on the weighing device; after the wafer fixture is hung on the bearing position of the weighing device, the weighing device senses the weight of the wafer fixture and sends a weight signal. The alarm is connected to the weighing device circuit; the alarm includes a control module and an alarm module, a weight threshold is stored in the control module, the control module receives the weight signal sent by the weighing device and converts it into a real-time weight value, and when the control module compares that the real-time weight value is less than the weight threshold, the control module sends an alarm control signal to the alarm module to start the alarm. The technical solution of the present application can remind the staff to take out the wafer fixture from the grinding table and return it to its place through weighing sensing and alarm prompts.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor processing and manufacturing, and in particular to a wafer grinding machine and a wafer grinding machine with an alarm function. Background Art

[0002] In the field of semiconductor manufacturing, wafer grinding is one of the key process steps, which directly affects the flatness of the wafer and the smooth progress of subsequent processes. As a device to achieve this process, the accuracy and safety of the operation of the wafer grinder are crucial. Manual and semi-manual wafer grinders are still widely used in certain specific application scenarios due to their flexibility and cost-effectiveness.

[0003] Existing manual and semi-manual wafer grinders are usually equipped with wafer jigs, which are used to assist in positioning the wafer in the grinder to ensure that its posture and position during the grinding process meet the process requirements. The use of wafer jigs plays an important role in ensuring the grinding quality.

[0004] Although the wafer fixture plays an important role in the wafer grinding process, there are some obvious defects in the existing technology. First, after the operator completes the placement of the wafer, he may forget to remove the wafer fixture due to negligence, or forget to perform necessary inspections before starting the machine. In this case, if the grinder is started, the grinding spindle will hit the wafer fixture, which will not only damage the spindle, but also the wafer will be damaged and scrapped, and the wafer fixture will also be damaged. This accident will not only cause economic losses, but may also affect production progress and product quality. Utility Model Content

[0005] The purpose of the embodiments of the present application is to provide a wafer grinding machine and a wafer grinding machine with an alarm function, which can remind the staff to take out the wafer fixture from the grinding table and put it back in place through weighing sensing and alarm prompts.

[0006] In the first aspect, a wafer grinding machine with an alarm function is provided, comprising a machine body, a weighing device and an alarm. The weighing device is installed on the side of the machine body, and a bearing position for hanging a wafer fixture is provided on the weighing device; after the wafer fixture is hung on the bearing position of the weighing device, the weighing device senses the weight of the wafer fixture and sends a weight signal. The alarm is connected to the weighing device circuit; the alarm includes a control module and an alarm module, a weight threshold is stored in the control module, the control module receives the weight signal sent by the weighing device and converts it into a real-time weight value, and when the control module compares that the real-time weight value is less than the weight threshold, the control module sends an alarm control signal to the alarm module to enable the alarm module to start an alarm.

[0007] In an implementable solution, a wafer grinding machine with an alarm function includes an input device connected to a control module circuit of an alarm, and the input device is at least used to modify the size of a weight threshold stored in the control module.

[0008] In an practicable solution, the weighing device includes a frame and a weighing unit, the frame includes at least a bottom plate, and the weighing unit includes a weighing sensor assembly and a wafer carrying bracket;

[0009] The weighing sensor assembly is installed on the bottom plate of the frame; the wafer supporting bracket maintains a vertical posture, and the bottom of the wafer supporting bracket is fixed on the weighing sensor assembly, and the top of the wafer supporting bracket is provided with a carrying position for hanging a wafer fixture; the frame is installed on the side wall of the machine body.

[0010] In an implementable scheme, the weighing sensor assembly includes a base, a weighing sensor and a force block, the weighing sensor is installed on the base, and the force block is installed on the force point of the weighing sensor; the base is installed on the bottom plate of the frame, and the bottom of the wafer supporting bracket is installed on the force block; the weighing sensor is connected to the alarm circuit.

[0011] In an implementable solution, the top of the wafer support bracket is an upwardly convex arc-shaped portion, and the arc-shaped portion has an upwardly open arc-shaped groove; when in use, the wafer fixture is hung in the arc-shaped groove.

[0012] In an implementable scheme, the wafer supporting bracket includes a connecting rod and a replacement head, the bottom of the connecting rod is fixed on the weighing sensor assembly, the bottom of the replacement head is detachably plugged into the top of the connecting rod, and the top of the replacement head is an arc-shaped portion; different replacement heads have arc-shaped portions of different sizes.

[0013] In an implementable solution, a female magnetic attraction portion is arranged on the side of the machine body; the frame also includes a first side plate and a second side plate opposite to each other, and the bottoms of the first side plate and the second side plate are fixed on the bottom plate; the weighing unit is located between the first side plate and the second side plate; a male magnetic attraction portion is arranged on the outer surface of the first side plate; when in use, the male magnetic attraction portion and the female magnetic attraction portion are tightly magnetically attracted together.

[0014] In an implementable solution, an extended magnetic attraction portion is provided on the outer surface of the second side plate of the frame; the number of weighing devices is greater than or equal to two, and after the first weighing device is fixed by adsorption by the male magnetic attraction portion and the female magnetic attraction portion, the second weighing device is fixed by adsorption by its own male magnetic attraction portion and the extended magnetic attraction portion of the previous weighing device.

[0015] In an implementable solution, when there are n weighing devices, n≥2, the multiple weighing devices are connected to the alarm circuit. The control module of the alarm stores the 1st to nth weight thresholds, the control module receives the weight signal sent by the ith weighing device and converts it into the ith real-time weight value, 1≤i≤n, and when the control module compares that the ith real-time weight value is less than the ith weight threshold, the control module sends an alarm control signal to the alarm module to start the alarm.

[0016] According to a second aspect of the present application, there is also provided a wafer grinding machine, comprising the aforementioned wafer grinding machine table with an alarm function, and also comprising a grinding machine control device;

[0017] The alarm of the wafer grinding machine is connected to the grinding machine control device circuit; wherein, the control module of the alarm sends an alarm control signal to the grinding machine control device at the same time, and when the grinding machine control device receives the alarm control signal, the grinding machine control device controls the wafer grinding holding machine to prohibit the operation state.

[0018] Compared with the prior art, the beneficial effects of this application include at least:

[0019] When the wafer grinding machine with alarm function of the present application is used, after the wafer is placed in place on the grinding machine using a wafer fixture, the staff can hang the wafer fixture on the weighing device on the side of the machine body, on the one hand to store the wafer fixture, on the other hand, the weight of the wafer fixture can be measured by the weighing device. If the wafer fixture is not hung on the weighing device, the weighing device cannot feel the weight of the wafer fixture, and the weighing device sends a weight signal to the alarm, and the real-time weight value obtained must be less than the weight threshold set in advance, then it is determined that the wafer fixture has not been returned to its position, that is, it is determined that the wafer fixture may not be taken out from the table of the machine body, so that the alarm sends an alarm signal to remind the staff to check whether the wafer fixture has been taken out and returned from the working table of the grinder. It can be seen from this that by means of weighing sensing and alarm reminder, it can be basically ensured that the wafer fixture has been taken out and returned from the working table when the grinder is working, thereby preventing the occurrence of damage to the grinding spindle and wafer damage and scrap caused by the failure to take out the wafer fixture as much as possible. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0021] Figure 1It is a schematic diagram of a three-dimensional structure of a wafer grinding machine according to an embodiment of the present application;

[0022] Figure 2 It is a schematic diagram of the three-dimensional structure of another wafer grinding machine according to an embodiment of the present application;

[0023] Figure 3 for Figure 1 Schematic diagram of the structure when the weighing device receives the wafer fixture;

[0024] Figure 4 A schematic diagram of the internal structure of a weighing device according to an embodiment of the present application;

[0025] Figure 5 It is a structural schematic diagram of a weighing unit according to an embodiment of the present application;

[0026] Figure 6 It is a structural schematic diagram of a wafer supporting bracket according to an embodiment of the present application;

[0027] Figure 7 It is a schematic diagram showing a weighing device and a machine body being magnetically fixed according to an embodiment of the present application;

[0028] Figure 8 It is a schematic diagram showing two weighing devices being magnetically fixed to the machine body in sequence according to an embodiment of the present application;

[0029] Fig. 9 for Figure 8 Schematic diagram of the exploded structure of the two weighing devices in the first side view;

[0030] Fig.10 for Figure 8 Schematic diagram of the exploded structure of the two weighing devices from the second side perspective.

[0031] In the figure: 1. machine body; 11. female magnetic part; 2. weighing device; 21. frame; 211. bottom plate; 212. first side plate; 213. second side plate; 22. weighing unit; 221. weighing sensor assembly; 2211. base; 2212. weighing sensor; 2213. force block; 222. wafer support bracket; 201. connecting rod; 202. replacement head; 2221. arc part; 2222. arc groove; 23. male magnetic part; 24. extended magnetic part; 3. alarm; 4. input device; 5. wafer fixture. DETAILED DESCRIPTION

[0032] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations.

[0033] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application for which protection is sought, but merely represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without creative work are within the scope of protection of the present application.

[0034] like Figure 1 and Figure 3 As shown, this embodiment provides a wafer grinding machine with an alarm function, including a machine body 1 , a weighing device 2 and an alarm 3 .

[0035] The upper part of the machine body 1 is used to place the wafer to be ground. The weighing device 2 is installed on the side of the machine body 1, and a bearing position for hanging the wafer fixture 5 is set on the weighing device 2; after the wafer fixture is hung on the bearing position of the weighing device 2, the weighing device 2 senses the weight of the wafer fixture 5 and sends a weight signal. The alarm 3 is connected to the weighing device 2 circuit; the alarm 3 includes a control module and an alarm module, and a weight threshold is stored in the control module. The control module receives the weight signal sent by the weighing device 2 and converts it into a real-time weight value. When the control module compares that the real-time weight value is less than the weight threshold, the control module sends an alarm control signal to the alarm module to start the alarm module.

[0036] When the wafer grinding machine with alarm function of this embodiment is used, the wafer is placed on the grinding machine using the wafer fixture 5. Figure 3As shown, the staff can hang the wafer fixture 5 on the weighing device 2 on the side of the machine body 1, on the one hand to store the wafer fixture 5, on the other hand to measure the weight of the wafer fixture 5 through the weighing device 2. If the wafer fixture 5 is not hung on the weighing device 2, the weighing device 2 cannot feel the weight of the wafer fixture 5, and the weighing device 2 sends a weight signal to the alarm 3. The real-time weight value obtained must be less than the weight threshold set in advance, and it is determined that the wafer fixture 5 has not been returned to its original position, that is, it is determined that the wafer fixture 5 may not be taken out from the table of the machine body 1, so that the alarm 3 sends an alarm signal to remind the staff to check whether the wafer fixture 5 has been taken out and returned to its original position from the working table of the grinder. It can be seen from this that by means of weighing sensing and alarm reminder, it can be basically ensured that the wafer fixture 5 has been taken out and returned to its original position from the working table when the grinder is working, thereby preventing the occurrence of damage to the grinding spindle and wafer damage and scrap caused by the failure to take out the wafer fixture 5 as much as possible.

[0037] At the same time, if the wafer fixture 5 has been placed on the weighing device 2, the weighing device 2 senses the weight of the wafer fixture 5, and the weighing device 2 sends a weight signal to the alarm 3. The real-time weight value obtained is greater than or equal to the weight threshold set in advance, so that the alarm 3 can remain silent or send an alarm signal that the wafer fixture 5 has been taken out.

[0038] For example, if the weight of a wafer fixture is 500g±100g, the weight threshold of the alarm 3 can be set to 200g, 350g, 400g, etc. When the weight signal measured by the weighing device 2 is converted to an actual weight value less than the weight threshold, it can be determined that the wafer fixture is not placed on the weighing device 2, so the alarm 3 alarms to remind the staff to check whether the wafer fixture has been removed from the grinding table. The alarm signal can only be triggered when the wafer fixture is placed on the weighing device 2.

[0039] It should be noted that, generally, a wafer grinder is equipped with a wafer fixture, and by setting a certain standard working process, it can be mandatory to place the wafer fixture on the corresponding weighing device 2 when not in use. Wafer fixtures of different wafer grinders are restricted and cannot be mixed.

[0040] In this embodiment, if Figure 2 As shown, the wafer grinding machine with alarm function may include an input device 4, which is connected to the control module circuit of the alarm 3, and the input device 4 is at least used to modify the size of the weight threshold stored in the control module. In some cases, different wafer grinders may use wafer fixtures of different weights, and a unified wafer grinder may need to replace wafer fixtures of different weights, so the size of the weight threshold can be modified through the input device 4. The input device 4 can be a screen input device, a keyboard input device, or other non-standard touch or key input devices.

[0041] In this embodiment, if Figure 4 As shown, the weighing device 2 may include a frame 21 and a weighing unit 22, the frame 21 may include at least a bottom plate 211, and the weighing unit 22 may include a weighing sensor assembly 221 and a wafer support bracket 222. The weighing sensor assembly 221 is mounted on the bottom plate 211 of the frame 21; the wafer support bracket 222 maintains a vertical posture, and the bottom of the wafer support bracket 222 is fixed on the weighing sensor assembly 221, and the top of the wafer support bracket 222 is provided with a bearing position for hanging a wafer fixture; the frame 21 is mounted on the side wall of the machine body 1.

[0042] In this embodiment, if Figure 5 As shown, the weighing sensor assembly 221 may include a base 2211, a weighing sensor 2212 and a force block 2213. The weighing sensor 2212 is made of a pressure sensor. Figure 4 The corresponding sensor physical circuit is not shown. The weighing sensor 2212 is mounted on the base 2211, and the force block 2213 is mounted on the force point of the weighing sensor 2212. The base 2211 is mounted on the bottom plate 211 of the frame 21, and the bottom of the wafer support bracket 222 is mounted on the force block 2213. The weighing sensor 2212 is connected to the alarm 3 circuit. The principle of the weighing sensor 2212 is to sense the pressure change and then generate an electrical signal change (that is, the aforementioned weight signal).

[0043] In this embodiment, if Figure 5 As shown, the top of the wafer support bracket 222 may be an upwardly convex arc portion 2221, and the arc portion 2221 has an upwardly open arc groove 2222. When in use, the wafer fixture 5 is hung in the arc groove 2222, which is also the bearing position for receiving the wafer fixture 5. The arc groove 2222 can better receive the wafer fixture 5 and prevent the wafer fixture 5 from falling.

[0044] In this embodiment, if Figure 6 As shown, the wafer support bracket 222 may include a connecting rod 201 and a replacement head 202, the bottom of the connecting rod 201 is fixed on the weighing sensor assembly 221, the bottom of the replacement head 202 is plugged into the top of the connecting rod 201 in a detachable manner, the top of the replacement head 202 is an arc portion 2221, and different replacement heads 202 have arc portions 2221 of different sizes. The wafer fixture 5 generally has a circular inner wall, and when facing wafer fixtures 5 of different diameters, the replacement head 202 of the corresponding size can be replaced. After replacing the replacement head 202, it is generally necessary to perform a zeroing operation on the weighing device 2, for example, it can be achieved through the aforementioned input device 4.

[0045] In this embodiment, if Figure 7As shown, a female magnetic attraction portion 11 can be provided on the side of the machine body 1. The frame 21 can also include a first side plate 212 and a second side plate 213 opposite to each other, the bottoms of the first side plate 212 and the second side plate 213 are fixed on the bottom plate 211, and the weighing unit 22 is located between the first side plate 212 and the second side plate 213. A male magnetic attraction portion 23 is provided on the outer surface of the first side plate 212; when in use, the male magnetic attraction portion 23 is tightly magnetically attracted to the female magnetic attraction portion 11, so as to realize convenient assembly of the weighing device 2.

[0046] In addition, the weighing device 2 may also be provided with a reserved weight signal output connector, and the alarm 3 may also be provided with a reserved receiving connector, and the two may be freely plugged in to achieve quick assembly and disassembly.

[0047] In this embodiment, if Figure 8 , Fig. 9 and Fig.10 As shown, an extended magnetic attraction portion 24 may be provided on the outer surface of the second side plate 213 of the frame 21. A wafer grinder may be equipped with multiple wafer fixtures, so the number of weighing devices 2 may be greater than or equal to two, which is consistent with the number of wafer fixtures. For example, after the first weighing device 2 is fixed by adsorption to the female magnetic attraction portion 11 through the male magnetic attraction portion 23, the second weighing device 2 is fixed by adsorption to the extended magnetic attraction portion 24 of the previous weighing device 2 through its own male magnetic attraction portion 23 to achieve rapid expansion.

[0048] Furthermore, when the number of weighing devices 2 is n, n≥2, the multiple weighing devices 2 are all connected to the alarm 3 circuit. The control module of the alarm 3 stores the 1st to nth weight thresholds, the control module receives the weight signal sent by the ith weighing device 2 and converts it into the ith real-time weight value, 1≤i≤n, and when the control module compares that the ith real-time weight value is less than the ith weight threshold, the control module sends an alarm control signal to the alarm module to start the alarm, so as to ensure that the multiple wafer fixtures have been returned to their positions when the grinding starts.

[0049] like Figure 1 and Figure 2 As shown, this embodiment also provides a wafer grinding machine, including the aforementioned wafer grinding machine table with alarm function, and also includes a grinding machine control device.

[0050] Among them, the alarm 3 of the wafer grinding machine is connected to the grinding machine control device circuit; wherein, the control module of the alarm 3 simultaneously sends the alarm control signal to the grinding machine control device, and when the grinding machine control device receives the alarm control signal, the grinding machine control device controls the wafer grinding holding machine to prohibit the operation state, thereby ensuring that when the wafer fixture is returned to its position, the equipment cannot be started, greatly improving the safety of grinding.

[0051] Compared with existing wafer grinders, it lacks effective automatic detection and alarm mechanisms, and cannot automatically stop the operation or alert the operator when the wafer fixture is not removed, which increases the operational risk. Moreover, due to the operational complexity of manual and semi-manual equipment, the operator's skills are required to be high, and new employees or inexperienced operators are more likely to make mistakes.

[0052] In summary, wafer grinding machines and wafer grinding machines with alarm functions reduce the probability of operational errors, improve production safety, and reduce the probability of equipment and product damage through automated detection and preventive measures, which is equivalent to reducing production costs and improving production efficiency and product quality.

[0053] The above description is only the preferred embodiment of the present application and is not intended to limit the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A wafer grinding machine with an alarm function, characterized in that: include: Machine body; A weighing device, installed on the side of the machine body, and provided with a bearing position for hanging a wafer fixture; After the wafer fixture is hung on the bearing position of the weighing device, the weighing device senses the weight of the wafer fixture and sends a weight signal; An alarm is connected to the weighing device circuit; the alarm includes a control module and an alarm module, the control module stores a weight threshold, the control module receives the weight signal sent by the weighing device and converts it into a real-time weight value, and when the control module compares that the real-time weight value is less than the weight threshold, the control module sends an alarm control signal to the alarm module to enable the alarm module to start an alarm.

2. The wafer grinding machine with alarm function according to claim 1, characterized in that: An input device is included, which is connected to the control module circuit of the alarm, and the input device is at least used to modify the size of the weight threshold stored in the control module.

3. The wafer grinding machine with alarm function according to claim 1 or 2, characterized in that: The weighing device comprises a frame and a weighing unit, wherein the frame comprises at least a bottom plate, and the weighing unit comprises a weighing sensor assembly and a wafer carrying bracket; The weighing sensor component is installed on the bottom plate of the frame; the wafer carrying bracket maintains a vertical posture, and the bottom of the wafer carrying bracket is fixed on the weighing sensor component, and the top of the wafer carrying bracket is provided with a carrying position for hanging a wafer fixture; the frame is installed on the side wall of the machine body.

4. The wafer grinding machine with alarm function according to claim 3, characterized in that: The weighing sensor assembly comprises a base, a weighing sensor and a force block, wherein the weighing sensor is mounted on the base, and the force block is mounted on the force point of the weighing sensor; The base is mounted on the bottom plate of the frame, and the bottom of the wafer supporting bracket is mounted on the force bearing block; The weighing sensor is connected to the alarm circuit.

5. The wafer grinding machine with alarm function according to claim 3, characterized in that: The top of the wafer support is an arc-shaped portion convex upward, and the arc-shaped portion has an arc-shaped groove opening upward; When in use, the wafer fixture is hung in the arc-shaped groove.

6. The wafer grinding machine with alarm function according to claim 5, characterized in that: The wafer support bracket includes a connecting rod and a replacement head, the bottom of the connecting rod is fixed on the weighing sensor assembly, the bottom of the replacement head is plugged with the top of the connecting rod in a detachable manner, and the top of the replacement head is the arc-shaped portion; Different replacement heads have arcuate portions of different sizes.

7. The wafer grinding machine with alarm function according to claim 3, characterized in that: A female magnetic attraction portion is provided on the side of the machine body; The frame further comprises a first side plate and a second side plate opposite to each other, and the bottoms of the first side plate and the second side plate are fixed to the bottom plate; The weighing unit is located between the first side plate and the second side plate; A male magnetic attraction portion is disposed on the outer surface of the first side plate; when in use, the male magnetic attraction portion and the female magnetic attraction portion are tightly magnetically attracted together.

8. The wafer grinding machine with alarm function according to claim 7, characterized in that: An extended magnetic attraction portion is provided on the outer surface of the second side plate of the frame; The number of the weighing devices is greater than or equal to two. After the first weighing device is fixed by adsorption by the male magnetic part and the female magnetic part, the second weighing device is fixed by adsorption by its own male magnetic part and the extended magnetic part of the previous weighing device.

9. The wafer grinding machine with alarm function according to claim 8, characterized in that: When the number of the weighing devices is n, n≥2, the plurality of weighing devices are connected to the alarm circuit; The control module of the alarm stores the 1st to nth weight thresholds. The control module receives the weight signal sent by the i-th weighing device and converts it into the i-th real-time weight value, 1≤i≤n. When the control module compares that the i-th real-time weight value is less than the i-th weight threshold, the control module sends an alarm control signal to the alarm module to enable the alarm module to start an alarm.

10. A wafer grinding machine, characterized in that: A wafer grinding machine with an alarm function according to any one of claims 1 to 9, further comprising a grinding machine control device; The alarm of the wafer grinding machine is connected to the circuit of the grinding machine control device; wherein, the control module of the alarm sends an alarm control signal to the grinding machine control device at the same time, and when the grinding machine control device receives the alarm control signal, the grinding machine control device controls the wafer grinding holding machine to prohibit the operation state.

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