Nano material with double-layer suspended three-dimensional nano structure and electronic component

Abstract

The nanometer material with the double-layer suspended three-dimensional nanometer structure and the electronic component have the unique double-layer suspended nanometer structure, have the characteristics of a double-layer structure and a suspended structure, have high specific surface area, enrich the performance diversification of the three-dimensional nanometer material, and have the advantages of being simple in structure and convenient to use. Huge potential is shown in the fields of scientific research and industrial application such as optoelectronic devices and sensors.

Description

[Technical field]

[0001] The utility model belongs to the technical field of nano materials, and in particular relates to a nano material and an electronic component with a double-layer suspended three-dimensional nano structure. [Background technology]

[0002] Nanomaterials refer to materials with at least one dimension in the nanometer scale (1-100 nanometers) in the three-dimensional space. They are a new generation of materials composed of nanoparticles whose sizes are between atoms, molecules and macroscopic systems. Nanomaterials exhibit many properties different from traditional materials due to their unique size effects, surface effects and quantum effects. These properties make them have wide application potential in many fields.

[0003] Nanomaterials can be roughly divided into four categories according to their dimensions: zero-dimensional, one-dimensional, two-dimensional and three-dimensional nanomaterials. Among them, three-dimensional nanomaterials refer to materials that exhibit nanoscale characteristics in three dimensions. Compared with nanomaterials of other dimensions, they have a higher specific surface area. However, the common three-dimensional nanomaterials currently exist in the form of simple solid nanospheres and solid nanocolumns, which limits the diversification of the performance of three-dimensional nanomaterials, thereby limiting the development and application of three-dimensional nanomaterials. [Contents of the utility model]

[0004] The utility model aims to provide a nano material with a double-layer suspended three-dimensional nano structure, so as to solve the problem that the current three-dimensional nano material has a simple structure and limited performance diversity.

[0005] A nanomaterial with a double-layer suspended three-dimensional nanostructure comprises a substrate, a metal hole layer is provided on the substrate, a support layer for supporting the three-dimensional nanostructure is provided on the other side of the metal hole layer, a plurality of nanocolumns for forming the three-dimensional nanostructure are provided on the support layer, a metal particle layer is provided inside the nanocolumns, and the metal particle layer, the nanocolumns and the metal hole layer form a double-layer suspended three-dimensional nanostructure.

[0006] In the double-layer suspended three-dimensional nanostructured nanomaterial as described above, the metal hole layer is provided with a plurality of metal holes, each of the metal holes corresponds to the position of each of the metal particle layers, and the metal particle layers are in a suspended state relative to the metal hole layer.

[0007] In the double-layer suspended three-dimensional nanostructured nanomaterial as described above, the distance between the metal particle layer and the metal hole layer is smaller than the height of the nanocolumn.

[0008] In the above-mentioned double-layer suspended three-dimensional nanostructured nanomaterial, the shape of the metal particle layer is the same as the shape of the metal pores.

[0009] In the double-layer suspended three-dimensional nanostructured nanomaterial as described above, the shape of the metal particle layer and the shape of the metal hole are both circular, and the diameter of the metal particle layer is smaller than the diameter of the metal hole.

[0010] In the above-mentioned double-layer suspended three-dimensional nanostructured nanomaterial, the material of the metal hole layer and the material of the metal particle layer are the same metal material.

[0011] In the double-layer suspended three-dimensional nanostructured nanomaterial as described above, the nanocolumn is a hollow structure, and a plurality of nanoholes are arranged on the nanocolumn, and each of the nanoholes corresponds to the position of each of the metal particle layers and each of the metal holes.

[0012] In the double-layer suspended three-dimensional nanostructured nanomaterial as described above, the nanocolumns and the support layer are an integrated structure.

[0013] In the nanomaterial of the double-layer suspended three-dimensional nanostructure as described above, the material of the support layer and the material of the nanocolumns are the same material.

[0014] An electronic component comprises the nano material of the double-layer suspended three-dimensional nano structure.

[0015] The nanomaterial of the double-layer suspended three-dimensional nanostructure of the utility model adopts the metal particle layer, the nanocolumn and the metal hole layer to form a double-layer suspended three-dimensional nanostructure. By combining the double-layer form and the suspended form, the structure has both the characteristics of a double-layer structure and the characteristics of a suspended structure. First, a double-layer structure is formed by a support layer, a metal particle layer and a metal hole layer. Compared with a single-layer structure, the double-layer structure has unique interface characteristics and synergistic effects. The physical and chemical properties of the material can be optimized by regulating the interaction at the interface of the structure, such as enhancing the mechanical strength, thermal stability and electrical conductivity of the material; and the optical properties, such as transparency, reflectivity and absorption spectrum, can be adjusted by precisely controlling the thickness and composition of the double-layer structure. Second, a support layer is used to support the metal particle layer, so that the metal particle layer is not supported on at least one side relative to the metal hole, and is suspended in the nanocolumns of the support layer, thereby forming a suspended structure. Suspended structures are unique and multifunctional. For example, suspended nanostructures have a high surface area to volume ratio, which gives them significant advantages in chemical reactions and physical adsorption. Suspended nanostructures not only have broad application prospects in environmental sensing and biosensing, but also have important applications in nanoelectronics and optoelectronics.

[0016] The nanomaterial of the double-layer suspended three-dimensional nanostructure of the utility model has a unique double-layer suspended nanostructure, which has the characteristics of both a double-layer structure and a suspended structure, has a high specific surface area, enriches the performance diversity of three-dimensional nanomaterials, and shows great potential in scientific research and industrial applications such as optoelectronic devices and sensors, solving the problem of simple structure and limited performance diversity of current three-dimensional nanomaterials.

Brief Description of the Drawings

[0017] Figure 1 This is a schematic diagram of the structure of the nano material of the utility model;

[0018] Figure 2 This is a schematic diagram of the decomposition of the nano material structure of the utility model;

[0019] Figure 3 This is a schematic diagram of the support layer structure of the utility model;

[0020] Figure 4 It is a three-dimensional schematic diagram of the nano material structure of the utility model;

[0021] Figure 5 This is the SEM image of the nanomaterial structure of the utility model, tilted at 45° and magnified 2000 times;

[0022] Figure 6 This is the SEM image of the nanomaterial structure of the utility model, tilted at 45° and magnified 10,000 times;

[0023] Figure 7 This is the SEM image of the nanomaterial structure of the utility model, tilted at 90° and magnified 50,000 times;

[0024] Figure 8 This is a SEM image of the metal particles and metal pores left after removing the support layer from the nanomaterial structure of the utility model. [Specific implementation method]

[0025] Below is a combination of the embodiments and the attached Figure 1-8 The specific technical solution of the utility model is described as follows:

[0026] A nanomaterial with a double-layer suspended three-dimensional nanostructure includes a substrate 1, a metal hole layer 2 is provided on the substrate 1, a support layer 3 for supporting the three-dimensional nanostructure is provided on the other side of the metal hole layer 2, a plurality of nanocolumns 4 for forming the three-dimensional nanostructure are provided on the support layer 3, a metal particle layer 5 is provided inside the nanocolumns 4, and the metal particle layer 5, the nanocolumns 4 and the metal hole layer 2 form a double-layer suspended three-dimensional nanostructure.

[0027] Furthermore, this embodiment uses silicon material as the substrate material. Silicon material has good mechanical stability, thermal stability and chemical stability. As the base of the three-dimensional nanostructure, it can stably support the upper structure; it also has good optical transparency and semiconductor properties. The material of the substrate provides the basis of the three-dimensional nanostructure, and can also be quartz or polymer materials.

[0028] Furthermore, the metal hole layer can be used to provide physical properties such as electrical conductivity and reflectivity, and the metal particle layer can be used to catalyze reactions, enhance electrical conductivity, or serve as a medium with optical properties.

[0029] Furthermore, the nanocolumn structure of this embodiment is a hollow cylindrical structure, and the nanocolumn structure can also be a hollow square column or other structure. The nanocolumn is a basic unit constituting a three-dimensional nanostructure, which can be used to enhance the surface area of ​​the material, provide mechanical strength or serve as a place for chemical reactions. Different nanocolumn structures can affect the surface area of ​​the material and the performance of the double-layer suspended structure, which helps to enrich the performance diversity of three-dimensional nanomaterials.

[0030] Furthermore, the metal hole layer 2 is provided with a plurality of metal holes 21, each of the metal holes 21 corresponds to the position of each of the metal particle layers 5, and the metal particle layer 5 is in a suspended state relative to the metal hole layer 2. The design of the corresponding positions of the metal hole layer and the metal particle layer has multifunctionality, but is not limited to the following effects. The metal hole can be used as a hot spot for plasma resonance, enhancing the intensity of the local electromagnetic field, thereby improving the metal particle layer's light absorption efficiency, and can also be used as a channel for electron transmission, and the metal particle layer is suspended thereon, which helps to form an effective electron transmission path; the relatively suspended metal particle layer can reduce thermal contact with the substrate, help to dissipate heat, and can also reduce capacitive coupling with the substrate.

[0031] Furthermore, the distance between the metal particle layer 5 and the metal hole layer 2 is smaller than the height of the nanorod 4. By precisely controlling the distance between the metal particle layer and the metal hole, the physical and chemical properties of the nanostructure can be optimized, thereby achieving high-performance applications in multiple fields such as optics, electronics, catalysis and sensors.

[0032] Furthermore, the shape of the metal particle layer 5 is the same as the shape of the metal hole 21. The shapes of the metal particle layer and the metal hole can affect the performance of the structure, and the same shape of the two can more accurately control the structure to better optimize the performance of the structure.

[0033] Furthermore, the shape of the metal particle layer 5 and the shape of the metal hole 21 are both circular, and the diameter of the metal particle layer 5 is smaller than the diameter of the metal hole 21 .

[0034] Furthermore, the material of the metal hole layer 2 is the same metal material as the material of the metal particle layer 5. The metal material used in this embodiment is gold, and the metal material can also be silver, copper and other metal materials.

[0035] Furthermore, the nanocolumn 4 is a hollow structure, and a plurality of nanoholes 41 are provided on the nanocolumn 4 . Each of the nanoholes 41 corresponds to the position of each of the metal particle layers 5 and each of the metal holes 21 .

[0036] Furthermore, the nanorods 4 and the support layer 3 are an integrated structure.

[0037] Furthermore, the material of the support layer 3 and the material of the nanocolumns 4 are the same material. In this embodiment, RM-311 resin is used as the material of the support layer and the nanocolumns. The material may also be nanoimprint resin, solvent-free nanoimprint resin or the like.

[0038] An electronic component comprises the nano material of the double-layer suspended three-dimensional nano structure.

[0039] The nanomaterial of the double-layer suspended three-dimensional nanostructure of the utility model has a unique double-layer suspended nanostructure, which has the characteristics of both a double-layer structure and a suspended structure, has a high specific surface area, enriches the performance diversity of three-dimensional nanomaterials, and shows great potential in scientific research and industrial applications such as optoelectronic devices, sensors and other fields.

[0040] The above description is only a preferred embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. A nanomaterial with a double-layer suspended three-dimensional nanostructure, comprising a substrate (1), characterized in that: A metal hole layer (2) is provided on the substrate (1); a support layer (3) for supporting a three-dimensional nanostructure is provided on the other side of the metal hole layer (2); a plurality of nanocolumns (4) for forming a three-dimensional nanostructure are provided on the support layer (3); a metal particle layer (5) is provided inside the nanocolumns (4); and the metal particle layer (5), the nanocolumns (4) and the metal hole layer (2) form a double-layer suspended three-dimensional nanostructure.

2. The nanomaterial of the double-layer suspended three-dimensional nanostructure according to claim 1, characterized in that: The metal hole layer (2) is provided with a plurality of metal holes (21), each of the metal holes (21) corresponds to the position of each of the metal particle layers (5), and the metal particle layers (5) are in a suspended state relative to the metal hole layer (2).

3. The nanomaterial of the double-layer suspended three-dimensional nanostructure according to claim 2, characterized in that: The distance between the metal particle layer (5) and the metal hole layer (2) is smaller than the height of the nanocolumns (4).

4. The nanomaterial of the double-layer suspended three-dimensional nanostructure according to claim 2, characterized in that: The shape of the metal particle layer (5) is the same as the shape of the metal hole (21).

5. The nanomaterial of the double-layer suspended three-dimensional nanostructure according to claim 4, characterized in that: The shape of the metal particle layer (5) and the shape of the metal hole (21) are both circular, and the diameter of the metal particle layer (5) is smaller than the diameter of the metal hole (21).

6. The nanomaterial of the double-layer suspended three-dimensional nanostructure according to claim 1, characterized in that: The material of the metal hole layer (2) and the material of the metal particle layer (5) are the same metal material.

7. The nanomaterial of the double-layer suspended three-dimensional nanostructure according to claim 2, characterized in that: The nanocolumn (4) is a hollow structure, and a plurality of nanoholes (41) are provided on the nanocolumn (4), and each of the nanoholes (41) corresponds to the position of each of the metal particle layers (5) and each of the metal holes (21).

8. The nanomaterial of the double-layer suspended three-dimensional nanostructure according to claim 7, characterized in that: The nanocolumns (4) and the support layer (3) are an integrated structure.

9. The nanomaterial of the double-layer suspended three-dimensional nanostructure according to claim 8, characterized in that: The material of the support layer (3) and the material of the nanocolumns (4) are the same material.

10. An electronic component, characterized in that: A nanomaterial comprising a double-layer suspended three-dimensional nanostructure according to any one of claims 1 to 9.

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