Support device and coating equipment

Abstract

The support device disclosed in the utility model is used to support the carrier in the furnace tube of the coating equipment. The support device includes a support rod and an insulating sleeve assembly. The support rod is provided with a feed boat block, and the feed boat foot of the carrier is provided on the feed boat block; the insulating sleeve assembly includes at least two insulating sleeves, which are sleeved on the support rod and respectively provided on both sides of the feed boat block, and a notch is provided on the side of the insulating sleeve facing the feed boat foot. After the coating process of the support device disclosed in the utility model is performed for a period of time, a layer of conductive film will be coated on the surface of the insulating sleeve, and the conductive film at the notch position will be coated on the support rod, which can increase the distance between the conductive film and the feed boat foot, reduce the probability of discharge arcing, thereby improving the stability of the electric field, improving the quality and efficiency of the coating, and increasing the output. The utility model also discloses a coating equipment.

Description

Technical Field

[0001] The utility model relates to the technical field of coating equipment, and more specifically, to a supporting device and coating equipment. Background Art

[0002] In the production of equipment that uses RF power to generate plasma for coating, it is necessary to use RF power to create an electric field environment for the carrier (such as a graphite boat) so that the plasma can produce glow discharge in the electric field. In the process of generating the electric field, it is necessary to continuously provide a stable electric field to ensure the quality of the product.

[0003] like Figure 1 As shown, the prior art usually uses a support rod 210' and related components to stably support the carrier 100' in the coating furnace tube. An insulating sleeve 230' is provided at a position on the support rod 210' corresponding to the feed boat foot 110' of the carrier 100' to fix the feed boat block 'in stable contact with the carrier 100' without axial movement. After the coating process is performed for a period of time, a layer of conductive film will be deposited on the surface of the insulating sleeve 230', and the conductive film and the feed boat foot 110' will produce discharge arcing, which affects the stability of the electric field of the coating process and further affects the quality of the coating.

[0004] Therefore, how to reduce the occurrence of discharge arcing, ensure the stability of the electric field, and improve the quality of the coating has become a technical problem that needs to be urgently solved by technical personnel in this field. Utility Model Content

[0005] In view of this, the purpose of the utility model is to provide a supporting device to reduce the occurrence of discharge arcing, ensure the stability of the electric field, and improve the quality of the coating.

[0006] Another core of the utility model is to disclose a coating device including the above-mentioned supporting device.

[0007] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0008] A supporting device is used to support a carrier in a furnace tube of a coating device, the supporting device comprising:

[0009] A support rod, on which a power feeding boat block is arranged, and a power feeding boat foot of the carrier is supported on the power feeding boat block;

[0010] The insulating sleeve assembly comprises at least two insulating sleeves, which are sleeved on the support rod and respectively arranged on both sides of the feed boat support block. A notch is provided on one side of the insulating sleeve facing the feed boat foot.

[0011] Optionally, in the above supporting device, the notch passes through one end of the insulating sleeve close to the feeding boat block and extends along the circumference of the insulating sleeve, so that the other end of the insulating sleeve forms a convex ring body relative to the supporting rod.

[0012] Optionally, in the above-mentioned supporting device, the notch passes through both ends of the insulating sleeve and extends along the circumference of the insulating sleeve, and the notch is smaller than half of the outer circumference of the insulating sleeve.

[0013] Optionally, in the above-mentioned supporting device, one of the insulating sleeve and the supporting rod is provided with a groove, and the other is provided with a protrusion matching with the groove.

[0014] Optionally, in the above supporting device, the insulating sleeve has an extending portion extending upward at one end of the notch away from the feeding boat block.

[0015] Optionally, the above-mentioned supporting device further includes an insulating cover plate, which is arranged on the supporting rod and located in the gap below the carrier, and the insulating cover plate is detachably connected to the supporting rod.

[0016] Optionally, in the above-mentioned supporting device, the thickness of the insulating cover plate is smaller than the thickness of the insulating sleeve.

[0017] Optionally, in the above-mentioned supporting device, the notch profile of the insulating sleeve adopts an arc transition.

[0018] Optionally, in the above supporting device, the contact surface between the feeding boat support block and the feeding boat foot is made of conductive material.

[0019] A coating device comprises the above-mentioned supporting device.

[0020] The support device disclosed by the utility model, after executing the coating process for a period of time, a layer of conductive film will be coated on the surface of the insulating sleeve, and the conductive film at the notch position will be coated on the support rod, which can increase the distance between the conductive film and the feeding boat foot and reduce the probability of discharge arcing, thereby improving the stability of the electric field, improving the quality and efficiency of the coating, and increasing the output. At the same time, it can extend the service life of the support device and shorten the maintenance cycle. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0022] Figure 1 It is a structural schematic diagram of a supporting device in the prior art;

[0023] Figure 2 It is a schematic diagram of the three-dimensional structure of the coating device disclosed in the embodiment of the utility model;

[0024] Figure 3 for Figure 2 A partial enlarged view of middle A;

[0025] Figure 4 It is a front view of the coating device disclosed in the embodiment of the utility model;

[0026] Figure 5 for Figure 4 A partial enlarged view of B in the middle;

[0027] Figure 6 It is a schematic diagram of the three-dimensional structure of the supporting device disclosed in the first embodiment of the utility model;

[0028] Figure 7 for Figure 6 A schematic diagram of the three-dimensional structure of the insulating sleeve ring of the supporting device shown;

[0029] Figure 8 It is a front view of the supporting device disclosed in the second embodiment of the utility model;

[0030] Fig. 9 for Figure 8 A schematic diagram of the three-dimensional structure of the insulating sleeve ring of the supporting device is shown.

[0031] Among them, 100' is a carrier, 110' is a feed boat foot, 210' is a support rod, 220' is a feed boat support block, and 230' is an insulating sleeve;

[0032] 100 is a carrier, 110 is a feeding boat foot;

[0033] 200 is a supporting device, 210 is a supporting rod, 220 is a feeding boat block, 230 is an insulating sleeve, 231 is an extension part, 232 is a groove, 240 is an insulating cover plate, and 250 is a fixing member. DETAILED DESCRIPTION

[0034] The core of the utility model is to disclose a supporting device to reduce the occurrence of discharge arcing, ensure the stability of the electric field and improve the quality of the coating.

[0035] Another core of the utility model is to disclose a coating device including the above-mentioned supporting device.

[0036] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0037] In the embodiments of the present invention, different reference numerals are given to the parts that are the same as those in the background technology in order to distinguish them.

[0038] like Figure 2 As shown, an embodiment of the utility model discloses a supporting device 200 for supporting a carrier 100 in a furnace tube of a coating device, and specifically comprises a supporting rod 210 and an insulating sleeve assembly.

[0039] The carrier 100 is usually made of a graphite boat, and a boat support block is arranged on the support rod 210, and the boat support block includes a feeding boat support block 220 and a supporting boat support block. The boat foot of the carrier 100 includes a feeding boat foot 110 and a supporting boat foot, and the boat foot is supported on the boat support block, and the supporting boat foot corresponds to the supporting boat support block, and the feeding boat foot 110 corresponds to the feeding boat support block 220 and realizes electrical connection. Figure 2 The graphite boat shown in has four boat legs, two of which are power feeding boat legs 110, and the other two are support boat legs. The support boat legs are preferably made of ceramic material, the power feeding boat legs 110 are preferably made of graphite material, and the support rod 210 is an insulating rod, preferably a ceramic tube.

[0040] like Figure 3 As shown, the insulating sleeve assembly includes at least two insulating sleeves 230. The following description takes two as an example (the two here refer to one feed boat block 220). The two insulating sleeves 230 are both sleeved on the support rod 210 and are respectively arranged on both sides of the feed boat block 220 to limit the feed boat block 220 and prevent the feed boat block 220 from moving along the axial direction of the support rod 210. The insulating sleeve 230 is preferably made of ceramic material.

[0041] In order to reduce the occurrence of discharge arcing between the feed boat foot 110 and the insulating sleeve 230, a notch is provided on the side of the insulating sleeve 230 facing the feed boat foot 110. During specific processing, the notch can be formed by partially cutting the insulating sleeve 230. The shape and size of the notch are not specifically limited. Preferably, the insulating sleeves 230 disposed on both sides of the feed boat support block 220 are arranged symmetrically. It can be understood by those skilled in the art that the insulating sleeves 230 located on both sides of the support boat support block may be provided with a notch or may not be provided with a notch.

[0042] After the coating process is performed for a period of time, a layer of conductive film will be coated on the surface of the insulating sleeve 230, and the conductive film at the notch position will be coated on the support rod 210, which can increase the distance between the conductive film and the feeding boat foot 110 and reduce the probability of discharge arcing, thereby improving the stability of the electric field, improving the quality and efficiency of the coating, and increasing production. At the same time, it can extend the service life of the support device 200 and shorten the maintenance cycle.

[0043] It should be noted that the insulating sleeve 230 can be fixed to the support rod 210 by a fixing member 250, and the fixing member 250 is preferably a clamp; or a receiving groove can be provided on the support rod 210, and the insulating sleeve 230 is provided in the receiving groove; or the insulating sleeve 230 and the support rod 210 are connected by a clamping method. Those skilled in the art can determine the specific connection method according to actual needs.

[0044] like Figure 4-Figure 5 As shown, in some specific embodiments, along the axial direction of the insulating sleeve 230, the notch penetrates one end of the insulating sleeve 230 close to the feed boat block 220, and extends along the circumferential direction of the insulating sleeve 230, so that the other end of the insulating sleeve 230 forms a convex ring body relative to the support rod 210. This arrangement allows the insulating sleeve 230 to be sleeved on the support rod 210. The arrangement of the convex ring body can increase the contact area between the insulating sleeve 230 and the support rod 210, so that the connection between the two is more firm and stable. Figure 7 FIG. 2 is a schematic structural diagram of the insulating sleeve 230 .

[0045] like Figure 8 As shown, in other specific embodiments, along the axial direction of the insulating sleeve 230, the notch penetrates both ends of the insulating sleeve 230 and extends along the circumference of the insulating sleeve 230, and the insulating sleeve 230 is a semi-tube structure. In order to ensure the contact area between the insulating sleeve 230 and the support rod 210 and prevent the insulating sleeve 230 from being separated from the support rod 210, the notch is smaller than half of the outer circumference of the insulating sleeve 230.

[0046] Based on the above embodiment, one of the insulating sleeve 230 and the support rod 210 is provided with a groove 232, and the other is provided with a protrusion matching the groove 232. This arrangement allows the insulating sleeve 230 and the support rod 210 to be snap-connected. Fig. 9 The figure shows a form in which a groove 232 is provided on the insulating sleeve 230 and a protrusion (not shown in the figure) is provided on the support rod 210 .

[0047] like Figure 8-Figure 9As shown, in order to increase the contact area between the insulating sleeve 230 and the support rod 210 and ensure the firmness of the connection between the two, on the basis of the above embodiment, the insulating sleeve 230 has an extension portion 231 extending upward at one end of the notch away from the feeding boat block 220, so as to increase the contact area between the insulating sleeve 230 and the support rod 210, so that the insulating sleeve 230 is covered on the support rod 210. In other specific embodiments, the extension portion 231 can be provided at both ends of the notch (here refers to the direction perpendicular to the axis of the insulating sleeve 230).

[0048] like Figure 6 and Figure 8 As shown, in other specific embodiments, an insulating cover plate 240 is further included. Specifically, the insulating cover plate 240 is disposed on the support rod 210 and is located at the notch position of the insulating sleeve 230 below the carrier 100. The size of the insulating cover plate 240 matches the notch size, and the thickness of the insulating cover plate 240 is less than the thickness of the insulating sleeve 230. After coating, the distance between the conductive film at the position of the insulating cover plate 240 and the feeding boat foot 110 can be increased, thereby reducing the probability of discharge arcing, thereby improving the stability of the electric field, and improving the quality and efficiency of the coating.

[0049] In order to facilitate the replacement of the insulating cover plate 240, the insulating cover plate 240 and the support rod 210 are detachably connected, and can be installed on the support rod 210 by high-temperature bolts or other detachable parts. After a period of use, there is no need to cool the furnace tube. The insulating cover plate 240 can be removed with tools and replaced with a new insulating cover plate 240. The furnace tube can be replaced in a hot state, shortening the maintenance time. At the same time, the removed insulating cover plate 240 can be cleaned and reused, which can save costs.

[0050] In order to prevent the coated products or product fragments from falling and accumulating at the notch position, the supporting device 200 disclosed in the embodiment of the utility model and the profile of the notch position of the insulating sleeve 230 adopt an arc transition, that is, the cut-off position of the notch is chamfered to form a rounded corner, such as Figure 7 As shown, this method can reduce the accumulation of coated products or product fragments and debris at the notch position or on the support device 200.

[0051] In addition, if Figure 2 and Figure 4 As shown, an embodiment of the utility model further discloses a coating device, including a supporting device 200 as in the above embodiment, and thus has all the technical effects of the above supporting device.

[0052] It should be noted that the various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0053] As shown in this application and claims, unless the context clearly indicates an exception, the words "a", "an", "a kind" and / or "the" do not refer to the singular, but also include the plural. Generally speaking, the terms "include" and "comprise" only indicate the inclusion of clearly identified steps and elements, and these steps and elements do not constitute an exclusive list. The method or device may also include other steps or elements. The elements defined by the sentence "includes a..." do not exclude the existence of other identical elements in the process, method, commodity or device that includes the elements.

[0054] In the following, the terms "first" and "second" are used for descriptive purposes only and are not to be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features.

[0055] This article uses specific examples to illustrate the principles and implementation methods of the utility model. The above examples are only used to help understand the core idea of ​​the utility model. It should be pointed out that for ordinary technicians in this technical field, without departing from the principle of the utility model, the utility model can also be improved and modified, and these improvements and modifications also fall within the scope of protection of the claims of the utility model.

Claims

1. A supporting device for supporting a carrier (100) in a furnace tube of a coating device, characterized in that: The supporting device (200) comprises: A support rod (210), wherein a power feeding boat block (220) is arranged on the support rod (210), and a power feeding boat foot (110) of the carrier (100) is supported on the power feeding boat block (220); An insulating sleeve assembly comprises at least two insulating sleeves (230), wherein the insulating sleeves (230) are sleeved on the support rod (210) and respectively arranged on both sides of the feed boat support block (220), and a notch is provided on one side of the insulating sleeve (230) facing the feed boat foot (110).

2. The support device according to claim 1, characterized in that: The notch penetrates one end of the insulating sleeve (230) close to the feeding boat block (220), and extends along the circumference of the insulating sleeve (230), so that the other end of the insulating sleeve (230) forms a convex ring body relative to the support rod (210).

3. The supporting device according to claim 1, characterized in that: The notch passes through both ends of the insulating sleeve (230) and extends along the circumference of the insulating sleeve (230); the notch is smaller than half of the outer circumference of the insulating sleeve (230).

4. The supporting device according to claim 2 or 3, characterized in that: One of the insulating sleeve (230) and the support rod (210) is provided with a groove (232), and the other is provided with a protrusion matching the groove (232).

5. The supporting device according to claim 3, characterized in that: The insulating sleeve (230) has an extending portion (231) extending upwards at one end of the notch away from the power feeding boat support block (220).

6. The supporting device according to any one of claims 1 to 5, characterized in that: It also comprises an insulating cover plate (240), the insulating cover plate (240) being arranged on the support rod (210) and located in the notch below the carrier (100), the insulating cover plate (240) being detachably connected to the support rod (210).

7. The supporting device according to claim 6, characterized in that: The thickness of the insulating cover plate (240) is smaller than the thickness of the insulating sleeve (230).

8. The supporting device according to claim 1, characterized in that: The profile of the notch of the insulating sleeve (230) adopts an arc transition.

9. The supporting device according to claim 1, characterized in that: The contact surface between the power feeding boat support block (220) and the power feeding boat foot (110) is made of conductive material.

10. A coating device, characterized in that: It comprises the supporting device (200) according to any one of claims 1 to 9.

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