Sheet drying structure

By designing the drying structure of air knives, ovens and guide strips during the chip manufacturing process, the problems of long drying time of the material sheet and offset during the transfer process are solved, and the drying efficiency and transfer stability are improved.

CN222733264UActive Publication Date: 2025-04-08芯朋半导体科技(如东)有限公司
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Patent Information

Application Number
CN202421485374.2
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-06-27
Publication Date
2025-04-08
Estimated Expiration
2034-06-27

AI Technical Summary

Technical Problem

During the chip manufacturing process, the drying time of the sheet is long and has low efficiency, and is easily deviated due to gas blowing during the transmission process, affecting the conveying efficiency.

Method used

A drying structure of the material sheet is designed, including air knife, oven, hot air duct and conveyor belt. The air knife is used to blow away the residue and water droplets on the material sheet, the oven is dried by hot air, and the guide strip is used to limit the position to prevent the material sheet from being offset.

Benefits of technology

The air knife blows away impurities and water droplets, and the oven efficiently drys the material sheets. The guide strips on the conveyor belt effectively prevent the material sheet from being offset, significantly improving the drying efficiency and conveying stability of the material sheets.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model relates to the field of chip manufacturing technology and equipment, and discloses a drying structure for a sheet, including an air knife, an oven, a hot air duct and a conveyor belt located in a box body, the oven is located in the box body in sequence, the oven includes a cover body and a bottom plate, an air outlet is provided on the bottom plate, the air knife is located at the sheet inlet on one side of the oven, the tail of the box body is a discharge plate, a through groove is provided on the discharge plate, and a guide bar is provided above the conveyor belt. The larger liquid particles and residues on the sheet are blown away by the air knife, and then the sheet is conveyed under the limit of the guide bar, and the sheet is dried by the oven at the same time, which effectively improves the drying efficiency of the sheet.
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Description

Technical Field

[0001] The utility model relates to the field of chip manufacturing technology equipment, in particular to a material sheet drying structure. Background Art

[0002] During the chip manufacturing process, the chip needs to be cleaned. After cleaning, there will be a large amount of liquid on the chip. If it is dried directly with a dryer, it will take a long time to dry the liquid on the chip. The long time is low and the efficiency is low. In addition, when the conveyor belt conveys the chip, the dryer will produce certain gases, which can easily blow the chip crooked, causing the chip to shift and affect the transportation of the chip.

[0003] Therefore, a new technical solution is needed to solve the above technical problems. Summary of the invention

[0004] In order to solve the above problems, the utility model discloses a drying structure for the sheet, which uses an air knife to blow away the larger liquid particles and residues on the sheet, and then conveys the sheet under the limit of a guide bar, while drying it in an oven, effectively improving the drying efficiency of the sheet.

[0005] The technical solution of the utility model is: a drying structure for a sheet, comprising an air knife, an oven, a hot air duct and a conveyor belt located in a box body, the oven is sequentially located in the box body, the oven comprises a cover body and a bottom plate, an air outlet is arranged on the bottom plate, the air knife is located at a sheet inlet on one side of the oven, the tail of the box body is a discharge plate, a through groove is arranged on the discharge plate, and a guide strip is arranged above the conveyor belt.

[0006] By adopting the above technical solution, after the sheet is cleaned in the previous process, it enters the drying structure, where it is first blown by a wind knife to disperse impurities and larger water droplets, and then dried in an oven. The sheet is transported by a conveyor belt, and the guide strips limit the sheet and prevent it from deviating.

[0007] Preferably, the oven is rectangular as a whole, the length direction of the oven is perpendicular to the feeding direction of the box body, and both ends of the bottom plate of the oven are fixed to the inner side wall of the box body in the length direction through a fixing plate.

[0008] By adopting the above technical solution, the sheets conveyed by each conveyor belt can be dried in the length direction of the oven, thereby improving the drying efficiency of the passing sheets.

[0009] Preferably, the ovens are located on both sides of the hot air duct, the air outlets are arranged adjacent to each other on the bottom plate, the bottom plate is covered with air outlets, the air outlets are through holes penetrating the bottom plate, and the width of the bottom plate is greater than the combined width of the transmission belts.

[0010] By adopting the above technical solution, the hot air in the oven is discharged outward through the air outlets, and the air outlets are all over the bottom plate, so that all the hot air in the oven can be released to the material sheets to the greatest extent to dry the material sheets. The width of the bottom plate of the oven can completely cover the longitudinal width of the transmission belt, that is, all the material sheets on the conveyor belt can be dried.

[0011] Preferably, the cover body and the bottom plate fit together, a cavity is provided in the cover body for storing hot air, an air inlet is provided on the cover body, and the air inlet is connected to the hot air duct through an air inlet duct.

[0012] By adopting the above technical solution, the hot air is stored in the cavity, so when the air outlet is discharging air, the hot air stored in the cavity can be transferred and released in time without causing time delay.

[0013] Preferably, the hot air duct is connected to an external hot air source, and the hot air duct is columnar and parallel to the oven.

[0014] By adopting the above technical solution, the hot air duct draws hot air from the outside, and then stores the hot air source in the oven through the air inlet duct connected to the hot air duct and the oven, supplying the sheet to be dried, thereby improving the drying efficiency of the sheet.

[0015] Preferably, the conveyor belt is located in the feeding direction of the box body in sequence, the guide bar is located above the conveyor belt and passes through the box body, close to the conveyor belt, the conveying direction of the guide bar and the conveying bar are consistent, the guide bar is two parallel vertical plates perpendicular to the conveyor belt, the size of the guide bar and the material sheet are matched, the bottom of the material sheet on the conveyor belt is transported by the conveyor belt, and the upper two sides are located in the guide bar.

[0016] By adopting the above technical solution, when the conveyor belt is transporting the material, the guide bar always limits the material, which can effectively prevent the material from shifting during the transportation process until the material is transported to the end of the conveyor belt and goes out of the through slot to the next process.

[0017] Preferably, the length direction of the through slot is perpendicular to the feeding direction of the box body, and the bottom of the through slot is flush with the conveyor belt.

[0018] By adopting the above technical solution, a through slot is set on the discharge plate to transport the chips out of the box. If the chips fall, they can also fall into the box in the discharge plate, which is convenient for the staff to collect them later.

[0019] The utility model has the following advantages: 1. The utility model provides an air knife at the front end of the sheet, so as to blow away the residual material and large water droplets on the sheet, so as to facilitate drying in the subsequent oven, thereby improving the drying speed of the sheet.

[0020] 2. The utility model conveys the material sheets on the conveyor belt. When the material sheets are transported, the guide strips on the conveyor belt can limit the position of the material sheets to prevent the material sheets from shifting during transportation and affecting the transportation of the material sheets.

[0021] 3. The utility model oven evaporates the small water vapor on the sheet in the form of gas at a higher temperature. The hot air source in the cavity can diffuse to more places through the air outlet, dry the sheet on the conveyor belt, and transport the sheet to the next process for production. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a structural schematic diagram of the utility model;

[0023] Figure 2 This is a schematic diagram of the structure of the oven of the utility model;

[0024] Figure 3 This is a schematic diagram of the structure of the cover body of the utility model;

[0025] Figure 4 It is a structural schematic diagram of the bottom plate of the utility model.

[0026] Wherein: 1. box body, 2. air knife, 3. oven, 3-1. cover body, 3-2. bottom plate, 3-21. air outlet, 4. air inlet duct, 5. hot air duct, 6. conveyor belt, 7. guide strip, 8. discharge plate, 8-1. through slot, 9. fixing plate. DETAILED DESCRIPTION

[0027] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the accompanying drawings in the embodiments of the present invention.

[0028] like Figure 1-4 As shown, the drying structure of the sheet includes an air knife 2, an oven 3, a hot air duct 5 and a conveyor belt 6 located in a box body 1. The oven 3 is located in the box body 1 in sequence. The oven 3 includes a cover 3-1 and a bottom plate 3-2. The bottom plate 3-2 is provided with an air outlet 3-21. The air knife 26 is located at the sheet inlet on one side of the oven 3. The tail of the box body 1 is a discharge plate 8, and a through groove 8-1 is provided on the discharge plate 8. A guide bar is provided above the conveyor belt 6. When the sheet is cleaned through the previous process, it enters the drying structure. The sheet is first blown strongly by the air knife 2 to blow away impurities and larger water droplets. Then, the sheet is dried by the oven 3 and conveyed by the conveyor belt 6. The guide bar limits the sheet and prevents it from deviating.

[0029] The oven 3 is rectangular as a whole, and the length direction of the oven 3 is perpendicular to the feeding direction of the box body 1. The two ends of the bottom plate of the oven 1 are fixed to the inner side wall of the box body 1 in the length direction through the fixing plate 9. The oven 3 can dry the sheets conveyed by each conveyor belt 6 in the length direction, thereby improving the drying efficiency of the passing sheets.

[0030] The oven 3 is located on both sides of the hot air duct 5, and the air outlets 3-21 are arranged adjacent to each other on the bottom plate 3-2. The bottom plate 3-2 is covered with air outlets 3-21, which are through holes penetrating the bottom plate 3-2. The width of the bottom plate 3-2 is greater than the combined width of the transmission belts. The hot air in the oven 3 is discharged outward through the air outlets. The air outlets 3-21 are distributed all over the bottom plate 3-2, so that all the hot air in the oven 3 can be released to the sheet to the greatest extent to dry the sheet. The width of the bottom plate of the oven 3 can completely cover the combined longitudinal width of the transmission belts, that is, all the sheets on the conveyor belt can be dried.

[0031] The cover body 3-1 and the bottom plate 3-2 fit together, and a cavity is provided inside the cover body 3-1 for storing hot air. An air inlet is provided on the cover body 3-1, and the air inlet is connected to the hot air duct 5 through the air inlet duct 4. The hot air is stored in the cavity, so that when the air outlet discharges air, the hot air stored in the cavity can be transferred and released in time without causing time delay.

[0032] The hot air duct 5 is connected to an external hot air source. The hot air duct 5 is columnar and parallel to the oven 3. The hot air duct 5 draws hot air from the outside, and then stores the hot air source in the oven 3 through an air inlet duct 4 connected to the hot air duct 5 and the oven 3, so as to dry the sheet material and improve the drying efficiency of the sheet material.

[0033] The conveyor belt 6 is located in the feeding direction of the box body 1 in sequence, the guide bar 7 is located above the conveyor belt 6 and passes through the box body 1, close to the conveyor belt 6, the conveying direction of the guide bar 7 and the conveyor bar 6 is consistent, the guide bar 7 is two parallel vertical plates perpendicular to the conveyor belt 6, the guide bar 7 and the size of the sheet are matched, the bottom of the sheet on the conveyor belt 6 is transported by the conveyor belt 6, and the upper two sides are located in the guide bar 7. When the conveyor belt 6 is transporting the sheet, the guide bar 7 always limits the sheet, which can effectively prevent the sheet from shifting during the transmission process, until the sheet is transmitted to the end of the conveyor belt 6 and goes out of the through slot 8-1 to the next process.

[0034] The length direction of the through slot 8-1 is perpendicular to the feeding direction of the box 1, and the bottom of the through slot 8-1 is flush with the conveyor belt 6. The through slot 8-1 is set on the discharge plate 8 to transport the chips out of the box 1. If the material sheet falls, it can also fall into the box 1 in the discharge plate 8, which is convenient for the later staff to collect.

[0035] The sheet is transported on the conveyor belt 6, and the guide strip 7 serves as a limit for the sheet. The sheet is first blown forcefully by the wind knife to blow off the residue and larger water droplets on the sheet, and then the conveyor belt 6 transports it to the bottom of the oven 3. The air outlet 3-21 of the oven 3 dries the sheet, and the conveyor belt 6 transports the sheet from the through slot 8-1 of the discharge plate 8 to the next process.

[0036] Those skilled in the art should understand that the embodiments of the present invention described above and shown in the accompanying drawings are only examples and do not limit the present invention, and the purpose of the present invention has been fully and effectively achieved. The functions and structural principles of the present invention have been demonstrated and explained in the embodiments, and the implementation methods of the present invention may be deformed or modified in any way without departing from the principles.

Claims

1. The drying structure of the sheet includes an air knife, an oven, a hot air duct and a conveyor belt located in the box, wherein the oven is located in the box in sequence, and is characterized in that: The oven comprises a cover and a bottom plate, the bottom plate is provided with an air outlet, the air knife is located at a sheet inlet on one side of the oven, the tail of the box body is a discharge plate, the discharge plate is provided with a through slot, and a guide bar is provided above the conveyor belt.

2. The drying structure of the sheet according to claim 1, characterized in that: The oven is rectangular in shape as a whole, the length direction of the oven is perpendicular to the feeding direction of the box body, and both ends of the bottom plate of the oven are fixed to the inner side wall in the length direction of the box body through fixing plates.

3. The drying structure of the sheet according to claim 1, characterized in that: The ovens are located on both sides of the hot air duct, the air outlets are arranged adjacent to each other on the bottom plate, the bottom plate is covered with air outlets, the air outlets are through holes penetrating the bottom plate, and the width of the bottom plate is greater than the combined width of the transmission belts.

4. The sheet drying structure according to claim 1, characterized in that: The cover body is fitted with the bottom plate, a cavity is arranged in the cover body for storing hot air, an air inlet is arranged on the cover body, and the air inlet is connected with the hot air duct through an air inlet duct.

5. The drying structure of the sheet according to claim 1, characterized in that: The hot air duct is connected to an external hot air source and is columnar and parallel to the oven.

6. The drying structure of the sheet according to claim 1, characterized in that: The conveyor belt is located in the feeding direction of the box body in sequence, the guide bar is located above the conveyor belt and passes through the box body, close to the conveyor belt, the guide bar is two parallel vertical plates perpendicular to the conveyor belt, the conveying directions of the guide bar and the conveyor bar are consistent, the sizes of the guide bar and the sheet are matched, the bottom of the sheet on the conveyor belt is transported by the conveyor belt, and the upper two sides are located in the guide bar.

7. The sheet drying structure according to claim 1, characterized in that: The length direction of the through slot is perpendicular to the feeding direction of the box body, and the bottom of the through slot is flush with the conveyor belt.